JP2007538376A - イオン源のための置き換え可能な陽極ライナー - Google Patents

イオン源のための置き換え可能な陽極ライナー Download PDF

Info

Publication number
JP2007538376A
JP2007538376A JP2007527397A JP2007527397A JP2007538376A JP 2007538376 A JP2007538376 A JP 2007538376A JP 2007527397 A JP2007527397 A JP 2007527397A JP 2007527397 A JP2007527397 A JP 2007527397A JP 2007538376 A JP2007538376 A JP 2007538376A
Authority
JP
Japan
Prior art keywords
anode
liner
ion source
electron
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007527397A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007538376A5 (enExample
Inventor
イー エレフソン ロバート
シー フリーズ ルイス
Original Assignee
インフィコン インコーポレイティッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by インフィコン インコーポレイティッド filed Critical インフィコン インコーポレイティッド
Publication of JP2007538376A publication Critical patent/JP2007538376A/ja
Publication of JP2007538376A5 publication Critical patent/JP2007538376A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/36—Solid anodes; Solid auxiliary anodes for maintaining a discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2007527397A 2004-05-20 2005-05-18 イオン源のための置き換え可能な陽極ライナー Pending JP2007538376A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/849,765 US7041984B2 (en) 2004-05-20 2004-05-20 Replaceable anode liner for ion source
PCT/US2005/017340 WO2005114701A2 (en) 2004-05-20 2005-05-18 Replaceable anode liner for ion source

Publications (2)

Publication Number Publication Date
JP2007538376A true JP2007538376A (ja) 2007-12-27
JP2007538376A5 JP2007538376A5 (enExample) 2008-07-10

Family

ID=35150670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007527397A Pending JP2007538376A (ja) 2004-05-20 2005-05-18 イオン源のための置き換え可能な陽極ライナー

Country Status (5)

Country Link
US (1) US7041984B2 (enExample)
JP (1) JP2007538376A (enExample)
DE (1) DE112005001120T5 (enExample)
GB (1) GB2434027B (enExample)
WO (1) WO2005114701A2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007157529A (ja) * 2005-12-06 2007-06-21 Ulvac Japan Ltd 四極子形質量分析計用イオン源
JP2014086137A (ja) * 2012-10-19 2014-05-12 Ran Technical Service Kk コールドカソード型イオン源

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090014644A1 (en) * 2007-07-13 2009-01-15 Inficon, Inc. In-situ ion source cleaning for partial pressure analyzers used in process monitoring
US7709790B2 (en) * 2008-04-01 2010-05-04 Thermo Finnigan Llc Removable ion source that does not require venting of the vacuum chamber
US8117987B2 (en) * 2009-09-18 2012-02-21 Applied Materials, Inc. Hot wire chemical vapor deposition (CVD) inline coating tool
JP5856964B2 (ja) * 2009-10-08 2016-02-10 パーキンエルマー・ヘルス・サイエンシーズ・インコーポレイテッドＰｅｒｋｉｎｅｌｍｅｒ Ｈｅａｌｔｈ Ｓｃｉｅｎｃｅｓ， Ｉｎｃ． 結合装置
KR101366781B1 (ko) 2012-11-12 2014-02-21 한국표준과학연구원 이온원 및 이를 구비하는 질량분석장치
TWI654695B (zh) 2012-12-06 2019-03-21 英福康公司 真空工具及測量該真空工具的客真空室中的氛圍的方法
TWI539154B (zh) 2012-12-19 2016-06-21 英福康公司 雙重偵測殘餘氣體分析器
GB201810823D0 (en) 2018-06-01 2018-08-15 Micromass Ltd An inner source assembly and associated components
US20250360603A1 (en) * 2024-05-21 2025-11-27 Thermo Finnigan Llc Module installation tools and associated methods

