RU2323416C2 - Устройство регулирования расхода с мультисенсорами - Google Patents

Устройство регулирования расхода с мультисенсорами Download PDF

Info

Publication number
RU2323416C2
RU2323416C2 RU2005131574/28A RU2005131574A RU2323416C2 RU 2323416 C2 RU2323416 C2 RU 2323416C2 RU 2005131574/28 A RU2005131574/28 A RU 2005131574/28A RU 2005131574 A RU2005131574 A RU 2005131574A RU 2323416 C2 RU2323416 C2 RU 2323416C2
Authority
RU
Russia
Prior art keywords
pressure
fluid
flow
temperature
inlet
Prior art date
Application number
RU2005131574/28A
Other languages
English (en)
Russian (ru)
Other versions
RU2005131574A (ru
Inventor
Марк С. ШУМАХЕР (US)
Марк С. ШУМАХЕР
Дэвид А. БРОДЕН (US)
Дэвид А. БРОДЕН
Дэвид Э. УИКЛУНД (US)
Дэвид Э. УИКЛУНД
Original Assignee
Роузмаунт Инк.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Роузмаунт Инк. filed Critical Роузмаунт Инк.
Publication of RU2005131574A publication Critical patent/RU2005131574A/ru
Application granted granted Critical
Publication of RU2323416C2 publication Critical patent/RU2323416C2/ru

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G01F15/022—Compensating or correcting for variations in pressure, density or temperature using electrical means

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
  • Details Of Flowmeters (AREA)
RU2005131574/28A 2003-03-12 2004-03-11 Устройство регулирования расхода с мультисенсорами RU2323416C2 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/387,088 US6843139B2 (en) 2003-03-12 2003-03-12 Flow instrument with multisensors
US10/387,088 2003-03-12

Publications (2)

Publication Number Publication Date
RU2005131574A RU2005131574A (ru) 2006-02-10
RU2323416C2 true RU2323416C2 (ru) 2008-04-27

Family

ID=32961819

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2005131574/28A RU2323416C2 (ru) 2003-03-12 2004-03-11 Устройство регулирования расхода с мультисенсорами

Country Status (6)

Country Link
US (1) US6843139B2 (enExample)
JP (1) JP2006519997A (enExample)
CN (1) CN100363717C (enExample)
DE (1) DE112004000430T5 (enExample)
RU (1) RU2323416C2 (enExample)
WO (1) WO2004081500A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2765405C2 (ru) * 2017-05-23 2022-01-28 Б. Браун Мельзунген Аг Сенсорная система

