JP2006527666A5 - - Google Patents
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- Publication number
- JP2006527666A5 JP2006527666A5 JP2006515661A JP2006515661A JP2006527666A5 JP 2006527666 A5 JP2006527666 A5 JP 2006527666A5 JP 2006515661 A JP2006515661 A JP 2006515661A JP 2006515661 A JP2006515661 A JP 2006515661A JP 2006527666 A5 JP2006527666 A5 JP 2006527666A5
- Authority
- JP
- Japan
- Prior art keywords
- metal
- ceramic
- ceramic substrate
- ceramic layer
- production process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims 54
- 239000002184 metal Substances 0.000 claims 33
- 229910052751 metal Inorganic materials 0.000 claims 33
- 239000000758 substrate Substances 0.000 claims 31
- 238000004519 manufacturing process Methods 0.000 claims 26
- 238000010438 heat treatment Methods 0.000 claims 15
- 238000000034 method Methods 0.000 claims 9
- 239000002826 coolant Substances 0.000 claims 3
- 239000011888 foil Substances 0.000 claims 3
- 238000000926 separation method Methods 0.000 claims 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 2
- 238000001465 metallisation Methods 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910010413 TiO 2 Inorganic materials 0.000 claims 1
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 239000000443 aerosol Substances 0.000 claims 1
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical group O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 238000005476 soldering Methods 0.000 claims 1
- 230000002123 temporal effect Effects 0.000 claims 1
- 238000007669 thermal treatment Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10327360.3 | 2003-06-16 | ||
| DE10327360A DE10327360B4 (de) | 2003-06-16 | 2003-06-16 | Verfahren zum Herstellen eines Keramik-Metall-Substrates |
| PCT/DE2004/001012 WO2004113041A2 (de) | 2003-06-16 | 2004-05-14 | Verfahren zum herstellen eines keramik-metall-substrates |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006527666A JP2006527666A (ja) | 2006-12-07 |
| JP2006527666A5 true JP2006527666A5 (enExample) | 2007-03-29 |
| JP5047615B2 JP5047615B2 (ja) | 2012-10-10 |
Family
ID=33495108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006515661A Expired - Fee Related JP5047615B2 (ja) | 2003-06-16 | 2004-05-14 | セラミック金属基板の製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20060183298A1 (enExample) |
| EP (1) | EP1634326A2 (enExample) |
| JP (1) | JP5047615B2 (enExample) |
| DE (1) | DE10327360B4 (enExample) |
| WO (1) | WO2004113041A2 (enExample) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005022160A1 (de) * | 2005-05-13 | 2006-11-16 | Daimlerchrysler Ag | Ölpumpe mit integrierter Stromregeleinrichtung |
| US20080070378A1 (en) * | 2006-09-19 | 2008-03-20 | Jong-Souk Yeo | Dual laser separation of bonded wafers |
| US20100320249A1 (en) * | 2007-02-28 | 2010-12-23 | Claus Peter Kluge | Method for producing a component using asymmetrical energy input along the parting or predetermined breaking line |
| US8496866B2 (en) | 2007-04-25 | 2013-07-30 | Ceramtec Gmbh | Chip resistor substrate |
| DE102009015520A1 (de) * | 2009-04-02 | 2010-10-07 | Electrovac Ag | Metall-Keramik-Substrat |
| JP5537081B2 (ja) | 2009-07-28 | 2014-07-02 | 浜松ホトニクス株式会社 | 加工対象物切断方法 |
| US9035163B1 (en) | 2011-05-10 | 2015-05-19 | Soundbound, Inc. | System and method for targeting content based on identified audio and multimedia |
| DE102012102611B4 (de) * | 2012-02-15 | 2017-07-27 | Rogers Germany Gmbh | Metall-Keramik-Substrat sowie Verfahren zum Herstellen eines Metall-Keramik-Substrates |
| DE102012104903B4 (de) * | 2012-05-10 | 2023-07-13 | Rogers Germany Gmbh | Verfahren zum Herstellen von Metall-Keramik-Substraten sowie nach diesem Verfahren hergestelltes Metall-Keramik-Substrat |
| DE102013105528B4 (de) * | 2013-05-29 | 2021-09-02 | Rogers Germany Gmbh | Metall-Keramik-Substrat sowie Verfahren zum Herstellen eines Metall-Keramik-Substrates |
| US20190009362A1 (en) * | 2015-12-22 | 2019-01-10 | Heraeus Deutschland GmbH & Co. KG | Method for producing a metal-ceramic substrate with picolaser |
| JP6853455B2 (ja) * | 2017-02-23 | 2021-03-31 | 三菱マテリアル株式会社 | パワーモジュール用基板の製造方法 |
| TWI769254B (zh) * | 2017-05-16 | 2022-07-01 | 德商賀利氏德國有限責任兩合公司 | 具有低非晶形相之陶瓷金屬基板 |
