JP2006507105A - マイクロ流体抗菌フィルタ - Google Patents
マイクロ流体抗菌フィルタ Download PDFInfo
- Publication number
- JP2006507105A JP2006507105A JP2003567551A JP2003567551A JP2006507105A JP 2006507105 A JP2006507105 A JP 2006507105A JP 2003567551 A JP2003567551 A JP 2003567551A JP 2003567551 A JP2003567551 A JP 2003567551A JP 2006507105 A JP2006507105 A JP 2006507105A
- Authority
- JP
- Japan
- Prior art keywords
- filter
- holes
- substrate
- mask
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/0088—Physical treatment with compounds, e.g. swelling, coating or impregnation
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
- A61L2/022—Filtration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/18—Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
- B01D63/08—Flat membrane modules
- B01D63/087—Single membrane modules
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0002—Organic membrane manufacture
- B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/003—Organic membrane manufacture by inducing porosity into non porous precursor membranes by selective elimination of components, e.g. by leaching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/024—Oxides
- B01D71/027—Silicium oxide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/48—Antimicrobial properties
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Water Supply & Treatment (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Epidemiology (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Micromachines (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Filtering Materials (AREA)
Abstract
Description
Claims (15)
- マイクロ流体システム用の抗菌フィルタを作製するための方法であって、
基板を提供する工程、
基板上にフィルタ材料のフィルタ膜を形成する工程、
フィルタマスクに複数の凹部と穴を画定するためにスペーサの各々の一部がフィルタ材料に接するように、フィルタ材料の上に複数のスペーサを堆積し、フィルタ材料の表面に接するスペーサの各々の部分が、スペーサとフィルタ材料との間にフィルタマスク材料がつながって入るのを阻止し、それによりフィルタマスクに複数の穴のうちの1つを画定するように、スペーサの周囲の一部およびフィルタ材料の上にフィルタマスク材料を堆積させ、かつ、フィルタマスクに複数の凹部と穴を形成するように複数のスペーサを取り除くことによって、中に複数の穴を有するフィルタマスクをフィルタ膜上に提供し、かつ
フィルタ膜に、フィルタマスクの複数の凹部と穴にそれぞれ位置が合った複数の穴を形成することによって、フィルタ膜を貫いて複数の穴を形成する工程、および
フィルタ膜の少なくともいくつかの穴を露出させるために基板の少なくとも一部を取り除く工程を含む方法。 - フィルタ膜を形成する工程が、
予め定められた基板の深さにフィルタ材料を拡散させる工程をさらに含み、基板内へのフィルタ材料の拡散の予め定められた深さが、フィルタ膜の予め定められた厚さに相当する、請求項1に記載の方法。 - フィルタ膜を形成する工程が、
基板上にフィルタ膜を堆積させる工程をさらに含む、請求項1に記載の方法。 - フィルタ膜に複数の穴を形成する工程が、
中に複数の凹部を有するフィルタマスクを、フィルタ膜の上に提供する工程、および
フィルタ膜に、フィルタマスクの複数の穴と位置が合った複数の穴を形成する工程を含む、請求項1に記載の方法。 - 複数のスペーサを取り除く工程が、
複数のスペーサを溶解する工程をさらに含む、請求項1に記載の方法。 - 複数のスペーサを取り除く工程が、
複数のスペーサを分解させる工程をさらに含む、請求項1に記載の方法。 - フィルタ膜に複数の穴を形成する工程が、
フィルタマスクの凹部を通じてフィルタ膜をエッチングする工程をさらに含む、請求項1に記載の方法。 - フィルタ膜の複数の穴の間に抗菌コーティングを堆積させる工程を含む、請求項1に記載の方法。
- 抗菌コーティングが銀を含む、請求項9に記載の方法。
- フィルタ膜の複数の穴が、フィルタマスクの凹部を通じてフィルタ膜をエッチングすることによって形成される、請求項4に記載の方法。
- エッチング工程が反応性イオンエッチングを含む、請求項10に記載の方法。
- マイクロ流体システムに適合した抗菌フィルタであって、
シリコンを主原料とする材料で形成され、かつ抗菌フィルタを貫いて形成される複数の穴を有する、抗菌フィルタ。 - フィルタ膜に接続され、かつフィルタ膜から延びるシリコンの支持構造体をさらに含む、請求項12に記載の抗菌フィルタ。
- フィルタ膜の複数の穴の間に配置された抗菌コーティングをさらに含む、請求項26に記載の抗菌フィルタ。
- マイクロ流体システム用の抗菌フィルタを作製するための方法であって、
基板を提供する工程、
基板上にフィルタ材料のフィルタ膜を形成する工程、
フィルタ膜に複数の穴を形成する工程、および
フィルタ膜の複数の穴を露出させるために基板の少なくとも一部を取り除く工程を含む方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/074,962 US20030150791A1 (en) | 2002-02-13 | 2002-02-13 | Micro-fluidic anti-microbial filter |
PCT/US2003/003106 WO2003068373A2 (en) | 2002-02-13 | 2003-02-03 | Micro-fluidic anti-microbial filter |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006507105A true JP2006507105A (ja) | 2006-03-02 |
JP2006507105A5 JP2006507105A5 (ja) | 2006-04-20 |
JP4111919B2 JP4111919B2 (ja) | 2008-07-02 |
Family
ID=27659995
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003567551A Expired - Fee Related JP4111919B2 (ja) | 2002-02-13 | 2003-02-03 | マイクロ流体抗菌フィルタ |
Country Status (9)
Country | Link |
---|---|
US (2) | US20030150791A1 (ja) |
EP (1) | EP1471991B1 (ja) |
JP (1) | JP4111919B2 (ja) |
AT (1) | ATE330694T1 (ja) |
AU (1) | AU2003207804B2 (ja) |
CA (1) | CA2475800A1 (ja) |
DE (1) | DE60306336T2 (ja) |
ES (1) | ES2269980T3 (ja) |
WO (1) | WO2003068373A2 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012076027A (ja) * | 2010-10-01 | 2012-04-19 | Kitakyushu Foundation For The Advancement Of Industry Science & Technology | 貫通孔規則配列フィルタ及びその製造方法 |
WO2013146627A1 (ja) * | 2012-03-29 | 2013-10-03 | 東京エレクトロン株式会社 | 濾過用フィルタの製造方法 |
WO2014046151A1 (ja) * | 2012-09-19 | 2014-03-27 | 東京エレクトロン株式会社 | 濾過用フィルタの製造方法 |
JP2014522302A (ja) * | 2011-05-20 | 2014-09-04 | サイマー リミテッド ライアビリティ カンパニー | 材料供給装置のためのフィルタ |
US10069151B2 (en) | 2015-05-29 | 2018-09-04 | Hyundai Motor Company | De-mineralizer for fuel cell and manufacturing method of same |
CN114768552A (zh) * | 2022-04-11 | 2022-07-22 | 重庆工程职业技术学院 | 一种硅纳米孔油水分离薄膜的制备方法及油水分离器 |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL1016030C1 (nl) | 2000-08-28 | 2002-03-01 | Aquamarijn Holding B V | Sproei inrichting met een nozzleplaat, een nozzleplaat, alsmede werkwijzen ter vervaardiging en voor toepassing van een dergelijke nozzleplaat. |
US6881198B2 (en) * | 2001-01-09 | 2005-04-19 | J. David Brown | Glaucoma treatment device and method |
AU2003900796A0 (en) * | 2003-02-24 | 2003-03-13 | Microtechnology Centre Management Limited | Microfluidic filter |
EP1619500A4 (en) * | 2003-04-25 | 2007-10-17 | Jsr Corp | BIOPUCE AND BIOPUCES KIT AND PRODUCTION METHOD AND METHOD OF USING SAME |
DE10353894B4 (de) | 2003-07-11 | 2007-02-15 | Nft Nanofiltertechnik Gmbh | Filterelement und Verfahren zu dessen Herstellung |
US7395474B2 (en) * | 2003-08-01 | 2008-07-01 | Intermec Ip Corp. | Lab-on-chip system and method and apparatus for manufacturing and operating same |
US9119929B2 (en) * | 2003-12-08 | 2015-09-01 | Fisher & Paykel Healthcare Limited | Breathing assistance apparatus |
US7384550B2 (en) * | 2004-02-24 | 2008-06-10 | Becton, Dickinson And Company | Glaucoma implant having MEMS filter module |
US7226540B2 (en) * | 2004-02-24 | 2007-06-05 | Becton, Dickinson And Company | MEMS filter module |
US20060219627A1 (en) * | 2005-03-31 | 2006-10-05 | Rodgers M S | MEMS filter module with concentric filtering walls |
US20060036207A1 (en) * | 2004-02-24 | 2006-02-16 | Koonmen James P | System and method for treating glaucoma |
CA2565454A1 (en) * | 2004-05-03 | 2005-11-10 | Friesland Brands B.V. | Device with a membrane on a carrier, as well as a method for manufacturing such a membrane |
NL1026530C2 (nl) * | 2004-06-30 | 2006-01-02 | Friesland Brands Bv | Membraan op drager, alsmede werkwijze ter vervaardiging van een dergelijk membraan. |
US7799278B2 (en) * | 2004-07-06 | 2010-09-21 | Schlumberger Technology Corporation | Microfluidic system for chemical analysis |
US7575681B2 (en) * | 2004-07-06 | 2009-08-18 | Schlumberger Technology Corporation | Microfluidic separator |
