JP2008192644A - 基板処理方法及び基板処理装置 - Google Patents
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- 239000000758 substrate Substances 0.000 title claims abstract description 112
- 238000000034 method Methods 0.000 title claims abstract description 71
- 239000007789 gas Substances 0.000 claims abstract description 114
- 230000008569 process Effects 0.000 claims abstract description 67
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 39
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims abstract description 39
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- 230000006870 function Effects 0.000 description 10
- 238000002955 isolation Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 238000004033 diameter control Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
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- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
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- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000012263 liquid product Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
- H01L21/02071—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a delineation, e.g. RIE, of conductive layers
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- Manufacturing & Machinery (AREA)
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
【解決手段】基板処理システム10は、ウエハWに化学反応処理を施す第2のプロセスモジュール28を備え、第2のプロセスモジュール28は、処理室(チャンバ)33と、該チャンバ33内のガス等を排気すると共にチャンバ33内の圧力を制御する排気制御系37を有し、チャンバ33に収容されたウエハWに化学反応処理を施す際、チャンバ33内の圧力を比較的口径の小さいAPCバルブ55によって制御し、ウエハWに化学反応処理を施した後に、チャンバ33内の弗化水素ガス等をAPCバルブ55を開放して排気管53を介してドライポンプ46によって排気し、さらに、APCバルブ55を閉鎖し且つアイソレートバルブ51を開放して排気管47を介してTMP50によって排気する。
【選択図】図3
Description
(化学反応処理)
SiO2+6HF → H2SiF6+2H2O
(加熱処理)
H2SiF6 → SiF4↑+2HF↑
H2O → H2O↑
第2のプロセスシップ12は、ウエハWに上述した化学反応処理を施す第2のプロセスモジュール28(基板処理装置)と、該第2のプロセスモジュール28に真空ゲートバルブ29を介して接続された、ウエハWに上述した加熱処理を施す第3のプロセスモジュール30と、第2のプロセスモジュール28及び第3のプロセスモジュール30にウエハWを受け渡すリンク型シングルピックタイプの第2の搬送アーム31を内蔵する第2のロードロックモジュール32とを有する。
10 基板処理システム
28 第2のプロセスモジュール
33 処理室(チャンバ)
37 排気制御系
46 ドライポンプ
47,53 排気管
49,54 排気孔
50 TMP
51 アイソレートバルブ
52 下流側バルブ
55 APCバルブ
Claims (12)
- 基板を収容する処理室と、前記処理室内に処理ガスを供給する供給部と、一端が前記処理室に接続された第1の管と、前記第1の管の途中に配置されたターボ分子ポンプと、前記第1の管において前記処理室及び前記ターボ分子ポンプの間に配置された第1の遮断バルブと、一端が前記処理室に接続され、前記第1の管よりも断面積が小さい第2の管と、前記第2の管の途中に配置された所定の口径の圧力制御バルブと、前記第1の管の他端及び前記第2の管の他端に接続されたドライポンプとを備える基板処理装置における基板処理方法であって、
前記処理室に収容された基板に処理を施す際、前記第1の遮断バルブを閉鎖し、前記処理室内の圧力を前記圧力制御バルブによって制御する第1の圧力制御ステップと、
前記基板に前記処理を施した後に、前記処理室内のガスを前記圧力制御バルブを開放して前記第2の管を介して前記ドライポンプによって排気する第1の排気ステップと、
