JP4192084B2 - 多軸センサ - Google Patents
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- JP4192084B2 JP4192084B2 JP2003422687A JP2003422687A JP4192084B2 JP 4192084 B2 JP4192084 B2 JP 4192084B2 JP 2003422687 A JP2003422687 A JP 2003422687A JP 2003422687 A JP2003422687 A JP 2003422687A JP 4192084 B2 JP4192084 B2 JP 4192084B2
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- 230000001133 acceleration Effects 0.000 claims description 68
- 230000005484 gravity Effects 0.000 claims description 5
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims description 3
- 229910000423 chromium oxide Inorganic materials 0.000 claims description 3
- 239000010408 film Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 description 27
- 238000006073 displacement reaction Methods 0.000 description 16
- 238000004364 calculation method Methods 0.000 description 13
- 239000011888 foil Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 9
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000013598 vector Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
- G01L1/2218—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being of the column type, e.g. cylindric, adapted for measuring a force along a single direction
- G01L1/2225—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being of the column type, e.g. cylindric, adapted for measuring a force along a single direction the direction being perpendicular to the central axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
- G01L1/2231—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being disc- or ring-shaped, adapted for measuring a force along a single direction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
- G01L5/162—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
- G01L5/1627—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Pressure Sensors (AREA)
- Measurement Of Force In General (AREA)
Description
また、第2の発明の多軸センサは、一平面上に配置された複数の歪みゲージと、複数の前記歪みゲージが取り付けられる1つの第1のダイヤフラムを有する第1部材と、前記歪みゲージを備えない第2のダイヤフラムを1つ有する第2部材と、前記第1のダイヤフラムと前記第2のダイヤフラムとを連結する作用体とを有しており、前記第1部材と前記第2部材とは、前記第1部材の前記第1のダイヤフラムの中心点と前記第2部材の前記第2のダイヤフラムの中心点とが対向するように配置されると共に、前記第1のダイヤフラムと前記第2のダイヤフラムとのそれぞれの前記中心点を中心に等角度おき、かつ前記中心点から等距離の位置同士が前記作用体によって連結されており、前記第1部材と前記第2部材との間に作用する多軸の力およびモーメントを測定する。
さらに、第3の発明の多軸センサは、一平面上に配置された複数の歪みゲージと、複数の前記歪みゲージが取り付けられる1つの第1のダイヤフラムを有する第1部材と、一平面に配置された複数の前記歪みゲージが取り付けられた第2のダイヤフラムを有する第2部材と、前記第1のダイヤフラムと前記第2のダイヤフラムとを連結する作用体とを有しており、前記第1部材と前記第2部材とは、前記第1部材の前記第1のダイヤフラムの中心点と前記第2部材の前記第2のダイヤフラムの中心点とが対向するように配置されると共に、前記第1及び第2のダイヤフラムの前記中心点を中心に等角度おき、かつ前記中心点から等距離の位置同士が前記作用体によって連結されており、前記第1部材と前記第2部材との間に作用する多軸の力およびモーメントを測定する。
2 第1部材
3 第2部材
4,5,6,7 ダイヤフラム
8 中心軸
10 ピエゾ抵抗素子
16、17、18、19 作用体
R11〜R48、R111〜R148 歪みゲージ
Claims (11)
- 一平面上に配置された複数の歪みゲージと、
複数の前記歪みゲージが取り付けられる1つの第1のダイヤフラムと、
前記平面の中心点を中心に等角度おき、かつ前記中心点から等距離の位置において、前記第1のダイヤフラムに設けられた作用体とを有しており、
該多軸センサに作用する多軸の加速度および角加速度を測定することを特徴とする多軸センサ。 - 一平面上に配置された複数の歪みゲージと、
複数の前記歪みゲージが取り付けられる1つの第1のダイヤフラムを有する第1部材と、
前記歪みゲージを備えない第2のダイヤフラムを1つ有する第2部材と、
前記第1のダイヤフラムと前記第2のダイヤフラムとを連結する作用体とを有しており、
前記第1部材と前記第2部材とは、前記第1部材の前記第1のダイヤフラムの中心点と前記第2部材の前記第2のダイヤフラムの中心点とが対向するように配置されると共に、前記第1のダイヤフラムと前記第2のダイヤフラムとのそれぞれの前記中心点を中心に等角度おき、かつ前記中心点から等距離の位置同士が前記作用体によって連結されており、前記第1部材と前記第2部材との間に作用する多軸の力およびモーメントを測定することを特徴とする多軸センサ。 - 一平面上に配置された複数の歪みゲージと、
複数の前記歪みゲージが取り付けられる1つの第1のダイヤフラムを有する第1部材と、
一平面に配置された複数の前記歪みゲージが取り付けられた第2のダイヤフラムを有する第2部材と、
前記第1のダイヤフラムと前記第2のダイヤフラムとを連結する作用体とを有しており、
