JP2007281038A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2007281038A JP2007281038A JP2006102547A JP2006102547A JP2007281038A JP 2007281038 A JP2007281038 A JP 2007281038A JP 2006102547 A JP2006102547 A JP 2006102547A JP 2006102547 A JP2006102547 A JP 2006102547A JP 2007281038 A JP2007281038 A JP 2007281038A
- Authority
- JP
- Japan
- Prior art keywords
- source
- drain
- region
- semiconductor device
- gate electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 84
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims abstract description 13
- 239000012535 impurity Substances 0.000 claims description 20
- 230000000694 effects Effects 0.000 abstract description 20
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000009413 insulation Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 39
- 125000006850 spacer group Chemical group 0.000 description 20
- 238000000034 method Methods 0.000 description 15
- 229910021332 silicide Inorganic materials 0.000 description 15
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 15
- 239000013078 crystal Substances 0.000 description 13
- 238000005530 etching Methods 0.000 description 13
- 238000005036 potential barrier Methods 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000001020 plasma etching Methods 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 239000011229 interlayer Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/161—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System including two or more of the elements provided for in group H01L29/16, e.g. alloys
- H01L29/165—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System including two or more of the elements provided for in group H01L29/16, e.g. alloys in different semiconductor regions, e.g. heterojunctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26586—Bombardment with radiation with high-energy radiation producing ion implantation characterised by the angle between the ion beam and the crystal planes or the main crystal surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/6656—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using multiple spacer layers, e.g. multiple sidewall spacers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66613—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation
- H01L29/66628—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation recessing the gate by forming single crystalline semiconductor material at the source or drain location
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66636—Lateral single gate silicon transistors with source or drain recessed by etching or first recessed by etching and then refilled
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
- H01L29/7834—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with a non-planar structure, e.g. the gate or the source or the drain being non-planar
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7848—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being located in the source/drain region, e.g. SiGe source and drain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/105—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with vertical doping variation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Thin Film Transistor (AREA)
Abstract
【解決手段】半導体基板と、前記半導体基板上にゲート絶縁膜を介して形成されたゲート電極と、前記ゲート電極と離間して形成されたソース・ドレイン領域と、前記ゲート電極と前記ソース・ドレイン領域との間に、前記ソース・ドレイン領域よりも浅く形成されたソース・ドレイン・エクステンション領域と、を備え、前記ソース・ドレイン領域および前記ソース・ドレイン・エクステンション領域は、SiGe膜またはSiC膜が埋め込まれた構造を有することを特徴とする半導体装置。