Families Citing this family (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7096738B2 (en) * 2004-03-18 2006-08-29 Rosemount Inc. In-line annular seal-based pressure device
WO2005095902A1 (en) * 2004-03-25 2005-10-13 Rosemount Inc. Simplified fluid property measurement
US20050267413A1 (en) * 2004-05-26 2005-12-01 Wang Jong H Flow monitoring devices and methods of use
US7255012B2 (en) * 2004-12-01 2007-08-14 Rosemount Inc. Process fluid flow device with variable orifice
US7201066B1 (en) * 2005-03-30 2007-04-10 The Board Of Regents For Oklahoma State University System for automatic tire inflation
US20090250116A1 (en) * 2006-07-10 2009-10-08 Hong Sa-Mun Flow rate controlling apparatus
KR101268524B1 (ko) * 2006-07-10 2013-05-28 삼성전자주식회사 유량제어장치
US7726186B2 (en) * 2006-07-19 2010-06-01 Degree Controls, Inc. Airflow sensor for filter blockage detection
US7896045B2 (en) * 2006-11-13 2011-03-01 The Board Of Regents For Oklahoma State University Apparatus for delivering air through powered axle assemblies
DE102007014898A1 (de) * 2007-03-26 2008-10-02 Vega Grieshaber Kg Messzellenanordnung, insbesondere Druckmesszellenanordnung
DE102007030699A1 (de) 2007-06-30 2009-01-15 Endress + Hauser Flowtec Ag Meßsystem für ein in einer Prozeßleitung strömendes Medium
DE102007030690A1 (de) 2007-06-30 2009-05-07 Endress + Hauser Flowtec Ag Meßsystem für ein in einer Prozeßleitung strömendes Medium
DE102007030691A1 (de) 2007-06-30 2009-01-02 Endress + Hauser Flowtec Ag Meßsystem für ein in einer Prozeßleitung strömendes Medium
DE102007030700A1 (de) 2007-06-30 2009-05-07 Endress + Hauser Flowtec Ag Meßsystem für ein in einer Prozeßleitung strömendes Medium
US7826991B2 (en) * 2007-07-25 2010-11-02 Rosemount Inc. Temperature-averaging field device compensation
US8234298B2 (en) * 2007-07-25 2012-07-31 International Business Machines Corporation System and method for determining driving factor in a data cube
US20090093774A1 (en) * 2007-10-04 2009-04-09 Baxter International Inc. Ambulatory pump with intelligent flow control
US8215157B2 (en) * 2007-10-04 2012-07-10 Baxter International Inc. System and method for measuring liquid viscosity in a fluid delivery system
CN101430216B (zh) * 2007-11-05 2015-11-25 北京七星华创电子股份有限公司 质量流量传感器及控制系统及其实现质量流量控制的方法
WO2009110895A1 (en) * 2008-03-05 2009-09-11 Brooks Instrument, Llc A system, method, and computer program for determining fluid flow rate using a pressure sensor and a thermal mass flow sensor
RU2453931C1 (ru) * 2008-05-27 2012-06-20 Роузмаунт, Инк. Улучшенная компенсация температуры многопараметрического датчика давления
US8042401B2 (en) * 2008-06-12 2011-10-25 Rosemount, Inc. Isolation system for process pressure measurement
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
CN105068565A (zh) * 2008-10-27 2015-11-18 罗斯蒙德公司 具有快速响应流量计算的多变量流体流量测量设备
JP5220642B2 (ja) * 2009-02-05 2013-06-26 サーパス工業株式会社 差圧式流量計および流量コントローラ
DE102009040542A1 (de) * 2009-09-08 2011-03-10 Bürkert Werke GmbH Vorrichtung und Verfahren zum Durchflussmessen oder -regeln
US8656772B2 (en) 2010-03-22 2014-02-25 Honeywell International Inc. Flow sensor with pressure output signal
US8113046B2 (en) 2010-03-22 2012-02-14 Honeywell International Inc. Sensor assembly with hydrophobic filter
US8397586B2 (en) * 2010-03-22 2013-03-19 Honeywell International Inc. Flow sensor assembly with porous insert
US8756990B2 (en) 2010-04-09 2014-06-24 Honeywell International Inc. Molded flow restrictor
US8418549B2 (en) 2011-01-31 2013-04-16 Honeywell International Inc. Flow sensor assembly with integral bypass channel
US9003877B2 (en) 2010-06-15 2015-04-14 Honeywell International Inc. Flow sensor assembly
US8695417B2 (en) 2011-01-31 2014-04-15 Honeywell International Inc. Flow sensor with enhanced flow range capability
