ATE511909T1 - Vorrichtung und verfahren zum verhindern der zersetzung von monogerman - Google Patents
Vorrichtung und verfahren zum verhindern der zersetzung von monogermanInfo
- Publication number
- ATE511909T1 ATE511909T1 AT03777881T AT03777881T ATE511909T1 AT E511909 T1 ATE511909 T1 AT E511909T1 AT 03777881 T AT03777881 T AT 03777881T AT 03777881 T AT03777881 T AT 03777881T AT E511909 T1 ATE511909 T1 AT E511909T1
- Authority
- AT
- Austria
- Prior art keywords
- deflagration
- activated carbon
- germane
- gas
- sorbent medium
- Prior art date
Links
- 238000000354 decomposition reaction Methods 0.000 title 1
- QUZPNFFHZPRKJD-UHFFFAOYSA-N germane Chemical group [GeH4] QUZPNFFHZPRKJD-UHFFFAOYSA-N 0.000 title 1
- 229910052986 germanium hydride Inorganic materials 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 8
- 229910000078 germane Inorganic materials 0.000 abstract 7
- 239000002594 sorbent Substances 0.000 abstract 6
- 238000004200 deflagration Methods 0.000 abstract 5
- 238000002203 pretreatment Methods 0.000 abstract 1
- 230000000717 retained effect Effects 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D59/00—Separation of different isotopes of the same chemical element
- B01D59/22—Separation by extracting
- B01D59/26—Separation by extracting by sorption, i.e. absorption, adsorption, persorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
- B01D2259/40086—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by using a purge gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
- B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/45—Gas separation or purification devices adapted for specific applications
- B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S95/00—Gas separation: processes
- Y10S95/90—Solid sorbent
- Y10S95/901—Activated carbon
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Treating Waste Gases (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/282,377 US6716271B1 (en) | 2002-10-29 | 2002-10-29 | Apparatus and method for inhibiting decomposition of germane |
| PCT/US2003/033836 WO2004039478A1 (en) | 2002-10-29 | 2003-10-27 | Apparatus and method for inhibiting decomposition of germane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE511909T1 true ATE511909T1 (de) | 2011-06-15 |
Family
ID=32030425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT03777881T ATE511909T1 (de) | 2002-10-29 | 2003-10-27 | Vorrichtung und verfahren zum verhindern der zersetzung von monogerman |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6716271B1 (https=) |
| EP (1) | EP1558363B1 (https=) |
| JP (1) | JP2006520443A (https=) |
| KR (1) | KR101097577B1 (https=) |
| AT (1) | ATE511909T1 (https=) |
| AU (1) | AU2003286671A1 (https=) |
| MY (1) | MY131132A (https=) |
| TW (1) | TWI305154B (https=) |
| WO (1) | WO2004039478A1 (https=) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005037421A2 (en) * | 2003-10-14 | 2005-04-28 | Advanced Technology Materials, Inc. | Hydrogen generation |
| US7087102B2 (en) * | 2004-02-26 | 2006-08-08 | Air Products And Chemicals, Inc. | Process for purification of germane |
| US7955797B2 (en) | 2004-10-25 | 2011-06-07 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel |
| CN102284224A (zh) * | 2005-05-03 | 2011-12-21 | 高级技术材料公司 | 流体供应系统、熏蒸系统以及供应流体用于应用的方法 |
| US20080245676A1 (en) * | 2005-08-22 | 2008-10-09 | Mcmanus James V | Material Containment System |
| JP2009525180A (ja) * | 2006-01-30 | 2009-07-09 | アドバンスド テクノロジー マテリアルズ，インコーポレイテッド | 流体貯留／分配、脱硫、および赤外線放射に有用な炭素材料、ならびにそれを使用する装置および方法 |
| KR101524324B1 (ko) * | 2007-06-22 | 2015-06-04 | 인티그리스, 인코포레이티드 | 태양열 흡착식 냉각 시스템용 구성요소 및 그 구성요소 제조 방법 |
| US8118913B2 (en) * | 2008-11-17 | 2012-02-21 | Voltaix, Llc | Germane purification |
| WO2010065874A2 (en) | 2008-12-05 | 2010-06-10 | Atmi | High concentration nitrogen-containing germanium telluride based memory devices and processes of making |
| US8410468B2 (en) * | 2009-07-02 | 2013-04-02 | Advanced Technology Materials, Inc. | Hollow GST structure with dielectric fill |
| KR101706809B1 (ko) | 2010-03-26 | 2017-02-15 | 엔테그리스, 아이엔씨. | 게르마늄 안티몬 텔루라이드 물질 및 이를 포함하는 장치 |
| US9190609B2 (en) | 2010-05-21 | 2015-11-17 | Entegris, Inc. | Germanium antimony telluride materials and devices incorporating same |
