JP2006520443A5 - - Google Patents
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- Publication number
- JP2006520443A5 JP2006520443A5 JP2004548473A JP2004548473A JP2006520443A5 JP 2006520443 A5 JP2006520443 A5 JP 2006520443A5 JP 2004548473 A JP2004548473 A JP 2004548473A JP 2004548473 A JP2004548473 A JP 2004548473A JP 2006520443 A5 JP2006520443 A5 JP 2006520443A5
- Authority
- JP
- Japan
- Prior art keywords
- germane
- storage
- gas
- activated carbon
- adsorbent medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 64
- 229910000078 germane Inorganic materials 0.000 claims 64
- 239000003463 adsorbent Substances 0.000 claims 46
- 239000007789 gas Substances 0.000 claims 39
- 239000000463 material Substances 0.000 claims 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 4
- 229910052739 hydrogen Inorganic materials 0.000 claims 4
- 239000001257 hydrogen Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 238000004200 deflagration Methods 0.000 claims 3
- 239000011324 bead Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 2
- 238000003795 desorption Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 2
- 238000000197 pyrolysis Methods 0.000 claims 2
- 241000264877 Hippospongia communis Species 0.000 claims 1
- 239000013032 Hydrocarbon resin Substances 0.000 claims 1
- 230000004913 activation Effects 0.000 claims 1
- 239000002131 composite material Substances 0.000 claims 1
- 238000000354 decomposition reaction Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 239000004744 fabric Substances 0.000 claims 1
- -1 fines Substances 0.000 claims 1
- 229920006270 hydrocarbon resin Polymers 0.000 claims 1
- 150000002431 hydrogen Chemical class 0.000 claims 1
- 230000001404 mediated effect Effects 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 229930014626 natural product Natural products 0.000 claims 1
- 238000002161 passivation Methods 0.000 claims 1
- 239000008188 pellet Substances 0.000 claims 1
- 238000010926 purge Methods 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/282,377 US6716271B1 (en) | 2002-10-29 | 2002-10-29 | Apparatus and method for inhibiting decomposition of germane |
| PCT/US2003/033836 WO2004039478A1 (en) | 2002-10-29 | 2003-10-27 | Apparatus and method for inhibiting decomposition of germane |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006520443A JP2006520443A (ja) | 2006-09-07 |
| JP2006520443A5 true JP2006520443A5 (https=) | 2010-03-18 |
Family
ID=32030425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004548473A Pending JP2006520443A (ja) | 2002-10-29 | 2003-10-27 | ゲルマンの分解を抑制する装置及び方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6716271B1 (https=) |
| EP (1) | EP1558363B1 (https=) |
| JP (1) | JP2006520443A (https=) |
| KR (1) | KR101097577B1 (https=) |
| AT (1) | ATE511909T1 (https=) |
| AU (1) | AU2003286671A1 (https=) |
| MY (1) | MY131132A (https=) |
| TW (1) | TWI305154B (https=) |
| WO (1) | WO2004039478A1 (https=) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005037421A2 (en) * | 2003-10-14 | 2005-04-28 | Advanced Technology Materials, Inc. | Hydrogen generation |
| US7087102B2 (en) * | 2004-02-26 | 2006-08-08 | Air Products And Chemicals, Inc. | Process for purification of germane |
| US7955797B2 (en) | 2004-10-25 | 2011-06-07 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel |
| CN102284224A (zh) * | 2005-05-03 | 2011-12-21 | 高级技术材料公司 | 流体供应系统、熏蒸系统以及供应流体用于应用的方法 |
| CN101277872A (zh) * | 2005-08-22 | 2008-10-01 | 高级技术材料公司 | 材料密封系统 |
| CN102600808A (zh) * | 2006-01-30 | 2012-07-25 | 高级技术材料公司 | 纳米多孔碳材料，以及利用其的系统和方法 |
| KR101524324B1 (ko) | 2007-06-22 | 2015-06-04 | 인티그리스, 인코포레이티드 | 태양열 흡착식 냉각 시스템용 구성요소 및 그 구성요소 제조 방법 |
| JP5701217B2 (ja) * | 2008-11-17 | 2015-04-15 | ヴォルタイクス インコーポレイテッド | ゲルマン精製 |
| US8330136B2 (en) | 2008-12-05 | 2012-12-11 | Advanced Technology Materials, Inc. | High concentration nitrogen-containing germanium telluride based memory devices and processes of making |
