JP2008206134A - Σδ型ad変換器およびそれを用いた角速度センサ - Google Patents
Σδ型ad変換器およびそれを用いた角速度センサ Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5649—Signal processing
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/322—Continuously compensating for, or preventing, undesired influence of physical parameters
- H03M3/324—Continuously compensating for, or preventing, undesired influence of physical parameters characterised by means or methods for compensating or preventing more than one type of error at a time, e.g. by synchronisation or using a ratiometric arrangement
- H03M3/326—Continuously compensating for, or preventing, undesired influence of physical parameters characterised by means or methods for compensating or preventing more than one type of error at a time, e.g. by synchronisation or using a ratiometric arrangement by averaging out the errors
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/322—Continuously compensating for, or preventing, undesired influence of physical parameters
- H03M3/368—Continuously compensating for, or preventing, undesired influence of physical parameters of noise other than the quantisation noise already being shaped inherently by delta-sigma modulators
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/39—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators
- H03M3/412—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the number of quantisers and their type and resolution
- H03M3/422—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the number of quantisers and their type and resolution having one quantiser only
- H03M3/43—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the number of quantisers and their type and resolution having one quantiser only the quantiser being a single bit one
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/39—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators
- H03M3/436—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the order of the loop filter, e.g. error feedback type
- H03M3/456—Structural details of delta-sigma modulators, e.g. incremental delta-sigma modulators characterised by the order of the loop filter, e.g. error feedback type the modulator having a first order loop filter in the feedforward path
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/458—Analogue/digital converters using delta-sigma modulation as an intermediate step
- H03M3/466—Multiplexed conversion systems
- H03M3/472—Shared, i.e. using a single converter for multiple channels
- H03M3/474—Shared, i.e. using a single converter for multiple channels using time-division multiplexing
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/458—Analogue/digital converters using delta-sigma modulation as an intermediate step
- H03M3/478—Means for controlling the correspondence between the range of the input signal and the range of signals the converter can handle; Means for out-of-range indication
- H03M3/48—Means for controlling the correspondence between the range of the input signal and the range of signals the converter can handle; Means for out-of-range indication characterised by the type of range control, e.g. limiting
- H03M3/486—Means for controlling the correspondence between the range of the input signal and the range of signals the converter can handle; Means for out-of-range indication characterised by the type of range control, e.g. limiting by adapting the input gain
