JP2006519997A5 - - Google Patents

Download PDF

Info

Publication number
JP2006519997A5
JP2006519997A5 JP2006507043A JP2006507043A JP2006519997A5 JP 2006519997 A5 JP2006519997 A5 JP 2006519997A5 JP 2006507043 A JP2006507043 A JP 2006507043A JP 2006507043 A JP2006507043 A JP 2006507043A JP 2006519997 A5 JP2006519997 A5 JP 2006519997A5
Authority
JP
Japan
Prior art keywords
fluid
pressure
temperature
inlet
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006507043A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006519997A (ja
Filing date
Publication date
Priority claimed from US10/387,088 external-priority patent/US6843139B2/en
Application filed filed Critical
Publication of JP2006519997A publication Critical patent/JP2006519997A/ja
Publication of JP2006519997A5 publication Critical patent/JP2006519997A5/ja
Pending legal-status Critical Current

Links

JP2006507043A 2003-03-12 2004-03-11 マルチセンサを備えた流量装置 Pending JP2006519997A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/387,088 US6843139B2 (en) 2003-03-12 2003-03-12 Flow instrument with multisensors
PCT/US2004/007321 WO2004081500A2 (en) 2003-03-12 2004-03-11 Flowmeter with multisensors

Publications (2)

Publication Number Publication Date
JP2006519997A JP2006519997A (ja) 2006-08-31
JP2006519997A5 true JP2006519997A5 (enExample) 2007-04-26

Family

ID=32961819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006507043A Pending JP2006519997A (ja) 2003-03-12 2004-03-11 マルチセンサを備えた流量装置

Country Status (6)

Country Link
US (1) US6843139B2 (enExample)
JP (1) JP2006519997A (enExample)
CN (1) CN100363717C (enExample)
DE (1) DE112004000430T5 (enExample)
RU (1) RU2323416C2 (enExample)
WO (1) WO2004081500A2 (enExample)

