JP2006351649A - 炭化珪素層製造方法、窒化ガリウム系半導体素子およびシリコン基板 - Google Patents
炭化珪素層製造方法、窒化ガリウム系半導体素子およびシリコン基板 Download PDFInfo
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- JP2006351649A JP2006351649A JP2005173209A JP2005173209A JP2006351649A JP 2006351649 A JP2006351649 A JP 2006351649A JP 2005173209 A JP2005173209 A JP 2005173209A JP 2005173209 A JP2005173209 A JP 2005173209A JP 2006351649 A JP2006351649 A JP 2006351649A
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- silicon carbide
- carbide layer
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- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 101
- 239000000758 substrate Substances 0.000 title claims abstract description 91
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 77
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 63
- 239000010703 silicon Substances 0.000 title claims abstract description 63
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 60
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 229910002601 GaN Inorganic materials 0.000 title claims description 22
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 title claims description 11
- 239000004065 semiconductor Substances 0.000 title claims description 9
- 238000010894 electron beam technology Methods 0.000 claims abstract description 40
- 229930195733 hydrocarbon Natural products 0.000 claims abstract description 21
- 239000004215 Carbon black (E152) Substances 0.000 claims abstract description 20
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 20
- 230000001678 irradiating effect Effects 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims description 10
- 230000001133 acceleration Effects 0.000 claims description 5
- 229910021419 crystalline silicon Inorganic materials 0.000 claims 1
- 239000013078 crystal Substances 0.000 abstract description 20
- 229930195735 unsaturated hydrocarbon Natural products 0.000 abstract description 3
- 125000001931 aliphatic group Chemical group 0.000 abstract description 2
- 229910052799 carbon Inorganic materials 0.000 abstract description 2
- 229930195734 saturated hydrocarbon Natural products 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 94
- 239000007789 gas Substances 0.000 description 27
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 9
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 9
- 238000001451 molecular beam epitaxy Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- 238000003763 carbonization Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000002128 reflection high energy electron diffraction Methods 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010000 carbonizing Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 238000003917 TEM image Methods 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- -1 hydrocarbon ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 229910052950 sphalerite Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- WGPCGCOKHWGKJJ-UHFFFAOYSA-N sulfanylidenezinc Chemical compound [Zn]=S WGPCGCOKHWGKJJ-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02614—Transformation of metal, e.g. oxidation, nitridation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02441—Group 14 semiconducting materials
