JP2009026859A5 - - Google Patents

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Publication number
JP2009026859A5
JP2009026859A5 JP2007186867A JP2007186867A JP2009026859A5 JP 2009026859 A5 JP2009026859 A5 JP 2009026859A5 JP 2007186867 A JP2007186867 A JP 2007186867A JP 2007186867 A JP2007186867 A JP 2007186867A JP 2009026859 A5 JP2009026859 A5 JP 2009026859A5
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JP
Japan
Prior art keywords
substrate
board
inspection apparatus
arm
pressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007186867A
Other languages
English (en)
Japanese (ja)
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JP2009026859A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007186867A priority Critical patent/JP2009026859A/ja
Priority claimed from JP2007186867A external-priority patent/JP2009026859A/ja
Publication of JP2009026859A publication Critical patent/JP2009026859A/ja
Publication of JP2009026859A5 publication Critical patent/JP2009026859A5/ja
Pending legal-status Critical Current

Links

JP2007186867A 2007-07-18 2007-07-18 基板検査装置 Pending JP2009026859A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007186867A JP2009026859A (ja) 2007-07-18 2007-07-18 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007186867A JP2009026859A (ja) 2007-07-18 2007-07-18 基板検査装置

Publications (2)

Publication Number Publication Date
JP2009026859A JP2009026859A (ja) 2009-02-05
JP2009026859A5 true JP2009026859A5 (enExample) 2010-09-02

Family

ID=40398417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007186867A Pending JP2009026859A (ja) 2007-07-18 2007-07-18 基板検査装置

Country Status (1)

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JP (1) JP2009026859A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013016605A (ja) * 2011-07-04 2013-01-24 Tatsumo Kk 基板搬送装置、基板搬送方法および塗布装置
JP5549655B2 (ja) * 2011-09-26 2014-07-16 株式会社安川電機 ハンドおよびロボット
WO2013150607A1 (ja) * 2012-04-03 2013-10-10 株式会社島津製作所 基板搭載位置矯正装置及び基板搭載位置矯正方法
KR101936815B1 (ko) * 2012-04-06 2019-04-04 엘지디스플레이 주식회사 평판표시장치용 세정장치
US9919430B1 (en) * 2016-12-06 2018-03-20 Jabil Inc. Apparatus, system and method for providing an end effector

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3414491B2 (ja) * 1994-05-12 2003-06-09 オリンパス光学工業株式会社 基板保持部材及びこれを用いた基板外観検査装置
JP3831043B2 (ja) * 1997-01-24 2006-10-11 東京エレクトロン株式会社 回転処理装置
JP2004115872A (ja) * 2002-09-26 2004-04-15 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
JP2003142554A (ja) * 2002-10-16 2003-05-16 Dainippon Screen Mfg Co Ltd 基板保持装置および基板搬送装置

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