US8262909B2 (en) * | 2004-07-06 | 2012-09-11 | Schlumberger Technology Corporation | Methods and devices for minimizing membrane fouling for microfluidic separators |
JP5082224B2 (ja) * | 2004-10-29 | 2012-11-28 | ブラザー工業株式会社 | フィルタの製造方法 |
EP1652678B1 (en) * | 2004-10-29 | 2007-08-22 | Brother Kogyo Kabushiki Kaisha | Method for manufacturing a filter |
US20080108932A1 (en) * | 2005-08-24 | 2008-05-08 | Rodgers M Steven | MEMS filter module with multi-level filter traps |
DE102005042884B3 (de) * | 2005-09-09 | 2007-01-18 | Gesellschaft zur Förderung der Analytischen Wissenschaften e.V. | Verfahren und Vorrichtung zur Herstellung von kugel- oder schlauchförmigen künstlichen Membranen |
US20070091153A1 (en) * | 2005-10-25 | 2007-04-26 | Shields James P | Biocidal print system components |
US20070184769A1 (en) * | 2006-02-09 | 2007-08-09 | Xiang Qian Lin | Biological safety cabinet |
DE102006025121A1 (de) * | 2006-05-30 | 2007-12-06 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Darstellung von Mikro- und Nanoporen-Massenanordnungen durch Selbstorganisation von Nanopartikeln und Sublimationstechnik |
US8790528B2 (en) * | 2007-02-08 | 2014-07-29 | Kleo Kwok | Manufacture filtration elements |
US20080190887A1 (en) * | 2007-02-08 | 2008-08-14 | Kleo Kwok | Manufacture filtration elements |
US20080277332A1 (en) * | 2007-05-11 | 2008-11-13 | Becton, Dickinson And Company | Micromachined membrane filter device for a glaucoma implant and method for making the same |
US20090314367A1 (en) * | 2008-06-20 | 2009-12-24 | Silverbrook Research Pty Ltd | Bonded Microfluidics System Comprising CMOS-Controllable Microfluidic Devices |
US20090314368A1 (en) * | 2008-06-20 | 2009-12-24 | Silverbrook Research Pty Ltd | Microfluidic System Comprising Pinch Valve and On-Chip MEMS Pump |
US20090315126A1 (en) * | 2008-06-20 | 2009-12-24 | Silverbrook Research Pty Ltd | Bonded Microfluidic System Comprising Thermal Bend Actuated Valve |
US8075855B2 (en) * | 2008-06-20 | 2011-12-13 | Silverbrook Research Pty Ltd | MEMS integrated circuit comprising peristaltic microfluidic pump |
US7981386B2 (en) * | 2008-06-20 | 2011-07-19 | Silverbrook Research Pty Ltd | Mechanically-actuated microfluidic valve |
US8080220B2 (en) * | 2008-06-20 | 2011-12-20 | Silverbrook Research Pty Ltd | Thermal bend actuated microfluidic peristaltic pump |
US8092761B2 (en) | 2008-06-20 | 2012-01-10 | Silverbrook Research Pty Ltd | Mechanically-actuated microfluidic diaphragm valve |
US8062612B2 (en) | 2008-06-20 | 2011-11-22 | Silverbrook Research Pty Ltd | MEMS integrated circuit comprising microfluidic diaphragm valve |
US20090317301A1 (en) * | 2008-06-20 | 2009-12-24 | Silverbrook Research Pty Ltd | Bonded Microfluidics System Comprising MEMS-Actuated Microfluidic Devices |
US20090317302A1 (en) * | 2008-06-20 | 2009-12-24 | Silverbrook Research Pty Ltd | Microfluidic System Comprising MEMS Integrated Circuit |
DE102008035772B4 (de) | 2008-07-31 | 2015-02-12 | Airbus Defence and Space GmbH | Partikelfilter sowie Herstellverfahren hierfür |
US20110204018A1 (en) * | 2010-02-25 | 2011-08-25 | Vaeth Kathleen M | Method of manufacturing filter for printhead |
US8633553B2 (en) | 2010-07-26 | 2014-01-21 | Stmicroelectronics S.R.L. | Process for manufacturing a micromechanical structure having a buried area provided with a filter |
KR101344103B1 (ko) * | 2010-09-03 | 2013-12-20 | 가부시키가이샤 고마쓰 세이사쿠쇼 | 오일 필터 및 밸브 장치 |
MY159287A (en) * | 2010-10-11 | 2016-12-30 | Mimos Berhad | Multilayer microfluidic filter and the method of fabricating thereof |
CN104014254B (zh) * | 2014-05-30 | 2015-12-02 | 北京大学 | 超薄类金刚石薄膜过滤膜 |
CN104560711B (zh) * | 2015-01-27 | 2017-02-01 | 哈尔滨工业大学 | 一种带自抗菌功能细胞培养微流控芯片 |
CN111135730B (zh) * | 2020-01-06 | 2022-04-12 | 常州费曼生物科技有限公司 | 一种药液过滤器滤膜的制备工艺及药液过滤器滤膜 |
CN115105966B (zh) * | 2021-03-23 | 2024-02-27 | 京东方科技集团股份有限公司 | 过滤膜及其制备方法、微流控芯片 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3423261A (en) * | 1965-03-08 | 1969-01-21 | Buckbee Mears Co | Method of etching fine filamentary apertures in thin metal sheets |
DE3631804A1 (de) * | 1986-09-18 | 1988-03-24 | Altenburger Electronic Gmbh | Verfahren und vorrichtung zur herstellung von mikrofiltern, sowie hiernach hergestelltes mikrofilter |
NL9401260A (nl) * | 1993-11-12 | 1995-06-01 | Cornelis Johannes Maria Van Ri | Membraan voor microfiltratie, ultrafiltratie, gasscheiding en katalyse, werkwijze ter vervaardiging van een dergelijk membraan, mal ter vervaardiging van een dergelijk membraan, alsmede diverse scheidingssystemen omvattende een dergelijk membraan. |
US5490938A (en) * | 1993-12-20 | 1996-02-13 | Biopolymerix, Inc. | Liquid dispenser for sterile solutions |
ATE184780T1 (de) * | 1993-12-20 | 1999-10-15 | Biopolymerix Inc | Flüssigkeitsdispensor zur abgabe von steriler flüssigkeit |
US5651900A (en) * | 1994-03-07 | 1997-07-29 | The Regents Of The University Of California | Microfabricated particle filter |
JPH07309707A (ja) * | 1994-05-16 | 1995-11-28 | Ngk Insulators Ltd | 軽量抗菌性セラミックス及び抗菌性セラミックスフィルター |
US5919364A (en) * | 1996-06-24 | 1999-07-06 | Regents Of The University Of California | Microfabricated filter and shell constructed with a permeable membrane |
EP1059979A4 (en) * | 1997-11-07 | 2001-05-30 | California Inst Of Techn | MICRO-MADE PARTICLE FILTER MEMBRANE WITH PARYLENE REINFORCEMENT |
SE0001768D0 (sv) * | 2000-05-12 | 2000-05-12 | Helen Andersson | Mikrofluidisk flödescell för manipulering av partiklar |
NL1016030C1 (nl) * | 2000-08-28 | 2002-03-01 | Aquamarijn Holding B V | Sproei inrichting met een nozzleplaat, een nozzleplaat, alsmede werkwijzen ter vervaardiging en voor toepassing van een dergelijke nozzleplaat. |
US6471876B1 (en) * | 2000-11-27 | 2002-10-29 | Kinetico Incorporated | Filter media with germicidal properties |
-
2002
- 2002-02-13 US US10/074,962 patent/US20030150791A1/en not_active Abandoned
-
2003
- 2003-02-03 CA CA002475800A patent/CA2475800A1/en not_active Abandoned
- 2003-02-03 WO PCT/US2003/003106 patent/WO2003068373A2/en active IP Right Grant
- 2003-02-03 EP EP03706041A patent/EP1471991B1/en not_active Expired - Lifetime
- 2003-02-03 DE DE60306336T patent/DE60306336T2/de not_active Expired - Fee Related
- 2003-02-03 AT AT03706041T patent/ATE330694T1/de not_active IP Right Cessation
- 2003-02-03 ES ES03706041T patent/ES2269980T3/es not_active Expired - Lifetime
- 2003-02-03 JP JP2003567551A patent/JP4111919B2/ja not_active Expired - Fee Related
- 2003-02-03 AU AU2003207804A patent/AU2003207804B2/en not_active Ceased
-
2004
- 2004-01-23 US US10/763,549 patent/US7201846B2/en not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012076027A (ja) * | 2010-10-01 | 2012-04-19 | Kitakyushu Foundation For The Advancement Of Industry Science & Technology | 貫通孔規則配列フィルタ及びその製造方法 |
JP2014522302A (ja) * | 2011-05-20 | 2014-09-04 | サイマー リミテッド ライアビリティ カンパニー | 材料供給装置のためのフィルタ |
US9669334B2 (en) | 2011-05-20 | 2017-06-06 | Asml Netherlands B.V. | Material supply apparatus for extreme ultraviolet light source having a filter constructed with a plurality of openings fluidly coupled to a plurality of through holes to remove non-target particles from the supply material |
WO2013146627A1 (ja) * | 2012-03-29 | 2013-10-03 | 東京エレクトロン株式会社 | 濾過用フィルタの製造方法 |
WO2014046151A1 (ja) * | 2012-09-19 | 2014-03-27 | 東京エレクトロン株式会社 | 濾過用フィルタの製造方法 |
US10069151B2 (en) | 2015-05-29 | 2018-09-04 | Hyundai Motor Company | De-mineralizer for fuel cell and manufacturing method of same |
CN114768552A (zh) * | 2022-04-11 | 2022-07-22 | 重庆工程职业技术学院 | 一种硅纳米孔油水分离薄膜的制备方法及油水分离器 |
CN114768552B (zh) * | 2022-04-11 | 2024-01-12 | 重庆工程职业技术学院 | 一种硅纳米孔油水分离薄膜的制备方法及油水分离器 |
Also Published As
Publication number | Publication date |
---|---|
US20040154972A1 (en) | 2004-08-12 |
WO2003068373A2 (en) | 2003-08-21 |
US20030150791A1 (en) | 2003-08-14 |
ATE330694T1 (de) | 2006-07-15 |
CA2475800A1 (en) | 2003-08-21 |
DE60306336T2 (de) | 2007-06-14 |
AU2003207804B2 (en) | 2009-01-08 |
AU2003207804A1 (en) | 2003-09-04 |
DE60306336D1 (de) | 2006-08-03 |
EP1471991A2 (en) | 2004-11-03 |
JP4111919B2 (ja) | 2008-07-02 |
EP1471991B1 (en) | 2006-06-21 |
WO2003068373A3 (en) | 2003-11-20 |
ES2269980T3 (es) | 2007-04-01 |
US7201846B2 (en) | 2007-04-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4111919B2 (ja) | マイクロ流体抗菌フィルタ | |
US6790599B1 (en) | Microfluidic devices and manufacture thereof | |
US7743928B2 (en) | Integrated apparatus and methods for treating liquids | |
US7638339B2 (en) | Hydrodynamic focusing devices | |
JP4721227B2 (ja) | マイクロ流路チップ及びその製造方法 | |
EP2014366A2 (en) | Microfluidic chip and method of fabricating the same | |
JP2009511021A (ja) | 細胞の処理のための装置および方法 | |
US20120261356A1 (en) | Device having solid-liquid separation function, micro-tas device, and solid-liquid separation method | |
JP2008039541A (ja) | マイクロ流路チップ及びそれを用いた生体高分子の処理方法 | |
EP1431018B1 (en) | Method of producing resin molded product | |
EP1635947A2 (en) | Fluidic mems device | |
US20100304306A1 (en) | Flexible micro/nanofluidic devices | |
JP2008064748A (ja) | 微量液体秤取装置、それを有するマイクロチップ及び微量な液体の秤取方法 | |
JP2004180594A (ja) | 細胞培養装置 | |
WO2006080336A1 (ja) | フィルタおよびその製造方法 | |
JP4590542B2 (ja) | マイクロ液滴輸送デバイス | |
JP4819945B2 (ja) | チャンバを含む流路部位を有する基板、およびそれを用いて液体を移送する方法 | |
Pan | Reliability considerations for the BioMEMS designer | |
US20080199371A1 (en) | Microfluidic Device for Patterned Surface Modification | |
CN108698044B (zh) | 流体微机电系统 | |
CN107469479B (zh) | 流体处理装置 | |
CN112619719A (zh) | 用于数字pcr的液滴生成微型装置 | |
Park et al. | Microtiter Plate-Based Microfluidic Platforms: Sealing, Leakage Testing, and Performance of a 96-Well SPRI Device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060201 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060201 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070914 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20071127 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080225 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20080325 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20080408 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110418 Year of fee payment: 3 |
|
LAPS | Cancellation because of no payment of annual fees |