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M3/00—Conversion of analogue values to or from differential modulation
- H03M3/30—Delta-sigma modulation
- H03M3/458—Analogue/digital converters using delta-sigma modulation as an intermediate step
- H03M3/478—Means for controlling the correspondence between the range of the input signal and the range of signals the converter can handle; Means for out-of-range indication
- H03M3/488—Means for controlling the correspondence between the range of the input signal and the range of signals the converter can handle; Means for out-of-range indication using automatic control
- H03M3/49—Means for controlling the correspondence between the range of the input signal and the range of signals the converter can handle; Means for out-of-range indication using automatic control in feedback mode, i.e. by determining the range to be selected from one or more previous digital output values
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- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Theoretical Computer Science (AREA)
- Signal Processing (AREA)
- Gyroscopes (AREA)
- Compression, Expansion, Code Conversion, And Decoders (AREA)
Abstract
【解決手段】本発明のΣΔ型AD変換器は、入力切替手段44とDA変換手段48とから出力される電荷を積分しその少なくとも2つの積分値を保持する積分手段62と、この積分手段62から出力される少なくとも2つの積分値を所定の値と比較する比較手段63と、この比較手段63の出力信号を演算する演算手段73とを備え、前記演算手段73に、前記比較手段63から出力される少なくとも2つの比較信号の差を演算する差分演算手段70を設けたものである。
【選択図】図1
Description
以下、本発明の実施の形態1におけるΣΔ型AD変換器およびそれを用いた角速度センサについて、図面を参照しながら説明する。図1は本発明の実施の形態1におけるΣΔ型AD変換器を用いた角速度センサの回路図である。
以下、本発明の実施の形態2におけるΣΔ型AD変換器を用いた角速度センサについて、図面を参照しながら説明する。図3は本発明の実施の形態2におけるΣΔ型AD変換器を用いた角速度センサの回路図である。なお、前述した本発明の実施の形態1と同様の構成を有するものについては、同一符号を付し、その説明は省略する。
以下、本発明の実施の形態3におけるΣΔ型AD変換器を用いた角速度センサについて、図面を参照しながら説明する。
32 駆動電極
33 モニタ電極
34,35 センス電極
40,131 ドライブ回路
41 PLL回路
43 タイミング制御回路
44,81,101,132 入力切替手段
47,84,104,136 DA切替手段
48,85,105,133 DA変換手段
62,99,119,134 積分手段
63,135 比較手段
70 差分演算手段
71 補正演算手段
73 演算手段
Claims (11)
- 少なくとも2つの入力信号を切り替える入力切替手段と、少なくとも2つのレベルの電荷量を出力するDA変換手段と、前記入力切替手段とDA変換手段とから出力される電荷を積分しその少なくとも2つの積分値を保持する積分手段と、この積分手段から出力される少なくとも2つの積分値を所定の値と比較する比較手段と、この比較手段の少なくとも2つの出力に応じて前記DA変換手段の出力を切り替えるDA切替手段と、前記比較手段の出力信号を演算する演算手段とを備え、前記演算手段に、前記比較手段から出力される少なくとも2つの比較信号の差を演算する差分演算手段を設けたΣΔ型AD変換器。
- 差分演算手段が、一対の比較信号を1ビット差分演算することにより、1ビット差分信号を形成するようにした請求項1記載のΣΔ型AD変換器。
- 演算手段に、1ビット差分信号を所定の補正情報と乗算する補正演算手段を設けた請求項1記載のΣΔ型AD変換器。
- 所定の入力信号の位相に応じて入力切替手段と積分手段の切り替えを行うタイミング制御回路を設けた請求項1記載のΣΔ型AD変換器。
- タイミング制御回路にPLL回路を設けた請求項4記載のΣΔ型AD変換器。
- 駆動電極と、センス電極と、モニタ電極を有するセンサ素子と、このセンサ素子を所定の駆動周波数で駆動させるドライブ回路と、前記センス電極から出力される信号を電気的に処理するとともに、少なくとも2つの入力信号を切り替える入力切替手段と、少なくとも2つのレベルの電荷量を出力するDA変換手段と、前記入力切替手段とDA変換手段とから出力される電荷を積分しその少なくとも2つの積分値を保持する積分手段と、この積分手段から出力される少なくとも2つの積分値を所定の値と比較する比較手段と、この比較手段の少なくとも2つの出力に応じて前記DA変換手段の出力を切り替えるDA切替手段と、前記比較手段の出力信号を演算する演算手段とを備え、前記演算手段に、前記比較手段から出力される少なくとも2つの比較信号の差を演算する差分演算手段を設けてなるΣΔ型AD変換器を用いた角速度センサ。
- 差分演算手段が、一対の比較信号を1ビット差分演算することにより、1ビット差分信号を形成するようにした請求項6記載の角速度センサ。
- 演算手段に、1ビット差分信号を所定の補正情報と演算する補正演算手段を設けた請求項6記載の角速度センサ。
- 所定の入力信号の位相に応じて入力切替手段と積分手段と演算手段の切り替えを行うタイミング制御回路を設けた請求項6記載の角速度センサ。
- タイミング制御回路にPLL回路を設けた請求項9記載の角速度センサ。
- 駆動電極と、センス電極と、モニタ電極とを有するセンサ素子と、このセンサ素子を所定の振幅にて振動駆動させるドライブ回路と、前記センサ素子におけるセンス電極から出力される信号を角速度出力信号に変換するセンス回路とを備え、前記ドライブ回路をセンサ素子におけるモニタ電極から出力される信号をオン・オフする入力切替手段と、少なくとも2つのレベルの電荷量を出力するDA変換手段と、前記入力切替手段とDA変換手段とから出力される電荷を積分し、その積分値を保持する積分手段と、この積分手段から出力される積分値を所定の値と比較する比較手段と、この比較手段の出力に応じて前記DA変換手段の出力を切り替えるDA切替手段と、デジタルバンドパスフィルタと、AGC回路および駆動回路とにより構成してなるΣΔ型AD変換器を用いた角速度センサ。
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
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JP2007292830A JP4924370B2 (ja) | 2007-01-26 | 2007-11-12 | Σδ型ad変換器およびそれを用いた角速度センサ |
US12/523,769 US7898448B2 (en) | 2007-01-26 | 2008-01-25 | Sigma-delta type analog-to-digital (AD) converter and angular velocity sensor using same |
PCT/JP2008/000087 WO2008090747A1 (ja) | 2007-01-26 | 2008-01-25 | Σδ型ad変換器およびそれを用いた角速度センサ |
EP08702828.8A EP2096759B1 (en) | 2007-01-26 | 2008-01-25 | Sigma-delta type analog-to-digital (ad) converter and angular velocity sensor using same |
CN2008800031159A CN101611548B (zh) | 2007-01-26 | 2008-01-25 | ∑△型ad转换器以及使用了该转换器的角速度传感器 |
EP08850315A EP2192690A4 (en) | 2007-11-12 | 2008-11-07 | PLL SWITCHING AND ANGLE SPEED SENSOR THEREWITH |
US12/680,935 US8451066B2 (en) | 2007-11-12 | 2008-11-07 | PLL circuit and angular velocity sensor using the same |
PCT/JP2008/003231 WO2009063603A1 (ja) | 2007-11-12 | 2008-11-07 | Pll回路およびそれを用いた角速度センサ |
CN200880114446XA CN101842987B (zh) | 2007-11-12 | 2008-11-07 | Pll电路和使用该pll电路的角速度传感器 |
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JP2007292830A JP4924370B2 (ja) | 2007-01-26 | 2007-11-12 | Σδ型ad変換器およびそれを用いた角速度センサ |
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JP2010009775A Division JP5012916B2 (ja) | 2007-01-26 | 2010-01-20 | Σδ型ad変換器を用いた角速度センサ |
JP2011183264A Division JP4952858B2 (ja) | 2007-01-26 | 2011-08-25 | Σδ型ad変換器を用いた角速度センサ |
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US (1) | US7898448B2 (ja) |
EP (1) | EP2096759B1 (ja) |
JP (1) | JP4924370B2 (ja) |
CN (1) | CN101611548B (ja) |
WO (1) | WO2008090747A1 (ja) |
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- 2008-01-25 WO PCT/JP2008/000087 patent/WO2008090747A1/ja active Application Filing
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Cited By (12)
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CN101792107A (zh) * | 2008-12-11 | 2010-08-04 | 意法半导体股份有限公司 | 可变电容电子装置和包括该电子装置的微电子机械装置 |
JP2010169532A (ja) * | 2009-01-22 | 2010-08-05 | Panasonic Corp | 駆動回路、物理量センサ装置 |
JP2010181312A (ja) * | 2009-02-06 | 2010-08-19 | Panasonic Corp | 角速度センサ |
EP2447671A1 (en) * | 2009-06-26 | 2012-05-02 | Rohm Co., Ltd. | Angular velocity sensor, and synchronous detection circuit used therein |
EP2447671A4 (en) * | 2009-06-26 | 2014-08-06 | Rohm Co Ltd | ANGLE SPEED SENSOR AND SYNCHRONOUS DETECTION CIRCUIT FOR THIS |
US9003883B2 (en) | 2009-06-26 | 2015-04-14 | Rohm Co., Ltd. | Angular velocity sensor and synchronous detection circuit used therein |
WO2011126033A1 (ja) * | 2010-03-31 | 2011-10-13 | シチズンホールディングス株式会社 | 物理量センサ |
JP2011227038A (ja) * | 2010-03-31 | 2011-11-10 | Citizen Holdings Co Ltd | 物理量センサ |
US9310203B2 (en) | 2010-03-31 | 2016-04-12 | Citizen Holdings Co., Ltd. | Physical quantity sensor |
WO2014122887A1 (ja) * | 2013-02-08 | 2014-08-14 | パナソニック株式会社 | 慣性センサ |
US9513309B2 (en) | 2013-02-08 | 2016-12-06 | Panasonic Intellectual Property Management Co., Ltd. | Inertia sensor with switching elements |
JPWO2014122887A1 (ja) * | 2013-02-08 | 2017-01-26 | パナソニックIpマネジメント株式会社 | 慣性センサ |
Also Published As
Publication number | Publication date |
---|---|
WO2008090747A1 (ja) | 2008-07-31 |
US7898448B2 (en) | 2011-03-01 |
CN101611548B (zh) | 2012-10-03 |
EP2096759A4 (en) | 2012-01-18 |
EP2096759B1 (en) | 2018-01-03 |
CN101611548A (zh) | 2009-12-23 |
JP4924370B2 (ja) | 2012-04-25 |
US20100013688A1 (en) | 2010-01-21 |
EP2096759A1 (en) | 2009-09-02 |
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