JP2007538376A5 - - Google Patents

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Publication number
JP2007538376A5
JP2007538376A5 JP2007527397A JP2007527397A JP2007538376A5 JP 2007538376 A5 JP2007538376 A5 JP 2007538376A5 JP 2007527397 A JP2007527397 A JP 2007527397A JP 2007527397 A JP2007527397 A JP 2007527397A JP 2007538376 A5 JP2007538376 A5 JP 2007538376A5
Authority
JP
Japan
Prior art keywords
liner
anode
ion source
electron
source assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007527397A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007538376A (ja
Filing date
Publication date
Priority claimed from US10/849,765 external-priority patent/US7041984B2/en
Application filed filed Critical
Publication of JP2007538376A publication Critical patent/JP2007538376A/ja
Publication of JP2007538376A5 publication Critical patent/JP2007538376A5/ja
Pending legal-status Critical Current

Links

JP2007527397A 2004-05-20 2005-05-18 イオン源のための置き換え可能な陽極ライナー Pending JP2007538376A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/849,765 US7041984B2 (en) 2004-05-20 2004-05-20 Replaceable anode liner for ion source
PCT/US2005/017340 WO2005114701A2 (en) 2004-05-20 2005-05-18 Replaceable anode liner for ion source

Publications (2)

Publication Number Publication Date
JP2007538376A JP2007538376A (ja) 2007-12-27
JP2007538376A5 true JP2007538376A5 (enExample) 2008-07-10

Family

ID=35150670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007527397A Pending JP2007538376A (ja) 2004-05-20 2005-05-18 イオン源のための置き換え可能な陽極ライナー

Country Status (5)

Country Link
US (1) US7041984B2 (enExample)
JP (1) JP2007538376A (enExample)
DE (1) DE112005001120T5 (enExample)
GB (1) GB2434027B (enExample)
WO (1) WO2005114701A2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007157529A (ja) * 2005-12-06 2007-06-21 Ulvac Japan Ltd 四極子形質量分析計用イオン源
US20090014644A1 (en) * 2007-07-13 2009-01-15 Inficon, Inc. In-situ ion source cleaning for partial pressure analyzers used in process monitoring
US7709790B2 (en) * 2008-04-01 2010-05-04 Thermo Finnigan Llc Removable ion source that does not require venting of the vacuum chamber
US8117987B2 (en) * 2009-09-18 2012-02-21 Applied Materials, Inc. Hot wire chemical vapor deposition (CVD) inline coating tool
AU2010303358B2 (en) 2009-10-08 2016-04-21 Perkinelmer U.S. Llc Coupling devices and methods of using them
JP2014086137A (ja) * 2012-10-19 2014-05-12 Ran Technical Service Kk コールドカソード型イオン源
KR101366781B1 (ko) * 2012-11-12 2014-02-21 한국표준과학연구원 이온원 및 이를 구비하는 질량분석장치
TWI654695B (zh) 2012-12-06 2019-03-21 英福康公司 真空工具及測量該真空工具的客真空室中的氛圍的方法
TWI539154B (zh) 2012-12-19 2016-06-21 英福康公司 雙重偵測殘餘氣體分析器
GB201810823D0 (en) 2018-06-01 2018-08-15 Micromass Ltd An inner source assembly and associated components
US20250360603A1 (en) * 2024-05-21 2025-11-27 Thermo Finnigan Llc Module installation tools and associated methods

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2610165C2 (de) * 1976-03-11 1983-11-10 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt Duoplasmatron-Ionenquelle zur Erzeugung mehrfach geladener Ionen
NL7902620A (nl) * 1978-04-05 1979-10-09 Atomic Energy Authority Uk Ionenbron.
JPH0855602A (ja) * 1994-08-16 1996-02-27 Jeol Ltd 質量分析装置用イオン源チャンバ
US5506412A (en) * 1994-12-16 1996-04-09 Buttrill, Jr.; Sidney E. Means for reducing the contamination of mass spectrometer leak detection ion sources
JPH09219169A (ja) * 1996-02-09 1997-08-19 Nissin Electric Co Ltd イオン源
US5889281A (en) * 1997-03-21 1999-03-30 Leybold Inficon, Inc. Method for linearization of ion currents in a quadrupole mass analyzer
GB9722649D0 (en) * 1997-10-24 1997-12-24 Univ Nanyang Cathode ARC source for metallic and dielectric coatings
US6064156A (en) * 1998-09-14 2000-05-16 The United States Of America As Represented By The Administrator Of Nasa Process for ignition of gaseous electrical discharge between electrodes of a hollow cathode assembly
KR20010014842A (ko) * 1999-04-30 2001-02-26 조셉 제이. 스위니 반도체 장치를 제조하기 위한 장치 및 방법
US6765216B2 (en) * 2002-03-04 2004-07-20 Atomic Hydrogen Technologies Ltd. Method and apparatus for producing atomic flows of molecular gases

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