JP2008145342A5 - - Google Patents

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Publication number
JP2008145342A5
JP2008145342A5 JP2006334679A JP2006334679A JP2008145342A5 JP 2008145342 A5 JP2008145342 A5 JP 2008145342A5 JP 2006334679 A JP2006334679 A JP 2006334679A JP 2006334679 A JP2006334679 A JP 2006334679A JP 2008145342 A5 JP2008145342 A5 JP 2008145342A5
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JP
Japan
Prior art keywords
resistance element
external force
base member
strain
sensor chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006334679A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008145342A (ja
JP5174343B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006334679A priority Critical patent/JP5174343B2/ja
Priority claimed from JP2006334679A external-priority patent/JP5174343B2/ja
Priority to US12/000,405 priority patent/US7707899B2/en
Publication of JP2008145342A publication Critical patent/JP2008145342A/ja
Publication of JP2008145342A5 publication Critical patent/JP2008145342A5/ja
Application granted granted Critical
Publication of JP5174343B2 publication Critical patent/JP5174343B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006334679A 2006-12-12 2006-12-12 力覚センサ用チップ Expired - Fee Related JP5174343B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006334679A JP5174343B2 (ja) 2006-12-12 2006-12-12 力覚センサ用チップ
US12/000,405 US7707899B2 (en) 2006-12-12 2007-12-12 Force sensor chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006334679A JP5174343B2 (ja) 2006-12-12 2006-12-12 力覚センサ用チップ

Publications (3)

Publication Number Publication Date
JP2008145342A JP2008145342A (ja) 2008-06-26
JP2008145342A5 true JP2008145342A5 (https=) 2009-12-17
JP5174343B2 JP5174343B2 (ja) 2013-04-03

Family

ID=39582077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006334679A Expired - Fee Related JP5174343B2 (ja) 2006-12-12 2006-12-12 力覚センサ用チップ

Country Status (2)

Country Link
US (1) US7707899B2 (https=)
JP (1) JP5174343B2 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5243704B2 (ja) * 2006-08-24 2013-07-24 本田技研工業株式会社 力覚センサ
JP5243988B2 (ja) * 2009-02-10 2013-07-24 本田技研工業株式会社 多軸力覚センサおよび加速度センサ
US8745571B2 (en) 2011-02-14 2014-06-03 International Business Machines Corporation Analysis of compensated layout shapes
US9003897B2 (en) 2012-05-10 2015-04-14 Honeywell International Inc. Temperature compensated force sensor
US9581511B2 (en) * 2013-10-15 2017-02-28 Meggitt (Orange County), Inc. Microelectromechanical pressure sensors
US10203254B2 (en) * 2016-09-12 2019-02-12 Apple Inc. Strain sensor with thermally conductive element
JP6760575B2 (ja) * 2016-10-07 2020-09-23 ミネベアミツミ株式会社 センサチップ、起歪体、力覚センサ装置
JP7025981B2 (ja) * 2018-04-12 2022-02-25 株式会社小野測器 トルク計測装置
JP2021071305A (ja) * 2019-10-29 2021-05-06 ミネベアミツミ株式会社 力覚センサ装置
JP2022142118A (ja) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 センサチップ、力覚センサ装置
JP2022142116A (ja) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 起歪体、力覚センサ装置
JP2022142117A (ja) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 センサチップ、力覚センサ装置
US12422314B2 (en) * 2021-10-08 2025-09-23 Qorvo Us, Inc. Input structures that include slots that create a stress concentration region in a substrate for strain detection by a sensor

Family Cites Families (26)

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Publication number Priority date Publication date Assignee Title
US3985025A (en) * 1975-01-20 1976-10-12 Ormond Alfred N Shear measuring flexure isolated load cells
JPS5814751B2 (ja) * 1977-03-17 1983-03-22 株式会社日立製作所 ダイアフラム形ひずみゲ−ジ
US4221134A (en) * 1979-08-20 1980-09-09 Ekstrom Jr Regner A Differential pressure transducer with strain gauge
JPS5660066A (en) * 1979-10-19 1981-05-23 Nec Corp Semiconductor strain detector
JPS5780532A (en) * 1980-11-07 1982-05-20 Hitachi Ltd Semiconductor load converter
JPS57169643A (en) * 1981-04-13 1982-10-19 Yamato Scale Co Ltd Load cell for multiple components of force
CA1237739A (en) * 1982-09-21 1988-06-07 Kazuo Asakawa Supporting device
US5207554A (en) * 1982-09-21 1993-05-04 Fujitsu Limited Supporting device
JPS62213280A (ja) * 1986-03-14 1987-09-19 Nissan Motor Co Ltd 半導体加速度センサ
JPH0617834B2 (ja) * 1987-04-24 1994-03-09 株式会社エンプラス研究所 力検出装置
DE3852271T2 (de) * 1987-04-24 1995-07-06 Enplas Lab Inc Kraft- und momentendetektor unter verwendung eines widerstandes.
US5095762A (en) * 1988-07-14 1992-03-17 University Of Hawaii Multidimensional force sensor
JP2560140B2 (ja) * 1990-08-03 1996-12-04 日産自動車株式会社 半導体装置
US6314823B1 (en) * 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
JP2548347Y2 (ja) * 1991-12-03 1997-09-17 大和製衡株式会社 ロードセル
JPH05215627A (ja) * 1992-02-04 1993-08-24 Kazuhiro Okada 多次元方向に関する力・加速度・磁気の検出装置
JP4141574B2 (ja) 1999-03-19 2008-08-27 エランテック デバイシーズ コーポレイション ポインティングスティック用厚膜回路基板
JP3870895B2 (ja) * 2002-01-10 2007-01-24 株式会社村田製作所 角速度センサ
US6823744B2 (en) * 2002-01-11 2004-11-30 Honda Giken Kogyo Kabushiki Kaisha Six-axis force sensor
US7021154B2 (en) * 2002-09-24 2006-04-04 Kabushiki Kaisha Toyota Chuo Kenkyusho Force sensing element
JP4045979B2 (ja) * 2003-02-26 2008-02-13 株式会社デンソー 圧力検出装置
JP4192084B2 (ja) * 2003-06-17 2008-12-03 ニッタ株式会社 多軸センサ
JP2005106679A (ja) * 2003-09-30 2005-04-21 Nitta Ind Corp 多軸センサユニットおよびこれを利用した多軸センサ
JP4680566B2 (ja) * 2004-10-26 2011-05-11 本田技研工業株式会社 多軸力センサチップとこれを用いた多軸力センサ
US6988412B1 (en) * 2004-11-30 2006-01-24 Endevco Corporation Piezoresistive strain concentrator
JP2006242797A (ja) * 2005-03-04 2006-09-14 Matsushita Electric Ind Co Ltd 歪センサとその製造方法

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