JP2008021760A - 薄膜トランジスタおよび画像表示装置 - Google Patents
薄膜トランジスタおよび画像表示装置 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 claims abstract description 89
- 239000010408 film Substances 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 36
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- 239000011159 matrix material Substances 0.000 claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 13
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- OFIYHXOOOISSDN-UHFFFAOYSA-N tellanylidenegallium Chemical compound [Te]=[Ga] OFIYHXOOOISSDN-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78612—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing the kink- or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42384—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Thin Film Transistor (AREA)
- Liquid Crystal (AREA)
Abstract
【解決手段】島状半導体薄膜SEMI−lのソース側かドレイン側のどちらか片側において、ゲート電極GTを該島状半導体薄膜SEMI−lの輪郭に沿って切れ目なく延長させて分岐閉路DETを設け、サブチャネルとなる島状半導体薄膜SEMI−lの端部の電流成分経路を無くす。
【選択図】図4
Description
PSI−L・・・多結晶シリコン膜のアイランド
GT・・・ゲート電極
DET・・・分岐閉路
RMF・・・分岐枝
CT・・・コンタクトホール
ASI・・・アモルファスシリコン膜
SUB1・・・薄膜トランジスタ基板(アクティブ・マトリクス基板)
PSI・・・多結晶シリコン膜
GI・・・ゲート絶縁膜
NE・・・nチャネル薄膜トランジスタ用閾値調整イオン注入
RNE・・・レジスト
RN・・・レジスト
N・・・nチャネル薄膜トランジスタ用ソース、ドレイン形成のためのイオン注入
RP・・・レジスト
P・・・pチャネル薄膜トランジスタ用ソース、ドレイン形成のためのイオン注入
LI・・・第一の層間絶縁膜
L2・・・第二の層間絶縁膜
L・・・金属配線
PASS・・保護膜
VDD・・・電源電圧
VSS・・・基準電圧
VIN_A・・・入力端子
VIN_A・・・入力端子
VOUT・・・出力端子
PSD・・・P型ソース・ドレイン領域
NSD・・・N型ソース・ドレイン領域
SHD・・・シールドフレーム
MDL・・・モールドケース
FPC1・・・フレキシブルプリント基板
FPC2・・・フレキシブルプリント基板
CFL・・・冷陰極蛍光ランプ
PCB・・・タイミングコントローラ
PNL・・・液晶セルの薄膜トランジスタ基板
OPS・・・光学補償部材
GLB・・・導光板
POL1・・・偏光板
POL2・・・偏光板
RFS・・・反射シート
LFS・・・ランプ反射シート
SUBX・・・封止基板
DDR・・・駆動回路領域
PAR・・・画素領域
GDR・…駆動回路領域
PLB・・・プリント基板
CTL・・・インターフェース回路チップ
CAS・・・下側ケース・
Claims (7)
- 島状半導体薄膜の上部にゲート絶縁膜を介して配置されたゲート電極を有し、前記ゲート電極の両側にソース電極およびドレイン電極が配置された薄膜トランジスタであって、
前記島状半導体薄膜上の前記ソース電極の形成側と前記ドレイン電極の形成側の何れか一方又は双方に、前記ゲート電極から分岐して前記島状半導体薄膜の輪郭を形成する側縁に沿い、かつ該側縁を覆って周回する分岐閉路を有することを特徴とする薄膜トランジスタ。 - 請求項1において、
前記ゲート電極と前記分岐閉路で囲まれた前記島状半導体薄膜の上部領域に複数のソース電極又は複数のドレイン電極を有することを特徴とする薄膜トランジスタ。 - 島状半導体薄膜の上部にゲート絶縁膜を介して配置されたゲート電極を有し、前記ゲート電極の両側にソース電極およびドレイン電極が配置された薄膜トランジスタであって、
前記島状半導体薄膜上の前記ソース電極の形成側と前記ドレイン電極の形成側の何れか一方又は双方に、前記ゲート電極から分岐して前記島状半導体薄膜の輪郭の一部を形成する側縁に沿い、かつ該側縁を覆って延在して、遊端を持つ分岐枝を有することを特徴とする薄膜トランジスタ。 - 請求項3において、
前記ゲート電極の両側の前記島状半導体薄膜の上部領域に複数のソース電極又は複数のドレイン電極を有することを特徴とする薄膜トランジスタ。 - 主面に複数の画素回路がマトリクス状に配置された表示領域と、該表示領域の外側に形成されて画素回路を駆動する駆動回路の一部又は全部を含む周辺回路領域とを備えた絶縁基板を有し、前記画素回路と前記周辺回路は薄膜トランジスタを含む回路で構成された画像表示装置であって、