| US8679231B2 (en) | 2011-01-19 | 2014-03-25 | Advanced Technology Materials, Inc. | PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same |
| US20140020685A1 (en) * | 2011-03-24 | 2014-01-23 | Medclair AB | System for collecting nitrous oxide in exhalation air |
| WO2014070682A1 (en) | 2012-10-30 | 2014-05-08 | Advaned Technology Materials, Inc. | Double self-aligned phase change memory device structure |
| US12378514B2 (en) | 2020-05-12 | 2025-08-05 | Pbs Biotech, Inc. | Material transfer devices and related systems and methods |
| WO2023055691A1 (en) * | 2021-09-29 | 2023-04-06 | Entegris, Inc. | Adsorbent-type storage and delivery vessels with high purity delivery of gas, and related methods |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6132492A (en) * | 1994-10-13 | 2000-10-17 | Advanced Technology Materials, Inc. | Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same |
| US5518528A (en) * | 1994-10-13 | 1996-05-21 | Advanced Technology Materials, Inc. | Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds |
| US6083298A (en) | 1994-10-13 | 2000-07-04 | Advanced Technology Materials, Inc. | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
| US5837027A (en) * | 1996-05-20 | 1998-11-17 | Advanced Technology Materials, Inc. | Manufacturing process for gas source and dispensing systems |
| DE69718137T2 (de) * | 1996-05-20 | 2003-10-09 | Advanced Technology Materials, Inc. | Flüssigkeitsbehälter und -abgabesystem mit physikalischem sorptionsmittel mit hoher kapazität |
| US5676735A (en) * | 1996-10-31 | 1997-10-14 | Advanced Technology Materials, Inc. | Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas |
| JP3021412B2 (ja) * | 1997-02-17 | 2000-03-15 | 高千穂化学工業株式会社 | 気体の貯蔵・送出方法及び気体の貯蔵・送出装置 |
| US5980608A (en) | 1998-01-07 | 1999-11-09 | Advanced Technology Materials, Inc. | Throughflow gas storage and dispensing system |
| US6406519B1 (en) * | 1998-03-27 | 2002-06-18 | Advanced Technology Materials, Inc. | Gas cabinet assembly comprising sorbent-based gas storage and delivery system |
| US6453924B1 (en) * | 2000-07-24 | 2002-09-24 | Advanced Technology Materials, Inc. | Fluid distribution system and process, and semiconductor fabrication facility utilizing same |
| US6101816A (en) | 1998-04-28 | 2000-08-15 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system |
| JP2001248794A (ja) * | 2000-03-02 | 2001-09-14 | Kansai Electric Power Co Inc:The | オゾン貯蔵方法および装置 |
| US6547861B2 (en) | 2000-12-26 | 2003-04-15 | Matheson Tri-Gas,, Inc. | Method and materials for purifying reactive gases using preconditioned ultra-low emission carbon material |
| US6425946B1 (en) * | 2000-12-26 | 2002-07-30 | Matheson Tri-Gas, Inc. | Method and apparatus for removing trace impurities from a gas using superactivated carbon material |
| US6592653B2 (en) * | 2001-11-12 | 2003-07-15 | Advanced Technology Materials, Inc. | Fluid storage and delivery system utilizing low heels carbon sorbent medium |
-
2002
- 2002-10-29 US US10/282,377 patent/US6716271B1/en not_active Expired - Lifetime
-
2003
- 2003-10-27 TW TW092129740A patent/TWI305154B/zh not_active IP Right Cessation
- 2003-10-27 KR KR1020057007442A patent/KR101097577B1/ko not_active Expired - Lifetime
- 2003-10-27 AU AU2003286671A patent/AU2003286671A1/en not_active Abandoned
- 2003-10-27 WO PCT/US2003/033836 patent/WO2004039478A1/en not_active Ceased
- 2003-10-27 EP EP03777881A patent/EP1558363B1/en not_active Expired - Lifetime
- 2003-10-27 JP JP2004548473A patent/JP2006520443A/ja active Pending
- 2003-10-27 AT AT03777881T patent/ATE511909T1/de not_active IP Right Cessation
- 2003-10-27 MY MYPI20034080A patent/MY131132A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2004039478A1 (en) | 2004-05-13 |
| KR101097577B1 (ko) | 2015-11-24 |
| JP2006520443A (ja) | 2006-09-07 |
| EP1558363A4 (en) | 2007-01-24 |
| TWI305154B (en) | 2009-01-11 |
| EP1558363A1 (en) | 2005-08-03 |
| US6716271B1 (en) | 2004-04-06 |
| TW200413080A (en) | 2004-08-01 |
| AU2003286671A1 (en) | 2004-05-25 |
| WO2004039478B1 (en) | 2006-03-23 |
| AU2003286671A8 (en) | 2004-05-25 |
| KR20050062780A (ko) | 2005-06-27 |
| EP1558363B1 (en) | 2011-06-08 |
| MY131132A (en) | 2007-07-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |