DE69005884D1 - Massenströmungsmesser mit Temperaturmesssonden. - Google Patents

Massenströmungsmesser mit Temperaturmesssonden.

Info

Publication number
DE69005884D1
DE69005884D1 DE90200417T DE69005884T DE69005884D1 DE 69005884 D1 DE69005884 D1 DE 69005884D1 DE 90200417 T DE90200417 T DE 90200417T DE 69005884 T DE69005884 T DE 69005884T DE 69005884 D1 DE69005884 D1 DE 69005884D1
Authority
DE
Germany
Prior art keywords
temperature
mass flow
tube
flow meter
temperature measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90200417T
Other languages
English (en)
Other versions
DE69005884T2 (de
Inventor
Der Graaf Frederik Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bronkhorst High-Tech BV
Original Assignee
Bronkhorst High-Tech BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bronkhorst High-Tech BV filed Critical Bronkhorst High-Tech BV
Publication of DE69005884D1 publication Critical patent/DE69005884D1/de
Application granted granted Critical
Publication of DE69005884T2 publication Critical patent/DE69005884T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/6888—Thermoelectric elements, e.g. thermocouples, thermopiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
DE69005884T 1989-02-24 1990-02-22 Massenströmungsmesser mit Temperaturmesssonden. Expired - Fee Related DE69005884T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8900474A NL8900474A (nl) 1989-02-24 1989-02-24 Massa-debietmeter met temperatuursensoren.

Publications (2)

Publication Number Publication Date
DE69005884D1 true DE69005884D1 (de) 1994-02-24
DE69005884T2 DE69005884T2 (de) 1994-06-09

Family

ID=19854209

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69005884T Expired - Fee Related DE69005884T2 (de) 1989-02-24 1990-02-22 Massenströmungsmesser mit Temperaturmesssonden.

Country Status (8)

Country Link
US (1) US5036701A (de)
EP (1) EP0395126B1 (de)
JP (1) JP2892419B2 (de)
AT (1) ATE100195T1 (de)
DE (1) DE69005884T2 (de)
DK (1) DK0395126T3 (de)
ES (1) ES2047818T3 (de)
NL (1) NL8900474A (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0484645B1 (de) * 1990-11-09 1995-04-26 Hewlett-Packard Company Verfahren und Systeme zur Identifizierung von Flüssigkeiten und Bestimmung der Strömung
DE4036991A1 (de) * 1990-11-20 1992-05-21 Linde Ag Verfahren zur verwendung inerter treibmittel bei der herstellung aufgeschaeumter kunststoffe
US5359878A (en) * 1991-02-26 1994-11-01 Dxl International, Inc. Apparatus and method for in-line calibration verification of mass flow meters
WO1992020006A2 (en) * 1991-04-26 1992-11-12 Unit Instruments, Inc. Thermal mass flow sensor
US5237866A (en) * 1991-05-10 1993-08-24 Brooks Instrument B.V. Flow sensor for measuring high fluid flow rates
JP2666163B2 (ja) * 1991-12-04 1997-10-22 山武ハネウエル株式会社 流速センサの温度特性補正方法
US5980102A (en) * 1994-06-20 1999-11-09 Columbia Gas Of Ohio Method for measuring physical characteristics in a pipeline without tapping
US5645348A (en) * 1994-06-20 1997-07-08 Columbia Gas Of Ohio, Inc. Method and apparatus for measuring pressure in a pipeline without tapping
NL1001674C2 (nl) * 1995-11-17 1997-05-21 Berkin Bv Debietmeter.
NL1003973C2 (nl) * 1996-09-06 1998-03-09 Berkin Bv Werkwijze voor het momentaan identificeren van een gas- of vloeistofstroom en inrichting voor het uitvoeren van de werkwijze.
US5693880A (en) * 1996-06-14 1997-12-02 Mks Instruments, Inc. Heater with tapered heater density function for use with mass flowmeter
JP2001525543A (ja) * 1997-12-02 2001-12-11 スミス、アラン、エル 質量及び熱流量測定センサ
JP2002529188A (ja) * 1998-11-18 2002-09-10 ジェネラル サージカル イノヴェイションズ インコーポレイテッド 螺旋状ファスナおよび外科手術用アプリケータ
DE10000496A1 (de) * 2000-01-08 2001-07-12 Bosch Gmbh Robert Gasströmungs-Bestimmungsverfahren und -vorrichtung
US6446504B1 (en) 2000-03-30 2002-09-10 Mks Instruments, Inc. Constant temperature gradient differential thermal mass flow sensor
NL1014797C2 (nl) * 2000-03-30 2001-10-02 Berkin Bv Massadebietmeter.
US6499357B2 (en) * 2001-03-13 2002-12-31 Factory Mutual Research Corporation Heat flux measurement pipe and method for determining sprinkler water delivery requirement
US6708561B2 (en) 2002-04-19 2004-03-23 Visteon Global Technologies, Inc. Fluid flow meter having an improved sampling channel
US7000464B2 (en) * 2002-05-28 2006-02-21 Mcmillan Company Measuring and control of low fluid flow rates with heated conduit walls
US6736005B2 (en) * 2002-05-28 2004-05-18 Mcmillan Company High accuracy measuring and control of low fluid flow rates
US6826955B2 (en) * 2002-09-20 2004-12-07 Visteon Global Technologies, Inc. Mass fluid flow sensor having an improved housing design
US6973825B2 (en) * 2003-02-24 2005-12-13 Visteon Global Technologies, Inc. Hot-wire mass flow sensor with low-loss bypass passage
US7874208B2 (en) * 2007-10-10 2011-01-25 Brooks Instrument, Llc System for and method of providing a wide-range flow controller
US7971480B2 (en) 2008-10-13 2011-07-05 Hitachi Metals, Ltd. Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements
DE102011120899B4 (de) 2011-12-12 2015-08-20 Karlsruher Institut für Technologie Verfahren und Verwendung einer Vorrichtung zur Bestimmung des Massenstroms eines Fluids
DE102017119667B4 (de) * 2017-08-28 2023-05-25 Dionex Softron Gmbh Messung eines Fluidflusses
US11150120B2 (en) * 2019-09-22 2021-10-19 Applied Materials, Inc. Low temperature thermal flow ratio controller

