JP6875217B2 - 電子増倍体 - Google Patents
電子増倍体 Download PDFInfo
- Publication number
- JP6875217B2 JP6875217B2 JP2017129433A JP2017129433A JP6875217B2 JP 6875217 B2 JP6875217 B2 JP 6875217B2 JP 2017129433 A JP2017129433 A JP 2017129433A JP 2017129433 A JP2017129433 A JP 2017129433A JP 6875217 B2 JP6875217 B2 JP 6875217B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- resistance
- resistance value
- secondary electron
- forming surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 208000020584 Polyploidy Diseases 0.000 title claims 2
- 239000000758 substrate Substances 0.000 claims description 31
- 238000001228 spectrum Methods 0.000 claims description 18
- 238000002441 X-ray diffraction Methods 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 179
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 68
- 201000011452 Adrenoleukodystrophy Diseases 0.000 description 27
- 208000010796 X-linked adrenoleukodystrophy Diseases 0.000 description 27
- 239000002585 base Substances 0.000 description 26
- 238000000231 atomic layer deposition Methods 0.000 description 25
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 16
- 239000011810 insulating material Substances 0.000 description 15
- 239000002184 metal Substances 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000011521 glass Substances 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 238000005259 measurement Methods 0.000 description 9
- 239000003574 free electron Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 208000015979 hopping Diseases 0.000 description 4
- 208000026487 Triploidy Diseases 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 102100021943 C-C motif chemokine 2 Human genes 0.000 description 2
- 101710091439 Major capsid protein 1 Proteins 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001026 inconel Inorganic materials 0.000 description 2
- 239000005355 lead glass Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000012458 free base Substances 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/18—Electrode arrangements using essentially more than one dynode
- H01J43/24—Dynodes having potential gradient along their surfaces
- H01J43/246—Microchannel plates [MCP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/08—Cathode arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/18—Electrode arrangements using essentially more than one dynode
- H01J43/24—Dynodes having potential gradient along their surfaces
Landscapes
- Electron Tubes For Measurement (AREA)
- Cold Cathode And The Manufacture (AREA)
Description
最初に本願発明の実施形態の対応それぞれを個別に列挙して説明する。
本願発明に係る電子増倍体の具体例を、以下に添付の図面を参照しながら詳細に説明する。なお、本発明は、これら例示に限定されるものではなく、特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内での全ての変更が含まれることが意図されている。また、図面の説明において同一の要素には同一符号を付して重複する説明を省略する。
Claims (4)
- チャネル形成面を有する基板と、
前記チャネル形成面に対面する底面と、前記底面に対向するとともに荷電粒子の入射に応答して二次電子を放出する二次電子放出面と、を有する二次電子放出層と、
前記基板と前記二次電子放出層に挟まれた抵抗層であって、前記チャネル形成面に一致または実質的に平行な層形成面上に二次元的に形成されたPt層を含む抵抗層と、
を備え、
前記抵抗層は、温度20℃における当該抵抗層の抵抗値に対して、−60℃における当該抵抗層の抵抗値が10倍以下であり、かつ、+60℃における当該抵抗層の抵抗値が0.25倍以上の範囲内に収まる温度特性を有し、
前記Pt層は、XRD分析により得られるスペクトルに、半値幅が角度5°以下となる(111)面のピークおよび(200)面のピークがそれぞれ出現する程度の結晶性を有するPt塊を含む、
電子増倍体。 - 前記抵抗層は、温度20℃における当該抵抗層の抵抗値に対して、−60℃における当該抵抗層の抵抗値が2.7倍以下であり、かつ、+60℃における当該抵抗層の抵抗値が0.3倍以上の範囲に収まる温度特性を有することを特徴とする請求項1に記載の電子増倍体。
- 前記Pt層は、XRD分析により得られるスペクトルに、半値幅が角度5°以下となる(220)面のピークが更に出現する程度の結晶性を有するPt塊を含むことを特徴とする請求項1に記載の電子増倍体。
- 前記基板と前記二次電子放出層との間に設けられ、前記二次電子放出層の前記底面に対面する位置に前記層形成面を有する下地層を更に備えたことを特徴とする請求項1〜3の何れか一項に記載の電子増倍体。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017129433A JP6875217B2 (ja) | 2017-06-30 | 2017-06-30 | 電子増倍体 |
RU2020103211A RU2756853C2 (ru) | 2017-06-30 | 2018-04-10 | Электронный умножитель |
PCT/JP2018/015085 WO2019003568A1 (ja) | 2017-06-30 | 2018-04-10 | 電子増倍体 |
US16/623,517 US11170983B2 (en) | 2017-06-30 | 2018-04-10 | Electron multiplier that suppresses and stabilizes a variation of a resistance value in a wide temperature range |
CN201880035018.1A CN110678955B (zh) | 2017-06-30 | 2018-04-10 | 电子倍增体 |
EP18825411.4A EP3648141B1 (en) | 2017-06-30 | 2018-04-10 | Electron multiplier |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017129433A JP6875217B2 (ja) | 2017-06-30 | 2017-06-30 | 電子増倍体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019012659A JP2019012659A (ja) | 2019-01-24 |
JP6875217B2 true JP6875217B2 (ja) | 2021-05-19 |
Family
