TW200801490A - Apparatus for inspecting a substrate, inspection system having the same, and method for inspecting a substrate - Google Patents

Apparatus for inspecting a substrate, inspection system having the same, and method for inspecting a substrate

Info

Publication number
TW200801490A
TW200801490A TW095148224A TW95148224A TW200801490A TW 200801490 A TW200801490 A TW 200801490A TW 095148224 A TW095148224 A TW 095148224A TW 95148224 A TW95148224 A TW 95148224A TW 200801490 A TW200801490 A TW 200801490A
Authority
TW
Taiwan
Prior art keywords
substrate
inspecting
lower roller
same
inspection system
Prior art date
Application number
TW095148224A
Other languages
English (en)
Chinese (zh)
Inventor
Hyoung-Il Son
Young-Il Kim
Chan-Je Jeon
Chung-Uk Yang
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of TW200801490A publication Critical patent/TW200801490A/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Signal Processing (AREA)
  • Analytical Chemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Liquid Crystal (AREA)
TW095148224A 2006-06-08 2006-12-21 Apparatus for inspecting a substrate, inspection system having the same, and method for inspecting a substrate TW200801490A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060051340A KR20070117287A (ko) 2006-06-08 2006-06-08 기판 검사 유닛, 이를 갖는 기판 검사 장치 및 이를 이용한기판 검사 방법

Publications (1)

Publication Number Publication Date
TW200801490A true TW200801490A (en) 2008-01-01

Family

ID=38928509

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095148224A TW200801490A (en) 2006-06-08 2006-12-21 Apparatus for inspecting a substrate, inspection system having the same, and method for inspecting a substrate

Country Status (3)

Country Link
JP (1) JP2007327960A (enExample)
KR (1) KR20070117287A (enExample)
TW (1) TW200801490A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100863340B1 (ko) * 2008-02-29 2008-10-15 와이즈플래닛(주) 컨베이어 설치용 이물 검사장치
KR101599541B1 (ko) * 2015-11-16 2016-03-03 한국검사엔지니어링(주) 비파괴 검사 보조장치
CN108983454A (zh) * 2018-08-01 2018-12-11 惠科股份有限公司 一种测试装置及测试设备
CN109991243A (zh) * 2019-04-04 2019-07-09 杭州载力科技有限公司 一种自动光学检测设备
CN110227655A (zh) * 2019-04-29 2019-09-13 丽水奇异果信息技术有限公司 一种基于图像识别的芯片检测装置
CN110931405B (zh) * 2019-11-18 2022-04-26 Tcl华星光电技术有限公司 传输构件、传输方法及清洗装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154312A (ja) * 1983-02-23 1984-09-03 Matsushita Electric Ind Co Ltd 熱間連続鋳造スラブの表面疵検出用照明装置
JP2679828B2 (ja) * 1988-11-22 1997-11-19 株式会社芝浦製作所 搬送ローラ装置
JPH02105155U (enExample) * 1989-02-08 1990-08-21
JPH0831710B2 (ja) * 1990-10-17 1996-03-27 ソマール株式会社 基板搬送装置
JPH11148902A (ja) * 1997-11-17 1999-06-02 Mitsubishi Chemical Corp 平板状基板の表面欠陥検査装置
WO2000007031A1 (en) * 1998-07-28 2000-02-10 Matsushita Electric Works, Ltd. Inspection system for inspecting discrete wiring patterns formed on a continuous substrate sheet of a flexible material

Also Published As

Publication number Publication date
KR20070117287A (ko) 2007-12-12
JP2007327960A (ja) 2007-12-20

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