ATE511909T1 - Vorrichtung und verfahren zum verhindern der zersetzung von monogerman - Google Patents

Vorrichtung und verfahren zum verhindern der zersetzung von monogerman

Info

Publication number
ATE511909T1
ATE511909T1 AT03777881T AT03777881T ATE511909T1 AT E511909 T1 ATE511909 T1 AT E511909T1 AT 03777881 T AT03777881 T AT 03777881T AT 03777881 T AT03777881 T AT 03777881T AT E511909 T1 ATE511909 T1 AT E511909T1
Authority
AT
Austria
Prior art keywords
deflagration
activated carbon
germane
gas
sorbent medium
Prior art date
Application number
AT03777881T
Other languages
German (de)
English (en)
Inventor
Edward Sturm
Luping Wang
James Dietz
Original Assignee
Advanced Tech Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Tech Materials filed Critical Advanced Tech Materials
Application granted granted Critical
Publication of ATE511909T1 publication Critical patent/ATE511909T1/de

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D59/00Separation of different isotopes of the same chemical element
    • B01D59/22Separation by extracting
    • B01D59/26Separation by extracting by sorption, i.e. absorption, adsorption, persorption
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2253/00Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10Inorganic adsorbents
    • B01D2253/102Carbon
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/40083Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/40083Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40086Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by using a purge gas
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/40083Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/45Gas separation or purification devices adapted for specific applications
    • B01D2259/4525Gas separation or purification devices adapted for specific applications for storage and dispensing systems
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S95/00Gas separation: processes
    • Y10S95/90Solid sorbent
    • Y10S95/901Activated carbon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Treating Waste Gases (AREA)
AT03777881T 2002-10-29 2003-10-27 Vorrichtung und verfahren zum verhindern der zersetzung von monogerman ATE511909T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/282,377 US6716271B1 (en) 2002-10-29 2002-10-29 Apparatus and method for inhibiting decomposition of germane
PCT/US2003/033836 WO2004039478A1 (en) 2002-10-29 2003-10-27 Apparatus and method for inhibiting decomposition of germane

Publications (1)

Publication Number Publication Date
ATE511909T1 true ATE511909T1 (de) 2011-06-15

Family

ID=32030425

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03777881T ATE511909T1 (de) 2002-10-29 2003-10-27 Vorrichtung und verfahren zum verhindern der zersetzung von monogerman

Country Status (9)

Country Link
US (1) US6716271B1 (https=)
EP (1) EP1558363B1 (https=)
JP (1) JP2006520443A (https=)
KR (1) KR101097577B1 (https=)
AT (1) ATE511909T1 (https=)
AU (1) AU2003286671A1 (https=)
MY (1) MY131132A (https=)
TW (1) TWI305154B (https=)
WO (1) WO2004039478A1 (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005037421A2 (en) * 2003-10-14 2005-04-28 Advanced Technology Materials, Inc. Hydrogen generation
US7087102B2 (en) * 2004-02-26 2006-08-08 Air Products And Chemicals, Inc. Process for purification of germane
US7955797B2 (en) 2004-10-25 2011-06-07 Advanced Technology Materials, Inc. Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
CN102284224A (zh) * 2005-05-03 2011-12-21 高级技术材料公司 流体供应系统、熏蒸系统以及供应流体用于应用的方法
CN101277872A (zh) * 2005-08-22 2008-10-01 高级技术材料公司 材料密封系统
CN102600808A (zh) * 2006-01-30 2012-07-25 高级技术材料公司 纳米多孔碳材料,以及利用其的系统和方法
KR101524324B1 (ko) 2007-06-22 2015-06-04 인티그리스, 인코포레이티드 태양열 흡착식 냉각 시스템용 구성요소 및 그 구성요소 제조 방법
JP5701217B2 (ja) * 2008-11-17 2015-04-15 ヴォルタイクス インコーポレイテッド ゲルマン精製
US8330136B2 (en) 2008-12-05 2012-12-11 Advanced Technology Materials, Inc. High concentration nitrogen-containing germanium telluride based memory devices and processes of making
US8410468B2 (en) * 2009-07-02 2013-04-02 Advanced Technology Materials, Inc. Hollow GST structure with dielectric fill
US9012876B2 (en) 2010-03-26 2015-04-21 Entegris, Inc. Germanium antimony telluride materials and devices incorporating same
WO2011146913A2 (en) 2010-05-21 2011-11-24 Advanced Technology Materials, Inc. Germanium antimony telluride materials and devices incorporating same
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
EP2688626B1 (en) * 2011-03-24 2018-08-15 Medclair AB System for collecting nitrous oxide in exhalation air
US9640757B2 (en) 2012-10-30 2017-05-02 Entegris, Inc. Double self-aligned phase change memory device structure
EP4150045A1 (en) 2020-05-12 2023-03-22 PBS Biotech, Inc. Material transfer devices and related systems and methods
CN118265869A (zh) * 2021-09-29 2024-06-28 恩特格里斯公司 具有高纯度气体输送的吸附剂型储运容器及相关方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5518528A (en) 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US6132492A (en) 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
US6083298A (en) 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US5837027A (en) * 1996-05-20 1998-11-17 Advanced Technology Materials, Inc. Manufacturing process for gas source and dispensing systems
WO1997044118A1 (en) * 1996-05-20 1997-11-27 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
US5676735A (en) * 1996-10-31 1997-10-14 Advanced Technology Materials, Inc. Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas
JP3021412B2 (ja) * 1997-02-17 2000-03-15 高千穂化学工業株式会社 気体の貯蔵・送出方法及び気体の貯蔵・送出装置
US5980608A (en) 1998-01-07 1999-11-09 Advanced Technology Materials, Inc. Throughflow gas storage and dispensing system
US6406519B1 (en) * 1998-03-27 2002-06-18 Advanced Technology Materials, Inc. Gas cabinet assembly comprising sorbent-based gas storage and delivery system
US6453924B1 (en) * 2000-07-24 2002-09-24 Advanced Technology Materials, Inc. Fluid distribution system and process, and semiconductor fabrication facility utilizing same
US6101816A (en) 1998-04-28 2000-08-15 Advanced Technology Materials, Inc. Fluid storage and dispensing system
JP2001248794A (ja) * 2000-03-02 2001-09-14 Kansai Electric Power Co Inc:The オゾン貯蔵方法および装置
US6547861B2 (en) * 2000-12-26 2003-04-15 Matheson Tri-Gas,, Inc. Method and materials for purifying reactive gases using preconditioned ultra-low emission carbon material
US6425946B1 (en) * 2000-12-26 2002-07-30 Matheson Tri-Gas, Inc. Method and apparatus for removing trace impurities from a gas using superactivated carbon material
US6592653B2 (en) * 2001-11-12 2003-07-15 Advanced Technology Materials, Inc. Fluid storage and delivery system utilizing low heels carbon sorbent medium

Also Published As

Publication number Publication date
JP2006520443A (ja) 2006-09-07
EP1558363B1 (en) 2011-06-08
WO2004039478B1 (en) 2006-03-23
MY131132A (en) 2007-07-31
US6716271B1 (en) 2004-04-06
KR20050062780A (ko) 2005-06-27
KR101097577B1 (ko) 2015-11-24
AU2003286671A1 (en) 2004-05-25
AU2003286671A8 (en) 2004-05-25
TW200413080A (en) 2004-08-01
EP1558363A1 (en) 2005-08-03
TWI305154B (en) 2009-01-11
EP1558363A4 (en) 2007-01-24
WO2004039478A1 (en) 2004-05-13

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