前記薄膜トランジスタは、前記絶縁基板の主面に形成された島状半導体薄膜の上部にゲート絶縁膜を介して配置されたゲート電極を有し、前記ゲート電極の両側にソース電極およびドレイン電極が配置されており、
前記周辺回路を構成する薄膜トランジスタの一部又は全部は、前記島状半導体薄膜上の前記ソース電極の形成側と前記ドレイン電極の形成側の何れか一方又は双方に、前記ゲート電極から分岐して前記島状半導体薄膜の輪郭を形成する側縁に沿い、かつ該側縁を覆って周回する分岐閉路を有することを特徴とすることを特徴とする画像表示装置。 - 請求項5において、
前記周辺回路を構成する薄膜トランジスタの一部は、前記島状半導体薄膜上の前記ソース電極の形成側と前記ドレイン電極の形成側の何れか一方又は双方に、前記ゲート電極から分岐して前記島状半導体薄膜の輪郭を形成する側縁に沿い、かつ該側縁を覆って周回する分岐閉路を有し、
前記周辺回路を構成する残りの全部又は一部の薄膜トランジスタは、前記島状半導体薄膜上の前記ソース電極の形成側と前記ドレイン電極の形成側の何れか一方又は双方に、前記ゲート電極から分岐して前記島状半導体薄膜の輪郭の一部を形成する側縁に沿い、かつ該側縁を覆って延在すると共に遊端を持つ分岐枝を有することを特徴とする画像表示装置。 - 請求項5又は6において、
前記周辺回路に含む少なくとも前記駆動回路の電源電圧が3.0Vから6.0Vの範囲内であることを特徴とする画像表示装置。
Priority Applications (3)
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JP2006191176A JP2008021760A (ja) | 2006-07-12 | 2006-07-12 | 薄膜トランジスタおよび画像表示装置 |
US11/761,930 US7755142B2 (en) | 2006-07-12 | 2007-06-12 | Thin-film transistor and image display device |
CNB2007101125875A CN100505315C (zh) | 2006-07-12 | 2007-06-22 | 薄膜晶体管和图像显示装置 |
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JP2006191176A JP2008021760A (ja) | 2006-07-12 | 2006-07-12 | 薄膜トランジスタおよび画像表示装置 |
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US (1) | US7755142B2 (ja) |
JP (1) | JP2008021760A (ja) |
CN (1) | CN100505315C (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010056169A (ja) * | 2008-08-26 | 2010-03-11 | Toshiba Mobile Display Co Ltd | 薄膜トランジスタ及びこれを用いた表示装置 |
JP2014116582A (ja) * | 2012-10-23 | 2014-06-26 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
Families Citing this family (6)
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KR101640192B1 (ko) * | 2014-08-05 | 2016-07-18 | 삼성디스플레이 주식회사 | 디스플레이 장치 |
CN105261654B (zh) * | 2015-11-05 | 2018-12-28 | 京东方科技集团股份有限公司 | 低温多晶硅薄膜晶体管及制作方法、阵列基板、显示面板 |
CN109509793B (zh) * | 2017-09-15 | 2020-12-01 | 京东方科技集团股份有限公司 | 薄膜晶体管、其制造方法及电子装置 |
CN109950320A (zh) * | 2019-03-18 | 2019-06-28 | 武汉华星光电半导体显示技术有限公司 | 阵列基板和阵列基板的制造方法 |
CN110289309B (zh) * | 2019-06-10 | 2021-04-27 | Tcl华星光电技术有限公司 | 薄膜晶体管及电路 |
US11189704B2 (en) | 2019-06-10 | 2021-11-30 | Tcl China Star Optofi Fctronics Technology Co.. Ltd. | Thin film transistor and electrical circuit |
Citations (7)
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---|---|---|---|---|
JPS61210672A (ja) * | 1985-03-14 | 1986-09-18 | Hitachi Ltd | 半導体装置 |
JPS6419751A (en) * | 1987-04-07 | 1989-01-23 | Nec Corp | Semiconductor integrated circuit device |