【選択図】図1
Description
(半導体装置の構成)
図1(a)、(b)は、本発明の第1の実施の形態に係る半導体装置の断面図、およびそのゲート近傍の部分拡大図である。
図2A(a)〜(d)、図2B(e)〜(h)、および図2C(i)〜(j)は、本発明の第1の実施の形態に係る半導体装置の製造工程を示す断面図である。
この第1の実施の形態によれば、ソース・ドレイン領域14、およびソース・ドレイン・エクステンション領域15の両者をエピタキシャル層で構成することにより、ソース・ドレイン間のチャネル領域のシリコンに十分な歪みを与え、かつ、短チャネル効果を抑制することができる。具体的には、エピタキシャル層をソース・ドレイン領域14とソース・ドレイン・エクステンション領域15の2段構造とすることにより、チャネル領域を挟んだエピタキシャル層の間隔を基板表面付近で小さくしてチャネル領域に十分な歪みを与え、かつ、チャネル領域下の領域を挟んだエピタキシャル層の間隔を基板内部では大きくして短チャネル効果を抑制する。
(半導体装置の構成)
図3(a)、(b)は、本発明の第2の実施の形態に係る半導体装置の断面図、およびそのゲート近傍の部分拡大図である。第2の実施の形態に係る半導体装置1は、ソース・ドレイン領域14、およびソース・ドレイン・エクステンション領域15の表面が、ゲート絶縁膜11の底部よりも高い位置に存在するレイズド・ソース・ドレイン構造を有し、第1の実施の形態に係る半導体装置1とは、ソース・ドレイン領域14、およびソース・ドレイン・エクステンション領域15の表面からの深さと、ゲート側壁膜の構成において異なる。なお、その他の構成や各部の材料等、第1の実施の形態と同様の点については、説明を省略する。
図4(a)〜(d)は、本発明の第2の実施の形態に係る半導体装置の製造工程を示す断面図である。なお、図2A(a)〜(d)、図2B(e)〜(g)に示す、エッチングにより第1および第2の凹部25、27を形成するまでの工程は第1の実施の形態と同様であるので説明を省略する。
この第2の実施の形態によれば、半導体装置1の構造をレイズド・ソース・ドレイン構造とすることにより、ソース・ドレイン領域14、およびソース・ドレイン・エクステンション領域15のゲート絶縁膜11の底部の位置を基準とした深さを第1の実施の形態と同等に抑えたまま、表面からの深さを大きくして電気抵抗を低減することができる。
10 半導体基板
11 ゲート絶縁膜
12 ゲート電極
13 ゲート側壁
14 ソース・ドレイン領域
15 ソース・ドレイン・エクステンション領域
16 ポテンシャルバリア領域
17 第1のシリサイド層
18 第2のシリサイド層
19 コンタクトエッチストップ層
20 層間絶縁膜
21 配線
22 コンタクト
24 第1のスペーサ
Claims (5)
- 半導体基板と、
前記半導体基板上にゲート絶縁膜を介して形成されたゲート電極と、
前記ゲート電極と離間して形成されたソース・ドレイン領域と、
前記ゲート電極と前記ソース・ドレイン領域との間に、前記ソース・ドレイン領域よりも浅く形成されたソース・ドレイン・エクステンション領域と、
を備え、
前記ソース・ドレイン領域および前記ソース・ドレイン・エクステンション領域は、SiGe膜またはSiC膜が埋め込まれた構造を有することを特徴とする半導体装置。 - 前記ソース・ドレイン領域および前記ソース・ドレイン・エクステンション領域に前記SiGe膜が埋め込まれた場合はp型トランジスタ、前記SiC膜が埋め込まれた場合はn型トランジスタとして機能することを特徴とする請求項1に記載の半導体装置。
- 前記ソース・ドレイン・エクステンション領域に埋め込まれた前記SiGe膜または前記SiC膜の前記ゲート絶縁膜からの深さが、3nm以上、20nm以下であることを特徴とする請求項1に記載の半導体装置。
- 前記ソース・ドレイン領域および前記ソース・ドレイン・エクステンション領域は、前記ソース・ドレイン領域および前記ソース・ドレイン・エクステンション領域の導電型と同型の不純物のみを含むことを特徴とする請求項1に記載の半導体装置。
- 前記ソース・ドレイン領域および前記ソース・ドレイン・エクステンション領域の表面が、前記ゲート絶縁膜の底部よりも高い位置に存在することを特徴とする請求項1に記載の半導体装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006102547A JP2007281038A (ja) | 2006-04-03 | 2006-04-03 | 半導体装置 |
US11/723,965 US20070228417A1 (en) | 2006-04-03 | 2007-03-22 | Semiconductor device and method of fabricating the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006102547A JP2007281038A (ja) | 2006-04-03 | 2006-04-03 | 半導体装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2007281038A true JP2007281038A (ja) | 2007-10-25 |
Family
ID=38557509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006102547A Abandoned JP2007281038A (ja) | 2006-04-03 | 2006-04-03 | 半導体装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20070228417A1 (ja) |
JP (1) | JP2007281038A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010010587A (ja) * | 2008-06-30 | 2010-01-14 | Toshiba Corp | 半導体素子及び半導体素子の製造方法 |
JP2012514317A (ja) * | 2008-12-31 | 2012-06-21 | アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド | 段階的な形状の構造を有する埋め込み歪誘起材質を伴うトランジスタ |
WO2013171892A1 (ja) * | 2012-05-18 | 2013-11-21 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008171999A (ja) * | 2007-01-11 | 2008-07-24 | Toshiba Corp | 半導体装置およびその製造方法 |
JP5211647B2 (ja) * | 2007-11-01 | 2013-06-12 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
JP2010141153A (ja) * | 2008-12-12 | 2010-06-24 | Toshiba Corp | 半導体装置 |
CN102779752A (zh) * | 2011-05-12 | 2012-11-14 | 中芯国际集成电路制造(上海)有限公司 | 半导体器件及其制造方法 |
