JP2007528511A5 - - Google Patents

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Publication number
JP2007528511A5
JP2007528511A5 JP2007502433A JP2007502433A JP2007528511A5 JP 2007528511 A5 JP2007528511 A5 JP 2007528511A5 JP 2007502433 A JP2007502433 A JP 2007502433A JP 2007502433 A JP2007502433 A JP 2007502433A JP 2007528511 A5 JP2007528511 A5 JP 2007528511A5
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JP
Japan
Prior art keywords
solvent
film
alkyl
seconds
polymer
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JP2007502433A
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English (en)
Japanese (ja)
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JP4839470B2 (ja
JP2007528511A (ja
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Priority claimed from US10/796,376 external-priority patent/US20050202351A1/en
Priority claimed from US11/044,305 external-priority patent/US7473512B2/en
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Publication of JP2007528511A publication Critical patent/JP2007528511A/ja
Publication of JP2007528511A5 publication Critical patent/JP2007528511A5/ja
Application granted granted Critical
Publication of JP4839470B2 publication Critical patent/JP4839470B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2007502433A 2004-03-09 2005-03-08 トップコートを用いて深紫外線フォトレジストに像を形成する方法およびそのための材料 Expired - Fee Related JP4839470B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US10/796,376 2004-03-09
US10/796,376 US20050202351A1 (en) 2004-03-09 2004-03-09 Process of imaging a deep ultraviolet photoresist with a top coating and materials thereof
US10/875,596 US20050202347A1 (en) 2004-03-09 2004-06-24 Process of imaging a deep ultraviolet photoresist with a top coating and materials thereof
US10/875,596 2004-06-24
US11/044,305 2005-01-27
US11/044,305 US7473512B2 (en) 2004-03-09 2005-01-27 Process of imaging a deep ultraviolet photoresist with a top coating and materials thereof
PCT/IB2005/000627 WO2005088397A2 (en) 2004-03-09 2005-03-08 A process of imaging a deep ultraviolet photoresist with a top coating and materials thereof

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011050965A Division JP5114806B2 (ja) 2004-03-09 2011-03-09 トップコートを用いて深紫外線フォトレジストに像を形成する方法およびそのための材料

Publications (3)

Publication Number Publication Date
JP2007528511A JP2007528511A (ja) 2007-10-11
JP2007528511A5 true JP2007528511A5 (enExample) 2008-03-21
JP4839470B2 JP4839470B2 (ja) 2011-12-21

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ID=34919858

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2007502433A Expired - Fee Related JP4839470B2 (ja) 2004-03-09 2005-03-08 トップコートを用いて深紫外線フォトレジストに像を形成する方法およびそのための材料
JP2011050965A Expired - Fee Related JP5114806B2 (ja) 2004-03-09 2011-03-09 トップコートを用いて深紫外線フォトレジストに像を形成する方法およびそのための材料

Family Applications After (1)

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JP2011050965A Expired - Fee Related JP5114806B2 (ja) 2004-03-09 2011-03-09 トップコートを用いて深紫外線フォトレジストに像を形成する方法およびそのための材料

Country Status (4)

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US (2) US20050202351A1 (enExample)
JP (2) JP4839470B2 (enExample)
CN (1) CN1930524B (enExample)
MY (1) MY145561A (enExample)

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