JP2008160094A - 貫通転位が低く、光取り出しが改善された半導体デバイス、および該半導体デバイスの製造方法 - Google Patents
貫通転位が低く、光取り出しが改善された半導体デバイス、および該半導体デバイスの製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 52
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 238000000605 extraction Methods 0.000 title claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 150
- 230000007547 defect Effects 0.000 claims abstract description 13
- 230000005855 radiation Effects 0.000 claims abstract description 11
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 36
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 33
- 150000004767 nitrides Chemical class 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 16
- 229910052594 sapphire Inorganic materials 0.000 claims description 10
- 239000010980 sapphire Substances 0.000 claims description 10
- 229910002601 GaN Inorganic materials 0.000 claims description 9
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 7
- 229910002704 AlGaN Inorganic materials 0.000 claims description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 3
- 238000007788 roughening Methods 0.000 claims description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910005540 GaP Inorganic materials 0.000 claims description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 claims 1
- 239000011787 zinc oxide Substances 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 10
- 150000001875 compounds Chemical class 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 238000001878 scanning electron micrograph Methods 0.000 description 8
- 238000001020 plasma etching Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- -1 GaN) Chemical class 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000000927 vapour-phase epitaxy Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000000608 laser ablation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000978 Pb alloy Inorganic materials 0.000 description 1
- QCEUXSAXTBNJGO-UHFFFAOYSA-N [Ag].[Sn] Chemical compound [Ag].[Sn] QCEUXSAXTBNJGO-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- GPYPVKIFOKLUGD-UHFFFAOYSA-N gold indium Chemical compound [In].[Au] GPYPVKIFOKLUGD-UHFFFAOYSA-N 0.000 description 1
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
- 238000003631 wet chemical etching Methods 0.000 description 1
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- H01L21/02658—Pretreatments
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Abstract
【解決手段】発光ダイオードなどの電子デバイスの製造での使用に適する半導体デバイス構造体が提供される。この半導体デバイス構造体は、その上でのエピタキシャル領域の成長を支持するのに適した粗面化成長表面を有する基板を含む。このデバイス構造体は、基板の粗面化成長表面上に、欠陥が少なく、および/または改善された放射取り出し効率を有するエピタキシャル領域を含みうる。基板の粗面化成長表面は、少なくとも約1ナノメートル(nm)の平均粗度Raと、少なくとも10ナノメートル(nm)の山から谷までの平均高さRzを有し得る。
【選択図】図2
Description
Claims (31)
- 発光ダイオードなどの電子デバイスの製造での使用に適する半導体デバイス構造体であって、
表面上でのエピタキシャル領域の成長を支持するのに適した粗面化成長表面を有する基板と、
前記基板上のエピタキシャル領域と
を備える、半導体デバイス構造体。 - 前記導電性基板の前記粗面化成長表面が、少なくとも1ナノメートル(nm)の平均粗度Raを有する、請求項1に記載の半導体デバイス構造体。
- 前記導電性基板の前記粗面化成長表面が、少なくとも10ナノメートル(nm)の山から谷までの平均高さRzを有する、請求項2に記載の半導体デバイス構造体。
- 前記エピタキシャル領域が、前記基板の実質的に平滑な成長表面上の同じエピタキシャル領域に比べてより少ない欠陥を含む、請求項1に記載の半導体デバイス構造体。
- 前記エピタキシャル領域が、6×108cm-2未満または6×108cm-2の貫通転位を有する、請求項1に記載の半導体デバイス構造体。
- 前記エピタキシャル領域が、108cm-2未満または108cm-2の貫通転位を有する、請求項5に記載の半導体デバイス構造体。
- 前記導電性基板が、前記粗面化成長表面と対向する第2の粗面をさらに備える、請求項1に記載の半導体デバイス構造体。
- 前記導電性基板の前記第2の粗面が、少なくとも1ナノメートル(nm)の平均粗度Raを有する、請求項7に記載の半導体デバイス構造体。
- 前記導電性基板の前記第2の粗面が、少なくとも10ナノメートル(nm)の山から谷までの平均高さRzを有する、請求項8に記載の半導体デバイス構造体。
- 前記基板が、炭化ケイ素、窒化アルミニウム、窒化ガリウム、シリコン、ヒ化ガリウム、リン化ガリウム、酸化亜鉛、およびサファイアから選択された材料を含む、請求項1に記載の半導体デバイス構造体。
- 前記基板が導電性基板である、請求項1に記載の半導体デバイス構造体。
- 前記導電性基板が炭化ケイ素(SiC)を含む、請求項1に記載の半導体デバイス構造体。
- 前記エピタキシャル領域が、放射を発することのできる能動領域を備える、請求項1に記載の半導体デバイス構造体。
- 前記導電性基板の前記粗面化成長表面が、実質的に平滑な成長表面上の同じ能動領域の放射取り出し効率に比べて、前記能動領域の放射取り出し効率を増大させるのに十分な粗度を有する、請求項13に記載の半導体デバイス構造体。
- 前記能動領域が第3族窒化物を含む、請求項14に記載の半導体デバイス構造体。
- 前記第3族窒化物が、AlN、GaN、InN、AlGaN、AlInN、InGaN、およびAlInGaNからなるグループから選択される、請求項15に記載の半導体デバイス構造体。
- 前記第3族窒化物がInGaNを含む、請求項16に記載の半導体デバイス構造体。
- ダイオード領域を形成するための前記能動領域の第1の表面に沿ったn型層と、前記能動領域の第2の対向する表面上のp型層とをさらに備える、請求項13に記載の半導体デバイス構造体。
- 前記n型層と前記p型層のそれぞれが第3族窒化物層を備える、請求項18に記載の半導体デバイス構造体。
- 前記エピタキシャル領域がバッファ層を備える、請求項1に記載の半導体デバイス構造体。
- 請求項1から20のいずれかに記載の半導体デバイス構造体を備える、発光ダイオード。
- 前記基板と対向するダイオード領域の表面上に反射層をさらに備える、請求項21に記載の発光ダイオード。
- 前記ダイオード領域と対向する前記反射層の表面上にサブマウントをさらに備える、請求項22に記載の発光ダイオード。
- 前記基板が導電性基板であり、ダイオード領域と対向する前記導電性基板の表面上の第1のオーミック層と、前記導電性基板と対向する前記ダイオード領域の表面上の第2のオーミック接触とをさらに備える、請求項21に記載の発光ダイオード。
- 請求項1から20のいずれかに記載の半導体デバイス構造体の製造方法であって、
表面上でのエピタキシャル領域の成長を支持するのに適した基板成長表面を、前記成長表面を粗面化するように処理するステップと、
前記導電性基板の前記粗面化成長表面にエピタキシャル領域を形成するステップと
を含む、半導体デバイス構造体の製造方法。 - 前記処理するステップが、前記基板の前記成長表面を機械的に処理することを含む、請求項25に記載の製造方法。
- 前記処理するステップが、前記基板の前記成長表面をエッチングすることを含む、請求項25に記載の製造方法。
- 前記処理するステップが、前記基板の前記成長表面を光学的に処理することを含む、請求項25に記載の製造方法。
- 前記基板と対向する前記エピタキシャル領域の表面上に反射層を設けるステップをさらに含む、請求項25に記載の製造方法。
- 前記エピタキシャル領域と対向する前記反射層の表面上にサブマウントを設けるステップをさらに含む、請求項29に記載の製造方法。
- 前記エピタキシャル領域と対向する前記基板の表面上に第1のオーミック層を設けるステップと、前記基板と対向する前記エピタキシャル領域の表面上に第2のオーミック接触を設けるステップとをさらに含む、請求項25に記載の製造方法。
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