前記第1の排気ステップの後に、前記処理室内のガスを前記圧力制御バルブを閉鎖し且つ前記第1の遮断バルブを開放して前記第1の管を介して前記ターボ分子ポンプによって排気する第2の排気ステップとを有することを特徴とする基板処理方法。 - 前記基板処理装置は前記第1の管において前記ターボ分子ポンプ及び前記ドライポンプの間に配置された第2の遮断バルブをさらに備え、
前記供給部は前記第1の圧力制御ステップの一部期間においてのみ前記処理室内に処理ガスを供給し、
前記第1の圧力制御ステップ、前記第1の排気ステップ及び前記第2の排気ステップの間、前記第2の遮断バルブを開放することを特徴とする請求項1記載の基板処理方法。 - さらに、前記第2の排気ステップの後に、前記第1の遮断バルブを閉鎖し、前記処理室内の圧力を前記圧力制御バルブによって制御する第2の圧力制御ステップを有することを特徴とする請求項1又は2記載の基板処理方法。
- 前記処理ガスは弗化水素ガスであることを特徴とする請求項1乃至3のいずれか1項に記載の基板処理方法。
- 前記第1の圧力制御ステップでは前記処理室内の圧力を133Pa(1Torr)以上の高圧に制御することを特徴とする請求項1乃至3のいずれか1項に記載の基板処理方法。
- 前記第1の圧力制御ステップでは前記処理室内の圧力を2660Pa(20Torr)以上の高圧に制御することを特徴とする請求項5記載の基板処理方法。
- 前記第1の圧力制御ステップでは前記処理室内の圧力を4000Pa(30Torr)以上の高圧に制御することを特徴とする請求項1乃至6のいずれか1項に記載の基板処理方法。
- 前記第1の遮断バルブは前記圧力制御バルブの口径より大きい口径の圧力制御バルブであることを特徴とする請求項1乃至7のいずれか1項に記載の基板処理方法。
- 基板を収容する処理室と、前記処理室内に処理ガスを供給する供給部と、一端が前記処理室に接続された第1の管と、前記第1の管の途中に配置されたターボ分子ポンプと、前記第1の管において前記処理室及び前記ターボ分子ポンプの間に配置された遮断バルブと、一端が前記処理室に接続され、前記第1の管よりも断面積が小さい第2の管と、前記第2の管の途中に配置された所定の口径の圧力制御バルブと、前記第1の管の他端及び前記第2の管の他端に接続されたドライポンプとを備えることを特徴とする基板処理装置。
- 前記処理ガスは弗化水素ガスであることを特徴とする請求項9記載の基板処理装置。
- 前記遮断バルブは前記圧力制御バルブの口径より大きい口径の圧力制御バルブであることを特徴とする請求項9又は10記載の基板処理装置。
- 基板を収容する処理室と、前記処理室内に処理ガスを供給する供給部と、一端が前記処理室に接続された第1の管と、前記第1の管の途中に配置されたターボ分子ポンプと、前記第1の管において前記処理室及び前記ターボ分子ポンプの間に配置された遮断バルブと、一端が前記第1の管において前記処理室及び前記遮断バルブの間に接続され、前記第1の管よりも断面積が小さい第2の管と、前記第2の管の途中に配置された所定の口径の圧力制御バルブと、前記第1の管の他端及び前記第2の管の他端に接続されたドライポンプとを備えることを特徴とする基板処理装置。
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JP2007022332A JP5048352B2 (ja) | 2007-01-31 | 2007-01-31 | 基板処理方法及び基板処理装置 |
TW097103492A TWI438833B (zh) | 2007-01-31 | 2008-01-30 | Substrate processing method and substrate processing device |
US12/022,533 US8043659B2 (en) | 2007-01-31 | 2008-01-30 | Substrate processing apparatus and substrate processing method |
KR1020080009433A KR100964041B1 (ko) | 2007-01-31 | 2008-01-30 | 기판 처리 방법 및 기판 처리 장치 |
CN2008100089397A CN101236893B (zh) | 2007-01-31 | 2008-01-31 | 基板处理方法和基板处理装置 |
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JP5048352B2 JP5048352B2 (ja) | 2012-10-17 |
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JP (1) | JP5048352B2 (ja) |
KR (1) | KR100964041B1 (ja) |
CN (1) | CN101236893B (ja) |
TW (1) | TWI438833B (ja) |
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CN101236893A (zh) | 2008-08-06 |
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TWI438833B (zh) | 2014-05-21 |
US8043659B2 (en) | 2011-10-25 |
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