JP2007336685A - 振動体、圧電アクチュエータ、電子機器、および振動体の製造方法 - Google Patents
振動体、圧電アクチュエータ、電子機器、および振動体の製造方法 Download PDFInfo
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- JP2007336685A JP2007336685A JP2006165345A JP2006165345A JP2007336685A JP 2007336685 A JP2007336685 A JP 2007336685A JP 2006165345 A JP2006165345 A JP 2006165345A JP 2006165345 A JP2006165345 A JP 2006165345A JP 2007336685 A JP2007336685 A JP 2007336685A
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006165345A JP2007336685A (ja) | 2006-06-14 | 2006-06-14 | 振動体、圧電アクチュエータ、電子機器、および振動体の製造方法 |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006165345A JP2007336685A (ja) | 2006-06-14 | 2006-06-14 | 振動体、圧電アクチュエータ、電子機器、および振動体の製造方法 |
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| Publication Number | Publication Date |
|---|---|
| JP2007336685A true JP2007336685A (ja) | 2007-12-27 |
| JP2007336685A5 JP2007336685A5 (enExample) | 2009-07-30 |
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| JP2006165345A Withdrawn JP2007336685A (ja) | 2006-06-14 | 2006-06-14 | 振動体、圧電アクチュエータ、電子機器、および振動体の製造方法 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8058773B2 (en) | 2008-04-10 | 2011-11-15 | Sharp Kabushiki Kaisha | Ultrasonic motor and ultrasonic vibrator |
| JP2015507847A (ja) * | 2011-12-30 | 2015-03-12 | マイクロファイン・マテリアルズ・テクノロジーズ・ピーティーイー・リミテッド | コスト効率の良い単結晶マルチステークアクチュエータおよび製造方法 |
| US9091607B2 (en) | 2011-11-08 | 2015-07-28 | Seiko Epson Corporation | Sensor element, force detecting device, and robot |
| JP2017212786A (ja) * | 2016-05-24 | 2017-11-30 | キヤノン株式会社 | 振動波モータ及び振動波モータを用いた光学装置 |
| JP2019083628A (ja) * | 2017-10-30 | 2019-05-30 | セイコーエプソン株式会社 | 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000326503A (ja) * | 1998-06-08 | 2000-11-28 | Seiko Epson Corp | インクジェット式記録ヘッド及びインクジェット式記録装置 |
| JP2001308401A (ja) * | 2000-04-19 | 2001-11-02 | Tokin Ceramics Corp | 圧電セラミック部品 |
| JP2004320980A (ja) * | 2003-04-03 | 2004-11-11 | Seiko Epson Corp | 稼働装置および電気機器 |
| JP2004335571A (ja) * | 2003-05-01 | 2004-11-25 | Seiko Epson Corp | 塗布装置、薄膜の形成方法、薄膜形成装置及び半導体装置の製造方法、並びに電気光学装置、電子機器 |
-
2006
- 2006-06-14 JP JP2006165345A patent/JP2007336685A/ja not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000326503A (ja) * | 1998-06-08 | 2000-11-28 | Seiko Epson Corp | インクジェット式記録ヘッド及びインクジェット式記録装置 |
| JP2001308401A (ja) * | 2000-04-19 | 2001-11-02 | Tokin Ceramics Corp | 圧電セラミック部品 |
| JP2004320980A (ja) * | 2003-04-03 | 2004-11-11 | Seiko Epson Corp | 稼働装置および電気機器 |
| JP2004335571A (ja) * | 2003-05-01 | 2004-11-25 | Seiko Epson Corp | 塗布装置、薄膜の形成方法、薄膜形成装置及び半導体装置の製造方法、並びに電気光学装置、電子機器 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8058773B2 (en) | 2008-04-10 | 2011-11-15 | Sharp Kabushiki Kaisha | Ultrasonic motor and ultrasonic vibrator |
| US9091607B2 (en) | 2011-11-08 | 2015-07-28 | Seiko Epson Corporation | Sensor element, force detecting device, and robot |
| JP2015507847A (ja) * | 2011-12-30 | 2015-03-12 | マイクロファイン・マテリアルズ・テクノロジーズ・ピーティーイー・リミテッド | コスト効率の良い単結晶マルチステークアクチュエータおよび製造方法 |
| US9673374B2 (en) | 2011-12-30 | 2017-06-06 | Microfine Materials Technologies Pty Ltd | Cost-effective single crystal multi-stake actuator and method of manufacture |
| JP2017212786A (ja) * | 2016-05-24 | 2017-11-30 | キヤノン株式会社 | 振動波モータ及び振動波モータを用いた光学装置 |
| JP2019083628A (ja) * | 2017-10-30 | 2019-05-30 | セイコーエプソン株式会社 | 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター |
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