JPH07326764A (ja) * | 1994-06-02 | 1995-12-12 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタおよび液晶表示装置 |
JPH08116063A (ja) * | 1994-10-14 | 1996-05-07 | Sharp Corp | 薄膜トランジスター及び液晶表示装置 |
JP2000277741A (ja) * | 1999-03-24 | 2000-10-06 | Toshiba Corp | 薄膜トランジスタ、その製造方法および液晶表示素子 |
JP2003124473A (ja) * | 2001-10-19 | 2003-04-25 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタ及び液晶表示装置及び有機el表示装置 |
JP2005317851A (ja) * | 2004-04-30 | 2005-11-10 | Toshiba Matsushita Display Technology Co Ltd | 薄膜トランジスタおよびその製造方法 |
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US7195960B2 (en) * | 1996-06-28 | 2007-03-27 | Seiko Epson Corporation | Thin film transistor, manufacturing method thereof, and circuit and liquid crystal display device using the thin film transistor |
-
2006
- 2006-07-12 JP JP2006191176A patent/JP2008021760A/ja active Pending
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2007
- 2007-06-12 US US11/761,930 patent/US7755142B2/en active Active
- 2007-06-22 CN CNB2007101125875A patent/CN100505315C/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61210672A (ja) * | 1985-03-14 | 1986-09-18 | Hitachi Ltd | 半導体装置 |
JPS6419751A (en) * | 1987-04-07 | 1989-01-23 | Nec Corp | Semiconductor integrated circuit device |
JPH07326764A (ja) * | 1994-06-02 | 1995-12-12 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタおよび液晶表示装置 |
JPH08116063A (ja) * | 1994-10-14 | 1996-05-07 | Sharp Corp | 薄膜トランジスター及び液晶表示装置 |
JP2000277741A (ja) * | 1999-03-24 | 2000-10-06 | Toshiba Corp | 薄膜トランジスタ、その製造方法および液晶表示素子 |
JP2003124473A (ja) * | 2001-10-19 | 2003-04-25 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタ及び液晶表示装置及び有機el表示装置 |
JP2005317851A (ja) * | 2004-04-30 | 2005-11-10 | Toshiba Matsushita Display Technology Co Ltd | 薄膜トランジスタおよびその製造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010056169A (ja) * | 2008-08-26 | 2010-03-11 | Toshiba Mobile Display Co Ltd | 薄膜トランジスタ及びこれを用いた表示装置 |
US8085355B2 (en) | 2008-08-26 | 2011-12-27 | Toshiba Mobile Display Co., Ltd. | Structure of thin film transistors and liquid crystal display device having the same |
JP2014116582A (ja) * | 2012-10-23 | 2014-06-26 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
Also Published As
Publication number | Publication date |
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US20080012023A1 (en) | 2008-01-17 |
CN100505315C (zh) | 2009-06-24 |
US7755142B2 (en) | 2010-07-13 |
CN101106162A (zh) | 2008-01-16 |
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