JP2006520443A - ゲルマンの分解を抑制する装置及び方法 - Google Patents

ゲルマンの分解を抑制する装置及び方法 Download PDF

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Publication number
JP2006520443A
JP2006520443A JP2004548473A JP2004548473A JP2006520443A JP 2006520443 A JP2006520443 A JP 2006520443A JP 2004548473 A JP2004548473 A JP 2004548473A JP 2004548473 A JP2004548473 A JP 2004548473A JP 2006520443 A JP2006520443 A JP 2006520443A
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Japan
Prior art keywords
germane
gas
storage
activated carbon
adsorbent medium
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JP2004548473A
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Japanese (ja)
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JP2006520443A5 (https=
Inventor
スターム，エドワード
ワン，ルピン
ディーツ，ジェームス
Original Assignee
アドバンスド テクノロジー マテリアルズ，インコーポレイテッド
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Application filed by アドバンスド テクノロジー マテリアルズ，インコーポレイテッド filed Critical アドバンスド テクノロジー マテリアルズ，インコーポレイテッド
Publication of JP2006520443A publication Critical patent/JP2006520443A/ja
Publication of JP2006520443A5 publication Critical patent/JP2006520443A5/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D59/00—Separation of different isotopes of the same chemical element
    • B01D59/22—Separation by extracting
    • B01D59/26—Separation by extracting by sorption, i.e. absorption, adsorption, persorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40086—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by using a purge gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/45—Gas separation or purification devices adapted for specific applications
    • B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S95/00—Gas separation: processes
    • Y10S95/90—Solid sorbent
    • Y10S95/901—Activated carbon

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Treating Waste Gases (AREA)
JP2004548473A 2002-10-29 2003-10-27 ゲルマンの分解を抑制する装置及び方法 Pending JP2006520443A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/282,377 US6716271B1 (en) 2002-10-29 2002-10-29 Apparatus and method for inhibiting decomposition of germane
PCT/US2003/033836 WO2004039478A1 (en) 2002-10-29 2003-10-27 Apparatus and method for inhibiting decomposition of germane

Publications (2)

Publication Number Publication Date
JP2006520443A true JP2006520443A (ja) 2006-09-07
JP2006520443A5 JP2006520443A5 (https=) 2010-03-18

Family

ID=32030425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004548473A Pending JP2006520443A (ja) 2002-10-29 2003-10-27 ゲルマンの分解を抑制する装置及び方法

Country Status (9)

Country Link
US (1) US6716271B1 (https=)
EP (1) EP1558363B1 (https=)
JP (1) JP2006520443A (https=)
KR (1) KR101097577B1 (https=)
AT (1) ATE511909T1 (https=)
AU (1) AU2003286671A1 (https=)
MY (1) MY131132A (https=)
TW (1) TWI305154B (https=)
WO (1) WO2004039478A1 (https=)

Families Citing this family (17)

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Publication number Priority date Publication date Assignee Title
WO2005037421A2 (en) * 2003-10-14 2005-04-28 Advanced Technology Materials, Inc. Hydrogen generation
US7087102B2 (en) * 2004-02-26 2006-08-08 Air Products And Chemicals, Inc. Process for purification of germane
US7955797B2 (en) 2004-10-25 2011-06-07 Advanced Technology Materials, Inc. Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
CN102284224A (zh) * 2005-05-03 2011-12-21 高级技术材料公司 流体供应系统、熏蒸系统以及供应流体用于应用的方法
CN101277872A (zh) * 2005-08-22 2008-10-01 高级技术材料公司 材料密封系统
CN102600808A (zh) * 2006-01-30 2012-07-25 高级技术材料公司 纳米多孔碳材料，以及利用其的系统和方法
KR101524324B1 (ko) 2007-06-22 2015-06-04 인티그리스, 인코포레이티드 태양열 흡착식 냉각 시스템용 구성요소 및 그 구성요소 제조 방법
JP5701217B2 (ja) * 2008-11-17 2015-04-15 ヴォルタイクス インコーポレイテッド ゲルマン精製
US8330136B2 (en) 2008-12-05 2012-12-11 Advanced Technology Materials, Inc. High concentration nitrogen-containing germanium telluride based memory devices and processes of making
US8410468B2 (en) * 2009-07-02 2013-04-02 Advanced Technology Materials, Inc. Hollow GST structure with dielectric fill
US9012876B2 (en) 2010-03-26 2015-04-21 Entegris, Inc. Germanium antimony telluride materials and devices incorporating same
WO2011146913A2 (en) 2010-05-21 2011-11-24 Advanced Technology Materials, Inc. Germanium antimony telluride materials and devices incorporating same
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
EP2688626B1 (en) * 2011-03-24 2018-08-15 Medclair AB System for collecting nitrous oxide in exhalation air
US9640757B2 (en) 2012-10-30 2017-05-02 Entegris, Inc. Double self-aligned phase change memory device structure
EP4150045A1 (en) 2020-05-12 2023-03-22 PBS Biotech, Inc. Material transfer devices and related systems and methods
CN118265869A (zh) * 2021-09-29 2024-06-28 恩特格里斯公司 具有高纯度气体输送的吸附剂型储运容器及相关方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1182891A (ja) * 1997-02-17 1999-03-26 Takachiho Kagaku Kogyo Kk 気体の貯蔵・送出方法及び気体の貯蔵・送出装置
JPH11511233A (ja) * 1996-05-20 1999-09-28 アドバンスド．テクノロジー．マテリアルズ．インコーポレイテッド 高能力の物理的吸着剤からなる流体貯蔵ならびに搬送システム
JP2002515570A (ja) * 1998-05-21 2002-05-28 アドバンスド．テクノロジー．マテリアルズ．インコーポレイテッド 高純度ガスを放出するための収着型ガス貯蔵および放出システム