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7096738B2 (en) * 2004-03-18 2006-08-29 Rosemount Inc. In-line annular seal-based pressure device
EP1730476B1 (en) * 2004-03-25 2021-04-28 Micro Motion, Inc. Simplified fluid property measurement
US20050267413A1 (en) * 2004-05-26 2005-12-01 Wang Jong H Flow monitoring devices and methods of use
US7255012B2 (en) * 2004-12-01 2007-08-14 Rosemount Inc. Process fluid flow device with variable orifice
US7201066B1 (en) * 2005-03-30 2007-04-10 The Board Of Regents For Oklahoma State University System for automatic tire inflation
KR101268524B1 (ko) * 2006-07-10 2013-05-28 삼성전자주식회사 유량제어장치
US20090250116A1 (en) * 2006-07-10 2009-10-08 Hong Sa-Mun Flow rate controlling apparatus
US7726186B2 (en) * 2006-07-19 2010-06-01 Degree Controls, Inc. Airflow sensor for filter blockage detection
US7896045B2 (en) * 2006-11-13 2011-03-01 The Board Of Regents For Oklahoma State University Apparatus for delivering air through powered axle assemblies
DE102007014898A1 (de) 2007-03-26 2008-10-02 Vega Grieshaber Kg Messzellenanordnung, insbesondere Druckmesszellenanordnung
DE102007030691A1 (de) 2007-06-30 2009-01-02 Endress + Hauser Flowtec Ag Meßsystem für ein in einer Prozeßleitung strömendes Medium
DE102007030699A1 (de) 2007-06-30 2009-01-15 Endress + Hauser Flowtec Ag Meßsystem für ein in einer Prozeßleitung strömendes Medium
DE102007030690A1 (de) 2007-06-30 2009-05-07 Endress + Hauser Flowtec Ag Meßsystem für ein in einer Prozeßleitung strömendes Medium
DE102007030700A1 (de) 2007-06-30 2009-05-07 Endress + Hauser Flowtec Ag Meßsystem für ein in einer Prozeßleitung strömendes Medium
US8234298B2 (en) * 2007-07-25 2012-07-31 International Business Machines Corporation System and method for determining driving factor in a data cube
US7826991B2 (en) * 2007-07-25 2010-11-02 Rosemount Inc. Temperature-averaging field device compensation
US20090093774A1 (en) * 2007-10-04 2009-04-09 Baxter International Inc. Ambulatory pump with intelligent flow control
US8215157B2 (en) * 2007-10-04 2012-07-10 Baxter International Inc. System and method for measuring liquid viscosity in a fluid delivery system
CN101430216B (zh) * 2007-11-05 2015-11-25 北京七星华创电子股份有限公司 质量流量传感器及控制系统及其实现质量流量控制的方法
US8504318B2 (en) * 2008-03-05 2013-08-06 Brooks Instruments, Llc System, method and computer program for determining fluid flow rate using a pressure sensor and a thermal mass flow sensor
CN102047089B (zh) * 2008-05-27 2013-05-01 罗斯蒙德公司 多变量压力变送器的改进温度补偿
US8042401B2 (en) * 2008-06-12 2011-10-25 Rosemount, Inc. Isolation system for process pressure measurement
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
EP2347224B1 (en) * 2008-10-27 2015-07-01 Rosemount, Inc. Multivariable fluid flow measurement device with fast response flow calculation
JP5220642B2 (ja) * 2009-02-05 2013-06-26 サーパス工業株式会社 差圧式流量計および流量コントローラ
DE102009040542A1 (de) * 2009-09-08 2011-03-10 Bürkert Werke GmbH Vorrichtung und Verfahren zum Durchflussmessen oder -regeln
US8113046B2 (en) 2010-03-22 2012-02-14 Honeywell International Inc. Sensor assembly with hydrophobic filter
US8656772B2 (en) 2010-03-22 2014-02-25 Honeywell International Inc. Flow sensor with pressure output signal
US8397586B2 (en) * 2010-03-22 2013-03-19 Honeywell International Inc. Flow sensor assembly with porous insert
US8756990B2 (en) 2010-04-09 2014-06-24 Honeywell International Inc. Molded flow restrictor
US9003877B2 (en) 2010-06-15 2015-04-14 Honeywell International Inc. Flow sensor assembly
US8418549B2 (en) 2011-01-31 2013-04-16 Honeywell International Inc. Flow sensor assembly with integral bypass channel
US8695417B2 (en) 2011-01-31 2014-04-15 Honeywell International Inc. Flow sensor with enhanced flow range capability
JP2012208061A (ja) * 2011-03-30 2012-10-25 Azbil Corp フローセンサ
KR101269541B1 (ko) * 2011-05-30 2013-06-04 한국수력원자력 주식회사 배관 내 유체 흐름 감시 장치 및 방법
US8578783B2 (en) * 2011-09-26 2013-11-12 Rosemount Inc. Process fluid pressure transmitter with separated sensor and sensor electronics
AU2013230135B2 (en) * 2012-03-06 2015-09-24 Rosemount Inc. Remote seal pressure measurement system for subsea use
US9052217B2 (en) 2012-11-09 2015-06-09 Honeywell International Inc. Variable scale sensor
US9696727B2 (en) * 2013-03-08 2017-07-04 Fujikin Incorporated Fluid control apparatus and thermal sensor installation structure with respect to fluid control apparatus
JP6408550B2 (ja) * 2013-03-12 2018-10-17 イリノイ トゥール ワークス インコーポレイティド 近距離無線通信及び／又はｕｓｂインターフェースを有する質量流量制御器
DE102013010170B4 (de) * 2013-06-19 2015-01-08 Krohne Messtechnik Gmbh Messgerät
US9707369B2 (en) * 2013-06-28 2017-07-18 Vyaire Medical Capital Llc Modular flow cassette
US9962514B2 (en) 2013-06-28 2018-05-08 Vyaire Medical Capital Llc Ventilator flow valve
US9541098B2 (en) 2013-06-28 2017-01-10 Vyaire Medical Capital Llc Low-noise blower
US9442031B2 (en) 2013-06-28 2016-09-13 Rosemount Inc. High integrity process fluid pressure probe
US9433743B2 (en) 2013-06-28 2016-09-06 Carefusion 303, Inc. Ventilator exhalation flow valve
JP2016526639A (ja) * 2013-06-28 2016-09-05 ケアフュージョン ３０３、インコーポレイテッド ベンチレータ・システム
US9746359B2 (en) 2013-06-28 2017-08-29 Vyaire Medical Capital Llc Flow sensor
US9795757B2 (en) 2013-06-28 2017-10-24 Vyaire Medical Capital Llc Fluid inlet adapter
US10444771B2 (en) 2013-07-12 2019-10-15 John C. Karamanos Fluid control measuring device
JP6425723B2 (ja) * 2013-07-19 2018-11-21 ローズマウント インコーポレイテッド ２ピース式の隔離プラグのある隔離部品を有する圧力伝送器
US9459170B2 (en) 2013-09-26 2016-10-04 Rosemount Inc. Process fluid pressure sensing assembly for pressure transmitters subjected to high working pressure
US9234776B2 (en) 2013-09-26 2016-01-12 Rosemount Inc. Multivariable process fluid transmitter for high pressure applications
DE102014112558A1 (de) 2014-09-01 2016-03-03 Endress + Hauser Flowtec Ag Sensorbaugruppe für einen Sensor, Sensor sowie damit gebildetes Meßsystem
US9638600B2 (en) 2014-09-30 2017-05-02 Rosemount Inc. Electrical interconnect for pressure sensor in a process variable transmitter
WO2016089552A1 (en) * 2014-12-04 2016-06-09 Illinois Tool Works Inc. Wireless flow restrictor of a flowmeter
US9952079B2 (en) 2015-07-15 2018-04-24 Honeywell International Inc. Flow sensor
WO2017188129A1 (ja) * 2016-04-28 2017-11-02 株式会社フジキン 流体制御装置、流体制御装置の制御方法、および、流体制御システム
CN106404060B (zh) * 2016-08-31 2019-01-15 贵州永红航空机械有限责任公司 一种流体温度和压力的通用测试装置
DE102016122714A1 (de) * 2016-11-24 2018-05-24 Endress + Hauser Wetzer Gmbh + Co Kg Kommunikations-Adapter für einen Transmitter eines Feldgeräts
DE102017111301A1 (de) * 2017-05-23 2018-11-29 B. Braun Melsungen Ag Sensorsystem
CN107422754B (zh) * 2017-09-01 2023-11-14 中国人民解放军军事科学院军事医学研究院 一种微量气体流速控制装置及控制方法
US10948370B2 (en) * 2018-04-10 2021-03-16 The Boeing Company Haptic pin field sensor and manipulator
EP3853563B1 (en) 2018-09-18 2024-11-06 Swagelok Company Fluid monitoring module arrangements
WO2020061127A1 (en) 2018-09-19 2020-03-26 Swagelok Company Flow restricting fluid component
US12215989B2 (en) * 2019-01-25 2025-02-04 Lam Research Corporation Differential-pressure-based flow meters
US20210396560A1 (en) * 2020-06-17 2021-12-23 Rosemount Inc Subsea multivariable transmitter
CN116222668A (zh) * 2020-08-18 2023-06-06 成都一通密封股份有限公司 一种压力传感校正器及其压力传感校正系统
CN114623879A (zh) * 2020-12-14 2022-06-14 宝能汽车集团有限公司 气体流量检测装置及其控制方法
US20230268200A1 (en) * 2022-02-23 2023-08-24 Ichor Systems, Inc. Fluid delivery module
USD1043392S1 (en) 2022-11-30 2024-09-24 Swagelok Company Flow monitoring device
DE102024114506A1 (de) * 2024-05-23 2025-11-27 Bürkert Werke GmbH & Co. KG Durchflussmessgerät sowie Massendurchflussregler und Massendurchflussmesser mit einem solchen Durchflussmessgerät