- H01L21/02447—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02529—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
Abstract
【解決手段】 本発明は、シリコン基板100の表面100aに炭化珪素層を形成する炭化珪素層製造方法において、高真空中で、500℃以上で1050℃以下の温度に加熱されたシリコン基板100の表面100aに向けて、炭化水素系気体を照射しつつ、併せて電子線を照射して、シリコン基板の表面に立方晶の炭化珪素層を形成する、ことを特徴としている。
【選択図】 図1
Description
古川 静二郎、雨宮 好仁 編著、「シリコン系ヘテロデバイス」、丸善株式会社、平成3年7月30日、91〜93頁
T.Ohachi他、ジャーナル オブ クリスタルグロース(J.Crystal Growth)、オランダ、第275巻、第1−2号、2005年、e1215〜e1221頁。
100a 基板表面
α 炭化水素系ガスの噴射角度(仰角)
β 電子線の照射角度(仰角)
Claims (6)
- シリコン基板の表面に炭化珪素層を形成する炭化珪素層製造方法において、
高真空中で、500℃以上で1050℃以下の温度に加熱されたシリコン基板の表面に向けて、炭化水素系気体を照射しつつ、併せて電子線を照射して、シリコン基板の表面に立方晶の炭化珪素層を形成する、
ことを特徴とする炭化珪素層製造方法。 - 上記炭化水素系気体をシリコン基板表面に照射する角度と、上記電子線をシリコン基板表面に照射する角度とを互いに異ならせた、請求項1に記載の炭化珪素層製造方法。
- 上記シリコン基板の表面に対する仰角にして、炭化珪素系気体の照射角度を、電子線の照射角度以上とした、請求項2に記載の炭化珪素層製造方法。
- 上記電子線照射において、照射する電子の加速エネルギーを150エレクトロンボルト(単位:eV)以上で500eV以下とし、密度を1×1011電子・cm-2以上で5×1013電子・cm-2以下とした、請求項1から3の何れか1項に記載の炭化珪素層製造方法。
- 請求項1から4の何れか1項に記載の炭化珪素層製造方法により製造した炭化珪素層上に、窒化ガリウム系半導体層を形成して製造した、ことを特徴とする窒化ガリウム系半導体素子。
- 請求項1から4の何れか1項に記載の炭化珪素層製造方法により製造した炭化珪素層を表面に有する、ことを特徴とするシリコン基板。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005173209A JP4897244B2 (ja) | 2005-06-14 | 2005-06-14 | 炭化珪素層製造方法、窒化ガリウム系半導体素子およびシリコン基板 |
US11/921,929 US8216367B2 (en) | 2005-06-14 | 2006-05-23 | Method for production of silicon carbide layer, gallium nitride semiconductor device and silicon substrate |
PCT/JP2006/310614 WO2006134765A1 (en) | 2005-06-14 | 2006-05-23 | Method for production of silicon carbide layer, gallium nitride semiconductor device and silicon substrate |
EP06766412A EP1891663A4 (en) | 2005-06-14 | 2006-05-23 | PROCESS FOR PRODUCING SILICON CARBIDE LAYER, GALLIUM NITRIDE SEMICONDUCTOR DEVICE, AND SILICON SUBSTRATE |
KR1020077030345A KR100939673B1 (ko) | 2005-06-14 | 2006-05-23 | 탄화 규소층의 제조방법, 질화 갈륨 반도체 소자 및 규소기판 |
CN200680021424XA CN101203940B (zh) | 2005-06-14 | 2006-05-23 | 碳化硅层的制造方法、氮化镓半导体器件以及硅衬底 |
TW095120735A TWI305935B (en) | 2005-06-14 | 2006-06-12 | Method for production of silicon carbide layer, gallium nitride semiconductor device and silicon substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2005173209A JP4897244B2 (ja) | 2005-06-14 | 2005-06-14 | 炭化珪素層製造方法、窒化ガリウム系半導体素子およびシリコン基板 |
Publications (2)
Publication Number | Publication Date |
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JP2006351649A true JP2006351649A (ja) | 2006-12-28 |
JP4897244B2 JP4897244B2 (ja) | 2012-03-14 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005173209A Expired - Fee Related JP4897244B2 (ja) | 2005-06-14 | 2005-06-14 | 炭化珪素層製造方法、窒化ガリウム系半導体素子およびシリコン基板 |
Country Status (4)
Country | Link |
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JP (1) | JP4897244B2 (ja) |
KR (1) | KR100939673B1 (ja) |
CN (1) | CN101203940B (ja) |