ID=64742952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017129433A Active JP6875217B2 (ja) | 2017-06-30 | 2017-06-30 | 電子増倍体 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11170983B2 (ja) |
EP (1) | EP3648141B1 (ja) |
JP (1) | JP6875217B2 (ja) |
CN (1) | CN110678955B (ja) |
RU (1) | RU2756853C2 (ja) |
WO (1) | WO2019003568A1 (ja) |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4849000A (en) | 1986-11-26 | 1989-07-18 | The United States Of America As Represented By The Secretary Of The Army | Method of making fiber optic plates for wide angle and graded acuity intensifier tubes |
US5514928A (en) * | 1994-05-27 | 1996-05-07 | Litton Systems, Inc. | Apparatus having cascaded and interbonded microchannel plates and method of making |
JP2001351509A (ja) | 2000-06-08 | 2001-12-21 | Hamamatsu Photonics Kk | マイクロチャネルプレート |
US6874674B2 (en) | 2003-03-31 | 2005-04-05 | Litton Systems, Inc. | Bonding method for microchannel plates |
JP4708118B2 (ja) | 2005-08-10 | 2011-06-22 | 浜松ホトニクス株式会社 | 光電子増倍管 |
RU2368978C2 (ru) | 2007-11-21 | 2009-09-27 | Федеральное Государственное Унитарное Предприятие Государственный Научный Центр Российской Федерации Институт Физики Высоких Энергий | Фотоумножитель |
US8237129B2 (en) | 2008-06-20 | 2012-08-07 | Arradiance, Inc. | Microchannel plate devices with tunable resistive films |
US8227965B2 (en) * | 2008-06-20 | 2012-07-24 | Arradiance, Inc. | Microchannel plate devices with tunable resistive films |
US9105379B2 (en) * | 2011-01-21 | 2015-08-11 | Uchicago Argonne, Llc | Tunable resistance coatings |
US8969823B2 (en) * | 2011-01-21 | 2015-03-03 | Uchicago Argonne, Llc | Microchannel plate detector and methods for their fabrication |
US9117640B2 (en) * | 2012-05-18 | 2015-08-25 | Hamamatsu Photonics K.K. | Microchannel plate having a main body, image intensifier, ion detector, and inspection device |
JP5981820B2 (ja) * | 2012-09-25 | 2016-08-31 | 浜松ホトニクス株式会社 | マイクロチャンネルプレート、マイクロチャンネルプレートの製造方法、及びイメージインテンシファイア |
CN104465295B (zh) | 2014-10-27 | 2018-02-27 | 中国电子科技集团公司第五十五研究所 | 一种带离子阻挡功能的新型微通道板电极及其制作方法 |
CN104829411B (zh) | 2015-05-15 | 2017-09-29 | 南京工业大学 | 一种微通道反应器中连续制备对二甲苯的方法 |
JP6395906B1 (ja) * | 2017-06-30 | 2018-09-26 | 浜松ホトニクス株式会社 | 電子増倍体 |
JP6817160B2 (ja) * | 2017-06-30 | 2021-01-20 | 浜松ホトニクス株式会社 | 電子増倍体 |
-
2017
- 2017-06-30 JP JP2017129433A patent/JP6875217B2/ja active Active
-
2018
- 2018-04-10 WO PCT/JP2018/015085 patent/WO2019003568A1/ja unknown
- 2018-04-10 CN CN201880035018.1A patent/CN110678955B/zh active Active
- 2018-04-10 RU RU2020103211A patent/RU2756853C2/ru active
- 2018-04-10 EP EP18825411.4A patent/EP3648141B1/en active Active
- 2018-04-10 US US16/623,517 patent/US11170983B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN110678955B (zh) | 2022-03-01 |
WO2019003568A1 (ja) | 2019-01-03 |
US11170983B2 (en) | 2021-11-09 |
EP3648141A4 (en) | 2021-03-24 |
CN110678955A (zh) | 2020-01-10 |
JP2019012659A (ja) | 2019-01-24 |
EP3648141B1 (en) | 2024-03-06 |
EP3648141A1 (en) | 2020-05-06 |
RU2020103211A (ru) | 2021-07-30 |
RU2020103211A3 (ja) | 2021-07-30 |
RU2756853C2 (ru) | 2021-10-06 |
US20210134572A1 (en) | 2021-05-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6395906B1 (ja) | 電子増倍体 | |
JP6817160B2 (ja) | 電子増倍体 | |
US10283311B2 (en) | X-ray source | |
US10340129B2 (en) | Microchannel plate and electron multiplier | |
EP2811510A2 (en) | Electrostatic suppression of ion feedback in a microchannel plate photomultiplier | |
US8786168B2 (en) | Microchannel plate for electron multiplier | |
JP6875217B2 (ja) | 電子増倍体 | |
EP1465232B1 (en) | Conductive tube for use as a reflectron lens | |
JP5956292B2 (ja) | 電子管 | |
US10818484B2 (en) | Microchannel plate and electron multiplier tube with improved gain and suppressed deterioration | |
JP4944625B2 (ja) | 平面型画像表示装置及び平面型画像表示装置用スペーサ | |
JP3630456B2 (ja) | 電子増倍管 | |
Alkasim et al. | Maximum conversion efficiency of thermionic heat to electricity converters using pure tungsten as the emitter: A theoretical review |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180925 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200212 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20201117 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201201 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210420 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210422 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6875217 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |