JP2008147472A - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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- JP2008147472A JP2008147472A JP2006333998A JP2006333998A JP2008147472A JP 2008147472 A JP2008147472 A JP 2008147472A JP 2006333998 A JP2006333998 A JP 2006333998A JP 2006333998 A JP2006333998 A JP 2006333998A JP 2008147472 A JP2008147472 A JP 2008147472A
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- H—ELECTRICITY
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- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/303—Surface mounted components, e.g. affixing before soldering, aligning means, spacing means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68313—Auxiliary support including a cavity for storing a finished device, e.g. IC package, or a partly finished device, e.g. die, during manufacturing or mounting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54426—Marks applied to semiconductor devices or parts for alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
- H01L2223/54486—Located on package parts, e.g. encapsulation, leads, package substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/111—Pads for surface mounting, e.g. lay-out
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09372—Pads and lands
- H05K2201/09381—Shape of non-curved single flat metallic pad, land or exposed part thereof; Shape of electrode of leadless component
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09372—Pads and lands
- H05K2201/094—Array of pads or lands differing from one another, e.g. in size, pitch, thickness; Using different connections on the pads
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10734—Ball grid array [BGA]; Bump grid array
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/166—Alignment or registration; Control of registration
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
【解決手段】本発明に係る半導体装置は、上パッケージのはんだボールと下パッケージのパッドとを直接接続させて形成される半導体装置において、前記パッドの一部がフィデューシャルマークを兼用する。さらに、前記フィデューシャルマークを兼用するパッドと、その他のパッドとは、形状が相違し、かつ面積が実質的に等しく形成される。
【選択図】図2
Description
本願発明に係る半導体装置1は、下パッケージ3において、フィデューシャルマーク兼用パッド17が設けられる。これにより、一つのフィデューシャルマーク兼用パッド17が、電気的接続端子としての役割を担うパッド機能を果たすとともに、下パッケージ3と上パッケージ2とを接続させる際に下パッケージ3の位置認識の役割を担うフィデューシャルマーク機能を果たすという、二役の効果を生じる。特に、フィデューシャルマーク兼用パッド17は、パッド16と相違する形状に形成されることによって、下パッケージ位置認識装置(図示しない)によって、他のパッド16と、フィデューシャルマーク兼用パッド17とを判別しつつ、フィデューシャルマーク兼用パッド17の位置を認識することが可能となる。さらに、フィデューシャルマーク兼用パッド17が、少なくとも二箇所以上の複数個所設けられる構成によって、下パッケージ3の位置認識の精度を向上させることができるという効果を生じる。
前述の構成を備える上パッケージ2と下パッケージ3とを準備し、下パッケージ3をキャリア31に収納した後(図4(a))、キャリア31における下パッケージ3の位置を、下パッケージ位置認識装置(図示しない)を用いて、下パッケージ3に設けられたフィデューシャルマーク兼用パッド17によって認識し、そこで認識された下パッケージ3の位置に基づいて、上パッケージ2のはんだボール11と、下パッケージ3のパッド16およびフィデューシャルマーク兼用パッド17との位置合わせを行い、それらを直接接続させて(図4(b))、半導体装置1を形成する(図4(c))。このとき、フィデューシャルマーク兼用パッド17と、その他のパッド16とは、形状が相違し、かつ面積が実質的に等しく形成される構成を備える。なお、一例として、前記直接接続は、はんだボール11をリフローさせて行われる。その後に、上パッケージ2と下パッケージ3との間にアンダーフィル(図示しない)を塗布する工程が続くことが一般的である。
例えば図7に示す従来の半導体装置では、下パッケージを構成する基板201の表面に、専用フィデューシャルマークとして認識バンプ213を形成して、その専用フィデューシャルマーク(認識バンプ213)によって、下パッケージ(基板201)の位置を認識していたのに対し、本実施例においては、パッドとしても機能するフィデューシャルマーク兼用パッド17によって、下パッケージ3の位置を認識することが可能となる。その結果、専用フィデューシャルマークの形成工程を省略することが可能となり、その形成に要していた材料費の削減および工期の削減が可能となる。
2 上パッケージ
3 下パッケージ
10 基板
11 はんだボール
12 半導体チップ
15 基板
16 パッド
17、17a、17b、17c、17d、17e フィデューシャルマーク兼用パッド
18 半導体チップ
31 キャリア
Claims (5)
- 上パッケージのはんだボールと下パッケージのパッドとを直接接続させて形成される半導体装置において、
前記パッドの一部がフィデューシャルマークを兼用すること
を特徴とする半導体装置。 - 前記フィデューシャルマークを兼用するパッドと、その他のパッドとは、形状が相違し、かつ面積が実質的に等しく形成されること
を特徴とする請求項1記載の半導体装置。 - 前記フィデューシャルマークを兼用するパッドが、前記下パッケージにおける対角位置に二箇所設けられること
を特徴とする請求項1または請求項2記載の半導体装置。 - 前記フィデューシャルマークを兼用するパッドが、前記下パッケージにおいて三角形を構成する位置に三箇所設けられること
を特徴とする請求項1または請求項2記載の半導体装置。 - キャリアに収納された下パッケージの位置を、下パッケージに設けられたフィデューシャルマークを兼用するパッドによって認識し、
前記認識位置に基づいて、上パッケージのはんだボールと、下パッケージのパッドとの位置合わせを行い、それらを直接接続させて、半導体装置を形成すること
を特徴とする半導体装置の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006333998A JP5049573B2 (ja) | 2006-12-12 | 2006-12-12 | 半導体装置 |
KR1020070125260A KR101571075B1 (ko) | 2006-12-12 | 2007-12-05 | 반도체 장치 및 그 제조 방법 |
US11/951,816 US7642662B2 (en) | 2006-12-12 | 2007-12-06 | Semiconductor device and method of manufacturing the same |
TW096147388A TWI453839B (zh) | 2006-12-12 | 2007-12-12 | 半導體裝置及其製造方法 |
