JP2007322428A5 - - Google Patents
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- Publication number
- JP2007322428A5 JP2007322428A5 JP2007141890A JP2007141890A JP2007322428A5 JP 2007322428 A5 JP2007322428 A5 JP 2007322428A5 JP 2007141890 A JP2007141890 A JP 2007141890A JP 2007141890 A JP2007141890 A JP 2007141890A JP 2007322428 A5 JP2007322428 A5 JP 2007322428A5
- Authority
- JP
- Japan
- Prior art keywords
- frame
- prober
- assembly
- contact head
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 8
- 230000000712 assembly Effects 0.000 claims 3
- 238000000429 assembly Methods 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000009423 ventilation Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US80359506P | 2006-05-31 | 2006-05-31 | |
| US82190406P | 2006-08-09 | 2006-08-09 | |
| US11/746,530 US7786742B2 (en) | 2006-05-31 | 2007-05-09 | Prober for electronic device testing on large area substrates |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014222921A Division JP2015057605A (ja) | 2006-05-31 | 2014-10-31 | 大面積基板上での電子デバイス検査のためのプローバ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007322428A JP2007322428A (ja) | 2007-12-13 |
| JP2007322428A5 true JP2007322428A5 (enExample) | 2013-10-24 |
Family
ID=39142022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007141890A Pending JP2007322428A (ja) | 2006-05-31 | 2007-05-29 | 大面積基板上での電子デバイス検査のためのプローバ |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2007322428A (enExample) |
| KR (2) | KR101088566B1 (enExample) |
| CN (1) | CN101082637B (enExample) |
| TW (1) | TWI339730B (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8907277B2 (en) | 2008-03-07 | 2014-12-09 | Carl Zeiss Microscopy, Llc | Reducing particle implantation |
| EP2180327A1 (en) * | 2008-10-21 | 2010-04-28 | Applied Materials, Inc. | Apparatus and method for active voltage compensation |
| CN101943744A (zh) * | 2009-07-06 | 2011-01-12 | 应用材料股份有限公司 | 干型高电位测试器以及太阳模拟工具 |
| KR101162912B1 (ko) * | 2009-10-27 | 2012-07-06 | 주식회사 탑 엔지니어링 | 어레이기판 검사장치 및 어레이기판 검사방법 |
| TWI503548B (zh) * | 2010-01-08 | 2015-10-11 | Photon Dynamics Inc | 探針系統 |
| KR101129195B1 (ko) * | 2010-12-20 | 2012-03-27 | 주식회사 탑 엔지니어링 | 어레이 테스트 장치 |
| KR101234088B1 (ko) * | 2010-12-30 | 2013-02-19 | 주식회사 탑 엔지니어링 | 어레이 테스트 장치 |
| KR101191343B1 (ko) * | 2010-12-30 | 2012-10-16 | 주식회사 탑 엔지니어링 | 어레이 테스트 장치 |
| CN102621731B (zh) * | 2012-04-17 | 2014-11-19 | 深圳市华星光电技术有限公司 | 液晶基板的电压施加装置 |
| WO2015010714A1 (en) * | 2013-07-22 | 2015-01-29 | Applied Materials, Inc. | Apparatus and method for processing a large area substrate |
| US9472410B2 (en) * | 2014-03-05 | 2016-10-18 | Applied Materials, Inc. | Pixelated capacitance controlled ESC |
| JP2017003484A (ja) | 2015-06-12 | 2017-01-05 | 株式会社ジャパンディスプレイ | 表示装置の検査装置、表示装置用マザー基板の検査方法、及び、表示装置 |
| JP2017096949A (ja) * | 2015-11-24 | 2017-06-01 | フォトン・ダイナミクス・インコーポレーテッド | セル接触プロービングパッドを使用して平面パネル型表示装置を電気的に検査するためのシステムおよび方法 |
| KR102612272B1 (ko) * | 2016-12-15 | 2023-12-11 | 세메스 주식회사 | 프로브 모듈 및 이를 포함하는 어레이 테스트 장치 |
| TWI718610B (zh) * | 2018-08-09 | 2021-02-11 | 日商歐姆龍股份有限公司 | 探針單元 |
| CN108982931A (zh) * | 2018-09-21 | 2018-12-11 | 京东方科技集团股份有限公司 | 探针单元、探针治具 |
| CN112285446B (zh) * | 2019-07-12 | 2024-05-31 | 瑞昱半导体股份有限公司 | 执行多种测试的测试系统、传送装置与接收装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3592831B2 (ja) * | 1996-02-26 | 2004-11-24 | 株式会社日本マイクロニクス | プローブユニット及びその調節方法 |
| JPH11174108A (ja) * | 1997-12-12 | 1999-07-02 | Dainippon Printing Co Ltd | 電極配線の検査装置 |
| US6744268B2 (en) * | 1998-08-27 | 2004-06-01 | The Micromanipulator Company, Inc. | High resolution analytical probe station |
| US7355418B2 (en) * | 2004-02-12 | 2008-04-08 | Applied Materials, Inc. | Configurable prober for TFT LCD array test |
| JP4790997B2 (ja) * | 2004-03-26 | 2011-10-12 | 株式会社日本マイクロニクス | プローブ装置 |
| JP2006085235A (ja) | 2004-09-14 | 2006-03-30 | Agilent Technol Inc | 移動型操作装置および移動型操作装置を制御するための方法 |
-
2007
- 2007-05-16 TW TW096117479A patent/TWI339730B/zh active
- 2007-05-23 KR KR1020070050207A patent/KR101088566B1/ko active Active
- 2007-05-28 CN CN2007101052709A patent/CN101082637B/zh active Active
- 2007-05-29 JP JP2007141890A patent/JP2007322428A/ja active Pending
-
2009
- 2009-10-23 KR KR1020090101382A patent/KR20090120444A/ko not_active Ceased
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