NL8900474A - Massa-debietmeter met temperatuursensoren. - Google Patents

Massa-debietmeter met temperatuursensoren. Download PDF

Info

Publication number
NL8900474A
NL8900474A NL8900474A NL8900474A NL8900474A NL 8900474 A NL8900474 A NL 8900474A NL 8900474 A NL8900474 A NL 8900474A NL 8900474 A NL8900474 A NL 8900474A NL 8900474 A NL8900474 A NL 8900474A
Authority
NL
Netherlands
Prior art keywords
tube
temperature
mass flow
flow meter
heating element
Prior art date
Application number
NL8900474A
Other languages
English (en)
Dutch (nl)
Original Assignee
Bronkhorst High Tech Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bronkhorst High Tech Bv filed Critical Bronkhorst High Tech Bv
Priority to NL8900474A priority Critical patent/NL8900474A/nl
Priority to US07/482,786 priority patent/US5036701A/en
Priority to EP90200417A priority patent/EP0395126B1/de
Priority to AT90200417T priority patent/ATE100195T1/de
Priority to JP2039927A priority patent/JP2892419B2/ja
Priority to DK90200417.5T priority patent/DK0395126T3/da
Priority to DE69005884T priority patent/DE69005884T2/de
Priority to ES90200417T priority patent/ES2047818T3/es
Publication of NL8900474A publication Critical patent/NL8900474A/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/6888—Thermoelectric elements, e.g. thermocouples, thermopiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
NL8900474A 1989-02-24 1989-02-24 Massa-debietmeter met temperatuursensoren. NL8900474A (nl)

Priority Applications (8)

Application Number Priority Date Filing Date Title
NL8900474A NL8900474A (nl) 1989-02-24 1989-02-24 Massa-debietmeter met temperatuursensoren.
US07/482,786 US5036701A (en) 1989-02-24 1990-02-21 Mass-flow meter with temperature sensors
EP90200417A EP0395126B1 (de) 1989-02-24 1990-02-22 Massenströmungsmesser mit Temperaturmesssonden
AT90200417T ATE100195T1 (de) 1989-02-24 1990-02-22 Massenstroemungsmesser mit temperaturmesssonden.
JP2039927A JP2892419B2 (ja) 1989-02-24 1990-02-22 温度センサー付質量流量計
DK90200417.5T DK0395126T3 (da) 1989-02-24 1990-02-22 Masseflowmeter med temperatursesorer
DE69005884T DE69005884T2 (de) 1989-02-24 1990-02-22 Massenströmungsmesser mit Temperaturmesssonden.
ES90200417T ES2047818T3 (es) 1989-02-24 1990-02-22 Caudalimetros masicos con detectores de temperatura.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8900474A NL8900474A (nl) 1989-02-24 1989-02-24 Massa-debietmeter met temperatuursensoren.
NL8900474 1989-02-24

Publications (1)

Publication Number Publication Date
NL8900474A true NL8900474A (nl) 1990-09-17

Family

ID=19854209

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8900474A NL8900474A (nl) 1989-02-24 1989-02-24 Massa-debietmeter met temperatuursensoren.

Country Status (8)

Country Link
US (1) US5036701A (de)
EP (1) EP0395126B1 (de)
JP (1) JP2892419B2 (de)
AT (1) ATE100195T1 (de)
DE (1) DE69005884T2 (de)
DK (1) DK0395126T3 (de)
ES (1) ES2047818T3 (de)
NL (1) NL8900474A (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69109236T2 (de) * 1990-11-09 1996-01-11 Hewlett Packard Co Verfahren und Systeme zur Identifizierung von Flüssigkeiten und Bestimmung der Strömung.
DE4036991A1 (de) * 1990-11-20 1992-05-21 Linde Ag Verfahren zur verwendung inerter treibmittel bei der herstellung aufgeschaeumter kunststoffe
US5359878A (en) * 1991-02-26 1994-11-01 Dxl International, Inc. Apparatus and method for in-line calibration verification of mass flow meters
EP0581896A1 (de) * 1991-04-26 1994-02-09 Unit Instruments, Inc. Thermischer Massendurchflusssensor
US5237866A (en) * 1991-05-10 1993-08-24 Brooks Instrument B.V. Flow sensor for measuring high fluid flow rates
JP2666163B2 (ja) * 1991-12-04 1997-10-22 山武ハネウエル株式会社 流速センサの温度特性補正方法
US5980102A (en) * 1994-06-20 1999-11-09 Columbia Gas Of Ohio Method for measuring physical characteristics in a pipeline without tapping
US5645348A (en) * 1994-06-20 1997-07-08 Columbia Gas Of Ohio, Inc. Method and apparatus for measuring pressure in a pipeline without tapping
NL1001674C2 (nl) * 1995-11-17 1997-05-21 Berkin Bv Debietmeter.
NL1003973C2 (nl) * 1996-09-06 1998-03-09 Berkin Bv Werkwijze voor het momentaan identificeren van een gas- of vloeistofstroom en inrichting voor het uitvoeren van de werkwijze.
US5693880A (en) * 1996-06-14 1997-12-02 Mks Instruments, Inc. Heater with tapered heater density function for use with mass flowmeter
CA2309152A1 (en) * 1997-12-02 1999-06-10 Allan L. Smith Apparatus and method for simultaneous measurement of mass and heat flow changes
CA2351531C (en) * 1998-11-18 2007-04-24 General Surgical Innovations, Inc. Helical fastener and applicator for surgical procedures
DE10000496A1 (de) * 2000-01-08 2001-07-12 Bosch Gmbh Robert Gasströmungs-Bestimmungsverfahren und -vorrichtung
NL1014797C2 (nl) * 2000-03-30 2001-10-02 Berkin Bv Massadebietmeter.
US6446504B1 (en) 2000-03-30 2002-09-10 Mks Instruments, Inc. Constant temperature gradient differential thermal mass flow sensor
US6499357B2 (en) * 2001-03-13 2002-12-31 Factory Mutual Research Corporation Heat flux measurement pipe and method for determining sprinkler water delivery requirement
US6708561B2 (en) 2002-04-19 2004-03-23 Visteon Global Technologies, Inc. Fluid flow meter having an improved sampling channel
US7000464B2 (en) * 2002-05-28 2006-02-21 Mcmillan Company Measuring and control of low fluid flow rates with heated conduit walls
US6736005B2 (en) * 2002-05-28 2004-05-18 Mcmillan Company High accuracy measuring and control of low fluid flow rates
US6826955B2 (en) * 2002-09-20 2004-12-07 Visteon Global Technologies, Inc. Mass fluid flow sensor having an improved housing design
US6973825B2 (en) * 2003-02-24 2005-12-13 Visteon Global Technologies, Inc. Hot-wire mass flow sensor with low-loss bypass passage
US7874208B2 (en) * 2007-10-10 2011-01-25 Brooks Instrument, Llc System for and method of providing a wide-range flow controller
US7971480B2 (en) 2008-10-13 2011-07-05 Hitachi Metals, Ltd. Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements
DE102011120899B4 (de) 2011-12-12 2015-08-20 Karlsruher Institut für Technologie Verfahren und Verwendung einer Vorrichtung zur Bestimmung des Massenstroms eines Fluids
DE102017119667B4 (de) * 2017-08-28 2023-05-25 Dionex Softron Gmbh Messung eines Fluidflusses
US11150120B2 (en) * 2019-09-22 2021-10-19 Applied Materials, Inc. Low temperature thermal flow ratio controller

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB591690A (en) * 1945-05-03 1947-08-26 Arthur Frederick Brown Instruments for indicating or measuring the flow of fluids
US2594618A (en) * 1945-08-11 1952-04-29 Atomic Energy Commission Thermal flowmeter
DE1065627B (de) * 1957-01-24
GB1072514A (en) * 1963-08-19 1967-06-21 Heinz Frank Poppendiek Means and techniques useful in fluid flow determinations
US4100801A (en) * 1976-02-09 1978-07-18 Tylan Corporation Mass flow sensing system
US4519246A (en) * 1981-12-21 1985-05-28 Advanced Semiconductor Materials International, N.V. Improved flow meter
US4686856A (en) * 1983-02-28 1987-08-18 Vavra Randall J Mass flow meter
US4487062A (en) * 1983-03-30 1984-12-11 Sierra Instruments, Inc. Mass flowmeter
US4972707A (en) * 1988-05-18 1990-11-27 Brooks Instrument B.V. Apparatus for measuring the flow of a fluid

Also Published As

Publication number Publication date
US5036701A (en) 1991-08-06
EP0395126A1 (de) 1990-10-31
EP0395126B1 (de) 1994-01-12
ATE100195T1 (de) 1994-01-15
ES2047818T3 (es) 1994-03-01
DK0395126T3 (da) 1994-04-11
DE69005884D1 (de) 1994-02-24
DE69005884T2 (de) 1994-06-09
JP2892419B2 (ja) 1999-05-17
JPH02262015A (ja) 1990-10-24

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BV The patent application has lapsed