KR101097577B1 - 게르마늄수소화물의 분해를 억제하기 위한 장치 및 방법 - Google Patents

게르마늄수소화물의 분해를 억제하기 위한 장치 및 방법 Download PDF

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KR101097577B1
KR101097577B1 KR1020057007442A KR20057007442A KR101097577B1 KR 101097577 B1 KR101097577 B1 KR 101097577B1 KR 1020057007442 A KR1020057007442 A KR 1020057007442A KR 20057007442 A KR20057007442 A KR 20057007442A KR 101097577 B1 KR101097577 B1 KR 101097577B1
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South Korea
Prior art keywords
germanium hydride
gas
activated carbon
storage
adsorption medium
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Korean (ko)
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KR20050062780A (ko
Inventor
에드워드 스텀
루핑 왕
제임스 디에츠
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인티그리스, 인코포레이티드
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Assigned to 인티그리스, 인코포레이티드 reassignment 인티그리스, 인코포레이티드 권리의 전부이전등록 Assignors: 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D59/00—Separation of different isotopes of the same chemical element
    • B01D59/22—Separation by extracting
    • B01D59/26—Separation by extracting by sorption, i.e. absorption, adsorption, persorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40086—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by using a purge gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/45—Gas separation or purification devices adapted for specific applications
    • B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S95/00—Gas separation: processes
    • Y10S95/90—Solid sorbent
    • Y10S95/901—Activated carbon

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Treating Waste Gases (AREA)
KR1020057007442A 2002-10-29 2003-10-27 게르마늄수소화물의 분해를 억제하기 위한 장치 및 방법 Expired - Lifetime KR101097577B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/282,377 US6716271B1 (en) 2002-10-29 2002-10-29 Apparatus and method for inhibiting decomposition of germane
US10/282,377 2002-10-29

Publications (2)

Publication Number Publication Date
KR20050062780A KR20050062780A (ko) 2005-06-27
KR101097577B1 true KR101097577B1 (ko) 2015-11-24

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KR1020057007442A Expired - Lifetime KR101097577B1 (ko) 2002-10-29 2003-10-27 게르마늄수소화물의 분해를 억제하기 위한 장치 및 방법

Country Status (9)

Country Link
US (1) US6716271B1 (https=)
EP (1) EP1558363B1 (https=)
JP (1) JP2006520443A (https=)
KR (1) KR101097577B1 (https=)
AT (1) ATE511909T1 (https=)
AU (1) AU2003286671A1 (https=)
MY (1) MY131132A (https=)
TW (1) TWI305154B (https=)
WO (1) WO2004039478A1 (https=)

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WO2005037421A2 (en) * 2003-10-14 2005-04-28 Advanced Technology Materials, Inc. Hydrogen generation
US7087102B2 (en) * 2004-02-26 2006-08-08 Air Products And Chemicals, Inc. Process for purification of germane
US7955797B2 (en) 2004-10-25 2011-06-07 Advanced Technology Materials, Inc. Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
CN102284224A (zh) * 2005-05-03 2011-12-21 高级技术材料公司 流体供应系统、熏蒸系统以及供应流体用于应用的方法
US20080245676A1 (en) * 2005-08-22 2008-10-09 Mcmanus James V Material Containment System
JP2009525180A (ja) * 2006-01-30 2009-07-09 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド 流体貯留／分配、脱硫、および赤外線放射に有用な炭素材料、ならびにそれを使用する装置および方法
KR101524324B1 (ko) * 2007-06-22 2015-06-04 인티그리스, 인코포레이티드 태양열 흡착식 냉각 시스템용 구성요소 및 그 구성요소 제조 방법
US8118913B2 (en) * 2008-11-17 2012-02-21 Voltaix, Llc Germane purification
WO2010065874A2 (en) 2008-12-05 2010-06-10 Atmi High concentration nitrogen-containing germanium telluride based memory devices and processes of making
US8410468B2 (en) * 2009-07-02 2013-04-02 Advanced Technology Materials, Inc. Hollow GST structure with dielectric fill
KR101706809B1 (ko) 2010-03-26 2017-02-15 엔테그리스, 아이엔씨. 게르마늄 안티몬 텔루라이드 물질 및 이를 포함하는 장치
US9190609B2 (en) 2010-05-21 2015-11-17 Entegris, Inc. Germanium antimony telluride materials and devices incorporating same
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
US20140020685A1 (en) * 2011-03-24 2014-01-23 Medclair AB System for collecting nitrous oxide in exhalation air
WO2014070682A1 (en) 2012-10-30 2014-05-08 Advaned Technology Materials, Inc. Double self-aligned phase change memory device structure
US12378514B2 (en) 2020-05-12 2025-08-05 Pbs Biotech, Inc. Material transfer devices and related systems and methods
WO2023055691A1 (en) * 2021-09-29 2023-04-06 Entegris, Inc. Adsorbent-type storage and delivery vessels with high purity delivery of gas, and related methods

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JP2002515570A (ja) 1998-05-21 2002-05-28 アドバンスド．テクノロジー．マテリアルズ．インコーポレイテッド 高純度ガスを放出するための収着型ガス貯蔵および放出システム

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US5518528A (en) * 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US6083298A (en) 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US5837027A (en) * 1996-05-20 1998-11-17 Advanced Technology Materials, Inc. Manufacturing process for gas source and dispensing systems
DE69718137T2 (de) * 1996-05-20 2003-10-09 Advanced Technology Materials, Inc. Flüssigkeitsbehälter und -abgabesystem mit physikalischem sorptionsmittel mit hoher kapazität
US5676735A (en) * 1996-10-31 1997-10-14 Advanced Technology Materials, Inc. Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas
JP3021412B2 (ja) * 1997-02-17 2000-03-15 高千穂化学工業株式会社 気体の貯蔵・送出方法及び気体の貯蔵・送出装置
US5980608A (en) 1998-01-07 1999-11-09 Advanced Technology Materials, Inc. Throughflow gas storage and dispensing system
US6406519B1 (en) * 1998-03-27 2002-06-18 Advanced Technology Materials, Inc. Gas cabinet assembly comprising sorbent-based gas storage and delivery system
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JP2002515570A (ja) 1998-05-21 2002-05-28 アドバンスド．テクノロジー．マテリアルズ．インコーポレイテッド 高純度ガスを放出するための収着型ガス貯蔵および放出システム

Also Published As

Publication number Publication date
WO2004039478A1 (en) 2004-05-13
JP2006520443A (ja) 2006-09-07
EP1558363A4 (en) 2007-01-24
TWI305154B (en) 2009-01-11
EP1558363A1 (en) 2005-08-03
US6716271B1 (en) 2004-04-06
TW200413080A (en) 2004-08-01
AU2003286671A1 (en) 2004-05-25
WO2004039478B1 (en) 2006-03-23
AU2003286671A8 (en) 2004-05-25
KR20050062780A (ko) 2005-06-27
ATE511909T1 (de) 2011-06-15
EP1558363B1 (en) 2011-06-08
MY131132A (en) 2007-07-31

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