JP2012208061A (ja) * 2011-03-30 2012-10-25 Azbil Corp フローセンサ
KR101269541B1 (ko) * 2011-05-30 2013-06-04 한국수력원자력 주식회사 배관 내 유체 흐름 감시 장치 및 방법
US8578783B2 (en) * 2011-09-26 2013-11-12 Rosemount Inc. Process fluid pressure transmitter with separated sensor and sensor electronics
CN104114989B (zh) * 2012-03-06 2016-02-17 罗斯蒙特公司 海底应用的远程密封件压力测量系统
US9052217B2 (en) 2012-11-09 2015-06-09 Honeywell International Inc. Variable scale sensor
CN105102868B (zh) * 2013-03-08 2017-05-24 株式会社富士金 流体控制装置以及流体控制装置上的热传感器设置结构
WO2014164336A1 (en) * 2013-03-12 2014-10-09 Illinois Tool Works Inc. Mass flow controller with near field communication and/or usb interface
DE102013010170B4 (de) * 2013-06-19 2015-01-08 Krohne Messtechnik Gmbh Messgerät
US9707369B2 (en) * 2013-06-28 2017-07-18 Vyaire Medical Capital Llc Modular flow cassette
US9442031B2 (en) 2013-06-28 2016-09-13 Rosemount Inc. High integrity process fluid pressure probe
US9795757B2 (en) 2013-06-28 2017-10-24 Vyaire Medical Capital Llc Fluid inlet adapter
US9962514B2 (en) 2013-06-28 2018-05-08 Vyaire Medical Capital Llc Ventilator flow valve
US9433743B2 (en) 2013-06-28 2016-09-06 Carefusion 303, Inc. Ventilator exhalation flow valve
US9541098B2 (en) 2013-06-28 2017-01-10 Vyaire Medical Capital Llc Low-noise blower
US9746359B2 (en) * 2013-06-28 2017-08-29 Vyaire Medical Capital Llc Flow sensor
BR112015032320A2 (pt) * 2013-06-28 2017-07-25 Carefusion 303 Inc sistema de ventilação
CA3174856A1 (en) * 2013-07-12 2015-01-15 John C. Karamanos Fluid control measuring device
US9689769B2 (en) * 2013-07-19 2017-06-27 Rosemount Inc. Pressure transmitter having an isolation assembly with a two-piece isolator plug
US9234776B2 (en) 2013-09-26 2016-01-12 Rosemount Inc. Multivariable process fluid transmitter for high pressure applications
US9459170B2 (en) 2013-09-26 2016-10-04 Rosemount Inc. Process fluid pressure sensing assembly for pressure transmitters subjected to high working pressure
DE102014112558A1 (de) * 2014-09-01 2016-03-03 Endress + Hauser Flowtec Ag Sensorbaugruppe für einen Sensor, Sensor sowie damit gebildetes Meßsystem
US9638600B2 (en) 2014-09-30 2017-05-02 Rosemount Inc. Electrical interconnect for pressure sensor in a process variable transmitter
CN107003682A (zh) * 2014-12-04 2017-08-01 伊利诺斯工具制品有限公司 流量计的无线限流器
US9952079B2 (en) 2015-07-15 2018-04-24 Honeywell International Inc. Flow sensor
US11137779B2 (en) * 2016-04-28 2021-10-05 Fujikin Incorporated Fluid control device, method for controlling fluid control device, and fluid control system
CN106404060B (zh) * 2016-08-31 2019-01-15 贵州永红航空机械有限责任公司 一种流体温度和压力的通用测试装置
DE102016122714A1 (de) * 2016-11-24 2018-05-24 Endress + Hauser Wetzer Gmbh + Co Kg Kommunikations-Adapter für einen Transmitter eines Feldgeräts
CN107422754B (zh) * 2017-09-01 2023-11-14 中国人民解放军军事科学院军事医学研究院 一种微量气体流速控制装置及控制方法
US10948370B2 (en) * 2018-04-10 2021-03-16 The Boeing Company Haptic pin field sensor and manipulator
WO2020060957A1 (en) * 2018-09-18 2020-03-26 Swagelok Company Fluid monitoring module arrangements
US10883865B2 (en) 2018-09-19 2021-01-05 Swagelok Company Flow restricting fluid component
CN113348339A (zh) * 2019-01-25 2021-09-03 朗姆研究公司 基于压差的流量计
US20210396560A1 (en) * 2020-06-17 2021-12-23 Rosemount Inc Subsea multivariable transmitter
CN111982194B (zh) * 2020-08-18 2023-03-28 成都一通密封股份有限公司 一种无线压力温度一体化传感器
CN114623879A (zh) * 2020-12-14 2022-06-14 宝能汽车集团有限公司 气体流量检测装置及其控制方法
US20230268200A1 (en) * 2022-02-23 2023-08-24 Ichor Systems, Inc. Fluid delivery module
USD1043392S1 (en) 2022-11-30 2024-09-24 Swagelok Company Flow monitoring device
DE102024114506A1 (de) * 2024-05-23 2025-11-27 Bürkert Werke GmbH & Co. KG Durchflussmessgerät sowie Massendurchflussregler und Massendurchflussmesser mit einem solchen Durchflussmessgerät

