CN100578016C - 药液供给装置 - Google Patents

药液供给装置 Download PDF

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Publication number
CN100578016C
CN100578016C CN200710147595A CN200710147595A CN100578016C CN 100578016 C CN100578016 C CN 100578016C CN 200710147595 A CN200710147595 A CN 200710147595A CN 200710147595 A CN200710147595 A CN 200710147595A CN 100578016 C CN100578016 C CN 100578016C
Authority
CN
China
Prior art keywords
chamber
piston
pump
cylinder
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200710147595A
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English (en)
Chinese (zh)
Other versions
CN101191482A (zh
Inventor
矢岛丈夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
K K KOGANEI
Koganei Corp
Original Assignee
K K KOGANEI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by K K KOGANEI filed Critical K K KOGANEI
Publication of CN101191482A publication Critical patent/CN101191482A/zh
Application granted granted Critical
Publication of CN100578016C publication Critical patent/CN100578016C/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F04B43/107—Pumps having fluid drive the fluid being actuated directly by a piston
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02019—Chemical etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Reciprocating Pumps (AREA)
CN200710147595A 2006-11-29 2007-08-28 药液供给装置 Expired - Fee Related CN100578016C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006322235 2006-11-29
JP2006322235A JP4547369B2 (ja) 2006-11-29 2006-11-29 薬液供給装置

Publications (2)

Publication Number Publication Date
CN101191482A CN101191482A (zh) 2008-06-04
CN100578016C true CN100578016C (zh) 2010-01-06

Family

ID=39486661

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200710147595A Expired - Fee Related CN100578016C (zh) 2006-11-29 2007-08-28 药液供给装置

Country Status (5)

Country Link
US (1) US7841842B2 (enExample)
JP (1) JP4547369B2 (enExample)
KR (1) KR100904832B1 (enExample)
CN (1) CN100578016C (enExample)
TW (1) TW200823367A (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4585563B2 (ja) * 2007-12-03 2010-11-24 株式会社コガネイ 薬液供給装置およびポンプ組立体
US8264347B2 (en) * 2008-06-24 2012-09-11 Trelleborg Sealing Solutions Us, Inc. Seal system in situ lifetime measurement
US20090317028A1 (en) * 2008-06-24 2009-12-24 Larry Castleman Seal assembly in situ lifetime measurement
KR100998602B1 (ko) * 2008-08-29 2010-12-07 씨앤지하이테크 주식회사 약액 이송장치
US9850889B2 (en) * 2010-02-02 2017-12-26 Dajustco Ip Holdings Inc. Hydraulic fluid control system for a diaphragm pump
JP5114527B2 (ja) * 2010-04-20 2013-01-09 株式会社コガネイ 液体供給装置
JP5438611B2 (ja) * 2010-07-09 2014-03-12 株式会社コガネイ 薬液供給装置
JP5535155B2 (ja) * 2011-09-05 2014-07-02 株式会社コガネイ 流路切換弁およびそれを用いた流動性材料の吐出制御装置
JP6438784B2 (ja) * 2015-02-03 2018-12-19 東京応化工業株式会社 ポンプおよび塗布装置
TWI626372B (zh) 2015-04-13 2018-06-11 徐郁輝 一種具摺層構造之可浮性儲水袋
KR101732113B1 (ko) * 2015-08-17 2017-05-04 이동민 진공 공정용 아이솔레이션 밸브
KR200483917Y1 (ko) * 2015-09-09 2017-07-11 주식회사 디엠에스 약액토출장치
JP6709795B2 (ja) * 2016-07-05 2020-06-17 株式会社コガネイ チューブポンプ
KR101879177B1 (ko) * 2017-07-31 2018-07-17 (주)포톤 약액 공급 장치
IL280504B2 (en) * 2018-08-10 2025-07-01 Fujikin Kk Fluid control device, abnormality detection method of fluid control device, abnormality detection device, and abnormality detection system
KR102502198B1 (ko) 2018-08-10 2023-02-21 가부시키가이샤 후지킨 동작 해석 시스템
KR102781539B1 (ko) * 2020-02-19 2025-03-17 주식회사 나래나노텍 약액 가압 장치, 및 이를 구비한 약액 공급 장치
CN111765061B (zh) * 2020-07-07 2022-03-29 鹏城实验室 压差驱动式吸排机构
CN113303305B (zh) * 2021-05-14 2022-02-11 北京百瑞盛田环保科技发展有限公司 一种施药监控方法、装置及系统
US12297825B2 (en) 2022-04-14 2025-05-13 Viking Pump, Inc. Expandable, inner liner pump

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2613607A (en) * 1949-10-27 1952-10-14 Milton Roy Co Bellows pump
US2853015A (en) * 1955-01-11 1958-09-23 Pleuger Friedrich Wilhelm Diaphragm pump
US3318251A (en) * 1965-06-21 1967-05-09 Manton Gaulin Mfg Company Inc Method and apparatus for pumping fluid bodies
JPS4840169Y1 (enExample) * 1970-02-26 1973-11-26
DE7303301U (de) * 1973-01-30 1974-04-04 Feluwa Schlesiger & Co Kg Membran-Kolbenpumpe
US4178133A (en) * 1977-04-14 1979-12-11 Binks Manufacturing Company Double-acting flexible tube pump
US4474540A (en) * 1982-09-10 1984-10-02 Pennwalt Corporation Tubular diaphragm pump
JPS63130973A (ja) * 1986-11-21 1988-06-03 Takeshi Hoya 弁装置構造
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
JPH03149371A (ja) * 1989-11-02 1991-06-25 Nippon Fuiidaa Kogyo Kk ダイヤフラムポンプ
US5165869A (en) * 1991-01-16 1992-11-24 Warren Rupp, Inc. Diaphragm pump
JP3554115B2 (ja) * 1996-08-26 2004-08-18 株式会社コガネイ 薬液供給装置
JPH1122648A (ja) * 1997-07-04 1999-01-26 Nissan Motor Co Ltd 燃料ポンプ
JP3461725B2 (ja) * 1998-06-26 2003-10-27 東京エレクトロン株式会社 処理液供給装置及び処理液供給方法
JP2002089503A (ja) 2000-09-18 2002-03-27 Koganei Corp アクチュエータ
JP2002242842A (ja) * 2001-02-19 2002-08-28 Nikkiso Co Ltd ダイアフラムポンプ
JP4197107B2 (ja) 2002-07-18 2008-12-17 大日本印刷株式会社 塗工装置
JP4790311B2 (ja) * 2005-02-28 2011-10-12 株式会社鷺宮製作所 定量送液ポンプ
JP4603925B2 (ja) * 2005-04-13 2010-12-22 株式会社コガネイ 薬液供給装置
JP5060766B2 (ja) 2006-06-19 2012-10-31 株式会社コガネイ 薬液供給装置
JP4916793B2 (ja) * 2006-06-30 2012-04-18 株式会社鷺宮製作所 定量送液ポンプおよびそれを用いた薬液塗布装置

Also Published As

Publication number Publication date
CN101191482A (zh) 2008-06-04
US7841842B2 (en) 2010-11-30
JP4547369B2 (ja) 2010-09-22
TW200823367A (en) 2008-06-01
KR20080048913A (ko) 2008-06-03
TWI379946B (enExample) 2012-12-21
KR100904832B1 (ko) 2009-06-25
JP2008133800A (ja) 2008-06-12
US20080138214A1 (en) 2008-06-12

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Granted publication date: 20100106

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