JP2007229607A5 - - Google Patents
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- Publication number
- JP2007229607A5 JP2007229607A5 JP2006053818A JP2006053818A JP2007229607A5 JP 2007229607 A5 JP2007229607 A5 JP 2007229607A5 JP 2006053818 A JP2006053818 A JP 2006053818A JP 2006053818 A JP2006053818 A JP 2006053818A JP 2007229607 A5 JP2007229607 A5 JP 2007229607A5
- Authority
- JP
- Japan
- Prior art keywords
- coated
- chamber
- droplets
- gas
- circulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001035 drying Methods 0.000 claims 6
- 239000007788 liquid Substances 0.000 claims 5
- 238000007599 discharging Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006053818A JP5002168B2 (ja) | 2006-02-28 | 2006-02-28 | 液滴塗布装置及び乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006053818A JP5002168B2 (ja) | 2006-02-28 | 2006-02-28 | 液滴塗布装置及び乾燥装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007229607A JP2007229607A (ja) | 2007-09-13 |
| JP2007229607A5 true JP2007229607A5 (enExample) | 2009-04-09 |
| JP5002168B2 JP5002168B2 (ja) | 2012-08-15 |
Family
ID=38550736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006053818A Expired - Fee Related JP5002168B2 (ja) | 2006-02-28 | 2006-02-28 | 液滴塗布装置及び乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5002168B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4433023B2 (ja) | 2007-09-05 | 2010-03-17 | 株式会社デンソー | 車両用交流発電機 |
| KR101721129B1 (ko) * | 2015-06-03 | 2017-03-29 | 주식회사 글로벌하이테크 | 진공건조장치의 건조실 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6129035Y2 (enExample) * | 1984-09-08 | 1986-08-27 | ||
| JPH0684072B2 (ja) * | 1987-05-29 | 1994-10-26 | 富士ゼロックス株式会社 | インクジエツトプリントヘツド |
| JPH0195282U (enExample) * | 1987-12-16 | 1989-06-23 | ||
| JPH0861848A (ja) * | 1994-08-22 | 1996-03-08 | Yamamoto Binitaa Kk | 木材乾燥装置 |
| JP4656358B2 (ja) * | 2001-02-15 | 2011-03-23 | 上垣 健男 | 乾燥装置 |
| JP2004031070A (ja) * | 2002-06-25 | 2004-01-29 | Toshiba Corp | 有機ｅｌ材料塗布装置とその塗布方法および有機ｅｌ表示装置 |
| JP3998005B2 (ja) * | 2004-04-30 | 2007-10-24 | セイコーエプソン株式会社 | 液晶表示装置の製造装置 |
| JP4496862B2 (ja) * | 2004-07-01 | 2010-07-07 | 凸版印刷株式会社 | 減圧乾燥装置 |
| JP4333503B2 (ja) * | 2004-07-01 | 2009-09-16 | セイコーエプソン株式会社 | 成膜装置 |
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2006
- 2006-02-28 JP JP2006053818A patent/JP5002168B2/ja not_active Expired - Fee Related