KR20070117287A - 기판 검사 유닛, 이를 갖는 기판 검사 장치 및 이를 이용한기판 검사 방법 - Google Patents

기판 검사 유닛, 이를 갖는 기판 검사 장치 및 이를 이용한기판 검사 방법 Download PDF

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Publication number
KR20070117287A
KR20070117287A KR1020060051340A KR20060051340A KR20070117287A KR 20070117287 A KR20070117287 A KR 20070117287A KR 1020060051340 A KR1020060051340 A KR 1020060051340A KR 20060051340 A KR20060051340 A KR 20060051340A KR 20070117287 A KR20070117287 A KR 20070117287A
Authority
KR
South Korea
Prior art keywords
substrate
inspection unit
rollers
unit
lower rollers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020060051340A
Other languages
English (en)
Korean (ko)
Inventor
손형일
김영일
전찬제
양정욱
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR1020060051340A priority Critical patent/KR20070117287A/ko
Priority to TW095148224A priority patent/TW200801490A/zh
Priority to JP2007152836A priority patent/JP2007327960A/ja
Publication of KR20070117287A publication Critical patent/KR20070117287A/ko
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Signal Processing (AREA)
  • Analytical Chemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Liquid Crystal (AREA)
KR1020060051340A 2006-06-08 2006-06-08 기판 검사 유닛, 이를 갖는 기판 검사 장치 및 이를 이용한기판 검사 방법 Ceased KR20070117287A (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020060051340A KR20070117287A (ko) 2006-06-08 2006-06-08 기판 검사 유닛, 이를 갖는 기판 검사 장치 및 이를 이용한기판 검사 방법
TW095148224A TW200801490A (en) 2006-06-08 2006-12-21 Apparatus for inspecting a substrate, inspection system having the same, and method for inspecting a substrate
JP2007152836A JP2007327960A (ja) 2006-06-08 2007-06-08 基板検査ユニット、それを有する基板検査装置及びそれを用いた基板検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060051340A KR20070117287A (ko) 2006-06-08 2006-06-08 기판 검사 유닛, 이를 갖는 기판 검사 장치 및 이를 이용한기판 검사 방법

Publications (1)

Publication Number Publication Date
KR20070117287A true KR20070117287A (ko) 2007-12-12

Family

ID=38928509

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060051340A Ceased KR20070117287A (ko) 2006-06-08 2006-06-08 기판 검사 유닛, 이를 갖는 기판 검사 장치 및 이를 이용한기판 검사 방법

Country Status (3)

Country Link
JP (1) JP2007327960A (enExample)
KR (1) KR20070117287A (enExample)
TW (1) TW200801490A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100863340B1 (ko) * 2008-02-29 2008-10-15 와이즈플래닛(주) 컨베이어 설치용 이물 검사장치
KR101599541B1 (ko) * 2015-11-16 2016-03-03 한국검사엔지니어링(주) 비파괴 검사 보조장치
CN110931405A (zh) * 2019-11-18 2020-03-27 Tcl华星光电技术有限公司 传输构件、传输方法及清洗装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108983454A (zh) * 2018-08-01 2018-12-11 惠科股份有限公司 一种测试装置及测试设备
CN109991243A (zh) * 2019-04-04 2019-07-09 杭州载力科技有限公司 一种自动光学检测设备
CN110227655A (zh) * 2019-04-29 2019-09-13 丽水奇异果信息技术有限公司 一种基于图像识别的芯片检测装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02105155U (enExample) * 1989-02-08 1990-08-21
JPH11148902A (ja) * 1997-11-17 1999-06-02 Mitsubishi Chemical Corp 平板状基板の表面欠陥検査装置
KR100367222B1 (ko) * 1998-07-28 2003-01-09 마츠시다 덴코 가부시키가이샤 가요성 소재의 연속 기판시트 상에 형성된 개별배선패턴을 검사하는 검사시스템

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154312A (ja) * 1983-02-23 1984-09-03 Matsushita Electric Ind Co Ltd 熱間連続鋳造スラブの表面疵検出用照明装置
JP2679828B2 (ja) * 1988-11-22 1997-11-19 株式会社芝浦製作所 搬送ローラ装置
JPH0831710B2 (ja) * 1990-10-17 1996-03-27 ソマール株式会社 基板搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02105155U (enExample) * 1989-02-08 1990-08-21
JPH11148902A (ja) * 1997-11-17 1999-06-02 Mitsubishi Chemical Corp 平板状基板の表面欠陥検査装置
KR100367222B1 (ko) * 1998-07-28 2003-01-09 마츠시다 덴코 가부시키가이샤 가요성 소재의 연속 기판시트 상에 형성된 개별배선패턴을 검사하는 검사시스템

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100863340B1 (ko) * 2008-02-29 2008-10-15 와이즈플래닛(주) 컨베이어 설치용 이물 검사장치
KR101599541B1 (ko) * 2015-11-16 2016-03-03 한국검사엔지니어링(주) 비파괴 검사 보조장치
CN110931405A (zh) * 2019-11-18 2020-03-27 Tcl华星光电技术有限公司 传输构件、传输方法及清洗装置

Also Published As

Publication number Publication date
JP2007327960A (ja) 2007-12-20
TW200801490A (en) 2008-01-01

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