JP2007327960A - 基板検査ユニット、それを有する基板検査装置及びそれを用いた基板検査方法 - Google Patents

基板検査ユニット、それを有する基板検査装置及びそれを用いた基板検査方法 Download PDF

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Publication number
JP2007327960A
JP2007327960A JP2007152836A JP2007152836A JP2007327960A JP 2007327960 A JP2007327960 A JP 2007327960A JP 2007152836 A JP2007152836 A JP 2007152836A JP 2007152836 A JP2007152836 A JP 2007152836A JP 2007327960 A JP2007327960 A JP 2007327960A
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JP
Japan
Prior art keywords
substrate
lower roller
inspection unit
roller
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007152836A
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English (en)
Japanese (ja)
Other versions
JP2007327960A5 (enExample
Inventor
Kyoichi Son
亨 一 孫
Young Il Kim
永 日 金
Sansai Zen
燦 濟 全
Teiiku Ryo
廷 郁 梁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of JP2007327960A publication Critical patent/JP2007327960A/ja
Publication of JP2007327960A5 publication Critical patent/JP2007327960A5/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Signal Processing (AREA)
  • Analytical Chemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Liquid Crystal (AREA)
JP2007152836A 2006-06-08 2007-06-08 基板検査ユニット、それを有する基板検査装置及びそれを用いた基板検査方法 Pending JP2007327960A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060051340A KR20070117287A (ko) 2006-06-08 2006-06-08 기판 검사 유닛, 이를 갖는 기판 검사 장치 및 이를 이용한기판 검사 방법

Publications (2)

Publication Number Publication Date
JP2007327960A true JP2007327960A (ja) 2007-12-20
JP2007327960A5 JP2007327960A5 (enExample) 2010-07-22

Family

ID=38928509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007152836A Pending JP2007327960A (ja) 2006-06-08 2007-06-08 基板検査ユニット、それを有する基板検査装置及びそれを用いた基板検査方法

Country Status (3)

Country Link
JP (1) JP2007327960A (enExample)
KR (1) KR20070117287A (enExample)
TW (1) TW200801490A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109991243A (zh) * 2019-04-04 2019-07-09 杭州载力科技有限公司 一种自动光学检测设备
CN110227655A (zh) * 2019-04-29 2019-09-13 丽水奇异果信息技术有限公司 一种基于图像识别的芯片检测装置
WO2020024477A1 (zh) * 2018-08-01 2020-02-06 惠科股份有限公司 一种测试装置及测试设备

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100863340B1 (ko) * 2008-02-29 2008-10-15 와이즈플래닛(주) 컨베이어 설치용 이물 검사장치
KR101599541B1 (ko) * 2015-11-16 2016-03-03 한국검사엔지니어링(주) 비파괴 검사 보조장치
CN110931405B (zh) * 2019-11-18 2022-04-26 Tcl华星光电技术有限公司 传输构件、传输方法及清洗装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154312A (ja) * 1983-02-23 1984-09-03 Matsushita Electric Ind Co Ltd 熱間連続鋳造スラブの表面疵検出用照明装置
JPH02144312A (ja) * 1988-11-22 1990-06-04 Shibaura Eng Works Co Ltd 搬送ローラ装置
JPH0548300A (ja) * 1990-10-17 1993-02-26 Somar Corp 基板搬送装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02105155U (enExample) * 1989-02-08 1990-08-21
JPH11148902A (ja) * 1997-11-17 1999-06-02 Mitsubishi Chemical Corp 平板状基板の表面欠陥検査装置
CN1212523C (zh) * 1998-07-28 2005-07-27 松下电工株式会社 用于检测柔性材料连续基片上分离布线图形的检测系统

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154312A (ja) * 1983-02-23 1984-09-03 Matsushita Electric Ind Co Ltd 熱間連続鋳造スラブの表面疵検出用照明装置
JPH02144312A (ja) * 1988-11-22 1990-06-04 Shibaura Eng Works Co Ltd 搬送ローラ装置
JPH0548300A (ja) * 1990-10-17 1993-02-26 Somar Corp 基板搬送装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020024477A1 (zh) * 2018-08-01 2020-02-06 惠科股份有限公司 一种测试装置及测试设备
CN109991243A (zh) * 2019-04-04 2019-07-09 杭州载力科技有限公司 一种自动光学检测设备
CN110227655A (zh) * 2019-04-29 2019-09-13 丽水奇异果信息技术有限公司 一种基于图像识别的芯片检测装置

Also Published As

Publication number Publication date
KR20070117287A (ko) 2007-12-12
TW200801490A (en) 2008-01-01

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