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5469749A (en) * 1991-09-20 1995-11-28 Hitachi, Ltd. Multiple-function fluid measuring and transmitting apparatus
RU96120202A (ru) * 1994-04-20 1998-12-27 Роузмаунт Инк. Процессорный клапанный регулятор
US6089097A (en) * 1995-02-28 2000-07-18 Rosemount Inc. Elongated pressure sensor for a pressure transmitter
WO2001020282A1 (en) * 1999-09-13 2001-03-22 Rosemount Inc. Process flow plate with temperature measurement feature
US6539813B1 (en) * 1999-11-15 2003-04-01 Smc Kabushiki Kaisha Throttle structure and flow meter incorporated with throttle structure

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3792609A (en) * 1971-05-10 1974-02-19 Tylan Corp Flow splitter
JPS6014121A (ja) * 1983-07-05 1985-01-24 Esutetsuku:Kk 層流素子
JPS62226016A (ja) * 1986-03-28 1987-10-05 Toshiba Corp 差圧式流量測定装置
JPH0170120U (enExample) * 1987-10-27 1989-05-10
JP2871727B2 (ja) * 1989-06-21 1999-03-17 東芝エンジニアリング株式会社 空気流量制御装置
JPH041526A (ja) * 1990-04-18 1992-01-07 Tokyo Gas Co Ltd 紋り流量計に於ける温度検出機構
JPH05107090A (ja) * 1991-10-21 1993-04-27 Nissan Motor Co Ltd 差圧流量計
US5332005A (en) * 1992-11-06 1994-07-26 Aalborg Instruments & Controls, Inc. Laminar flow element and method for metering fluid flow
JP3377574B2 (ja) 1993-11-05 2003-02-17 株式会社技術開発総合研究所 差圧検出センサ
JPH0863235A (ja) * 1994-08-24 1996-03-08 Burutsukusu Instr Kk 差圧式質量流量コントロール装置
EP0839316B1 (en) * 1995-07-17 2010-10-27 Rosemount Inc. Transmitter for providing a signal indicative of flow through a differential transducer using a simplified process
US5672832A (en) * 1996-02-15 1997-09-30 Nt International, Inc. Chemically inert flow meter within caustic fluids having non-contaminating body
US6907383B2 (en) * 1996-03-28 2005-06-14 Rosemount Inc. Flow diagnostic system
JPH10300544A (ja) * 1997-04-24 1998-11-13 Hitachi Ltd 空気流量測定方法及び装置
ATE222354T1 (de) * 1997-12-30 2002-08-15 Qualiflow S A Verfahren zu herstellung von einem sensor für einen thermischen massendurchflussmesser
US6152162A (en) * 1998-10-08 2000-11-28 Mott Metallurgical Corporation Fluid flow controlling
CN1330765A (zh) * 1998-12-15 2002-01-09 丹尼尔工业公司 可用于因特网的网络流量计算机系统
US6119730A (en) * 1998-12-21 2000-09-19 Mcmillan Company Precision laminar flow element for use in thermal mass flow sensors and flow controllers
US6143080A (en) * 1999-02-02 2000-11-07 Silicon Valley Group Thermal Systems Llc Wafer processing reactor having a gas flow control system and method
JP2000315115A (ja) * 1999-03-02 2000-11-14 Stec Inc 流量制御方法、流量制御装置および記録媒体
US6138990A (en) * 1999-03-25 2000-10-31 Dxl Usa Inc. Flow control valve assembly for mass flow controller
US6363958B1 (en) * 1999-05-10 2002-04-02 Parker-Hannifin Corporation Flow control of process gas in semiconductor manufacturing
US6119710A (en) * 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction
US6445980B1 (en) * 1999-07-10 2002-09-03 Mykrolis Corporation System and method for a variable gain proportional-integral (PI) controller
US6352001B1 (en) * 1999-08-30 2002-03-05 General Electric Company Non-iterative method for obtaining mass flow rate
US6311568B1 (en) * 1999-09-13 2001-11-06 Rosemount, Inc. Process flow device with improved pressure measurement feature
JP2001201414A (ja) * 2000-01-20 2001-07-27 Smc Corp 複合センサ及び複合センサを備えたフローコントローラ
US6655207B1 (en) * 2000-02-16 2003-12-02 Honeywell International Inc. Flow rate module and integrated flow restrictor
JP2002054959A (ja) * 2000-08-10 2002-02-20 Kazumasa Onishi 差圧式流量計
AU2001286619A1 (en) * 2000-08-22 2002-03-04 Fugasity Corporation Fluid mass flow meter with substantial measurement range
US6609431B1 (en) * 2000-09-29 2003-08-26 Xellogy, Inc. Flow measuring device based on predetermine class of liquid
US6333272B1 (en) * 2000-10-06 2001-12-25 Lam Research Corporation Gas distribution apparatus for semiconductor processing
AU2002307547A1 (en) * 2001-04-24 2002-11-05 Unit Instruments, Inc. System and method for configuring and asapting a mass flow controller
US6592253B2 (en) * 2001-10-09 2003-07-15 Northrop Grumman Corporation Precision temperature probe having fast response
US6708568B2 (en) * 2001-11-21 2004-03-23 General Electric Company Combustion chamber dynamic pressure transducer tee probe holder and related method
US6742394B1 (en) * 2003-01-13 2004-06-01 Power Systems Mfg, Llc Gas turbine combustor hybrid dynamic-static probe

