JP2006507105A5 - - Google Patents

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Publication number
JP2006507105A5
JP2006507105A5 JP2003567551A JP2003567551A JP2006507105A5 JP 2006507105 A5 JP2006507105 A5 JP 2006507105A5 JP 2003567551 A JP2003567551 A JP 2003567551A JP 2003567551 A JP2003567551 A JP 2003567551A JP 2006507105 A5 JP2006507105 A5 JP 2006507105A5
Authority
JP
Japan
Prior art keywords
filter material
holes
spacer
substrate
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003567551A
Other languages
English (en)
Japanese (ja)
Other versions
JP4111919B2 (ja
JP2006507105A (ja
Filing date
Publication date
Priority claimed from US10/074,962 external-priority patent/US20030150791A1/en
Application filed filed Critical
Publication of JP2006507105A publication Critical patent/JP2006507105A/ja
Publication of JP2006507105A5 publication Critical patent/JP2006507105A5/ja
Application granted granted Critical
Publication of JP4111919B2 publication Critical patent/JP4111919B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2003567551A 2002-02-13 2003-02-03 マイクロ流体抗菌フィルタ Expired - Fee Related JP4111919B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/074,962 US20030150791A1 (en) 2002-02-13 2002-02-13 Micro-fluidic anti-microbial filter
PCT/US2003/003106 WO2003068373A2 (en) 2002-02-13 2003-02-03 Micro-fluidic anti-microbial filter

Publications (3)

Publication Number Publication Date
JP2006507105A JP2006507105A (ja) 2006-03-02
JP2006507105A5 true JP2006507105A5 (enExample) 2006-04-20
JP4111919B2 JP4111919B2 (ja) 2008-07-02

Family

ID=27659995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003567551A Expired - Fee Related JP4111919B2 (ja) 2002-02-13 2003-02-03 マイクロ流体抗菌フィルタ

Country Status (9)

Country Link
US (2) US20030150791A1 (enExample)
EP (1) EP1471991B1 (enExample)
JP (1) JP4111919B2 (enExample)
AT (1) ATE330694T1 (enExample)
AU (1) AU2003207804B2 (enExample)
CA (1) CA2475800A1 (enExample)
DE (1) DE60306336T2 (enExample)
ES (1) ES2269980T3 (enExample)
WO (1) WO2003068373A2 (enExample)

Families Citing this family (52)

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NL1016030C1 (nl) 2000-08-28 2002-03-01 Aquamarijn Holding B V Sproei inrichting met een nozzleplaat, een nozzleplaat, alsmede werkwijzen ter vervaardiging en voor toepassing van een dergelijke nozzleplaat.
US6881198B2 (en) * 2001-01-09 2005-04-19 J. David Brown Glaucoma treatment device and method
AU2003900796A0 (en) * 2003-02-24 2003-03-13 Microtechnology Centre Management Limited Microfluidic filter
WO2004097415A1 (ja) * 2003-04-25 2004-11-11 Jsr Corporation バイオチップおよびバイオチップキットならびにその製造方法および使用方法
DE10353894B4 (de) * 2003-07-11 2007-02-15 Nft Nanofiltertechnik Gmbh Filterelement und Verfahren zu dessen Herstellung
US7395474B2 (en) * 2003-08-01 2008-07-01 Intermec Ip Corp. Lab-on-chip system and method and apparatus for manufacturing and operating same
ES2381478T3 (es) * 2003-12-08 2012-05-28 Fisher & Paykel Healthcare Limited Aparato de asistencia respiratoria
US20060036207A1 (en) * 2004-02-24 2006-02-16 Koonmen James P System and method for treating glaucoma
US20060219627A1 (en) * 2005-03-31 2006-10-05 Rodgers M S MEMS filter module with concentric filtering walls
US7226540B2 (en) * 2004-02-24 2007-06-05 Becton, Dickinson And Company MEMS filter module
US7384550B2 (en) * 2004-02-24 2008-06-10 Becton, Dickinson And Company Glaucoma implant having MEMS filter module
NL1026530C2 (nl) * 2004-06-30 2006-01-02 Friesland Brands Bv Membraan op drager, alsmede werkwijze ter vervaardiging van een dergelijk membraan.
WO2005105276A2 (en) * 2004-05-03 2005-11-10 Friesland Brands B.V. Device with a membrane on a carrier, as well as a method for manufacturing such a membrane
US7575681B2 (en) * 2004-07-06 2009-08-18 Schlumberger Technology Corporation Microfluidic separator
US7799278B2 (en) * 2004-07-06 2010-09-21 Schlumberger Technology Corporation Microfluidic system for chemical analysis
US8262909B2 (en) * 2004-07-06 2012-09-11 Schlumberger Technology Corporation Methods and devices for minimizing membrane fouling for microfluidic separators
EP1652678B1 (en) * 2004-10-29 2007-08-22 Brother Kogyo Kabushiki Kaisha Method for manufacturing a filter
JP5082224B2 (ja) * 2004-10-29 2012-11-28 ブラザー工業株式会社 フィルタの製造方法
US20080108932A1 (en) * 2005-08-24 2008-05-08 Rodgers M Steven MEMS filter module with multi-level filter traps
DE102005042884B3 (de) * 2005-09-09 2007-01-18 Gesellschaft zur Förderung der Analytischen Wissenschaften e.V. Verfahren und Vorrichtung zur Herstellung von kugel- oder schlauchförmigen künstlichen Membranen
US20070091153A1 (en) * 2005-10-25 2007-04-26 Shields James P Biocidal print system components
US20070184769A1 (en) * 2006-02-09 2007-08-09 Xiang Qian Lin Biological safety cabinet
DE102006025121A1 (de) * 2006-05-30 2007-12-06 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Darstellung von Mikro- und Nanoporen-Massenanordnungen durch Selbstorganisation von Nanopartikeln und Sublimationstechnik
US8790528B2 (en) * 2007-02-08 2014-07-29 Kleo Kwok Manufacture filtration elements
US20080190887A1 (en) * 2007-02-08 2008-08-14 Kleo Kwok Manufacture filtration elements
US20080277332A1 (en) * 2007-05-11 2008-11-13 Becton, Dickinson And Company Micromachined membrane filter device for a glaucoma implant and method for making the same
US8092761B2 (en) 2008-06-20 2012-01-10 Silverbrook Research Pty Ltd Mechanically-actuated microfluidic diaphragm valve
US20090314367A1 (en) * 2008-06-20 2009-12-24 Silverbrook Research Pty Ltd Bonded Microfluidics System Comprising CMOS-Controllable Microfluidic Devices
US8062612B2 (en) 2008-06-20 2011-11-22 Silverbrook Research Pty Ltd MEMS integrated circuit comprising microfluidic diaphragm valve
US8080220B2 (en) * 2008-06-20 2011-12-20 Silverbrook Research Pty Ltd Thermal bend actuated microfluidic peristaltic pump
US20090317301A1 (en) * 2008-06-20 2009-12-24 Silverbrook Research Pty Ltd Bonded Microfluidics System Comprising MEMS-Actuated Microfluidic Devices
US20090315126A1 (en) * 2008-06-20 2009-12-24 Silverbrook Research Pty Ltd Bonded Microfluidic System Comprising Thermal Bend Actuated Valve
US7981386B2 (en) * 2008-06-20 2011-07-19 Silverbrook Research Pty Ltd Mechanically-actuated microfluidic valve
US20090317302A1 (en) * 2008-06-20 2009-12-24 Silverbrook Research Pty Ltd Microfluidic System Comprising MEMS Integrated Circuit
US20090314368A1 (en) * 2008-06-20 2009-12-24 Silverbrook Research Pty Ltd Microfluidic System Comprising Pinch Valve and On-Chip MEMS Pump
US8075855B2 (en) * 2008-06-20 2011-12-13 Silverbrook Research Pty Ltd MEMS integrated circuit comprising peristaltic microfluidic pump
DE102008035772B4 (de) 2008-07-31 2015-02-12 Airbus Defence and Space GmbH Partikelfilter sowie Herstellverfahren hierfür
US20110204018A1 (en) * 2010-02-25 2011-08-25 Vaeth Kathleen M Method of manufacturing filter for printhead
US8633553B2 (en) 2010-07-26 2014-01-21 Stmicroelectronics S.R.L. Process for manufacturing a micromechanical structure having a buried area provided with a filter
KR101344103B1 (ko) * 2010-09-03 2013-12-20 가부시키가이샤 고마쓰 세이사쿠쇼 오일 필터 및 밸브 장치
JP2012076027A (ja) * 2010-10-01 2012-04-19 Kitakyushu Foundation For The Advancement Of Industry Science & Technology 貫通孔規則配列フィルタ及びその製造方法
MY159287A (en) * 2010-10-11 2016-12-30 Mimos Berhad Multilayer microfluidic filter and the method of fabricating thereof
US9029813B2 (en) * 2011-05-20 2015-05-12 Asml Netherlands B.V. Filter for material supply apparatus of an extreme ultraviolet light source
JP2013202559A (ja) * 2012-03-29 2013-10-07 Tokyo Electron Ltd 濾過用フィルタの製造方法
JP2014057934A (ja) * 2012-09-19 2014-04-03 Tokyo Electron Ltd 濾過用フィルタの製造方法
CN104014254B (zh) * 2014-05-30 2015-12-02 北京大学 超薄类金刚石薄膜过滤膜
CN104560711B (zh) * 2015-01-27 2017-02-01 哈尔滨工业大学 一种带自抗菌功能细胞培养微流控芯片
KR101684121B1 (ko) 2015-05-29 2016-12-07 현대자동차주식회사 연료전지용 냉각수 이온필터 및 이의 제조 방법
CN111135730B (zh) * 2020-01-06 2022-04-12 常州费曼生物科技有限公司 一种药液过滤器滤膜的制备工艺及药液过滤器滤膜
US11786869B2 (en) * 2020-04-07 2023-10-17 Global Life Sciences Solutions Usa Llc Biocompatible high aspect-ratio porous membrane
CN115105966B (zh) * 2021-03-23 2024-02-27 京东方科技集团股份有限公司 过滤膜及其制备方法、微流控芯片
CN114768552B (zh) * 2022-04-11 2024-01-12 重庆工程职业技术学院 一种硅纳米孔油水分离薄膜的制备方法及油水分离器

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US3423261A (en) * 1965-03-08 1969-01-21 Buckbee Mears Co Method of etching fine filamentary apertures in thin metal sheets
DE3631804A1 (de) * 1986-09-18 1988-03-24 Altenburger Electronic Gmbh Verfahren und vorrichtung zur herstellung von mikrofiltern, sowie hiernach hergestelltes mikrofilter
NL9401260A (nl) * 1993-11-12 1995-06-01 Cornelis Johannes Maria Van Ri Membraan voor microfiltratie, ultrafiltratie, gasscheiding en katalyse, werkwijze ter vervaardiging van een dergelijk membraan, mal ter vervaardiging van een dergelijk membraan, alsmede diverse scheidingssystemen omvattende een dergelijk membraan.
JP3860207B2 (ja) * 1993-12-20 2006-12-20 サーフィシニ コンスーマー プロダクツ エルエルシー 無菌溶液用液体ディスペンサ
US5490938A (en) * 1993-12-20 1996-02-13 Biopolymerix, Inc. Liquid dispenser for sterile solutions
US5651900A (en) * 1994-03-07 1997-07-29 The Regents Of The University Of California Microfabricated particle filter
JPH07309707A (ja) * 1994-05-16 1995-11-28 Ngk Insulators Ltd 軽量抗菌性セラミックス及び抗菌性セラミックスフィルター
US5919364A (en) * 1996-06-24 1999-07-06 Regents Of The University Of California Microfabricated filter and shell constructed with a permeable membrane
WO1999024141A1 (en) * 1997-11-07 1999-05-20 California Institute Of Technology Micromachined membrane particle filter using parylene reinforcement
SE0001768D0 (sv) * 2000-05-12 2000-05-12 Helen Andersson Mikrofluidisk flödescell för manipulering av partiklar
NL1016030C1 (nl) * 2000-08-28 2002-03-01 Aquamarijn Holding B V Sproei inrichting met een nozzleplaat, een nozzleplaat, alsmede werkwijzen ter vervaardiging en voor toepassing van een dergelijke nozzleplaat.
US6471876B1 (en) 2000-11-27 2002-10-29 Kinetico Incorporated Filter media with germicidal properties

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