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US5518528A (en) 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US6083298A (en) 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US5837027A (en) * 1996-05-20 1998-11-17 Advanced Technology Materials, Inc. Manufacturing process for gas source and dispensing systems
US5676735A (en) * 1996-10-31 1997-10-14 Advanced Technology Materials, Inc. Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas
US5980608A (en) 1998-01-07 1999-11-09 Advanced Technology Materials, Inc. Throughflow gas storage and dispensing system
US6406519B1 (en) * 1998-03-27 2002-06-18 Advanced Technology Materials, Inc. Gas cabinet assembly comprising sorbent-based gas storage and delivery system
US6453924B1 (en) * 2000-07-24 2002-09-24 Advanced Technology Materials, Inc. Fluid distribution system and process, and semiconductor fabrication facility utilizing same
US6101816A (en) 1998-04-28 2000-08-15 Advanced Technology Materials, Inc. Fluid storage and dispensing system
JP2001248794A (ja) * 2000-03-02 2001-09-14 Kansai Electric Power Co Inc:The オゾン貯蔵方法および装置
US6547861B2 (en) * 2000-12-26 2003-04-15 Matheson Tri-Gas,, Inc. Method and materials for purifying reactive gases using preconditioned ultra-low emission carbon material
US6425946B1 (en) * 2000-12-26 2002-07-30 Matheson Tri-Gas, Inc. Method and apparatus for removing trace impurities from a gas using superactivated carbon material
US6592653B2 (en) * 2001-11-12 2003-07-15 Advanced Technology Materials, Inc. Fluid storage and delivery system utilizing low heels carbon sorbent medium

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11511233A (ja) * 1996-05-20 1999-09-28 アドバンスド．テクノロジー．マテリアルズ．インコーポレイテッド 高能力の物理的吸着剤からなる流体貯蔵ならびに搬送システム
JPH1182891A (ja) * 1997-02-17 1999-03-26 Takachiho Kagaku Kogyo Kk 気体の貯蔵・送出方法及び気体の貯蔵・送出装置
JP2002515570A (ja) * 1998-05-21 2002-05-28 アドバンスド．テクノロジー．マテリアルズ．インコーポレイテッド 高純度ガスを放出するための収着型ガス貯蔵および放出システム

Also Published As

Publication number Publication date
EP1558363B1 (en) 2011-06-08
WO2004039478B1 (en) 2006-03-23
MY131132A (en) 2007-07-31
US6716271B1 (en) 2004-04-06
KR20050062780A (ko) 2005-06-27
KR101097577B1 (ko) 2015-11-24
AU2003286671A1 (en) 2004-05-25
AU2003286671A8 (en) 2004-05-25
TW200413080A (en) 2004-08-01
EP1558363A1 (en) 2005-08-03
TWI305154B (en) 2009-01-11
EP1558363A4 (en) 2007-01-24
WO2004039478A1 (en) 2004-05-13
ATE511909T1 (de) 2011-06-15

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