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3792609A (en) * 1971-05-10 1974-02-19 Tylan Corp Flow splitter
JPS6014121A (ja) * 1983-07-05 1985-01-24 Esutetsuku:Kk 層流素子
JPS62226016A (ja) * 1986-03-28 1987-10-05 Toshiba Corp 差圧式流量測定装置
JPH0170120U (enExample) * 1987-10-27 1989-05-10
JP2871727B2 (ja) * 1989-06-21 1999-03-17 東芝エンジニアリング株式会社 空気流量制御装置
JPH041526A (ja) * 1990-04-18 1992-01-07 Tokyo Gas Co Ltd 紋り流量計に於ける温度検出機構
JP3182807B2 (ja) * 1991-09-20 2001-07-03 株式会社日立製作所 多機能流体計測伝送装置及びそれを用いた流体量計測制御システム
JPH05107090A (ja) * 1991-10-21 1993-04-27 Nissan Motor Co Ltd 差圧流量計
US5332005A (en) * 1992-11-06 1994-07-26 Aalborg Instruments & Controls, Inc. Laminar flow element and method for metering fluid flow
JP3377574B2 (ja) 1993-11-05 2003-02-17 株式会社技術開発総合研究所 差圧検出センサ
JPH0863235A (ja) * 1994-08-24 1996-03-08 Burutsukusu Instr Kk 差圧式質量流量コントロール装置
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
BR9609752A (pt) * 1995-07-17 1999-03-30 Rosemount Inc Transmissor e processo de proporcionar um sinal de saída indicativo da taxa de vazão em massa de fluido através de um conjunto
US5672832A (en) * 1996-02-15 1997-09-30 Nt International, Inc. Chemically inert flow meter within caustic fluids having non-contaminating body
US6907383B2 (en) * 1996-03-28 2005-06-14 Rosemount Inc. Flow diagnostic system
JPH10300544A (ja) * 1997-04-24 1998-11-13 Hitachi Ltd 空気流量測定方法及び装置
DE69714747T2 (de) * 1997-12-30 2003-04-30 Qualiflow S.A., Montpellier Verfahren zu Herstellung von einem Sensor für einen thermischen Massendurchflussmesser
US6152162A (en) * 1998-10-08 2000-11-28 Mott Metallurgical Corporation Fluid flow controlling
TR200101761T2 (tr) * 1998-12-15 2001-10-22 Daniel Industries Inc. Ağ takibi için internet üzerinden çalışan bilgisayar sistemi.
US6119730A (en) * 1998-12-21 2000-09-19 Mcmillan Company Precision laminar flow element for use in thermal mass flow sensors and flow controllers
US6143080A (en) * 1999-02-02 2000-11-07 Silicon Valley Group Thermal Systems Llc Wafer processing reactor having a gas flow control system and method
JP2000315115A (ja) * 1999-03-02 2000-11-14 Stec Inc 流量制御方法、流量制御装置および記録媒体
US6138990A (en) * 1999-03-25 2000-10-31 Dxl Usa Inc. Flow control valve assembly for mass flow controller
US6363958B1 (en) * 1999-05-10 2002-04-02 Parker-Hannifin Corporation Flow control of process gas in semiconductor manufacturing
US6119710A (en) * 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction
US6445980B1 (en) * 1999-07-10 2002-09-03 Mykrolis Corporation System and method for a variable gain proportional-integral (PI) controller
US6352001B1 (en) * 1999-08-30 2002-03-05 General Electric Company Non-iterative method for obtaining mass flow rate
US6311568B1 (en) * 1999-09-13 2001-11-06 Rosemount, Inc. Process flow device with improved pressure measurement feature
US6543297B1 (en) * 1999-09-13 2003-04-08 Rosemount Inc. Process flow plate with temperature measurement feature
JP2001141532A (ja) * 1999-11-15 2001-05-25 Smc Corp 絞り構造体及び絞り構造体を組み込む流量計
JP2001201414A (ja) * 2000-01-20 2001-07-27 Smc Corp 複合センサ及び複合センサを備えたフローコントローラ
US6655207B1 (en) * 2000-02-16 2003-12-02 Honeywell International Inc. Flow rate module and integrated flow restrictor
JP2002054959A (ja) * 2000-08-10 2002-02-20 Kazumasa Onishi 差圧式流量計
US20020046612A1 (en) * 2000-08-22 2002-04-25 Fugasity Corporation Fluid mass flow meter with substantial measurement range
US6609431B1 (en) * 2000-09-29 2003-08-26 Xellogy, Inc. Flow measuring device based on predetermine class of liquid
US6333272B1 (en) * 2000-10-06 2001-12-25 Lam Research Corporation Gas distribution apparatus for semiconductor processing
JP4864280B2 (ja) * 2001-04-24 2012-02-01 ブルックス・インストルメント・エルエルシー 質量流量コントローラのシステムおよび方法
US6592253B2 (en) * 2001-10-09 2003-07-15 Northrop Grumman Corporation Precision temperature probe having fast response
US6708568B2 (en) * 2001-11-21 2004-03-23 General Electric Company Combustion chamber dynamic pressure transducer tee probe holder and related method
US6742394B1 (en) * 2003-01-13 2004-06-01 Power Systems Mfg, Llc Gas turbine combustor hybrid dynamic-static probe

