KR101097577B1 - 게르마늄수소화물의 분해를 억제하기 위한 장치 및 방법 - Google Patents

게르마늄수소화물의 분해를 억제하기 위한 장치 및 방법 Download PDF

Info

Publication number
KR101097577B1
KR101097577B1 KR1020057007442A KR20057007442A KR101097577B1 KR 101097577 B1 KR101097577 B1 KR 101097577B1 KR 1020057007442 A KR1020057007442 A KR 1020057007442A KR 20057007442 A KR20057007442 A KR 20057007442A KR 101097577 B1 KR101097577 B1 KR 101097577B1
Authority
KR
South Korea
Prior art keywords
germanium hydride
gas
activated carbon
storage
adsorption medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020057007442A
Other languages
English (en)
Korean (ko)
Other versions
KR20050062780A (ko
Inventor
에드워드 스텀
루핑 왕
제임스 디에츠
Original Assignee
인티그리스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 인티그리스, 인코포레이티드 filed Critical 인티그리스, 인코포레이티드
Publication of KR20050062780A publication Critical patent/KR20050062780A/ko
Assigned to 인티그리스, 인코포레이티드 reassignment 인티그리스, 인코포레이티드 권리의 전부이전등록 Assignors: 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드
Application granted granted Critical
Publication of KR101097577B1 publication Critical patent/KR101097577B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D59/00—Separation of different isotopes of the same chemical element
    • B01D59/22—Separation by extracting
    • B01D59/26—Separation by extracting by sorption, i.e. absorption, adsorption, persorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40086—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by using a purge gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/45—Gas separation or purification devices adapted for specific applications
    • B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S95/00—Gas separation: processes
    • Y10S95/90—Solid sorbent
    • Y10S95/901—Activated carbon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Treating Waste Gases (AREA)
KR1020057007442A 2002-10-29 2003-10-27 게르마늄수소화물의 분해를 억제하기 위한 장치 및 방법 Expired - Lifetime KR101097577B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/282,377 2002-10-29
US10/282,377 US6716271B1 (en) 2002-10-29 2002-10-29 Apparatus and method for inhibiting decomposition of germane

Publications (2)

Publication Number Publication Date
KR20050062780A KR20050062780A (ko) 2005-06-27
KR101097577B1 true KR101097577B1 (ko) 2015-11-24

Family

ID=32030425

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057007442A Expired - Lifetime KR101097577B1 (ko) 2002-10-29 2003-10-27 게르마늄수소화물의 분해를 억제하기 위한 장치 및 방법

Country Status (9)

Country Link
US (1) US6716271B1 (https=)
EP (1) EP1558363B1 (https=)
JP (1) JP2006520443A (https=)
KR (1) KR101097577B1 (https=)
AT (1) ATE511909T1 (https=)
AU (1) AU2003286671A1 (https=)
MY (1) MY131132A (https=)
TW (1) TWI305154B (https=)
WO (1) WO2004039478A1 (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005037421A2 (en) * 2003-10-14 2005-04-28 Advanced Technology Materials, Inc. Hydrogen generation
US7087102B2 (en) * 2004-02-26 2006-08-08 Air Products And Chemicals, Inc. Process for purification of germane
US7955797B2 (en) 2004-10-25 2011-06-07 Advanced Technology Materials, Inc. Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
CN102284224A (zh) * 2005-05-03 2011-12-21 高级技术材料公司 流体供应系统、熏蒸系统以及供应流体用于应用的方法
CN101277872A (zh) * 2005-08-22 2008-10-01 高级技术材料公司 材料密封系统
CN102600808A (zh) * 2006-01-30 2012-07-25 高级技术材料公司 纳米多孔碳材料，以及利用其的系统和方法
KR101524324B1 (ko) 2007-06-22 2015-06-04 인티그리스, 인코포레이티드 태양열 흡착식 냉각 시스템용 구성요소 및 그 구성요소 제조 방법
JP5701217B2 (ja) * 2008-11-17 2015-04-15 ヴォルタイクス インコーポレイテッド ゲルマン精製
US8330136B2 (en) 2008-12-05 2012-12-11 Advanced Technology Materials, Inc. High concentration nitrogen-containing germanium telluride based memory devices and processes of making
US8410468B2 (en) * 2009-07-02 2013-04-02 Advanced Technology Materials, Inc. Hollow GST structure with dielectric fill
US9012876B2 (en) 2010-03-26 2015-04-21 Entegris, Inc. Germanium antimony telluride materials and devices incorporating same
WO2011146913A2 (en) 2010-05-21 2011-11-24 Advanced Technology Materials, Inc. Germanium antimony telluride materials and devices incorporating same
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
EP2688626B1 (en) * 2011-03-24 2018-08-15 Medclair AB System for collecting nitrous oxide in exhalation air
US9640757B2 (en) 2012-10-30 2017-05-02 Entegris, Inc. Double self-aligned phase change memory device structure
EP4150045A1 (en) 2020-05-12 2023-03-22 PBS Biotech, Inc. Material transfer devices and related systems and methods
CN118265869A (zh) * 2021-09-29 2024-06-28 恩特格里斯公司 具有高纯度气体输送的吸附剂型储运容器及相关方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002515570A (ja) 1998-05-21 2002-05-28 アドバンスド．テクノロジー．マテリアルズ．インコーポレイテッド 高純度ガスを放出するための収着型ガス貯蔵および放出システム

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5518528A (en) 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US6083298A (en) 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US5837027A (en) * 1996-05-20 1998-11-17 Advanced Technology Materials, Inc. Manufacturing process for gas source and dispensing systems
WO1997044118A1 (en) * 1996-05-20 1997-11-27 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
US5676735A (en) * 1996-10-31 1997-10-14 Advanced Technology Materials, Inc. Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas
JP3021412B2 (ja) * 1997-02-17 2000-03-15 高千穂化学工業株式会社 気体の貯蔵・送出方法及び気体の貯蔵・送出装置
US5980608A (en) 1998-01-07 1999-11-09 Advanced Technology Materials, Inc. Throughflow gas storage and dispensing system
US6406519B1 (en) * 1998-03-27 2002-06-18 Advanced Technology Materials, Inc. Gas cabinet assembly comprising sorbent-based gas storage and delivery system
US6453924B1 (en) * 2000-07-24 2002-09-24 Advanced Technology Materials, Inc. Fluid distribution system and process, and semiconductor fabrication facility utilizing same
US6101816A (en) 1998-04-28 2000-08-15 Advanced Technology Materials, Inc. Fluid storage and dispensing system
JP2001248794A (ja) * 2000-03-02 2001-09-14 Kansai Electric Power Co Inc:The オゾン貯蔵方法および装置
US6547861B2 (en) * 2000-12-26 2003-04-15 Matheson Tri-Gas,, Inc. Method and materials for purifying reactive gases using preconditioned ultra-low emission carbon material
US6425946B1 (en) * 2000-12-26 2002-07-30 Matheson Tri-Gas, Inc. Method and apparatus for removing trace impurities from a gas using superactivated carbon material
US6592653B2 (en) * 2001-11-12 2003-07-15 Advanced Technology Materials, Inc. Fluid storage and delivery system utilizing low heels carbon sorbent medium

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002515570A (ja) 1998-05-21 2002-05-28 アドバンスド．テクノロジー．マテリアルズ．インコーポレイテッド 高純度ガスを放出するための収着型ガス貯蔵および放出システム

Also Published As

Publication number Publication date
JP2006520443A (ja) 2006-09-07
EP1558363B1 (en) 2011-06-08
WO2004039478B1 (en) 2006-03-23
MY131132A (en) 2007-07-31
US6716271B1 (en) 2004-04-06
KR20050062780A (ko) 2005-06-27
AU2003286671A1 (en) 2004-05-25
AU2003286671A8 (en) 2004-05-25
TW200413080A (en) 2004-08-01
EP1558363A1 (en) 2005-08-03
TWI305154B (en) 2009-01-11
EP1558363A4 (en) 2007-01-24
WO2004039478A1 (en) 2004-05-13
ATE511909T1 (de) 2011-06-15

Similar Documents

Publication Publication Date Title
KR101097577B1 (ko) 게르마늄수소화물의 분해를 억제하기 위한 장치 및 방법
KR101412735B1 (ko) 유체 저장/분배, 탈황, 및 적외선 복사 방출에 유용한 탄소질 재료, 이를 이용하는 장치 및 방법
AU713214B2 (en) Fluid storage and delivery system comprising high work capacity physical sorbent
KR100416424B1 (ko) 유체 저장 및 분배 시스템
US5704967A (en) Fluid storage and delivery system comprising high work capacity physical sorbent
WO2000012196A9 (en) Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
JPH11264500A (ja) 気体化合物の貯蔵と送出のシステム
WO2003041843A1 (en) Fluid storage and delivery system utilizing low heels carbon sorbent medium
JP2006520443A5 (https=)
JP5542315B2 (ja) 高能力の物理的吸着剤からなる流体貯蔵ならびに搬送システム
US5989314A (en) Pressure swing adsorption air prepurifier
WO2015187864A1 (en) Thermal management of fluid storage and dispensing vessels
JP2009008265A5 (https=)
RU2079769C1 (ru) Способ уплотнения пористой массы в газовом баллоне и установка для его осуществления
JPH11351498A (ja) ボイルオフガス処理装置および液化天然ガス貯蔵装置

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20050428

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20081024

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20101105

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20110927

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20111215

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20111215

End annual number: 3

Start annual number: 1

FPAY Annual fee payment

Payment date: 20141125

Year of fee payment: 4

PR1001 Payment of annual fee

Payment date: 20141125

Start annual number: 4

End annual number: 4

PG1601 Publication of registration
FPAY Annual fee payment

Payment date: 20151203

Year of fee payment: 5

PR1001 Payment of annual fee

Payment date: 20151203

Start annual number: 5

End annual number: 5

FPAY Annual fee payment

Payment date: 20161124

Year of fee payment: 6

PR1001 Payment of annual fee

Payment date: 20161124

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20171129

Year of fee payment: 7

PR1001 Payment of annual fee

Payment date: 20171129

Start annual number: 7

End annual number: 7

PR1001 Payment of annual fee

Payment date: 20201201

Start annual number: 10

End annual number: 10

PR1001 Payment of annual fee

Payment date: 20211122

Start annual number: 11

End annual number: 11

PR1001 Payment of annual fee

Payment date: 20221123

Start annual number: 12

End annual number: 12

PC1801 Expiration of term

Termination date: 20240427

Termination category: Expiration of duration