JPS6419751A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS6419751A JPS6419751A JP8641188A JP8641188A JPS6419751A JP S6419751 A JPS6419751 A JP S6419751A JP 8641188 A JP8641188 A JP 8641188A JP 8641188 A JP8641188 A JP 8641188A JP S6419751 A JPS6419751 A JP S6419751A
- Authority
- JP
- Japan
- Prior art keywords
- contact holes
- cut down
- same
- constitution
- speed operation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To reduce the design margin of contact holes and other patterns for high integration and high speed operation of an integrated device by making the contact holes take the same shape. CONSTITUTION:When the contact holes 101 of a source region 105, a drain region 106 and a gate of a MIS transistor of conventional design in 1.5mumX5.5mum is desiged in 1.5mumX1.5mum, the extention of the contact holes is cut down to around 10% of the designed dimension. Consequently, when the same contact hole dimension is set up at the same margin, the design space of MIS type transistor can be cut down to attain the high integration and high speed operation. In such a constitution, even in case of the MIS transistor in wider channel width, only one shape of contact hole can suffice to cut down the man-hours thereof to 1/4 in case the contact holes are digitalized using CAD.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8641188A JPS6419751A (en) | 1987-04-07 | 1988-04-07 | Semiconductor integrated circuit device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8596987 | 1987-04-07 | ||
JP8641188A JPS6419751A (en) | 1987-04-07 | 1988-04-07 | Semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6419751A true JPS6419751A (en) | 1989-01-23 |
Family
ID=26426979
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8641188A Pending JPS6419751A (en) | 1987-04-07 | 1988-04-07 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6419751A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008021760A (en) * | 2006-07-12 | 2008-01-31 | Hitachi Displays Ltd | Thin film transistor and image display device |
-
1988
- 1988-04-07 JP JP8641188A patent/JPS6419751A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008021760A (en) * | 2006-07-12 | 2008-01-31 | Hitachi Displays Ltd | Thin film transistor and image display device |
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