JP2007504682A5 - - Google Patents
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- Publication number
- JP2007504682A5 JP2007504682A5 JP2006532828A JP2006532828A JP2007504682A5 JP 2007504682 A5 JP2007504682 A5 JP 2007504682A5 JP 2006532828 A JP2006532828 A JP 2006532828A JP 2006532828 A JP2006532828 A JP 2006532828A JP 2007504682 A5 JP2007504682 A5 JP 2007504682A5
- Authority
- JP
- Japan
- Prior art keywords
- doped
- layer
- group iii
- active region
- optoelectronic device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005693 optoelectronics Effects 0.000 claims 25
- 150000004767 nitrides Chemical class 0.000 claims 24
- 239000000463 material Substances 0.000 claims 21
- 230000004888 barrier function Effects 0.000 claims 12
- 239000002019 doping agent Substances 0.000 claims 12
- 238000000034 method Methods 0.000 claims 12
- 229910002704 AlGaN Inorganic materials 0.000 claims 9
- 238000009792 diffusion process Methods 0.000 claims 8
- 239000012535 impurity Substances 0.000 claims 6
- 239000011777 magnesium Substances 0.000 claims 6
- 229910052749 magnesium Inorganic materials 0.000 claims 5
- 238000004377 microelectronic Methods 0.000 claims 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 239000000969 carrier Substances 0.000 claims 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 claims 1
- 239000010980 sapphire Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US46931603P | 2003-05-09 | 2003-05-09 | |
| PCT/US2004/014171 WO2004102153A2 (en) | 2003-05-09 | 2004-05-06 | III-NITRIDE ELECTRONIC DEVICE STRUCTURE WITH HIGH-A1 A1GaN DIFFUSION BARRIER |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007504682A JP2007504682A (ja) | 2007-03-01 |
| JP2007504682A5 true JP2007504682A5 (enExample) | 2007-04-12 |
Family
ID=33452273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006532828A Pending JP2007504682A (ja) | 2003-05-09 | 2004-05-06 | 高Al含量AlGaN拡散バリアを有するIII族窒化物電子素子構造 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7282744B2 (enExample) |
| JP (1) | JP2007504682A (enExample) |
| TW (1) | TWI244223B (enExample) |
| WO (1) | WO2004102153A2 (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007005764A (ja) * | 2005-05-27 | 2007-01-11 | Toyota Motor Corp | 半導体装置とその製造方法 |
| US20060289891A1 (en) * | 2005-06-28 | 2006-12-28 | Hutchins Edward L | Electronic and/or optoelectronic devices grown on free-standing GaN substrates with GaN spacer structures |
| DE102005035722B9 (de) | 2005-07-29 | 2021-11-18 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronischer Halbleiterchip und Verfahren zu dessen Herstellung |
| DE102005048196B4 (de) | 2005-07-29 | 2023-01-26 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Strahlungsemittierender Halbleiterchip |
| JP2007095823A (ja) * | 2005-09-27 | 2007-04-12 | Toyota Central Res & Dev Lab Inc | 半導体装置と半導体装置製造方法 |
| JP2009530798A (ja) | 2006-01-05 | 2009-08-27 | イルミテックス, インコーポレイテッド | Ledから光を導くための独立した光学デバイス |
| JP2007227621A (ja) * | 2006-02-23 | 2007-09-06 | Toyota Central Res & Dev Lab Inc | 絶縁ゲート構造体を有する半導体装置とその製造方法 |
| KR100818269B1 (ko) * | 2006-06-23 | 2008-04-01 | 삼성전자주식회사 | 질화물 반도체 발광소자 |
| KR20090064474A (ko) | 2006-10-02 | 2009-06-18 | 일루미텍스, 인크. | Led 시스템 및 방법 |
| JPWO2008117788A1 (ja) * | 2007-03-26 | 2010-07-15 | 日本碍子株式会社 | 発光素子 |
| EP2240968A1 (en) | 2008-02-08 | 2010-10-20 | Illumitex, Inc. | System and method for emitter layer shaping |
| US7902545B2 (en) * | 2008-05-14 | 2011-03-08 | Baker Hughes Incorporated | Semiconductor for use in harsh environments |
| TW201034256A (en) | 2008-12-11 | 2010-09-16 | Illumitex Inc | Systems and methods for packaging light-emitting diode devices |