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5469749A (en) * 1991-09-20 1995-11-28 Hitachi, Ltd. Multiple-function fluid measuring and transmitting apparatus
RU96120202A (ru) * 1994-04-20 1998-12-27 Роузмаунт Инк. Процессорный клапанный регулятор
US6089097A (en) * 1995-02-28 2000-07-18 Rosemount Inc. Elongated pressure sensor for a pressure transmitter
WO2001020282A1 (en) * 1999-09-13 2001-03-22 Rosemount Inc. Process flow plate with temperature measurement feature
US6539813B1 (en) * 1999-11-15 2003-04-01 Smc Kabushiki Kaisha Throttle structure and flow meter incorporated with throttle structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2765405C2 (ru) * 2017-05-23 2022-01-28 Б. Браун Мельзунген Аг Сенсорная система
US11701465B2 (en) 2017-05-23 2023-07-18 B. Braun Melsungen Ag Sensor system

Also Published As

Publication number Publication date
US6843139B2 (en) 2005-01-18
WO2004081500A3 (en) 2004-11-04
CN100363717C (zh) 2008-01-23
US20040177703A1 (en) 2004-09-16
WO2004081500A2 (en) 2004-09-23
JP2006519997A (ja) 2006-08-31
DE112004000430T5 (de) 2006-03-09
CN1777790A (zh) 2006-05-24
RU2005131574A (ru) 2006-02-10

Similar Documents

Publication Publication Date Title
RU2323416C2 (ru) Устройство регулирования расхода с мультисенсорами
RU2630710C2 (ru) Измеритель разницы давления, оснащенный датчиком
JP5492071B2 (ja) 圧力送信機用の膨張チャンバ
EP3638998B1 (en) Pressure sensor module for high working pressure applications
US6508129B1 (en) Pressure sensor capsule with improved isolation
EP2304404B1 (en) Improved isolation system for process pressure measurement
KR101931375B1 (ko) 유량 측정 장치 및 유량 제어 장치
EP3857189B1 (en) Non-invasive process fluid temperature indication with reduced error
TWI796417B (zh) 具有絕對和差分壓力變換器之質量流量控制器及其相關方法
CN104515545B (zh) 用于高压应用的多变量过程流体变送器
CN100520311C (zh) 耐蚀金属制流体用传感器及用该传感器的流体供给设备
EP2191249A1 (en) Improved differential pressure sensor isolation in a process fluid pressure transmitter
US20200103293A1 (en) Non-invasive process fluid temperature indication
JP2010534338A (ja) 屋外装置の温度平均化補償
JPS638524A (ja) 差圧発信器
US20190078914A1 (en) Pressure sensor cap having flow path with dimension variation
CN216385756U (zh) 过程流体多变量测量系统和多变量热电偶套管
EP3049782B1 (en) Isolator system for a pressure transmitter
US7124641B2 (en) Capacitive pressure transmitter
JP2005524847A (ja) 圧力センサ組立体
KR100411475B1 (ko) 정전 용량식 압력센서의 제조방법 및 이를 이용한 압력검출 장치
EP0895582A1 (en) Differential pressure device
JP7459257B2 (ja) 高範囲差圧センサ
US11041773B2 (en) Sensor body cell of a pressure sensor

Legal Events

Date Code Title Description
MM4A The patent is invalid due to non-payment of fees

Effective date: 20180312