US9224604B2 (en) | 2012-04-05 | 2015-12-29 | Globalfoundries Inc. | Device and method for forming sharp extension region with controllable junction depth and lateral overlap |
CN104183487A (zh) * | 2013-05-21 | 2014-12-03 | 中芯国际集成电路制造(上海)有限公司 | 一种FinTFET半导体器件及其制备方法 |
TWI680502B (zh) * | 2016-02-03 | 2019-12-21 | 聯華電子股份有限公司 | 半導體元件及其製作方法 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6303479B1 (en) * | 1999-12-16 | 2001-10-16 | Spinnaker Semiconductor, Inc. | Method of manufacturing a short-channel FET with Schottky-barrier source and drain contacts |
US6548842B1 (en) * | 2000-03-31 | 2003-04-15 | National Semiconductor Corporation | Field-effect transistor for alleviating short-channel effects |
US6399973B1 (en) * | 2000-12-29 | 2002-06-04 | Intel Corporation | Technique to produce isolated junctions by forming an insulation layer |
US6429084B1 (en) * | 2001-06-20 | 2002-08-06 | International Business Machines Corporation | MOS transistors with raised sources and drains |
JP2003347399A (ja) * | 2002-05-23 | 2003-12-05 | Sharp Corp | 半導体基板の製造方法 |
KR100495914B1 (ko) * | 2002-05-24 | 2005-06-20 | 주식회사 하이닉스반도체 | 씨모스트랜지스터 및 그 제조 방법 |
KR100464935B1 (ko) * | 2002-09-17 | 2005-01-05 | 주식회사 하이닉스반도체 | 불화붕소화합물 도핑에 의한 초박형 에피채널을 갖는반도체소자의 제조 방법 |
US6686637B1 (en) * | 2002-11-21 | 2004-02-03 | International Business Machines Corporation | Gate structure with independently tailored vertical doping profile |
KR100486609B1 (ko) * | 2002-12-30 | 2005-05-03 | 주식회사 하이닉스반도체 | 이중 도핑구조의 초박형 에피채널 피모스트랜지스터 및그의 제조 방법 |
US7303949B2 (en) * | 2003-10-20 | 2007-12-04 | International Business Machines Corporation | High performance stress-enhanced MOSFETs using Si:C and SiGe epitaxial source/drain and method of manufacture |
KR100618839B1 (ko) * | 2004-06-28 | 2006-09-01 | 삼성전자주식회사 | 반도체 소자의 제조 방법 |
US7078722B2 (en) * | 2004-09-20 | 2006-07-18 | International Business Machines Corporation | NFET and PFET devices and methods of fabricating same |
US7560352B2 (en) * | 2004-12-01 | 2009-07-14 | Applied Materials, Inc. | Selective deposition |
JP4945900B2 (ja) * | 2005-01-06 | 2012-06-06 | ソニー株式会社 | 絶縁ゲート電界効果トランジスタおよびその製造方法 |
US7176481B2 (en) * | 2005-01-12 | 2007-02-13 | International Business Machines Corporation | In situ doped embedded sige extension and source/drain for enhanced PFET performance |
KR100703967B1 (ko) * | 2005-02-28 | 2007-04-05 | 삼성전자주식회사 | 씨모스 트랜지스터 및 그 제조 방법 |
US7429775B1 (en) * | 2005-03-31 | 2008-09-30 | Xilinx, Inc. | Method of fabricating strain-silicon CMOS |
US7696537B2 (en) * | 2005-04-18 | 2010-04-13 | Toshiba America Electronic Components, Inc. | Step-embedded SiGe structure for PFET mobility enhancement |
US7605042B2 (en) * | 2005-04-18 | 2009-10-20 | Toshiba America Electronic Components, Inc. | SOI bottom pre-doping merged e-SiGe for poly height reduction |
JP4630728B2 (ja) * | 2005-05-26 | 2011-02-09 | 株式会社東芝 | 半導体装置及びその製造方法 |
US7579617B2 (en) * | 2005-06-22 | 2009-08-25 | Fujitsu Microelectronics Limited | Semiconductor device and production method thereof |
US8207523B2 (en) * | 2006-04-26 | 2012-06-26 | United Microelectronics Corp. | Metal oxide semiconductor field effect transistor with strained source/drain extension layer |
US7413961B2 (en) * | 2006-05-17 | 2008-08-19 | Chartered Semiconductor Manufacturing Ltd. | Method of fabricating a transistor structure |
US7504301B2 (en) * | 2006-09-28 | 2009-03-17 | Advanced Micro Devices, Inc. | Stressed field effect transistor and methods for its fabrication |
