CN100363717C - 具有多传感器的流量仪器 - Google Patents
具有多传感器的流量仪器 Download PDFInfo
- Publication number
- CN100363717C CN100363717C CNB2004800049351A CN200480004935A CN100363717C CN 100363717 C CN100363717 C CN 100363717C CN B2004800049351 A CNB2004800049351 A CN B2004800049351A CN 200480004935 A CN200480004935 A CN 200480004935A CN 100363717 C CN100363717 C CN 100363717C
- Authority
- CN
- China
- Prior art keywords
- pressure
- sensor
- inlet
- temperature
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/40—Details of construction of the flow constriction devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
- G01F15/022—Compensating or correcting for variations in pressure, density or temperature using electrical means
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Flow Control (AREA)
- Details Of Flowmeters (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/387,088 | 2003-03-12 | ||
| US10/387,088 US6843139B2 (en) | 2003-03-12 | 2003-03-12 | Flow instrument with multisensors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1777790A CN1777790A (zh) | 2006-05-24 |
| CN100363717C true CN100363717C (zh) | 2008-01-23 |
Family
ID=32961819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004800049351A Expired - Lifetime CN100363717C (zh) | 2003-03-12 | 2004-03-11 | 具有多传感器的流量仪器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6843139B2 (enExample) |
| JP (1) | JP2006519997A (enExample) |
| CN (1) | CN100363717C (enExample) |
| DE (1) | DE112004000430T5 (enExample) |
| RU (1) | RU2323416C2 (enExample) |
| WO (1) | WO2004081500A2 (enExample) |
Families Citing this family (72)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7096738B2 (en) * | 2004-03-18 | 2006-08-29 | Rosemount Inc. | In-line annular seal-based pressure device |
| DK1730476T3 (da) * | 2004-03-25 | 2021-06-21 | Micro Motion Inc | Simplificeret måling af fluidegenskaber |
| US20050267413A1 (en) * | 2004-05-26 | 2005-12-01 | Wang Jong H | Flow monitoring devices and methods of use |
| US7255012B2 (en) * | 2004-12-01 | 2007-08-14 | Rosemount Inc. | Process fluid flow device with variable orifice |
| US7201066B1 (en) * | 2005-03-30 | 2007-04-10 | The Board Of Regents For Oklahoma State University | System for automatic tire inflation |
| KR101268524B1 (ko) * | 2006-07-10 | 2013-05-28 | 삼성전자주식회사 | 유량제어장치 |
| US20090250116A1 (en) * | 2006-07-10 | 2009-10-08 | Hong Sa-Mun | Flow rate controlling apparatus |
| US7726186B2 (en) * | 2006-07-19 | 2010-06-01 | Degree Controls, Inc. | Airflow sensor for filter blockage detection |
| US7896045B2 (en) * | 2006-11-13 | 2011-03-01 | The Board Of Regents For Oklahoma State University | Apparatus for delivering air through powered axle assemblies |
| DE102007014898A1 (de) * | 2007-03-26 | 2008-10-02 | Vega Grieshaber Kg | Messzellenanordnung, insbesondere Druckmesszellenanordnung |
| DE102007030690A1 (de) | 2007-06-30 | 2009-05-07 | Endress + Hauser Flowtec Ag | Meßsystem für ein in einer Prozeßleitung strömendes Medium |
| DE102007030700A1 (de) | 2007-06-30 | 2009-05-07 | Endress + Hauser Flowtec Ag | Meßsystem für ein in einer Prozeßleitung strömendes Medium |
| DE102007030691A1 (de) | 2007-06-30 | 2009-01-02 | Endress + Hauser Flowtec Ag | Meßsystem für ein in einer Prozeßleitung strömendes Medium |
| DE102007030699A1 (de) | 2007-06-30 | 2009-01-15 | Endress + Hauser Flowtec Ag | Meßsystem für ein in einer Prozeßleitung strömendes Medium |
| US8234298B2 (en) * | 2007-07-25 | 2012-07-31 | International Business Machines Corporation | System and method for determining driving factor in a data cube |
| US7826991B2 (en) * | 2007-07-25 | 2010-11-02 | Rosemount Inc. | Temperature-averaging field device compensation |
| US20090093774A1 (en) * | 2007-10-04 | 2009-04-09 | Baxter International Inc. | Ambulatory pump with intelligent flow control |
| US8215157B2 (en) * | 2007-10-04 | 2012-07-10 | Baxter International Inc. | System and method for measuring liquid viscosity in a fluid delivery system |
| CN101430216B (zh) * | 2007-11-05 | 2015-11-25 | 北京七星华创电子股份有限公司 | 质量流量传感器及控制系统及其实现质量流量控制的方法 |
| US8504318B2 (en) * | 2008-03-05 | 2013-08-06 | Brooks Instruments, Llc | System, method and computer program for determining fluid flow rate using a pressure sensor and a thermal mass flow sensor |
| JP2011521270A (ja) * | 2008-05-27 | 2011-07-21 | ローズマウント インコーポレイテッド | 多変量圧力トランスミッターの改善された温度補償 |
| US8042401B2 (en) * | 2008-06-12 | 2011-10-25 | Rosemount, Inc. | Isolation system for process pressure measurement |
| US7826986B2 (en) * | 2008-09-26 | 2010-11-02 | Advanced Energy Industries, Inc. | Method and system for operating a mass flow controller |
| EP2347224B1 (en) * | 2008-10-27 | 2015-07-01 | Rosemount, Inc. | Multivariable fluid flow measurement device with fast response flow calculation |
| JP5220642B2 (ja) * | 2009-02-05 | 2013-06-26 | サーパス工業株式会社 | 差圧式流量計および流量コントローラ |
| DE102009040542A1 (de) * | 2009-09-08 | 2011-03-10 | Bürkert Werke GmbH | Vorrichtung und Verfahren zum Durchflussmessen oder -regeln |
| US8113046B2 (en) | 2010-03-22 | 2012-02-14 | Honeywell International Inc. | Sensor assembly with hydrophobic filter |
| US8397586B2 (en) * | 2010-03-22 | 2013-03-19 | Honeywell International Inc. | Flow sensor assembly with porous insert |
| US8656772B2 (en) | 2010-03-22 | 2014-02-25 | Honeywell International Inc. | Flow sensor with pressure output signal |
| US8756990B2 (en) | 2010-04-09 | 2014-06-24 | Honeywell International Inc. | Molded flow restrictor |
| US8418549B2 (en) | 2011-01-31 | 2013-04-16 | Honeywell International Inc. | Flow sensor assembly with integral bypass channel |
| US9003877B2 (en) | 2010-06-15 | 2015-04-14 | Honeywell International Inc. | Flow sensor assembly |
| US8695417B2 (en) | 2011-01-31 | 2014-04-15 | Honeywell International Inc. | Flow sensor with enhanced flow range capability |
| JP2012208061A (ja) * | 2011-03-30 | 2012-10-25 | Azbil Corp | フローセンサ |
| KR101269541B1 (ko) * | 2011-05-30 | 2013-06-04 | 한국수력원자력 주식회사 | 배관 내 유체 흐름 감시 장치 및 방법 |
| US8578783B2 (en) * | 2011-09-26 | 2013-11-12 | Rosemount Inc. | Process fluid pressure transmitter with separated sensor and sensor electronics |
| WO2013134232A2 (en) | 2012-03-06 | 2013-09-12 | Rosemount, Inc. | Remote seal pressure measurement system for subsea use |
| US9052217B2 (en) | 2012-11-09 | 2015-06-09 | Honeywell International Inc. | Variable scale sensor |
| KR101775257B1 (ko) * | 2013-03-08 | 2017-09-05 | 가부시키가이샤 후지킨 | 유체 제어 장치 및 유체 제어 장치에의 서멀 센서 설치 구조 |
| EP2972630B1 (en) * | 2013-03-12 | 2019-01-16 | Illinois Tool Works Inc. | Mass flow controller with near field communication and/or usb interface |
| DE102013010170B4 (de) * | 2013-06-19 | 2015-01-08 | Krohne Messtechnik Gmbh | Messgerät |
| US9433743B2 (en) | 2013-06-28 | 2016-09-06 | Carefusion 303, Inc. | Ventilator exhalation flow valve |
| US9746359B2 (en) * | 2013-06-28 | 2017-08-29 | Vyaire Medical Capital Llc | Flow sensor |
| US9795757B2 (en) | 2013-06-28 | 2017-10-24 | Vyaire Medical Capital Llc | Fluid inlet adapter |
| US9541098B2 (en) | 2013-06-28 | 2017-01-10 | Vyaire Medical Capital Llc | Low-noise blower |
| US9442031B2 (en) | 2013-06-28 | 2016-09-13 | Rosemount Inc. | High integrity process fluid pressure probe |
| EP3013400B8 (en) * | 2013-06-28 | 2017-07-05 | Vyaire Medical Capital LLC | Ventilator system |
| US9707369B2 (en) * | 2013-06-28 | 2017-07-18 | Vyaire Medical Capital Llc | Modular flow cassette |
| US9962514B2 (en) | 2013-06-28 | 2018-05-08 | Vyaire Medical Capital Llc | Ventilator flow valve |
| EP4089373A1 (en) | 2013-07-12 | 2022-11-16 | John C. Karamanos | Fluid control measuring device |
| CN104583742B (zh) * | 2013-07-19 | 2016-12-28 | 罗斯蒙特公司 | 包括具有两件式隔离插塞的隔离组件的压力变送器 |
| US9234776B2 (en) | 2013-09-26 | 2016-01-12 | Rosemount Inc. | Multivariable process fluid transmitter for high pressure applications |
| US9459170B2 (en) | 2013-09-26 | 2016-10-04 | Rosemount Inc. | Process fluid pressure sensing assembly for pressure transmitters subjected to high working pressure |
| DE102014112558A1 (de) | 2014-09-01 | 2016-03-03 | Endress + Hauser Flowtec Ag | Sensorbaugruppe für einen Sensor, Sensor sowie damit gebildetes Meßsystem |
| US9638600B2 (en) | 2014-09-30 | 2017-05-02 | Rosemount Inc. | Electrical interconnect for pressure sensor in a process variable transmitter |
| WO2016089552A1 (en) * | 2014-12-04 | 2016-06-09 | Illinois Tool Works Inc. | Wireless flow restrictor of a flowmeter |
| US9952079B2 (en) | 2015-07-15 | 2018-04-24 | Honeywell International Inc. | Flow sensor |
| CN109074104B (zh) * | 2016-04-28 | 2021-07-16 | 株式会社富士金 | 流体控制系统以及流体控制装置的控制方法 |
| CN106404060B (zh) * | 2016-08-31 | 2019-01-15 | 贵州永红航空机械有限责任公司 | 一种流体温度和压力的通用测试装置 |
| DE102016122714A1 (de) * | 2016-11-24 | 2018-05-24 | Endress + Hauser Wetzer Gmbh + Co Kg | Kommunikations-Adapter für einen Transmitter eines Feldgeräts |
| DE102017111301A1 (de) | 2017-05-23 | 2018-11-29 | B. Braun Melsungen Ag | Sensorsystem |
| CN107422754B (zh) * | 2017-09-01 | 2023-11-14 | 中国人民解放军军事科学院军事医学研究院 | 一种微量气体流速控制装置及控制方法 |
| US10948370B2 (en) * | 2018-04-10 | 2021-03-16 | The Boeing Company | Haptic pin field sensor and manipulator |
| CN112673239B (zh) * | 2018-09-18 | 2024-11-12 | 斯瓦戈洛克公司 | 流体监测模块布置 |
| WO2020061127A1 (en) | 2018-09-19 | 2020-03-26 | Swagelok Company | Flow restricting fluid component |
| WO2020154197A1 (en) * | 2019-01-25 | 2020-07-30 | Lam Research Corporation | Differential-pressure-based flow meters |
| US20210396560A1 (en) * | 2020-06-17 | 2021-12-23 | Rosemount Inc | Subsea multivariable transmitter |
| CN116222668A (zh) * | 2020-08-18 | 2023-06-06 | 成都一通密封股份有限公司 | 一种压力传感校正器及其压力传感校正系统 |
| CN114623879A (zh) * | 2020-12-14 | 2022-06-14 | 宝能汽车集团有限公司 | 气体流量检测装置及其控制方法 |
| JP2025506812A (ja) * | 2022-02-23 | 2025-03-13 | アイコール・システムズ・インク | 流体送達モジュール |
| USD1043392S1 (en) | 2022-11-30 | 2024-09-24 | Swagelok Company | Flow monitoring device |
| DE102024114506A1 (de) * | 2024-05-23 | 2025-11-27 | Bürkert Werke GmbH & Co. KG | Durchflussmessgerät sowie Massendurchflussregler und Massendurchflussmesser mit einem solchen Durchflussmessgerät |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3792609A (en) * | 1971-05-10 | 1974-02-19 | Tylan Corp | Flow splitter |
| US5332005A (en) * | 1992-11-06 | 1994-07-26 | Aalborg Instruments & Controls, Inc. | Laminar flow element and method for metering fluid flow |
| JPH07128103A (ja) * | 1993-11-05 | 1995-05-19 | Gijutsu Kaihatsu Sogo Kenkyusho:Kk | 差圧検出センサ |
| US5469749A (en) * | 1991-09-20 | 1995-11-28 | Hitachi, Ltd. | Multiple-function fluid measuring and transmitting apparatus |
| CN1176693A (zh) * | 1995-02-28 | 1998-03-18 | 罗斯蒙德公司 | 压力传感器和压力变送器 |
| JP2001141532A (ja) * | 1999-11-15 | 2001-05-25 | Smc Corp | 絞り構造体及び絞り構造体を組み込む流量計 |
| CN1371490A (zh) * | 1999-07-10 | 2002-09-25 | 米克罗利斯公司 | 可变增益比例积分控制器的系统和方法 |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6014121A (ja) * | 1983-07-05 | 1985-01-24 | Esutetsuku:Kk | 層流素子 |
| JPS62226016A (ja) * | 1986-03-28 | 1987-10-05 | Toshiba Corp | 差圧式流量測定装置 |
| JPH0170120U (enExample) * | 1987-10-27 | 1989-05-10 | ||
| JP2871727B2 (ja) * | 1989-06-21 | 1999-03-17 | 東芝エンジニアリング株式会社 | 空気流量制御装置 |
| JPH041526A (ja) * | 1990-04-18 | 1992-01-07 | Tokyo Gas Co Ltd | 紋り流量計に於ける温度検出機構 |
| JPH05107090A (ja) * | 1991-10-21 | 1993-04-27 | Nissan Motor Co Ltd | 差圧流量計 |
| JPH0863235A (ja) * | 1994-08-24 | 1996-03-08 | Burutsukusu Instr Kk | 差圧式質量流量コントロール装置 |
| WO1997004288A1 (en) * | 1995-07-17 | 1997-02-06 | Rosemount Inc. | Transmitter for providing a signal indicative of flow through a differential transducer using a simplified process |
| US5672832A (en) * | 1996-02-15 | 1997-09-30 | Nt International, Inc. | Chemically inert flow meter within caustic fluids having non-contaminating body |
| US6907383B2 (en) * | 1996-03-28 | 2005-06-14 | Rosemount Inc. | Flow diagnostic system |
| JPH10300544A (ja) * | 1997-04-24 | 1998-11-13 | Hitachi Ltd | 空気流量測定方法及び装置 |
| DE69714747T2 (de) * | 1997-12-30 | 2003-04-30 | Qualiflow S.A., Montpellier | Verfahren zu Herstellung von einem Sensor für einen thermischen Massendurchflussmesser |
| US6152162A (en) * | 1998-10-08 | 2000-11-28 | Mott Metallurgical Corporation | Fluid flow controlling |
| CA2354622A1 (en) * | 1998-12-15 | 2000-06-22 | Daniel Industries, Inc. | Internet enabled network flow computer system |
| US6119730A (en) * | 1998-12-21 | 2000-09-19 | Mcmillan Company | Precision laminar flow element for use in thermal mass flow sensors and flow controllers |
| US6143080A (en) * | 1999-02-02 | 2000-11-07 | Silicon Valley Group Thermal Systems Llc | Wafer processing reactor having a gas flow control system and method |
| JP2000315115A (ja) * | 1999-03-02 | 2000-11-14 | Stec Inc | 流量制御方法、流量制御装置および記録媒体 |
| US6138990A (en) * | 1999-03-25 | 2000-10-31 | Dxl Usa Inc. | Flow control valve assembly for mass flow controller |
| US6363958B1 (en) * | 1999-05-10 | 2002-04-02 | Parker-Hannifin Corporation | Flow control of process gas in semiconductor manufacturing |
| US6119710A (en) * | 1999-05-26 | 2000-09-19 | Cyber Instrument Technologies Llc | Method for wide range gas flow system with real time flow measurement and correction |
| US6352001B1 (en) * | 1999-08-30 | 2002-03-05 | General Electric Company | Non-iterative method for obtaining mass flow rate |
| US6311568B1 (en) * | 1999-09-13 | 2001-11-06 | Rosemount, Inc. | Process flow device with improved pressure measurement feature |
| US6543297B1 (en) * | 1999-09-13 | 2003-04-08 | Rosemount Inc. | Process flow plate with temperature measurement feature |
| JP2001201414A (ja) * | 2000-01-20 | 2001-07-27 | Smc Corp | 複合センサ及び複合センサを備えたフローコントローラ |
| US6655207B1 (en) * | 2000-02-16 | 2003-12-02 | Honeywell International Inc. | Flow rate module and integrated flow restrictor |
| JP2002054959A (ja) * | 2000-08-10 | 2002-02-20 | Kazumasa Onishi | 差圧式流量計 |
| WO2002016885A1 (en) * | 2000-08-22 | 2002-02-28 | Fugasity Corporation | Fluid mass flow meter with substantial measurement range |
| US6609431B1 (en) * | 2000-09-29 | 2003-08-26 | Xellogy, Inc. | Flow measuring device based on predetermine class of liquid |
| US6333272B1 (en) * | 2000-10-06 | 2001-12-25 | Lam Research Corporation | Gas distribution apparatus for semiconductor processing |
| ATE310986T1 (de) * | 2001-04-24 | 2005-12-15 | Celerity Group Inc | Verfahren zur bestimmung einer ventilöffnung für einen massenflussregler |
| US6592253B2 (en) * | 2001-10-09 | 2003-07-15 | Northrop Grumman Corporation | Precision temperature probe having fast response |
| US6708568B2 (en) * | 2001-11-21 | 2004-03-23 | General Electric Company | Combustion chamber dynamic pressure transducer tee probe holder and related method |
| US6742394B1 (en) * | 2003-01-13 | 2004-06-01 | Power Systems Mfg, Llc | Gas turbine combustor hybrid dynamic-static probe |
-
2003
- 2003-03-12 US US10/387,088 patent/US6843139B2/en not_active Expired - Lifetime
-
2004
- 2004-03-11 DE DE112004000430T patent/DE112004000430T5/de not_active Ceased
- 2004-03-11 JP JP2006507043A patent/JP2006519997A/ja active Pending
- 2004-03-11 CN CNB2004800049351A patent/CN100363717C/zh not_active Expired - Lifetime
- 2004-03-11 WO PCT/US2004/007321 patent/WO2004081500A2/en not_active Ceased
- 2004-03-11 RU RU2005131574/28A patent/RU2323416C2/ru not_active IP Right Cessation
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3792609A (en) * | 1971-05-10 | 1974-02-19 | Tylan Corp | Flow splitter |
| US5469749A (en) * | 1991-09-20 | 1995-11-28 | Hitachi, Ltd. | Multiple-function fluid measuring and transmitting apparatus |
| US5332005A (en) * | 1992-11-06 | 1994-07-26 | Aalborg Instruments & Controls, Inc. | Laminar flow element and method for metering fluid flow |
| JPH07128103A (ja) * | 1993-11-05 | 1995-05-19 | Gijutsu Kaihatsu Sogo Kenkyusho:Kk | 差圧検出センサ |
| CN1176693A (zh) * | 1995-02-28 | 1998-03-18 | 罗斯蒙德公司 | 压力传感器和压力变送器 |
| CN1371490A (zh) * | 1999-07-10 | 2002-09-25 | 米克罗利斯公司 | 可变增益比例积分控制器的系统和方法 |
| JP2001141532A (ja) * | 1999-11-15 | 2001-05-25 | Smc Corp | 絞り構造体及び絞り構造体を組み込む流量計 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1777790A (zh) | 2006-05-24 |
| US6843139B2 (en) | 2005-01-18 |
| WO2004081500A2 (en) | 2004-09-23 |
| RU2323416C2 (ru) | 2008-04-27 |
| RU2005131574A (ru) | 2006-02-10 |
| US20040177703A1 (en) | 2004-09-16 |
| JP2006519997A (ja) | 2006-08-31 |
| WO2004081500A3 (en) | 2004-11-04 |
| DE112004000430T5 (de) | 2006-03-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100363717C (zh) | 具有多传感器的流量仪器 | |
| JP6088050B2 (ja) | 圧力センサを有する差圧伝送器 | |
| US6508129B1 (en) | Pressure sensor capsule with improved isolation | |
| CN101180526B (zh) | 使用可压缩的传感器体的压力传感器 | |
| CN1225643C (zh) | 可用于高度洁净及高腐蚀性环境的感测器 | |
| EP3287758B1 (en) | Differential pressure sensor incorporating common mode error compensation | |
| US10627302B2 (en) | Pressure sensor module for high working pressure applications | |
| CN113390554A (zh) | 压差传感器 | |
| US10655989B2 (en) | Pressure sensor cap having flow path with dimension variation | |
| CN113390553A (zh) | 用于压差感测基座的封装 | |
| CN113390555A (zh) | 压差感测基座 | |
| WO2000003220A1 (en) | Methods and apparatus for sensing differential and gauge static pressure in a fluid flow line | |
| US7124641B2 (en) | Capacitive pressure transmitter | |
| CN114076640A (zh) | 具有压力感测能力的热电偶套管 | |
| JP7600379B2 (ja) | サファイアオイルレス圧力センサ上のポリシリコン | |
| EP3614116B1 (en) | Pressure sensors and methods of making pressure sensors | |
| KR100411475B1 (ko) | 정전 용량식 압력센서의 제조방법 및 이를 이용한 압력검출 장치 | |
| WO1999028718A1 (en) | Fluid monitoring device | |
| WO2025071956A1 (en) | Process variable transmitter with cryogenic temperature sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20080123 |