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB591690A (en) * 1945-05-03 1947-08-26 Arthur Frederick Brown Instruments for indicating or measuring the flow of fluids
US2594618A (en) * 1945-08-11 1952-04-29 Atomic Energy Commission Thermal flowmeter
DE1065627B (de) * 1957-01-24
GB1072514A (en) * 1963-08-19 1967-06-21 Heinz Frank Poppendiek Means and techniques useful in fluid flow determinations
US4100801A (en) * 1976-02-09 1978-07-18 Tylan Corporation Mass flow sensing system
US4519246A (en) * 1981-12-21 1985-05-28 Advanced Semiconductor Materials International, N.V. Improved flow meter
US4686856A (en) * 1983-02-28 1987-08-18 Vavra Randall J Mass flow meter
US4487062A (en) * 1983-03-30 1984-12-11 Sierra Instruments, Inc. Mass flowmeter
US4972707A (en) * 1988-05-18 1990-11-27 Brooks Instrument B.V. Apparatus for measuring the flow of a fluid

Also Published As

Publication number Publication date
JP2892419B2 (ja) 1999-05-17
ES2047818T3 (es) 1994-03-01
US5036701A (en) 1991-08-06
NL8900474A (nl) 1990-09-17
JPH02262015A (ja) 1990-10-24
ATE100195T1 (de) 1994-01-15
EP0395126B1 (de) 1994-01-12
EP0395126A1 (de) 1990-10-31
DE69005884T2 (de) 1994-06-09
DK0395126T3 (da) 1994-04-11

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Legal Events

Date Code Title Description
8380 Miscellaneous part iii

Free format text: DER INHABER IST ZU AENDERN IN: BERKIN B.V., RUURLO, NL

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee
8370 Indication related to discontinuation of the patent is to be deleted
8339 Ceased/non-payment of the annual fee