JP2007227827A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2007227827A JP2007227827A JP2006049625A JP2006049625A JP2007227827A JP 2007227827 A JP2007227827 A JP 2007227827A JP 2006049625 A JP2006049625 A JP 2006049625A JP 2006049625 A JP2006049625 A JP 2006049625A JP 2007227827 A JP2007227827 A JP 2007227827A
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- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
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Abstract
【解決手段】本発明においては、ボンディングパッド下の領域にストライプタイプのプラグ用配線を配置し、プラグ用配線とパッド用配線とを導電プラグで接続する構造とする。導電プラグが杭の役目となりパッド用配線の剥れ防止、パッド下の配線の断線を防止する。さらにプラグ用配線により最低パターン率を確保することで、エッチングやCMP等の条件出しが容易となる。内部回路と同等の微細パターンの配線をパッド下の通過配線として利用でき、かつ拡散歩留りが向上する。
【選択図】 図1
Description
2、3、4 層間絶縁膜
5 ポリィミド
6 メモリセル部
10、11 1アルミプラグ用配線
12 1アルミ通過配線
13 1アルミパッド接続配線
14 1アルミ信号配線
20 2アルミパッド用配線
21 2アルミプラグ用配線
22 2アルミ通過配線
23 2アルミパッド接続配線
24 2アルミ信号配線
30 3アルミパッド用配線
40、41 1−2層導電プラグ
42 2−3層導電プラグ
Claims (10)
- 多層配線を有する半導体装置において、最上層の配線層により形成されたボンディングパッドと、該ボンディングパッドの下の領域に第1の下層配線層により形成された第1層プラグ用配線と、前記ボンディングパッドと前記第1層プラグ用配線とを接続する第1の導電プラグとを備えたことを特徴とする半導体装置。
- 前記第1層プラグ用配線はストライプ状に平行に複数本配置されたことを特徴とする請求項1に記載の半導体装置。
- 前記第1の導電プラグを形成する導電物は、タングステンを含むアルミよりも硬い導電体及びその合金からなることを特徴とする請求項1に記載の半導体装置。
- 平行に複数本配置された前記第1層プラグ用配線の間に、第1層通過配線を前記第1層プラグ用配線に平行に配置することを特徴とする請求項2に記載の半導体装置。
- 前記ボンディングパッドの下の領域における前記第1層プラグ用配線のパターン率は20%以上、50%以下であることを特徴とする請求項2に記載の半導体装置。
- 前記ボンディングパッドの下の領域における前記第1層プラグ用配線と、前記第1層通過配線との合計パターン率は20%以上、60%以下であることを特徴とする請求項2に記載の半導体装置。
- 前記第1の下層配線層よりさらに下層の第2の下層配線層により形成された第2層プラグ用配線と、前記第1層プラグ用配線と前記第2層プラグ用配線を接続する第2の導電プラグとを有することを特徴とする請求項1に記載の半導体装置。
- 前記第1の導電プラグと前記第2の導電プラグは、平面的に同じ位置に重なって形成されたことを特徴とする請求項7に記載の半導体装置。
- 前記第1層プラグ用配線はストライプ状に平行に複数本配置され、複数の前記第1層プラグ用配線に直交して前記第2層プラグ用配線はストライプ状に複数本配置されたことを特徴とする請求項7に記載の半導体装置。
- 前記第1層プラグ用配線の間に設けられた第1層通過配線と、前記第2層プラグ用配線の間に設けられた第2層通過配線とを設け、前記第1層通過配線と前記第2層通過配線とを接続することを特徴とする請求項9に記載の半導体装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2006049625A JP4757660B2 (ja) | 2006-02-27 | 2006-02-27 | 半導体装置 |
US11/710,486 US7884478B2 (en) | 2006-02-27 | 2007-02-26 | Semiconductor apparatus |
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Application Number | Priority Date | Filing Date | Title |
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JP2006049625A JP4757660B2 (ja) | 2006-02-27 | 2006-02-27 | 半導体装置 |
Publications (3)
Publication Number | Publication Date |
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JP2007227827A true JP2007227827A (ja) | 2007-09-06 |
JP2007227827A5 JP2007227827A5 (ja) | 2008-10-23 |
JP4757660B2 JP4757660B2 (ja) | 2011-08-24 |
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Application Number | Title | Priority Date | Filing Date |
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JP2006049625A Active JP4757660B2 (ja) | 2006-02-27 | 2006-02-27 | 半導体装置 |
