DE69714747T2 - Verfahren zu Herstellung von einem Sensor für einen thermischen Massendurchflussmesser - Google Patents

Verfahren zu Herstellung von einem Sensor für einen thermischen Massendurchflussmesser

Info

Publication number
DE69714747T2
DE69714747T2 DE69714747T DE69714747T DE69714747T2 DE 69714747 T2 DE69714747 T2 DE 69714747T2 DE 69714747 T DE69714747 T DE 69714747T DE 69714747 T DE69714747 T DE 69714747T DE 69714747 T2 DE69714747 T2 DE 69714747T2
Authority
DE
Germany
Prior art keywords
sensor
manufacturing
mass flow
flow meter
thermal mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69714747T
Other languages
English (en)
Other versions
DE69714747D1 (de
Inventor
Pascal Rudent
Andre Boyer
Alain Giani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qualiflow S A
Original Assignee
Qualiflow S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualiflow S A filed Critical Qualiflow S A
Application granted granted Critical
Publication of DE69714747D1 publication Critical patent/DE69714747D1/de
Publication of DE69714747T2 publication Critical patent/DE69714747T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
DE69714747T 1997-12-30 1997-12-30 Verfahren zu Herstellung von einem Sensor für einen thermischen Massendurchflussmesser Expired - Fee Related DE69714747T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP97403185A EP0927875B1 (de) 1997-12-30 1997-12-30 Verfahren zu Herstellung von einem Sensor für einen thermischen Massendurchflussmesser

Publications (2)

Publication Number Publication Date
DE69714747D1 DE69714747D1 (de) 2002-09-19
DE69714747T2 true DE69714747T2 (de) 2003-04-30

Family

ID=8229942

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69714747T Expired - Fee Related DE69714747T2 (de) 1997-12-30 1997-12-30 Verfahren zu Herstellung von einem Sensor für einen thermischen Massendurchflussmesser

Country Status (4)

Country Link
US (1) US6354150B1 (de)
EP (1) EP0927875B1 (de)
AT (1) ATE222354T1 (de)
DE (1) DE69714747T2 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE210819T1 (de) * 1997-12-30 2001-12-15 Qualiflow S A Verfahren zur schaffung eines mikro-thermoelement-sensors für die massendurchflussmessung und entsprechende vorrichtung dazu
US6595049B1 (en) * 1999-06-18 2003-07-22 Mks Instruments, Inc. Thermal mass flow sensor with improved sensitivity and response time
US6779396B2 (en) * 2002-04-08 2004-08-24 Takao Tsuda Method for measuring flow within an open tube
US6675660B1 (en) * 2002-07-31 2004-01-13 Sandia National Laboratories Composition pulse time-of-flight mass flow sensor
US6843139B2 (en) * 2003-03-12 2005-01-18 Rosemount Inc. Flow instrument with multisensors
US7107835B2 (en) * 2004-09-08 2006-09-19 Honeywell International Inc. Thermal mass flow sensor
WO2007110934A1 (ja) * 2006-03-28 2007-10-04 Shimadzu Corporation 熱式質量流量計
US7651263B2 (en) * 2007-03-01 2010-01-26 Advanced Energy Industries, Inc. Method and apparatus for measuring the temperature of a gas in a mass flow controller
DE102007039280A1 (de) * 2007-08-20 2009-02-26 Heraeus Sensor Technology Gmbh Elektronische Nase
US7797997B2 (en) * 2007-08-24 2010-09-21 Siargo Inc. Configuration and methods for manufacturing time-of-flight MEMS mass flow sensor
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
DE102012004317B4 (de) * 2012-03-07 2015-09-03 Karlsruher Institut für Technologie Fluidkalorimeter
US10352743B1 (en) * 2013-09-26 2019-07-16 Sensors That Count, L.L.C. Flow sensor based on electrical capacity
US11231305B2 (en) * 2013-09-26 2022-01-25 Amvac Chemical Corporation Flow sensor apparatus for monitoring a directed stream of an agricultural product
US10908005B2 (en) * 2014-10-01 2021-02-02 Sierra Instruments, Inc. Capillary sensor tube flow meters and controllers
GB2533936B (en) 2015-01-07 2017-10-25 Homeserve Plc Flow detection device
GB201501935D0 (en) 2015-02-05 2015-03-25 Tooms Moore Consulting Ltd And Trow Consulting Ltd Water flow analysis
EP3392621A1 (de) * 2017-04-19 2018-10-24 Sensirion AG Membranbasierte thermische durchflusssensorvorrichtung
JP6843024B2 (ja) * 2017-09-15 2021-03-17 アズビル株式会社 熱式流量計
JP6661678B2 (ja) * 2018-02-23 2020-03-11 三菱電機株式会社 熱式検出センサ
CN109283117B (zh) * 2018-11-15 2023-07-25 中国计量大学 基于热传导的岩土渗流实时测量仪器系统
US11927555B2 (en) * 2021-05-25 2024-03-12 Siargo Ltd. Micromachined thermal time-of-flight fluidic concentration metering device

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Publication number Priority date Publication date Assignee Title
US3056295A (en) * 1955-07-08 1962-10-02 Laub John Harry Flow meter
US3938384A (en) * 1972-10-13 1976-02-17 Tylan Corporation Mass flow meter with reduced attitude sensitivity
DE3220170A1 (de) * 1982-05-28 1983-12-01 Robert Bosch Gmbh, 7000 Stuttgart Messvorrichtung zur erfassung der stroemungsgeschwindigkeit von fluessigkeiten und gasen
DE3229609A1 (de) * 1982-08-09 1984-02-09 Trasidex AG, 9490 Vaduz Thermischer durchflussmesser
JPS59162413A (ja) * 1983-03-07 1984-09-13 Hitachi Ltd 熱式流量計
ATE70911T1 (de) * 1983-05-18 1992-01-15 Bronkhorst High Tech Bv Durchflussmessgeraet.
US4672997A (en) * 1984-10-29 1987-06-16 Btu Engineering Corporation Modular, self-diagnostic mass-flow controller and system
JP2791828B2 (ja) * 1990-08-11 1998-08-27 株式会社エステック 熱式質量流量計
JPH07111367B2 (ja) * 1991-02-26 1995-11-29 ディーエクスエル・インターナショナル・インコーポレーテッド 流量センサおよびその検査方法
JP2643665B2 (ja) * 1991-06-13 1997-08-20 日本エム・ケー・エス 株式会社 流量センサ
JP2842729B2 (ja) * 1992-04-30 1999-01-06 三菱電機株式会社 感熱式流量センサ
DE4335332A1 (de) * 1993-10-18 1995-04-20 Bitop Gmbh Verfahren und Vorrichtung zur insbesondere nicht invasiven Ermittlung mindestens eines interessierenden Parameters eines Fluid-Rohr-Systems
US5792952A (en) * 1996-05-23 1998-08-11 Varian Associates, Inc. Fluid thermal mass flow sensor
US5693880A (en) * 1996-06-14 1997-12-02 Mks Instruments, Inc. Heater with tapered heater density function for use with mass flowmeter

Also Published As

Publication number Publication date
EP0927875A1 (de) 1999-07-07
EP0927875B1 (de) 2002-08-14
DE69714747D1 (de) 2002-09-19
ATE222354T1 (de) 2002-08-15
US6354150B1 (en) 2002-03-12

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee