JP2006527666A5 - - Google Patents

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Publication number
JP2006527666A5
JP2006527666A5 JP2006515661A JP2006515661A JP2006527666A5 JP 2006527666 A5 JP2006527666 A5 JP 2006527666A5 JP 2006515661 A JP2006515661 A JP 2006515661A JP 2006515661 A JP2006515661 A JP 2006515661A JP 2006527666 A5 JP2006527666 A5 JP 2006527666A5
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JP
Japan
Prior art keywords
metal
ceramic
ceramic substrate
ceramic layer
production process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2006515661A
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English (en)
Japanese (ja)
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JP2006527666A (ja
JP5047615B2 (ja
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Publication date
Priority claimed from DE10327360A external-priority patent/DE10327360B4/de
Application filed filed Critical
Publication of JP2006527666A publication Critical patent/JP2006527666A/ja
Publication of JP2006527666A5 publication Critical patent/JP2006527666A5/ja
Application granted granted Critical
Publication of JP5047615B2 publication Critical patent/JP5047615B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2006515661A 2003-06-16 2004-05-14 セラミック金属基板の製造方法 Expired - Fee Related JP5047615B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10327360.3 2003-06-16
DE10327360A DE10327360B4 (de) 2003-06-16 2003-06-16 Verfahren zum Herstellen eines Keramik-Metall-Substrates
PCT/DE2004/001012 WO2004113041A2 (de) 2003-06-16 2004-05-14 Verfahren zum herstellen eines keramik-metall-substrates

Publications (3)

Publication Number Publication Date
JP2006527666A JP2006527666A (ja) 2006-12-07
JP2006527666A5 true JP2006527666A5 (enExample) 2007-03-29
JP5047615B2 JP5047615B2 (ja) 2012-10-10

Family

ID=33495108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006515661A Expired - Fee Related JP5047615B2 (ja) 2003-06-16 2004-05-14 セラミック金属基板の製造方法

Country Status (5)

Country Link
US (1) US20060183298A1 (enExample)
EP (1) EP1634326A2 (enExample)
JP (1) JP5047615B2 (enExample)
DE (1) DE10327360B4 (enExample)
WO (1) WO2004113041A2 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005022160A1 (de) * 2005-05-13 2006-11-16 Daimlerchrysler Ag Ölpumpe mit integrierter Stromregeleinrichtung
US20080070378A1 (en) * 2006-09-19 2008-03-20 Jong-Souk Yeo Dual laser separation of bonded wafers
US20100320249A1 (en) * 2007-02-28 2010-12-23 Claus Peter Kluge Method for producing a component using asymmetrical energy input along the parting or predetermined breaking line
US8496866B2 (en) 2007-04-25 2013-07-30 Ceramtec Gmbh Chip resistor substrate
DE102009015520A1 (de) * 2009-04-02 2010-10-07 Electrovac Ag Metall-Keramik-Substrat
JP5537081B2 (ja) 2009-07-28 2014-07-02 浜松ホトニクス株式会社 加工対象物切断方法
US9035163B1 (en) 2011-05-10 2015-05-19 Soundbound, Inc. System and method for targeting content based on identified audio and multimedia
DE102012102611B4 (de) * 2012-02-15 2017-07-27 Rogers Germany Gmbh Metall-Keramik-Substrat sowie Verfahren zum Herstellen eines Metall-Keramik-Substrates
DE102012104903B4 (de) * 2012-05-10 2023-07-13 Rogers Germany Gmbh Verfahren zum Herstellen von Metall-Keramik-Substraten sowie nach diesem Verfahren hergestelltes Metall-Keramik-Substrat
DE102013105528B4 (de) * 2013-05-29 2021-09-02 Rogers Germany Gmbh Metall-Keramik-Substrat sowie Verfahren zum Herstellen eines Metall-Keramik-Substrates
US20190009362A1 (en) * 2015-12-22 2019-01-10 Heraeus Deutschland GmbH & Co. KG Method for producing a metal-ceramic substrate with picolaser
JP6853455B2 (ja) * 2017-02-23 2021-03-31 三菱マテリアル株式会社 パワーモジュール用基板の製造方法
TWI769254B (zh) * 2017-05-16 2022-07-01 德商賀利氏德國有限責任兩合公司 具有低非晶形相之陶瓷金屬基板
TWI651193B (zh) * 2017-12-06 2019-02-21 李宜臻 金屬陶瓷積層散熱基板之製造方法、及包含該金屬陶瓷積層散熱基板之電子裝置及發光二極體
CN111684584A (zh) * 2018-02-01 2020-09-18 康宁股份有限公司 用于卷形式的电子封装和其他应用的单一化基材
WO2019222330A2 (en) * 2018-05-17 2019-11-21 Corning Incorporated Singulated electronic substrates on a flexible or rigid carrier and related methods
EP3799541A4 (en) * 2018-05-23 2022-03-16 Sumitomo Bakelite Co.Ltd. Method for manufacturing circuit board
US20200368804A1 (en) * 2019-05-24 2020-11-26 Trusval Technology Co., Ltd. Manufacturing process for heat sink composite having heat dissipation function and manufacturing method for its finished product
KR20220105849A (ko) * 2021-01-21 2022-07-28 주식회사 엘엑스세미콘 인쇄회로용 기판의 제조방법
CN116904913A (zh) * 2023-08-01 2023-10-20 江苏富乐华半导体科技股份有限公司 一种dcb的铜片氧化方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3556366A (en) * 1969-05-01 1971-01-19 Teletype Corp Methods of severing materials employing a thermal shock
DE2213115C3 (de) * 1972-03-17 1975-12-04 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum hochfesten Verbinden von Keramiken aus Karbiden, einschließlich des Diamanten, Boriden, Nitriden oder Suiziden mit Metall nach dem Trocken-Lötverfahren
US3744120A (en) * 1972-04-20 1973-07-10 Gen Electric Direct bonding of metals with a metal-gas eutectic
US3766634A (en) * 1972-04-20 1973-10-23 Gen Electric Method of direct bonding metals to non-metallic substrates
JPH0810710B2 (ja) 1984-02-24 1996-01-31 株式会社東芝 良熱伝導性基板の製造方法
JPH04331781A (ja) * 1990-11-29 1992-11-19 Nippon Carbide Ind Co Inc セラミックス複合体
RU2024441C1 (ru) * 1992-04-02 1994-12-15 Владимир Степанович Кондратенко Способ резки неметаллических материалов
EP0613765B1 (de) * 1993-03-02 1999-12-15 CeramTec AG Innovative Ceramic Engineering Verfahren zum Herstellen von unterteilbaren Platten aus sprödem Material mit hoher Genauigkeit
EP0862209B1 (de) * 1997-03-01 2009-12-16 Electrovac AG Verfahren zum Herstellen eines Metall-Keramik-Substrates
US6207221B1 (en) * 1997-03-01 2001-03-27 Jürgen Schulz-Harder Process for producing a metal-ceramic substrate and a metal-ceramic substrate
MY120533A (en) * 1997-04-14 2005-11-30 Schott Ag Method and apparatus for cutting through a flat workpiece made of brittle material, especially glass.
US6211488B1 (en) * 1998-12-01 2001-04-03 Accudyne Display And Semiconductor Systems, Inc. Method and apparatus for separating non-metallic substrates utilizing a laser initiated scribe
US6420678B1 (en) * 1998-12-01 2002-07-16 Brian L. Hoekstra Method for separating non-metallic substrates
DE19927046B4 (de) * 1999-06-14 2007-01-25 Electrovac Ag Keramik-Metall-Substrat als Mehrfachsubstrat
JP2001176820A (ja) * 1999-12-15 2001-06-29 Hitachi Cable Ltd 基板の加工方法及びその加工装置
JP3404352B2 (ja) * 2000-03-29 2003-05-06 京セラ株式会社 多数個取りセラミック配線基板
US6444499B1 (en) * 2000-03-30 2002-09-03 Amkor Technology, Inc. Method for fabricating a snapable multi-package array substrate, snapable multi-package array and snapable packaged electronic components
JP4886937B2 (ja) * 2001-05-17 2012-02-29 リンテック株式会社 ダイシングシート及びダイシング方法
KR100701013B1 (ko) * 2001-05-21 2007-03-29 삼성전자주식회사 레이저 빔을 이용한 비금속 기판의 절단방법 및 장치
JP2003088973A (ja) * 2001-09-12 2003-03-25 Hamamatsu Photonics Kk レーザ加工方法
JP3886756B2 (ja) * 2001-09-13 2007-02-28 独立行政法人科学技術振興機構 レーザ割断方法およびその方法を使用したレンズまたはレンズ型を製造する方法ならびにその製造方法によって成形されたレンズ、レンズ型
TW568809B (en) * 2001-09-21 2004-01-01 Mitsuboshi Diamond Ind Co Ltd Method for scribing substrate of brittle material and scriber

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