| US8410468B2 (en) * | 2009-07-02 | 2013-04-02 | Advanced Technology Materials, Inc. | Hollow GST structure with dielectric fill |
| US9012876B2 (en) | 2010-03-26 | 2015-04-21 | Entegris, Inc. | Germanium antimony telluride materials and devices incorporating same |
| WO2011146913A2 (en) | 2010-05-21 | 2011-11-24 | Advanced Technology Materials, Inc. | Germanium antimony telluride materials and devices incorporating same |
| US8679231B2 (en) | 2011-01-19 | 2014-03-25 | Advanced Technology Materials, Inc. | PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same |
| EP2688626B1 (en) * | 2011-03-24 | 2018-08-15 | Medclair AB | System for collecting nitrous oxide in exhalation air |
| US9640757B2 (en) | 2012-10-30 | 2017-05-02 | Entegris, Inc. | Double self-aligned phase change memory device structure |
| EP4150045A1 (en) | 2020-05-12 | 2023-03-22 | PBS Biotech, Inc. | Material transfer devices and related systems and methods |
| CN118265869A (zh) * | 2021-09-29 | 2024-06-28 | 恩特格里斯公司 | 具有高纯度气体输送的吸附剂型储运容器及相关方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5518528A (en) | 1994-10-13 | 1996-05-21 | Advanced Technology Materials, Inc. | Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds |
| US6132492A (en) | 1994-10-13 | 2000-10-17 | Advanced Technology Materials, Inc. | Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same |
| US6083298A (en) | 1994-10-13 | 2000-07-04 | Advanced Technology Materials, Inc. | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
| US5837027A (en) * | 1996-05-20 | 1998-11-17 | Advanced Technology Materials, Inc. | Manufacturing process for gas source and dispensing systems |
| WO1997044118A1 (en) * | 1996-05-20 | 1997-11-27 | Advanced Technology Materials, Inc. | Fluid storage and delivery system comprising high work capacity physical sorbent |
| US5676735A (en) * | 1996-10-31 | 1997-10-14 | Advanced Technology Materials, Inc. | Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas |
| JP3021412B2 (ja) * | 1997-02-17 | 2000-03-15 | 高千穂化学工業株式会社 | 気体の貯蔵・送出方法及び気体の貯蔵・送出装置 |
| US5980608A (en) | 1998-01-07 | 1999-11-09 | Advanced Technology Materials, Inc. | Throughflow gas storage and dispensing system |
| US6406519B1 (en) * | 1998-03-27 | 2002-06-18 | Advanced Technology Materials, Inc. | Gas cabinet assembly comprising sorbent-based gas storage and delivery system |
| US6453924B1 (en) * | 2000-07-24 | 2002-09-24 | Advanced Technology Materials, Inc. | Fluid distribution system and process, and semiconductor fabrication facility utilizing same |
| US6101816A (en) | 1998-04-28 | 2000-08-15 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system |
| JP2001248794A (ja) * | 2000-03-02 | 2001-09-14 | Kansai Electric Power Co Inc:The | オゾン貯蔵方法および装置 |
| US6547861B2 (en) * | 2000-12-26 | 2003-04-15 | Matheson Tri-Gas,, Inc. | Method and materials for purifying reactive gases using preconditioned ultra-low emission carbon material |
| US6425946B1 (en) * | 2000-12-26 | 2002-07-30 | Matheson Tri-Gas, Inc. | Method and apparatus for removing trace impurities from a gas using superactivated carbon material |
| US6592653B2 (en) * | 2001-11-12 | 2003-07-15 | Advanced Technology Materials, Inc. | Fluid storage and delivery system utilizing low heels carbon sorbent medium |
-
2002
- 2002-10-29 US US10/282,377 patent/US6716271B1/en not_active Expired - Lifetime
-
2003
- 2003-10-27 KR KR1020057007442A patent/KR101097577B1/ko not_active Expired - Lifetime
- 2003-10-27 AU AU2003286671A patent/AU2003286671A1/en not_active Abandoned
- 2003-10-27 EP EP03777881A patent/EP1558363B1/en not_active Expired - Lifetime
- 2003-10-27 WO PCT/US2003/033836 patent/WO2004039478A1/en not_active Ceased
- 2003-10-27 AT AT03777881T patent/ATE511909T1/de not_active IP Right Cessation
- 2003-10-27 JP JP2004548473A patent/JP2006520443A/ja active Pending
- 2003-10-27 TW TW092129740A patent/TWI305154B/zh not_active IP Right Cessation
- 2003-10-27 MY MYPI20034080A patent/MY131132A/en unknown
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