Similar Documents

Publication Publication Date Title
JP2006519997A5 (enExample)
RU2005131574A (ru) Устройство регулирования расхода с мультисенсорами
JP4568763B2 (ja) バイパス一体型流体センサ装置およびその製造方法
JP2003010334A5 (enExample)
CA2456926A1 (en) System and method for rapid heating of fluid
JP2002345965A5 (enExample)
EP1227326A3 (en) Fluid flow sensor
JP2003000716A5 (enExample)
EP3332227A1 (en) Mems flow sensor
WO2008123906A3 (en) Flangeless differential pressure transmitter for industrial process control systems
JP2003504220A (ja) マイクロメカニカル流体制御コンポーネントを取り付ける装置および方法
RU2005102008A (ru) Система стабильного датчика высокой температуры/нагревателя с вольфрамом на aln и способ
CN101663571A (zh) 用于压力变送器的膨胀室
JP2009192220A (ja) 流量センサおよびこれを用いた質量流量制御装置
DE602004013555D1 (de) Silizium-drucksensor mit niedrigem druckausgleich zwischen dem gemessenen druck und dem referenzraum
ATE438086T1 (de) Durchfluss-messvorrichtung mit druckabfall- erzeugungsmittel
WO2003046534A3 (de) Sensor zur detektion von teilchen in einem gasstrom
DE50300559D1 (de) Windkessel
TWI470388B (zh) 質量流量控制器
EP0903568A3 (en) Method for manufacturing a pressure measure device equipped with a resonating element
HU0200690D0 (en) Method and device for controlling of room temperature
CN107830967A (zh) 一种mems气体差压传感器
CN103620360A (zh) 压力变换器装置
JP2004022572A (ja) 基板処理装置および不活性ガス濃度制御方法
WO2005064285A3 (de) Modularer hantelkopfsensor