JP2007327960A5 - - Google Patents

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Publication number
JP2007327960A5
JP2007327960A5 JP2007152836A JP2007152836A JP2007327960A5 JP 2007327960 A5 JP2007327960 A5 JP 2007327960A5 JP 2007152836 A JP2007152836 A JP 2007152836A JP 2007152836 A JP2007152836 A JP 2007152836A JP 2007327960 A5 JP2007327960 A5 JP 2007327960A5
Authority
JP
Japan
Prior art keywords
substrate
inspection unit
lower roller
unit according
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007152836A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007327960A (ja
Filing date
Publication date
Priority claimed from KR1020060051340A external-priority patent/KR20070117287A/ko
Application filed filed Critical
Publication of JP2007327960A publication Critical patent/JP2007327960A/ja
Publication of JP2007327960A5 publication Critical patent/JP2007327960A5/ja
Pending legal-status Critical Current

Links

JP2007152836A 2006-06-08 2007-06-08 基板検査ユニット、それを有する基板検査装置及びそれを用いた基板検査方法 Pending JP2007327960A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060051340A KR20070117287A (ko) 2006-06-08 2006-06-08 기판 검사 유닛, 이를 갖는 기판 검사 장치 및 이를 이용한기판 검사 방법

Publications (2)

Publication Number Publication Date
JP2007327960A JP2007327960A (ja) 2007-12-20
JP2007327960A5 true JP2007327960A5 (enExample) 2010-07-22

Family

ID=38928509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007152836A Pending JP2007327960A (ja) 2006-06-08 2007-06-08 基板検査ユニット、それを有する基板検査装置及びそれを用いた基板検査方法

Country Status (3)

Country Link
JP (1) JP2007327960A (enExample)
KR (1) KR20070117287A (enExample)
TW (1) TW200801490A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100863340B1 (ko) * 2008-02-29 2008-10-15 와이즈플래닛(주) 컨베이어 설치용 이물 검사장치
KR101599541B1 (ko) * 2015-11-16 2016-03-03 한국검사엔지니어링(주) 비파괴 검사 보조장치
CN108983454A (zh) * 2018-08-01 2018-12-11 惠科股份有限公司 一种测试装置及测试设备
CN109991243A (zh) * 2019-04-04 2019-07-09 杭州载力科技有限公司 一种自动光学检测设备
CN110227655A (zh) * 2019-04-29 2019-09-13 丽水奇异果信息技术有限公司 一种基于图像识别的芯片检测装置
CN110931405B (zh) * 2019-11-18 2022-04-26 Tcl华星光电技术有限公司 传输构件、传输方法及清洗装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154312A (ja) * 1983-02-23 1984-09-03 Matsushita Electric Ind Co Ltd 熱間連続鋳造スラブの表面疵検出用照明装置
JP2679828B2 (ja) * 1988-11-22 1997-11-19 株式会社芝浦製作所 搬送ローラ装置
JPH02105155U (enExample) * 1989-02-08 1990-08-21
JPH0831710B2 (ja) * 1990-10-17 1996-03-27 ソマール株式会社 基板搬送装置
JPH11148902A (ja) * 1997-11-17 1999-06-02 Mitsubishi Chemical Corp 平板状基板の表面欠陥検査装置
KR100367222B1 (ko) * 1998-07-28 2003-01-09 마츠시다 덴코 가부시키가이샤 가요성 소재의 연속 기판시트 상에 형성된 개별배선패턴을 검사하는 검사시스템

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