JP2008133800A5 - - Google Patents

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Publication number
JP2008133800A5
JP2008133800A5 JP2006322235A JP2006322235A JP2008133800A5 JP 2008133800 A5 JP2008133800 A5 JP 2008133800A5 JP 2006322235 A JP2006322235 A JP 2006322235A JP 2006322235 A JP2006322235 A JP 2006322235A JP 2008133800 A5 JP2008133800 A5 JP 2008133800A5
Authority
JP
Japan
Prior art keywords
chamber
piston
pump
cylinder
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006322235A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008133800A (ja
JP4547369B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2006322235A external-priority patent/JP4547369B2/ja
Priority to JP2006322235A priority Critical patent/JP4547369B2/ja
Priority to TW096129958A priority patent/TW200823367A/zh
Priority to KR1020070086566A priority patent/KR100904832B1/ko
Priority to CN200710147595A priority patent/CN100578016C/zh
Priority to US11/856,820 priority patent/US7841842B2/en
Publication of JP2008133800A publication Critical patent/JP2008133800A/ja
Publication of JP2008133800A5 publication Critical patent/JP2008133800A5/ja
Publication of JP4547369B2 publication Critical patent/JP4547369B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006322235A 2006-11-29 2006-11-29 薬液供給装置 Expired - Fee Related JP4547369B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2006322235A JP4547369B2 (ja) 2006-11-29 2006-11-29 薬液供給装置
TW096129958A TW200823367A (en) 2006-11-29 2007-08-14 Drug liquid supply device
KR1020070086566A KR100904832B1 (ko) 2006-11-29 2007-08-28 약액 공급장치
CN200710147595A CN100578016C (zh) 2006-11-29 2007-08-28 药液供给装置
US11/856,820 US7841842B2 (en) 2006-11-29 2007-09-18 Chemical liquid supplying apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006322235A JP4547369B2 (ja) 2006-11-29 2006-11-29 薬液供給装置

Publications (3)

Publication Number Publication Date
JP2008133800A JP2008133800A (ja) 2008-06-12
JP2008133800A5 true JP2008133800A5 (enExample) 2010-04-08
JP4547369B2 JP4547369B2 (ja) 2010-09-22

Family

ID=39486661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006322235A Expired - Fee Related JP4547369B2 (ja) 2006-11-29 2006-11-29 薬液供給装置

Country Status (5)

Country Link
US (1) US7841842B2 (enExample)
JP (1) JP4547369B2 (enExample)
KR (1) KR100904832B1 (enExample)
CN (1) CN100578016C (enExample)
TW (1) TW200823367A (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4585563B2 (ja) * 2007-12-03 2010-11-24 株式会社コガネイ 薬液供給装置およびポンプ組立体
US20090317028A1 (en) * 2008-06-24 2009-12-24 Larry Castleman Seal assembly in situ lifetime measurement
US8264347B2 (en) * 2008-06-24 2012-09-11 Trelleborg Sealing Solutions Us, Inc. Seal system in situ lifetime measurement
KR100998602B1 (ko) * 2008-08-29 2010-12-07 씨앤지하이테크 주식회사 약액 이송장치
EP2531729B1 (en) * 2010-02-02 2020-03-04 Dajustco Ip Holdings Inc. Diaphragm pump with hydraulic fluid control system
JP5114527B2 (ja) * 2010-04-20 2013-01-09 株式会社コガネイ 液体供給装置
JP5438611B2 (ja) * 2010-07-09 2014-03-12 株式会社コガネイ 薬液供給装置
JP5535155B2 (ja) * 2011-09-05 2014-07-02 株式会社コガネイ 流路切換弁およびそれを用いた流動性材料の吐出制御装置
JP6438784B2 (ja) * 2015-02-03 2018-12-19 東京応化工業株式会社 ポンプおよび塗布装置
TWI626372B (zh) * 2015-04-13 2018-06-11 徐郁輝 一種具摺層構造之可浮性儲水袋
KR101732113B1 (ko) * 2015-08-17 2017-05-04 이동민 진공 공정용 아이솔레이션 밸브
KR200483917Y1 (ko) * 2015-09-09 2017-07-11 주식회사 디엠에스 약액토출장치
JP6709795B2 (ja) * 2016-07-05 2020-06-17 株式会社コガネイ チューブポンプ
KR101879177B1 (ko) * 2017-07-31 2018-07-17 (주)포톤 약액 공급 장치
US11960308B2 (en) 2018-08-10 2024-04-16 Fujikin, Incorporated Fluid control apparatus, fluid control device, and operation analysis system
JP7315963B2 (ja) * 2018-08-10 2023-07-27 株式会社フジキン 流体制御機器、流体制御機器の異常検知方法、異常検知装置、及び異常検知システム
KR102781539B1 (ko) * 2020-02-19 2025-03-17 주식회사 나래나노텍 약액 가압 장치, 및 이를 구비한 약액 공급 장치
CN111765061B (zh) * 2020-07-07 2022-03-29 鹏城实验室 压差驱动式吸排机构
CN113303305B (zh) * 2021-05-14 2022-02-11 北京百瑞盛田环保科技发展有限公司 一种施药监控方法、装置及系统
WO2023201036A1 (en) 2022-04-14 2023-10-19 Viking Pump, Inc. An expandable, inner liner pump