CN2007101990827A CN101202262B (zh) | 2006-12-12 | 2007-12-12 | 半导体装置及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006333998A JP5049573B2 (ja) | 2006-12-12 | 2006-12-12 | 半導体装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008147472A true JP2008147472A (ja) | 2008-06-26 |
JP2008147472A5 JP2008147472A5 (ja) | 2009-10-08 |
JP5049573B2 JP5049573B2 (ja) | 2012-10-17 |
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006333998A Active JP5049573B2 (ja) | 2006-12-12 | 2006-12-12 | 半導体装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7642662B2 (ja) |
JP (1) | JP5049573B2 (ja) |
KR (1) | KR101571075B1 (ja) |
CN (1) | CN101202262B (ja) |
TW (1) | TWI453839B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012256741A (ja) * | 2011-06-09 | 2012-12-27 | Shinko Electric Ind Co Ltd | 半導体パッケージ |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8618669B2 (en) * | 2008-01-09 | 2013-12-31 | Ibiden Co., Ltd. | Combination substrate |
US8415792B2 (en) * | 2010-08-04 | 2013-04-09 | International Business Machines Corporation | Electrical contact alignment posts |
JP6207190B2 (ja) * | 2013-03-22 | 2017-10-04 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
US9343386B2 (en) * | 2013-06-19 | 2016-05-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Alignment in the packaging of integrated circuits |
KR102274742B1 (ko) * | 2014-10-06 | 2021-07-07 | 삼성전자주식회사 | 패키지 온 패키지와 이를 포함하는 컴퓨팅 장치 |
US9953963B2 (en) * | 2015-11-06 | 2018-04-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit process having alignment marks for underfill |
US11456259B2 (en) * | 2019-03-27 | 2022-09-27 | Pyxis Cf Pte. Ltd. | Panel level packaging for devices |
US11393759B2 (en) * | 2019-10-04 | 2022-07-19 | International Business Machines Corporation | Alignment carrier for interconnect bridge assembly |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04102339A (ja) * | 1990-08-22 | 1992-04-03 | Seiko Epson Corp | 半導体素子及びその実装方法 |
JPH10199921A (ja) * | 1997-01-09 | 1998-07-31 | Hitachi Ltd | 位置認識用マーク付半導体装置 |
JP2004253667A (ja) * | 2003-02-21 | 2004-09-09 | Sony Corp | 半導体装置及びその製造方法、並びに半導体パッケージ |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3284048B2 (ja) | 1996-05-31 | 2002-05-20 | 東芝マイクロエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US6278193B1 (en) * | 1998-12-07 | 2001-08-21 | International Business Machines Corporation | Optical sensing method to place flip chips |
TW457545B (en) * | 2000-09-28 | 2001-10-01 | Advanced Semiconductor Eng | Substrate to form electronic package |
US6668449B2 (en) * | 2001-06-25 | 2003-12-30 | Micron Technology, Inc. | Method of making a semiconductor device having an opening in a solder mask |
KR100416000B1 (ko) * | 2001-07-11 | 2004-01-24 | 삼성전자주식회사 | 다수의 핀을 갖는 부품이 실장되는 인쇄회로기판 |
US6570263B1 (en) * | 2002-06-06 | 2003-05-27 | Vate Technology Co., Ltd. | Structure of plated wire of fiducial marks for die-dicing package |
JP3804649B2 (ja) | 2003-09-19 | 2006-08-02 | 株式会社村田製作所 | 電子回路装置の製造方法および電子回路装置 |
-
2006
- 2006-12-12 JP JP2006333998A patent/JP5049573B2/ja active Active
-
2007
- 2007-12-05 KR KR1020070125260A patent/KR101571075B1/ko active IP Right Grant
- 2007-12-06 US US11/951,816 patent/US7642662B2/en active Active
- 2007-12-12 CN CN2007101990827A patent/CN101202262B/zh active Active
- 2007-12-12 TW TW096147388A patent/TWI453839B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04102339A (ja) * | 1990-08-22 | 1992-04-03 | Seiko Epson Corp | 半導体素子及びその実装方法 |
JPH10199921A (ja) * | 1997-01-09 | 1998-07-31 | Hitachi Ltd | 位置認識用マーク付半導体装置 |
JP2004253667A (ja) * | 2003-02-21 | 2004-09-09 | Sony Corp | 半導体装置及びその製造方法、並びに半導体パッケージ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012256741A (ja) * | 2011-06-09 | 2012-12-27 | Shinko Electric Ind Co Ltd | 半導体パッケージ |
US9406620B2 (en) | 2011-06-09 | 2016-08-02 | Shinko Electric Industries Co., Ltd. | Semiconductor package |
Also Published As
Publication number | Publication date |
---|---|
KR20080054347A (ko) | 2008-06-17 |
KR101571075B1 (ko) | 2015-11-23 |
JP5049573B2 (ja) | 2012-10-17 |
TWI453839B (zh) | 2014-09-21 |
CN101202262A (zh) | 2008-06-18 |
TW200828473A (en) | 2008-07-01 |
CN101202262B (zh) | 2011-06-15 |
US7642662B2 (en) | 2010-01-05 |
US20080258287A1 (en) | 2008-10-23 |
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