JP2007052501A5 - - Google Patents

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Publication number
JP2007052501A5
JP2007052501A5 JP2005235491A JP2005235491A JP2007052501A5 JP 2007052501 A5 JP2007052501 A5 JP 2007052501A5 JP 2005235491 A JP2005235491 A JP 2005235491A JP 2005235491 A JP2005235491 A JP 2005235491A JP 2007052501 A5 JP2007052501 A5 JP 2007052501A5
Authority
JP
Japan
Prior art keywords
data
control
communication
dma transfer
transferred
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005235491A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007052501A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005235491A priority Critical patent/JP2007052501A/ja
Priority claimed from JP2005235491A external-priority patent/JP2007052501A/ja
Priority to US11/463,357 priority patent/US7472206B2/en
Priority to EP06016876A priority patent/EP1760598A3/en
Publication of JP2007052501A publication Critical patent/JP2007052501A/ja
Publication of JP2007052501A5 publication Critical patent/JP2007052501A5/ja
Withdrawn legal-status Critical Current

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JP2005235491A 2005-08-15 2005-08-15 通信制御装置、通信制御方法、露光装置、並びにデバイス製造方法 Withdrawn JP2007052501A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005235491A JP2007052501A (ja) 2005-08-15 2005-08-15 通信制御装置、通信制御方法、露光装置、並びにデバイス製造方法
US11/463,357 US7472206B2 (en) 2005-08-15 2006-08-09 Method and apparatus of communication control using direct memory access (DMA) transfer
EP06016876A EP1760598A3 (en) 2005-08-15 2006-08-11 Communication control apparatus, communication control method, exposure apparatus, and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005235491A JP2007052501A (ja) 2005-08-15 2005-08-15 通信制御装置、通信制御方法、露光装置、並びにデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2007052501A JP2007052501A (ja) 2007-03-01
JP2007052501A5 true JP2007052501A5 (https=) 2009-02-12

Family

ID=37442074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005235491A Withdrawn JP2007052501A (ja) 2005-08-15 2005-08-15 通信制御装置、通信制御方法、露光装置、並びにデバイス製造方法

Country Status (3)

Country Link
US (1) US7472206B2 (https=)
EP (1) EP1760598A3 (https=)
JP (1) JP2007052501A (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8255606B2 (en) * 2008-10-24 2012-08-28 Applied Materials, Inc. Remote access gateway for semiconductor processing equipment
WO2012016577A1 (en) * 2010-08-06 2012-02-09 Carl Zeiss Smt Gmbh Microlithographic projection exposure apparatus
JP5772040B2 (ja) * 2011-02-15 2015-09-02 富士通セミコンダクター株式会社 データ転送システム，データ転送スケジューリングプログラム
RU2515738C1 (ru) * 2012-09-20 2014-05-20 Федеральное государственное унитарное предприятие "Центральный аэрогидродинамический институт имени профессора Н.Е. Жуковского" (ФГУП "ЦАГИ") Способ контроля работоспособности многоточечной измерительной системы с входной коммутацией датчиков
FR3057969B1 (fr) * 2016-10-25 2019-11-01 Thales Systeme de pilotage deterministe du fonctionnement de moyens de transfert de donnees par acces direct a des moyens de memorisation
JP7575955B2 (ja) * 2021-01-13 2024-10-30 キヤノン株式会社 制御装置、システム、リソグラフィ装置、物品の製造方法、制御方法及びプログラム
US11726713B2 (en) 2021-06-25 2023-08-15 Western Digital Technologies, Inc. Systems and methods for priority command data fetching management

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4653903A (en) * 1984-01-24 1987-03-31 Canon Kabushiki Kaisha Exposure apparatus
US4941980A (en) * 1989-02-17 1990-07-17 Opal, Inc. System for measuring a topographical feature on a specimen
JPH03137757A (ja) * 1989-10-24 1991-06-12 Mitsubishi Electric Corp 優先順位制御方式
JP2924344B2 (ja) * 1991-08-09 1999-07-26 キヤノン株式会社 投影露光装置
JP3223584B2 (ja) 1992-06-10 2001-10-29 株式会社ダイヘン 半導体ウエハのセンタ合せ装置及び方法
JP3610082B2 (ja) 1993-10-13 2005-01-12 キヤノン株式会社 光磁気ディスク装置
JP3625508B2 (ja) * 1994-12-27 2005-03-02 株式会社リコー 画像読取装置
JP2996183B2 (ja) 1996-08-16 1999-12-27 日本電気株式会社 Ｄｍａ機能を備えたデータ処理装置
US6473780B1 (en) * 1998-04-01 2002-10-29 Intel Corporation Scheduling of direct memory access
JP2000228342A (ja) 1999-02-04 2000-08-15 Canon Inc 露光装置
JP2001057380A (ja) 1999-06-09 2001-02-27 Daihen Corp 半導体ウエハのセンタ合せ装置
US20030097481A1 (en) 2001-03-01 2003-05-22 Richter Roger K. Method and system for performing packet integrity operations using a data movement engine
US7072996B2 (en) 2001-06-13 2006-07-04 Corrent Corporation System and method of transferring data between a processing engine and a plurality of bus types using an arbiter
US20050038949A1 (en) 2003-01-06 2005-02-17 Lynn Patterson Apparatus for enabling distributed processing across a plurality of circuit cards
JP2005175400A (ja) * 2003-12-15 2005-06-30 Canon Inc 露光装置

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