US7750338B2 (en) * | 2006-12-05 | 2010-07-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Dual-SiGe epitaxy for MOS devices |
-
2006
- 2006-04-03 JP JP2006102547A patent/JP2007281038A/ja not_active Abandoned
-
2007
- 2007-03-22 US US11/723,965 patent/US20070228417A1/en not_active Abandoned
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010010587A (ja) * | 2008-06-30 | 2010-01-14 | Toshiba Corp | 半導体素子及び半導体素子の製造方法 |
JP2012514317A (ja) * | 2008-12-31 | 2012-06-21 | アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド | 段階的な形状の構造を有する埋め込み歪誘起材質を伴うトランジスタ |
WO2013171892A1 (ja) * | 2012-05-18 | 2013-11-21 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
JP5833748B2 (ja) * | 2012-05-18 | 2015-12-16 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US9293347B2 (en) | 2012-05-18 | 2016-03-22 | Renesas Electronics Corporation | Semiconductor device and method of manufacturing the same |
US9460936B2 (en) | 2012-05-18 | 2016-10-04 | Renesas Electronics Corporation | Semiconductor device and method of manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
US20070228417A1 (en) | 2007-10-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7315063B2 (en) | CMOS transistor and method of manufacturing the same | |
US9837415B2 (en) | FinFET structures having silicon germanium and silicon fins with suppressed dopant diffusion | |
US7855126B2 (en) | Methods of fabricating a semiconductor device using a cyclic selective epitaxial growth technique and semiconductor devices formed using the same | |
US8114727B2 (en) | Disposable spacer integration with stress memorization technique and silicon-germanium | |
EP3188227A1 (en) | Fin-fet device and fabrication method thereof | |
US9385231B2 (en) | Device structure with increased contact area and reduced gate capacitance | |
JP2007281038A (ja) | 半導体装置 | |
US8841191B2 (en) | Semiconductor device and method of manufacturing same | |
JP5671294B2 (ja) | 集積回路及びその製造方法 | |
US20090001418A1 (en) | Semiconductor device and method for fabricating the same | |
US20080277699A1 (en) | Recess Etch for Epitaxial SiGe | |
JP4664950B2 (ja) | 半導体装置 | |
US20080017931A1 (en) | Metal-oxide-semiconductor transistor device, manufacturing method thereof, and method of improving drain current thereof | |
JP2008235568A (ja) | 半導体装置およびその製造方法 | |
US10211341B2 (en) | Tensile strained high percentage silicon germanium alloy FinFETS | |
JPWO2007034553A1 (ja) | 半導体装置およびその製造方法 | |
US20170025509A1 (en) | Strained silicon germanium fin with controlled junction for finfet devices | |
JP2011009412A (ja) | 半導体装置およびその製造方法 | |
JP2009105163A (ja) | 半導体装置 | |
JP2011066042A (ja) | 半導体装置とその製造方法 | |
JP2010245233A (ja) | 半導体装置およびその製造方法 | |
JP2008198715A (ja) | 半導体装置 | |
JP2007227721A (ja) | 半導体装置およびその製造方法 | |
JP2008171999A (ja) | 半導体装置およびその製造方法 | |
JP2009064875A (ja) | 半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090204 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20100924 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20100924 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20110627 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20110628 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20110629 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20110630 |
|
A762 | Written abandonment of application |
Free format text: JAPANESE INTERMEDIATE CODE: A762 Effective date: 20111020 |