| US8449128B2 (en) | 2009-08-20 | 2013-05-28 | Illumitex, Inc. | System and method for a lens and phosphor layer |
| US8585253B2 (en) | 2009-08-20 | 2013-11-19 | Illumitex, Inc. | System and method for color mixing lens array |
| JP2012015154A (ja) * | 2010-06-29 | 2012-01-19 | Ngk Insulators Ltd | 半導体発光素子および半導体発光素子の製造方法 |
| CN103003931B (zh) * | 2010-07-29 | 2016-01-13 | 日本碍子株式会社 | 半导体元件用外延基板、半导体元件、pn接合二极管元件以及半导体元件用外延基板的制造方法 |
| TWI486254B (zh) * | 2010-09-20 | 2015-06-01 | Nitto Denko Corp | 發光陶瓷層板及其製造方法 |
| TWI449224B (zh) * | 2011-02-25 | 2014-08-11 | Univ Nat Chiao Tung | 半導體發光元件 |
| US8354689B2 (en) * | 2011-04-28 | 2013-01-15 | Palo Alto Research Center Incorporated | Light emitting devices having dopant front loaded tunnel barrier layers |
| CN103824908B (zh) * | 2014-03-12 | 2016-09-14 | 合肥彩虹蓝光科技有限公司 | 一种提高GaN基LED静电耐受能力的外延生长方法 |
| CN103824910A (zh) * | 2014-03-12 | 2014-05-28 | 合肥彩虹蓝光科技有限公司 | 一种提高ⅲ-ⅴ族化合物半导体led芯片抗静电能力的外延生长方法 |
| CN103872204B (zh) * | 2014-03-12 | 2017-01-04 | 合肥彩虹蓝光科技有限公司 | 一种具有循环结构的p型插入层及生长方法 |
| CN103887378B (zh) * | 2014-03-28 | 2017-05-24 | 西安神光皓瑞光电科技有限公司 | 一种高光效紫外led的外延生长方法 |
| JP2014199953A (ja) * | 2014-07-28 | 2014-10-23 | 日本碍子株式会社 | 半導体発光素子および半導体発光素子の製造方法 |
| WO2017077806A1 (ja) * | 2015-11-02 | 2017-05-11 | 日本碍子株式会社 | 半導体素子用エピタキシャル基板、半導体素子、および、半導体素子用エピタキシャル基板の製造方法 |
| US11056434B2 (en) * | 2017-01-26 | 2021-07-06 | Epistar Corporation | Semiconductor device having specified p-type dopant concentration profile |
| CN107221585A (zh) * | 2017-05-17 | 2017-09-29 | 聚灿光电科技股份有限公司 | Led外延结构及其制备方法 |
| CN108110109B (zh) * | 2017-12-29 | 2019-12-06 | 安徽三安光电有限公司 | 一种发光二极管 |
| US11552217B2 (en) * | 2018-11-12 | 2023-01-10 | Epistar Corporation | Semiconductor device |
| CN109860360B (zh) * | 2018-11-29 | 2020-08-18 | 华灿光电(浙江)有限公司 | 一种氮化镓基发光二极管外延片及其制备方法 |
| JP7448782B2 (ja) | 2019-12-20 | 2024-03-13 | 日亜化学工業株式会社 | 窒化物半導体素子の製造方法 |
| US12051769B2 (en) | 2021-10-13 | 2024-07-30 | Creeled, Inc. | Integrated warning structures for energized ultraviolet light-emitting diode packages |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4614961A (en) * | 1984-10-09 | 1986-09-30 | Honeywell Inc. | Tunable cut-off UV detector based on the aluminum gallium nitride material system |
| JPH10321042A (ja) * | 1997-05-21 | 1998-12-04 | Tonen Chem Corp | 非プロトン性電解質薄膜およびその製造方法 |
| DE69839300T2 (de) * | 1997-12-15 | 2009-04-16 | Philips Lumileds Lighting Company, LLC, San Jose | Licht-emittierende Vorrichtung |
| US6153894A (en) * | 1998-11-12 | 2000-11-28 | Showa Denko Kabushiki Kaisha | Group-III nitride semiconductor light-emitting device |
| US6218293B1 (en) * | 1998-11-13 | 2001-04-17 | Micron Technology, Inc. | Batch processing for semiconductor wafers to form aluminum nitride and titanium aluminum nitride |
| US6222207B1 (en) * | 1999-05-24 | 2001-04-24 | Lumileds Lighting, U.S. Llc | Diffusion barrier for increased mirror reflectivity in reflective solderable contacts on high power LED chip |
| KR100348269B1 (ko) * | 2000-03-22 | 2002-08-09 | 엘지전자 주식회사 | 루데니움 산화물을 이용한 쇼트키 콘택 방법 |
| US6800876B2 (en) * | 2001-01-16 | 2004-10-05 | Cree, Inc. | Group III nitride LED with undoped cladding layer (5000.137) |
| US6511876B2 (en) * | 2001-06-25 | 2003-01-28 | International Business Machines Corporation | High mobility FETS using A1203 as a gate oxide |
-
2004
- 2004-05-06 WO PCT/US2004/014171 patent/WO2004102153A2/en not_active Ceased
- 2004-05-06 US US10/840,515 patent/US7282744B2/en not_active Expired - Lifetime
- 2004-05-06 JP JP2006532828A patent/JP2007504682A/ja active Pending
- 2004-05-07 TW TW093112874A patent/TWI244223B/zh not_active IP Right Cessation
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