JP2007052501A - 通信制御装置、通信制御方法、露光装置、並びにデバイス製造方法 - Google Patents

通信制御装置、通信制御方法、露光装置、並びにデバイス製造方法 Download PDF

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Publication number
JP2007052501A
JP2007052501A JP2005235491A JP2005235491A JP2007052501A JP 2007052501 A JP2007052501 A JP 2007052501A JP 2005235491 A JP2005235491 A JP 2005235491A JP 2005235491 A JP2005235491 A JP 2005235491A JP 2007052501 A JP2007052501 A JP 2007052501A
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JP
Japan
Prior art keywords
data
control
communication
dma transfer
transferred
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005235491A
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English (en)
Japanese (ja)
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JP2007052501A5 (https=
Inventor
Mikio Sato
幹夫 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2005235491A priority Critical patent/JP2007052501A/ja
Priority to US11/463,357 priority patent/US7472206B2/en
Priority to EP06016876A priority patent/EP1760598A3/en
Publication of JP2007052501A publication Critical patent/JP2007052501A/ja
Publication of JP2007052501A5 publication Critical patent/JP2007052501A5/ja
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F13/00—Interconnection of, or transfer of information or other signals between, memories, input/output devices or central processing units
    • G06F13/14—Handling requests for interconnection or transfer
    • G06F13/20—Handling requests for interconnection or transfer for access to input/output bus
    • G06F13/28—Handling requests for interconnection or transfer for access to input/output bus using burst mode transfer, e.g. direct memory access DMA, cycle steal
    • G06F13/30—Handling requests for interconnection or transfer for access to input/output bus using burst mode transfer, e.g. direct memory access DMA, cycle steal with priority control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F13/00—Interconnection of, or transfer of information or other signals between, memories, input/output devices or central processing units
    • G06F13/38—Information transfer, e.g. on bus
    • G06F13/40—Bus structure
    • G06F13/4004—Coupling between buses
    • G06F13/4022—Coupling between buses using switching circuits, e.g. switching matrix, connection or expansion network

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Computer Hardware Design (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Telephone Function (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Bus Control (AREA)
JP2005235491A 2005-08-15 2005-08-15 通信制御装置、通信制御方法、露光装置、並びにデバイス製造方法 Withdrawn JP2007052501A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005235491A JP2007052501A (ja) 2005-08-15 2005-08-15 通信制御装置、通信制御方法、露光装置、並びにデバイス製造方法
US11/463,357 US7472206B2 (en) 2005-08-15 2006-08-09 Method and apparatus of communication control using direct memory access (DMA) transfer
EP06016876A EP1760598A3 (en) 2005-08-15 2006-08-11 Communication control apparatus, communication control method, exposure apparatus, and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005235491A JP2007052501A (ja) 2005-08-15 2005-08-15 通信制御装置、通信制御方法、露光装置、並びにデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2007052501A true JP2007052501A (ja) 2007-03-01
JP2007052501A5 JP2007052501A5 (https=) 2009-02-12

Family

ID=37442074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005235491A Withdrawn JP2007052501A (ja) 2005-08-15 2005-08-15 通信制御装置、通信制御方法、露光装置、並びにデバイス製造方法

Country Status (3)

Country Link
US (1) US7472206B2 (https=)
EP (1) EP1760598A3 (https=)
JP (1) JP2007052501A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012168808A (ja) * 2011-02-15 2012-09-06 Fujitsu Semiconductor Ltd データ転送システム，データ転送スケジューリングプログラム

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8255606B2 (en) * 2008-10-24 2012-08-28 Applied Materials, Inc. Remote access gateway for semiconductor processing equipment
WO2012016577A1 (en) * 2010-08-06 2012-02-09 Carl Zeiss Smt Gmbh Microlithographic projection exposure apparatus
RU2515738C1 (ru) * 2012-09-20 2014-05-20 Федеральное государственное унитарное предприятие "Центральный аэрогидродинамический институт имени профессора Н.Е. Жуковского" (ФГУП "ЦАГИ") Способ контроля работоспособности многоточечной измерительной системы с входной коммутацией датчиков
FR3057969B1 (fr) * 2016-10-25 2019-11-01 Thales Systeme de pilotage deterministe du fonctionnement de moyens de transfert de donnees par acces direct a des moyens de memorisation
JP7575955B2 (ja) * 2021-01-13 2024-10-30 キヤノン株式会社 制御装置、システム、リソグラフィ装置、物品の製造方法、制御方法及びプログラム
US11726713B2 (en) 2021-06-25 2023-08-15 Western Digital Technologies, Inc. Systems and methods for priority command data fetching management

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4653903A (en) * 1984-01-24 1987-03-31 Canon Kabushiki Kaisha Exposure apparatus
US4941980A (en) * 1989-02-17 1990-07-17 Opal, Inc. System for measuring a topographical feature on a specimen
JPH03137757A (ja) * 1989-10-24 1991-06-12 Mitsubishi Electric Corp 優先順位制御方式
JP2924344B2 (ja) * 1991-08-09 1999-07-26 キヤノン株式会社 投影露光装置
JP3223584B2 (ja) 1992-06-10 2001-10-29 株式会社ダイヘン 半導体ウエハのセンタ合せ装置及び方法
JP3610082B2 (ja) 1993-10-13 2005-01-12 キヤノン株式会社 光磁気ディスク装置
JP3625508B2 (ja) * 1994-12-27 2005-03-02 株式会社リコー 画像読取装置
JP2996183B2 (ja) 1996-08-16 1999-12-27 日本電気株式会社 Ｄｍａ機能を備えたデータ処理装置
US6473780B1 (en) * 1998-04-01 2002-10-29 Intel Corporation Scheduling of direct memory access
JP2000228342A (ja) 1999-02-04 2000-08-15 Canon Inc 露光装置
JP2001057380A (ja) 1999-06-09 2001-02-27 Daihen Corp 半導体ウエハのセンタ合せ装置
US20030097481A1 (en) 2001-03-01 2003-05-22 Richter Roger K. Method and system for performing packet integrity operations using a data movement engine
US7072996B2 (en) 2001-06-13 2006-07-04 Corrent Corporation System and method of transferring data between a processing engine and a plurality of bus types using an arbiter
US20050038949A1 (en) 2003-01-06 2005-02-17 Lynn Patterson Apparatus for enabling distributed processing across a plurality of circuit cards
JP2005175400A (ja) * 2003-12-15 2005-06-30 Canon Inc 露光装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012168808A (ja) * 2011-02-15 2012-09-06 Fujitsu Semiconductor Ltd データ転送システム，データ転送スケジューリングプログラム

Also Published As

Publication number Publication date
US7472206B2 (en) 2008-12-30
US20070129824A1 (en) 2007-06-07
EP1760598A3 (en) 2007-12-26
EP1760598A2 (en) 2007-03-07

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