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2613607A (en) * 1949-10-27 1952-10-14 Milton Roy Co Bellows pump
US2853015A (en) * 1955-01-11 1958-09-23 Pleuger Friedrich Wilhelm Diaphragm pump
US3318251A (en) * 1965-06-21 1967-05-09 Manton Gaulin Mfg Company Inc Method and apparatus for pumping fluid bodies
JPS4840169Y1 (enExample) * 1970-02-26 1973-11-26
DE7303301U (de) * 1973-01-30 1974-04-04 Feluwa Schlesiger & Co Kg Membran-Kolbenpumpe
US4178133A (en) * 1977-04-14 1979-12-11 Binks Manufacturing Company Double-acting flexible tube pump
US4474540A (en) * 1982-09-10 1984-10-02 Pennwalt Corporation Tubular diaphragm pump
JPS63130973A (ja) * 1986-11-21 1988-06-03 Takeshi Hoya 弁装置構造
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
JPH03149371A (ja) * 1989-11-02 1991-06-25 Nippon Fuiidaa Kogyo Kk ダイヤフラムポンプ
US5165869A (en) * 1991-01-16 1992-11-24 Warren Rupp, Inc. Diaphragm pump
JP3554115B2 (ja) * 1996-08-26 2004-08-18 株式会社コガネイ 薬液供給装置
JPH1122648A (ja) * 1997-07-04 1999-01-26 Nissan Motor Co Ltd 燃料ポンプ
JP3461725B2 (ja) * 1998-06-26 2003-10-27 東京エレクトロン株式会社 処理液供給装置及び処理液供給方法
JP2002089503A (ja) 2000-09-18 2002-03-27 Koganei Corp アクチュエータ
JP2002242842A (ja) * 2001-02-19 2002-08-28 Nikkiso Co Ltd ダイアフラムポンプ
JP4197107B2 (ja) 2002-07-18 2008-12-17 大日本印刷株式会社 塗工装置
JP4790311B2 (ja) * 2005-02-28 2011-10-12 株式会社鷺宮製作所 定量送液ポンプ
JP4603925B2 (ja) * 2005-04-13 2010-12-22 株式会社コガネイ 薬液供給装置
JP5060766B2 (ja) 2006-06-19 2012-10-31 株式会社コガネイ 薬液供給装置
JP4916793B2 (ja) * 2006-06-30 2012-04-18 株式会社鷺宮製作所 定量送液ポンプおよびそれを用いた薬液塗布装置

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