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54139000A (en) * 1978-04-05 1979-10-27 Atomic Energy Authority Uk Improvement of ion source
JPH0855602A (ja) * 1994-08-16 1996-02-27 Jeol Ltd 質量分析装置用イオン源チャンバ
JPH08236065A (ja) * 1994-12-16 1996-09-13 Varian Assoc Inc 質量スペクトロメータリーク検出器のイオンソースの汚染を削減するための手段
JPH09219169A (ja) * 1996-02-09 1997-08-19 Nissin Electric Co Ltd イオン源
JPH1131473A (ja) * 1997-03-21 1999-02-02 Leybold Inficon Inc 質量分光計において分圧の測定を訂正する方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2610165C2 (de) * 1976-03-11 1983-11-10 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt Duoplasmatron-Ionenquelle zur Erzeugung mehrfach geladener Ionen
GB9722649D0 (en) * 1997-10-24 1997-12-24 Univ Nanyang Cathode ARC source for metallic and dielectric coatings
US6064156A (en) * 1998-09-14 2000-05-16 The United States Of America As Represented By The Administrator Of Nasa Process for ignition of gaseous electrical discharge between electrodes of a hollow cathode assembly
EP1049133A3 (en) * 1999-04-30 2001-05-16 Applied Materials, Inc. Enhancing adhesion of deposits on exposed surfaces in process chamber
US6765216B2 (en) * 2002-03-04 2004-07-20 Atomic Hydrogen Technologies Ltd. Method and apparatus for producing atomic flows of molecular gases

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54139000A (en) * 1978-04-05 1979-10-27 Atomic Energy Authority Uk Improvement of ion source
JPH0855602A (ja) * 1994-08-16 1996-02-27 Jeol Ltd 質量分析装置用イオン源チャンバ
JPH08236065A (ja) * 1994-12-16 1996-09-13 Varian Assoc Inc 質量スペクトロメータリーク検出器のイオンソースの汚染を削減するための手段
JPH09219169A (ja) * 1996-02-09 1997-08-19 Nissin Electric Co Ltd イオン源
JPH1131473A (ja) * 1997-03-21 1999-02-02 Leybold Inficon Inc 質量分光計において分圧の測定を訂正する方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007157529A (ja) * 2005-12-06 2007-06-21 Ulvac Japan Ltd 四極子形質量分析計用イオン源
JP2014086137A (ja) * 2012-10-19 2014-05-12 Ran Technical Service Kk コールドカソード型イオン源

Also Published As

Publication number Publication date
WO2005114701A2 (en) 2005-12-01
GB0622336D0 (en) 2006-12-20
WO2005114701A3 (en) 2006-10-19
DE112005001120T5 (de) 2007-04-26
US7041984B2 (en) 2006-05-09
US20050258374A1 (en) 2005-11-24
GB2434027B (en) 2010-09-01
GB2434027A (en) 2007-07-11

Similar Documents

Publication Publication Date Title
US20190371584A1 (en) Bench-top time of flight mass spectrometer
EP0437358B1 (en) Glow discharge spectrometry
US8878148B2 (en) Method and apparatus of pretreatment of an electron gun chamber
US20210210329A1 (en) Bench-top time of flight mass spectrometer
US20170236699A1 (en) Mass spectrometer
JP5805746B2 (ja) 小型環状無線周波数イオントラップ質量分析器
JP2007538376A (ja) イオン源のための置き換え可能な陽極ライナー
US6753521B1 (en) Method and apparatus for a nanoelectrosprayer for use in mass spectrometry
CN106992109B (zh) 改进离子转移管件流量和抽吸系统负载
KR102724713B1 (ko) 가스 분석 장치 및 가스 분석 장치의 제어 방법
US4388531A (en) Ionizer having interchangeable ionization chamber
EP2012341A1 (en) Modular gas ion source
US12027359B2 (en) Bench-top Time of Flight mass spectrometer
US5376792A (en) Scanning electron microscope
WO2019229465A1 (en) Bench-top time of flight mass spectrometer
WO2021200773A1 (ja) プラズマ生成装置
JP4232662B2 (ja) イオン化装置
JPWO2019234919A1 (ja) 探針エレクトロスプレーイオン化ユニット及びイオン分析装置
WO2007102204A1 (ja) 質量分析装置
JP2004134321A (ja) 質量分析装置用イオン源
JP2004139911A (ja) 質量分析装置用イオン源のカラム位置決め方法および治具
JP2002367970A (ja) ドライエッチングのエッチング量制御方法及びドライエッチング装置
TW202242952A (zh) 用於質譜儀的寬範圍電子碰撞離子源
JPH0883592A (ja) イオン注入装置
US20090294652A1 (en) Electron Generation Apparatuses, Mass Spectrometry Instruments, Methods of Generating Electrons, and Mass Spectrometry Methods

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080516

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080516

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080516

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110531

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20111101