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US (1) | US7884478B2 (ja) |
JP (1) | JP4757660B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011502352A (ja) * | 2007-10-31 | 2011-01-20 | アギア システムズ インコーポレーテッド | 半導体デバイスのためのボンド・パッド・サポート構造 |
JP2013065890A (ja) * | 2012-12-26 | 2013-04-11 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007046556A1 (de) * | 2007-09-28 | 2009-04-02 | Infineon Technologies Austria Ag | Halbleiterbauelement mit Kupfermetallisierungen |
JP5558336B2 (ja) | 2010-12-27 | 2014-07-23 | 株式会社東芝 | 半導体装置 |
CN108666295A (zh) * | 2018-05-18 | 2018-10-16 | 上海华虹宏力半导体制造有限公司 | 顶层金属连接层及其制作方法、焊盘结构和半导体器件 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1154508A (ja) * | 1997-07-30 | 1999-02-26 | Sanyo Electric Co Ltd | 半導体装置及び半導体装置の製造方法 |
JP2000195866A (ja) * | 1998-12-28 | 2000-07-14 | Samsung Electronics Co Ltd | 半導体素子のボンディングパッド構造及びその製造方法 |
JP2004014609A (ja) * | 2002-06-04 | 2004-01-15 | Sharp Corp | 半導体装置及びその製造方法 |
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JPS5918041A (ja) | 1982-07-21 | 1984-01-30 | Nissan Motor Co Ltd | 車両用ライト制御装置 |
JPS62213261A (ja) * | 1986-03-14 | 1987-09-19 | Canon Inc | 長尺素子アレイ部材 |
JP4228418B2 (ja) * | 1998-07-30 | 2009-02-25 | 沖電気工業株式会社 | 半導体装置 |
US7381642B2 (en) * | 2004-09-23 | 2008-06-03 | Megica Corporation | Top layers of metal for integrated circuits |
TW430935B (en) * | 1999-03-19 | 2001-04-21 | Ind Tech Res Inst | Frame type bonding pad structure having a low parasitic capacitance |
JP2002329783A (ja) * | 2001-04-27 | 2002-11-15 | Toshiba Corp | 配線パターンの自動レイアウト方法、レイアウトパターンの光学補正方法、自動レイアウト方法と光学補正方法に基づいて製造される半導体集積回路、および自動レイアウト光学補正プログラムを記録した記録媒体 |
JP2005166959A (ja) | 2003-12-03 | 2005-06-23 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
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2006
- 2006-02-27 JP JP2006049625A patent/JP4757660B2/ja active Active
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2007
- 2007-02-26 US US11/710,486 patent/US7884478B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1154508A (ja) * | 1997-07-30 | 1999-02-26 | Sanyo Electric Co Ltd | 半導体装置及び半導体装置の製造方法 |
JP2000195866A (ja) * | 1998-12-28 | 2000-07-14 | Samsung Electronics Co Ltd | 半導体素子のボンディングパッド構造及びその製造方法 |
JP2004014609A (ja) * | 2002-06-04 | 2004-01-15 | Sharp Corp | 半導体装置及びその製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011502352A (ja) * | 2007-10-31 | 2011-01-20 | アギア システムズ インコーポレーテッド | 半導体デバイスのためのボンド・パッド・サポート構造 |
JP2013065890A (ja) * | 2012-12-26 | 2013-04-11 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP4757660B2 (ja) | 2011-08-24 |
US7884478B2 (en) | 2011-02-08 |
US20070200242A1 (en) | 2007-08-30 |
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