前記第1部材と前記第2部材とは、前記第1部材の前記第1のダイヤフラムの中心点と前記第2部材の前記第2のダイヤフラムの中心点とが対向するように配置されると共に、前記第1及び第2のダイヤフラムの前記中心点を中心に等角度おき、かつ前記中心点から等距離の位置同士が前記作用体によって連結されており、前記第1部材と前記第2部材との間に作用する多軸の力およびモーメントを測定することを特徴とする多軸センサ。 - 前記第1部材の前記歪みゲージと前記第2部材の前記歪みゲージとは、多軸センサの重心点を中心に対称位置に配置されていることを特徴とする請求項3に記載の多軸センサ。
- 前記第1部材の前記歪みゲージと前記第2部材の前記歪みゲージとの各出力のうち、いずれか一方の出力信号が所定範囲外であるときは他方の出力信号を採用することを特徴とする請求項4に記載の多軸センサ。
- 前記角度は90度であることを特徴とする請求項1〜5のいずれか1項に記載の多軸センサ。
- 前記作用体は、前記第1のダイヤフラムの中心点を原点とするX軸およびY軸上の正方向および負方向にそれぞれ設けられていることを特徴とする請求項6に記載の多軸センサ。
- 前記角度は120度であることを特徴とする請求項1〜5のいずれか1項に記載の多軸センサ。
- 前記歪みゲージの配置位置は、
前記平面上の前記作用体に対応する部分の中心点と前記第1のダイヤフラムの中心点とを結ぶ線上における前記作用体の縁部と、
前記平面上の前記作用体に対応する部分の中心点における前記線の垂直線上において前記作用体の縁部と、
前記第1のダイヤフラムの中心点から等角度おき、かつ前記中心点から等距離の位置であって前記作用体の縁部および前記第1のダイヤフラムの縁部のいずれか一方とであることを特徴とする請求項1〜8のいずれか1項に記載の多軸センサ。 - 前記歪みゲージはピエゾ抵抗素子であることを特徴とする請求項1〜9のいずれか1項に記載の多軸センサ。
- 前記歪みゲージは絶縁膜上に酸化クロム薄膜で形成した歪みゲージであることを特徴とする請求項1〜9のいずれか1項に記載の多軸センサ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003422687A JP4192084B2 (ja) | 2003-06-17 | 2003-12-19 | 多軸センサ |
EP04745979A EP1645859A4 (en) | 2003-06-17 | 2004-06-16 | MORE AXLE SENSOR |
US10/560,995 US7360456B2 (en) | 2003-06-17 | 2004-06-16 | Six-axis sensor |
PCT/JP2004/008438 WO2004111592A1 (ja) | 2003-06-17 | 2004-06-16 | 多軸センサ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003172045 | 2003-06-17 | ||
JP2003422687A JP4192084B2 (ja) | 2003-06-17 | 2003-12-19 | 多軸センサ |
Publications (2)
Publication Number | Publication Date |
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JP2005031062A JP2005031062A (ja) | 2005-02-03 |
JP4192084B2 true JP4192084B2 (ja) | 2008-12-03 |
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Application Number | Title | Priority Date | Filing Date |
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JP2003422687A Expired - Fee Related JP4192084B2 (ja) | 2003-06-17 | 2003-12-19 | 多軸センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7360456B2 (ja) |
EP (1) | EP1645859A4 (ja) |
JP (1) | JP4192084B2 (ja) |
WO (1) | WO2004111592A1 (ja) |
Cited By (7)
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JP2020165897A (ja) * | 2019-03-29 | 2020-10-08 | 株式会社レプトリノ | 力覚センサ |
JP2020165899A (ja) * | 2019-03-29 | 2020-10-08 | 株式会社レプトリノ | 力覚センサ |
JP2021135284A (ja) * | 2020-08-19 | 2021-09-13 | 株式会社トライフォース・マネジメント | 力覚センサ |
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-
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- 2004-06-16 EP EP04745979A patent/EP1645859A4/en not_active Withdrawn
- 2004-06-16 WO PCT/JP2004/008438 patent/WO2004111592A1/ja active Application Filing
- 2004-06-16 US US10/560,995 patent/US7360456B2/en not_active Expired - Fee Related
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JP2017062147A (ja) * | 2015-09-24 | 2017-03-30 | 株式会社ワコー | 力覚センサ |
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JP2021135279A (ja) * | 2020-02-25 | 2021-09-13 | 株式会社トライフォース・マネジメント | 力覚センサ |
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JP2021135284A (ja) * | 2020-08-19 | 2021-09-13 | 株式会社トライフォース・マネジメント | 力覚センサ |
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JP2022174264A (ja) * | 2020-08-19 | 2022-11-22 | 株式会社トライフォース・マネジメント | 力覚センサ |
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Also Published As
Publication number | Publication date |
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US7360456B2 (en) | 2008-04-22 |
WO2004111592A1 (ja) | 2004-12-23 |
JP2005031062A (ja) | 2005-02-03 |
EP1645859A4 (en) | 2007-08-15 |
EP1645859A1 (en) | 2006-04-12 |
US20060174718A1 (en) | 2006-08-10 |
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