| TWI651193B (zh) * | 2017-12-06 | 2019-02-21 | 李宜臻 | 金屬陶瓷積層散熱基板之製造方法、及包含該金屬陶瓷積層散熱基板之電子裝置及發光二極體 |
| CN111684584A (zh) * | 2018-02-01 | 2020-09-18 | 康宁股份有限公司 | 用于卷形式的电子封装和其他应用的单一化基材 |
| WO2019222330A2 (en) * | 2018-05-17 | 2019-11-21 | Corning Incorporated | Singulated electronic substrates on a flexible or rigid carrier and related methods |
| EP3799541A4 (en) * | 2018-05-23 | 2022-03-16 | Sumitomo Bakelite Co.Ltd. | Method for manufacturing circuit board |
| US20200368804A1 (en) * | 2019-05-24 | 2020-11-26 | Trusval Technology Co., Ltd. | Manufacturing process for heat sink composite having heat dissipation function and manufacturing method for its finished product |
| KR20220105849A (ko) * | 2021-01-21 | 2022-07-28 | 주식회사 엘엑스세미콘 | 인쇄회로용 기판의 제조방법 |
| CN116904913A (zh) * | 2023-08-01 | 2023-10-20 | 江苏富乐华半导体科技股份有限公司 | 一种dcb的铜片氧化方法 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3556366A (en) * | 1969-05-01 | 1971-01-19 | Teletype Corp | Methods of severing materials employing a thermal shock |
| DE2213115C3 (de) * | 1972-03-17 | 1975-12-04 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum hochfesten Verbinden von Keramiken aus Karbiden, einschließlich des Diamanten, Boriden, Nitriden oder Suiziden mit Metall nach dem Trocken-Lötverfahren |
| US3744120A (en) * | 1972-04-20 | 1973-07-10 | Gen Electric | Direct bonding of metals with a metal-gas eutectic |
| US3766634A (en) * | 1972-04-20 | 1973-10-23 | Gen Electric | Method of direct bonding metals to non-metallic substrates |
| JPH0810710B2 (ja) | 1984-02-24 | 1996-01-31 | 株式会社東芝 | 良熱伝導性基板の製造方法 |
| JPH04331781A (ja) * | 1990-11-29 | 1992-11-19 | Nippon Carbide Ind Co Inc | セラミックス複合体 |
| RU2024441C1 (ru) * | 1992-04-02 | 1994-12-15 | Владимир Степанович Кондратенко | Способ резки неметаллических материалов |
| EP0613765B1 (de) * | 1993-03-02 | 1999-12-15 | CeramTec AG Innovative Ceramic Engineering | Verfahren zum Herstellen von unterteilbaren Platten aus sprödem Material mit hoher Genauigkeit |
| EP0862209B1 (de) * | 1997-03-01 | 2009-12-16 | Electrovac AG | Verfahren zum Herstellen eines Metall-Keramik-Substrates |
| US6207221B1 (en) * | 1997-03-01 | 2001-03-27 | Jürgen Schulz-Harder | Process for producing a metal-ceramic substrate and a metal-ceramic substrate |
| MY120533A (en) * | 1997-04-14 | 2005-11-30 | Schott Ag | Method and apparatus for cutting through a flat workpiece made of brittle material, especially glass. |
| US6211488B1 (en) * | 1998-12-01 | 2001-04-03 | Accudyne Display And Semiconductor Systems, Inc. | Method and apparatus for separating non-metallic substrates utilizing a laser initiated scribe |
| US6420678B1 (en) * | 1998-12-01 | 2002-07-16 | Brian L. Hoekstra | Method for separating non-metallic substrates |
| DE19927046B4 (de) * | 1999-06-14 | 2007-01-25 | Electrovac Ag | Keramik-Metall-Substrat als Mehrfachsubstrat |
| JP2001176820A (ja) * | 1999-12-15 | 2001-06-29 | Hitachi Cable Ltd | 基板の加工方法及びその加工装置 |
| JP3404352B2 (ja) * | 2000-03-29 | 2003-05-06 | 京セラ株式会社 | 多数個取りセラミック配線基板 |
| US6444499B1 (en) * | 2000-03-30 | 2002-09-03 | Amkor Technology, Inc. | Method for fabricating a snapable multi-package array substrate, snapable multi-package array and snapable packaged electronic components |
| JP4886937B2 (ja) * | 2001-05-17 | 2012-02-29 | リンテック株式会社 | ダイシングシート及びダイシング方法 |
| KR100701013B1 (ko) * | 2001-05-21 | 2007-03-29 | 삼성전자주식회사 | 레이저 빔을 이용한 비금속 기판의 절단방법 및 장치 |
| JP2003088973A (ja) * | 2001-09-12 | 2003-03-25 | Hamamatsu Photonics Kk | レーザ加工方法 |
| JP3886756B2 (ja) * | 2001-09-13 | 2007-02-28 | 独立行政法人科学技術振興機構 | レーザ割断方法およびその方法を使用したレンズまたはレンズ型を製造する方法ならびにその製造方法によって成形されたレンズ、レンズ型 |
| TW568809B (en) * | 2001-09-21 | 2004-01-01 | Mitsuboshi Diamond Ind Co Ltd | Method for scribing substrate of brittle material and scriber |
-
2003
- 2003-06-16 DE DE10327360A patent/DE10327360B4/de not_active Expired - Fee Related
-
2004
- 2004-05-14 WO PCT/DE2004/001012 patent/WO2004113041A2/de not_active Ceased
- 2004-05-14 US US10/560,525 patent/US20060183298A1/en not_active Abandoned
- 2004-05-14 EP EP04732932A patent/EP1634326A2/de not_active Withdrawn
- 2004-05-14 JP JP2006515661A patent/JP5047615B2/ja not_active Expired - Fee Related
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