JP2007048633A - 光電子増倍管 - Google Patents
光電子増倍管 Download PDFInfo
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- JP2007048633A JP2007048633A JP2005232535A JP2005232535A JP2007048633A JP 2007048633 A JP2007048633 A JP 2007048633A JP 2005232535 A JP2005232535 A JP 2005232535A JP 2005232535 A JP2005232535 A JP 2005232535A JP 2007048633 A JP2007048633 A JP 2007048633A
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- 229910052710 silicon Inorganic materials 0.000 claims description 43
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 42
- 239000011521 glass Substances 0.000 description 39
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/18—Electrode arrangements using essentially more than one dynode
- H01J43/24—Dynodes having potential gradient along their surfaces
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
【解決手段】 内部が真空に維持された外囲器を備え、該外囲器内に、光電面(22)と、電子増倍部(31)と、陽極(32)が配置されている。電子増倍部(31)は光電子をカスケード増倍するための溝部を電子増倍チャネルとして有し、陽極(32)はそれぞれが壁部(311)で規定された溝部に対応するチャネル電極(320)により構成されている。特に、各チャネル電極(320)は、その一部が対応する溝部を規定する一対の壁部で挟まれた空間内に配置されている。
【選択図】 図2
Description
Claims (6)
- 内部が真空状態に維持された外囲器と、
前記外囲器内に収納され、該外囲器を介して取り込まれた光に応じて電子を該外囲器の内部に放出する光電面と、
前記外囲器内に収納され、電子の進行方向に沿って伸びた複数の溝部を有する電子増倍部と、
前記外囲器内に収納され、前記電子増倍部でカスケード増倍された電子のうち到達した電子を信号として取り出すための陽極であって、前記電子増倍部に設けられた複数の溝部それぞれに対応して設けられ、少なくともその一部が対応する溝部を規定する一対の壁部で挟まれた空間内に配置された複数のチャネル電極から構成されている陽極を備えた光電子増倍管。 - 前記陽極を構成する各チャネル電極は、その先端が前記対応する溝部を規定する一対の壁部で挟まれた空間内に挿入された突起部を有することを特徴とする請求項1記載の光電子増倍管。
- 内部が真空状態に維持された外囲器と、
前記外囲器内に収納された、該外囲器を介して取り込まれた光に応じて電子を該外囲器の内部に放出する光電面と、
前記外囲器内に収納された、電子の進行方向に沿って伸びた複数の貫通孔を有する電子増倍部と、
前記外囲器内に収納された、前記電子増倍部でカスケード増倍された電子のうち到達した電子を信号として取り出すための陽極であって、前記電子増倍部に設けられた複数の貫通孔それぞれに対応して設けられ、少なくともその一部が対応する貫通孔を規定する壁部で挟まれた空間内に配置された複数のチャネル電極から構成されている陽極を備えた光電子増倍管。 - 前記陽極を構成する各チャネル電極は、その先端が前記対応する貫通孔を規定する壁部で挟まれた空間内に挿入された突起部を有することを特徴とする請求項3記載の光電子増倍管。
- 前記陽極を構成する各チャネル電極は、その本体部分が前記外囲器の一部に固定されており、前記突起部は、前記外囲器から所定距離離間した状態で前記本体部分によって支持されていることを特徴とする請求項2又は4項記載の光電子増倍管。
- 前記陽極を構成する各チャネル電極は、シリコンからなることを特徴とする請求項1〜5のいずれか一項記載の光電子増倍管。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005232535A JP4708118B2 (ja) | 2005-08-10 | 2005-08-10 | 光電子増倍管 |
CN200680019794XA CN101189701B (zh) | 2005-08-10 | 2006-06-01 | 光电倍增器 |
PCT/JP2006/311009 WO2007017984A1 (ja) | 2005-08-10 | 2006-06-01 | 光電子増倍管 |
US11/921,959 US7880385B2 (en) | 2005-08-10 | 2006-06-01 | Photomultiplier including an electronic-multiplier section in a housing |
EP06756886A EP1892749A4 (en) | 2005-08-10 | 2006-06-01 | photomultiplier |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005232535A JP4708118B2 (ja) | 2005-08-10 | 2005-08-10 | 光電子増倍管 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007048633A true JP2007048633A (ja) | 2007-02-22 |
JP4708118B2 JP4708118B2 (ja) | 2011-06-22 |
Family
ID=37727175
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005232535A Active JP4708118B2 (ja) | 2005-08-10 | 2005-08-10 | 光電子増倍管 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7880385B2 (ja) |
EP (1) | EP1892749A4 (ja) |
JP (1) | JP4708118B2 (ja) |
CN (1) | CN101189701B (ja) |
WO (1) | WO2007017984A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010262811A (ja) * | 2009-05-01 | 2010-11-18 | Hamamatsu Photonics Kk | 光電子増倍管 |
JP2010267414A (ja) * | 2009-05-12 | 2010-11-25 | Hamamatsu Photonics Kk | 光電子増倍管 |
US8492694B2 (en) | 2010-10-14 | 2013-07-23 | Hamamatsu Photonics K.K. | Photomultiplier tube having a plurality of stages of dynodes with recessed surfaces |
US8587196B2 (en) | 2010-10-14 | 2013-11-19 | Hamamatsu Photonics K.K. | Photomultiplier tube |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4708118B2 (ja) * | 2005-08-10 | 2011-06-22 | 浜松ホトニクス株式会社 | 光電子増倍管 |
JP5290805B2 (ja) * | 2009-02-25 | 2013-09-18 | 浜松ホトニクス株式会社 | 光電子増倍管 |
JP5290804B2 (ja) * | 2009-02-25 | 2013-09-18 | 浜松ホトニクス株式会社 | 光電子増倍管 |
CN102918624B (zh) | 2011-06-03 | 2013-11-06 | 浜松光子学株式会社 | 电子倍增部以及包含其的光电倍增管 |
EP2560189B1 (de) * | 2011-08-16 | 2020-06-17 | Leica Microsystems CMS GmbH | Detektorvorrichtung |
US9490911B2 (en) | 2013-03-15 | 2016-11-08 | Fairfield Industries Incorporated | High-bandwidth underwater data communication system |
US9490910B2 (en) * | 2013-03-15 | 2016-11-08 | Fairfield Industries Incorporated | High-bandwidth underwater data communication system |
US20170316925A1 (en) * | 2014-11-18 | 2017-11-02 | Innosys, Inc. | A Two-Dimensional Anode Array Or Two-Dimensional Multi-Channel Anode For Large-Area Photodetection |
US10488537B2 (en) | 2016-06-30 | 2019-11-26 | Magseis Ff Llc | Seismic surveys with optical communication links |
JP6875217B2 (ja) | 2017-06-30 | 2021-05-19 | 浜松ホトニクス株式会社 | 電子増倍体 |
CN114093743B (zh) * | 2021-11-25 | 2024-01-16 | 上海集成电路研发中心有限公司 | 一种光敏传感器及其制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6196645A (ja) * | 1984-10-18 | 1986-05-15 | Shimadzu Corp | マルチチヤンネル形検出器 |
JPS647465A (en) * | 1987-06-30 | 1989-01-11 | Murata Manufacturing Co | Secondary electron multiplier |
US5568013A (en) * | 1994-07-29 | 1996-10-22 | Center For Advanced Fiberoptic Applications | Micro-fabricated electron multipliers |
JPH09180670A (ja) * | 1995-12-26 | 1997-07-11 | Hamamatsu Photonics Kk | 光電子増倍管 |
WO2005078759A1 (ja) * | 2004-02-17 | 2005-08-25 | Hamamatsu Photonics K.K. | 光電子増倍管 |
WO2007017984A1 (ja) * | 2005-08-10 | 2007-02-15 | Hamamatsu Photonics K.K. | 光電子増倍管 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
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US3184633A (en) * | 1960-11-03 | 1965-05-18 | Gen Electric | Semiconductive electron multiplier |
US3244922A (en) * | 1962-11-05 | 1966-04-05 | Itt | Electron multiplier having undulated passage with semiconductive secondary emissive coating |
JPS61130568A (ja) | 1984-11-28 | 1986-06-18 | 株式会社日本水中作業 | 液中におけるコンクリ−ト構築物等の解体方法 |
JPS647465U (ja) | 1987-07-03 | 1989-01-17 | ||
JPH04359855A (ja) | 1991-06-06 | 1992-12-14 | Hamamatsu Photonics Kk | 二次電子増倍装置 |
JP3078905B2 (ja) | 1991-12-26 | 2000-08-21 | 浜松ホトニクス株式会社 | 電子増倍器を備えた電子管 |
US5264693A (en) | 1992-07-01 | 1993-11-23 | The United States Of America As Represented By The Secretary Of The Navy | Microelectronic photomultiplier device with integrated circuitry |
JPH06150876A (ja) * | 1992-11-09 | 1994-05-31 | Hamamatsu Photonics Kk | 光電子増倍管及び電子増倍管 |
US5453609A (en) * | 1993-10-22 | 1995-09-26 | Southeastern Universities Research Assn., Inc. | Non cross talk multi-channel photomultiplier using guided electron multipliers |
US5880458A (en) * | 1997-10-21 | 1999-03-09 | Hamamatsu Photonics K.K. | Photomultiplier tube with focusing electrode plate having frame |
JP3919332B2 (ja) | 1998-05-18 | 2007-05-23 | 浜松ホトニクス株式会社 | 光電子増倍管及び分光測定装置 |
US6166365A (en) * | 1998-07-16 | 2000-12-26 | Schlumberger Technology Corporation | Photodetector and method for manufacturing it |
US6492657B1 (en) * | 2000-01-27 | 2002-12-10 | Burle Technologies, Inc. | Integrated semiconductor microchannel plate and planar diode electron flux amplifier and collector |
WO2003098658A1 (fr) * | 2002-05-15 | 2003-11-27 | Hamamatsu Photonics K.K. | Tube photomultiplicateur et son procédé d'utilisation |
US7049747B1 (en) | 2003-06-26 | 2006-05-23 | Massachusetts Institute Of Technology | Fully-integrated in-plane micro-photomultiplier |
GB2409927B (en) | 2004-01-09 | 2006-09-27 | Microsaic Systems Ltd | Micro-engineered electron multipliers |
-
2005
- 2005-08-10 JP JP2005232535A patent/JP4708118B2/ja active Active
-
2006
- 2006-06-01 CN CN200680019794XA patent/CN101189701B/zh active Active
- 2006-06-01 EP EP06756886A patent/EP1892749A4/en not_active Ceased
- 2006-06-01 WO PCT/JP2006/311009 patent/WO2007017984A1/ja active Application Filing
- 2006-06-01 US US11/921,959 patent/US7880385B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6196645A (ja) * | 1984-10-18 | 1986-05-15 | Shimadzu Corp | マルチチヤンネル形検出器 |
JPS647465A (en) * | 1987-06-30 | 1989-01-11 | Murata Manufacturing Co | Secondary electron multiplier |
US5568013A (en) * | 1994-07-29 | 1996-10-22 | Center For Advanced Fiberoptic Applications | Micro-fabricated electron multipliers |
JPH09180670A (ja) * | 1995-12-26 | 1997-07-11 | Hamamatsu Photonics Kk | 光電子増倍管 |
WO2005078759A1 (ja) * | 2004-02-17 | 2005-08-25 | Hamamatsu Photonics K.K. | 光電子増倍管 |
WO2007017984A1 (ja) * | 2005-08-10 | 2007-02-15 | Hamamatsu Photonics K.K. | 光電子増倍管 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010262811A (ja) * | 2009-05-01 | 2010-11-18 | Hamamatsu Photonics Kk | 光電子増倍管 |
JP2010267414A (ja) * | 2009-05-12 | 2010-11-25 | Hamamatsu Photonics Kk | 光電子増倍管 |
US8492694B2 (en) | 2010-10-14 | 2013-07-23 | Hamamatsu Photonics K.K. | Photomultiplier tube having a plurality of stages of dynodes with recessed surfaces |
US8587196B2 (en) | 2010-10-14 | 2013-11-19 | Hamamatsu Photonics K.K. | Photomultiplier tube |
Also Published As
Publication number | Publication date |
---|---|
EP1892749A4 (en) | 2011-08-24 |
JP4708118B2 (ja) | 2011-06-22 |
CN101189701A (zh) | 2008-05-28 |
EP1892749A1 (en) | 2008-02-27 |
WO2007017984A1 (ja) | 2007-02-15 |
US7880385B2 (en) | 2011-02-01 |
US20090045741A1 (en) | 2009-02-19 |
CN101189701B (zh) | 2010-04-21 |
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