TW (1) | TWI305935B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011225421A (ja) * | 2010-03-29 | 2011-11-10 | Air Water Inc | 単結晶3C−SiC基板の製造方法およびそれによって得られた単結晶3C−SiC基板 |
WO2022215464A1 (ja) * | 2021-04-08 | 2022-10-13 | 信越半導体株式会社 | 窒化物半導体ウェーハの製造方法 |
JP2023053693A (ja) * | 2021-10-01 | 2023-04-13 | 信越半導体株式会社 | 窒化物半導体ウェーハの製造方法、及び窒化物半導体ウェーハ |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2009153857A1 (ja) | 2008-06-17 | 2011-11-24 | 富士通株式会社 | 半導体装置及びその製造方法 |
CN109273405B (zh) * | 2017-07-18 | 2021-06-08 | 上海新昇半导体科技有限公司 | 一种半导体器件及其制造方法、电子装置 |
TWI730516B (zh) * | 2018-12-12 | 2021-06-11 | 日商闊斯泰股份有限公司 | 氮化物半導體基板以及氮化物半導體裝置 |
JP7023882B2 (ja) * | 2019-02-04 | 2022-02-22 | 株式会社東芝 | 半導体装置の製造方法、基板の製造方法、半導体装置、基板、及び、基板の製造装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03173418A (ja) * | 1989-12-01 | 1991-07-26 | Nec Corp | 表面改質方法及び表面改質装置 |
JPH0524999A (ja) * | 1991-07-16 | 1993-02-02 | Matsushita Electric Ind Co Ltd | 炭化珪素薄膜の製造方法 |
JPH11204440A (ja) * | 1998-01-16 | 1999-07-30 | Ritsumeikan | 結晶性薄膜の製造方法 |
JP2002093725A (ja) * | 2000-09-20 | 2002-03-29 | Toshiba Corp | 表面処理方法および半導体装置の製造方法 |
JP2003086520A (ja) * | 2001-09-11 | 2003-03-20 | Shin Etsu Handotai Co Ltd | 半導体多層構造 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5492752A (en) * | 1992-12-07 | 1996-02-20 | Oregon Graduate Institute Of Science And Technology | Substrates for the growth of 3C-silicon carbide |
-
2005
- 2005-06-14 JP JP2005173209A patent/JP4897244B2/ja not_active Expired - Fee Related
-
2006
- 2006-05-23 KR KR1020077030345A patent/KR100939673B1/ko active IP Right Grant
- 2006-05-23 CN CN200680021424XA patent/CN101203940B/zh not_active Expired - Fee Related
- 2006-06-12 TW TW095120735A patent/TWI305935B/zh not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03173418A (ja) * | 1989-12-01 | 1991-07-26 | Nec Corp | 表面改質方法及び表面改質装置 |
JPH0524999A (ja) * | 1991-07-16 | 1993-02-02 | Matsushita Electric Ind Co Ltd | 炭化珪素薄膜の製造方法 |
JPH11204440A (ja) * | 1998-01-16 | 1999-07-30 | Ritsumeikan | 結晶性薄膜の製造方法 |
JP2002093725A (ja) * | 2000-09-20 | 2002-03-29 | Toshiba Corp | 表面処理方法および半導体装置の製造方法 |
JP2003086520A (ja) * | 2001-09-11 | 2003-03-20 | Shin Etsu Handotai Co Ltd | 半導体多層構造 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011225421A (ja) * | 2010-03-29 | 2011-11-10 | Air Water Inc | 単結晶3C−SiC基板の製造方法およびそれによって得られた単結晶3C−SiC基板 |
WO2022215464A1 (ja) * | 2021-04-08 | 2022-10-13 | 信越半導体株式会社 | 窒化物半導体ウェーハの製造方法 |
JP2022161310A (ja) * | 2021-04-08 | 2022-10-21 | 信越半導体株式会社 | 窒化物半導体ウェーハの製造方法 |
JP7420108B2 (ja) | 2021-04-08 | 2024-01-23 | 信越半導体株式会社 | 窒化物半導体ウェーハの製造方法 |
JP2023053693A (ja) * | 2021-10-01 | 2023-04-13 | 信越半導体株式会社 | 窒化物半導体ウェーハの製造方法、及び窒化物半導体ウェーハ |
JP7400789B2 (ja) | 2021-10-01 | 2023-12-19 | 信越半導体株式会社 | 窒化物半導体ウェーハの製造方法、及び窒化物半導体ウェーハ |
Also Published As
Publication number | Publication date |
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TW200735183A (en) | 2007-09-16 |
KR20080012996A (ko) | 2008-02-12 |
JP4897244B2 (ja) | 2012-03-14 |
CN101203940A (zh) | 2008-06-18 |
KR100939673B1 (ko) | 2010-02-03 |
TWI305935B (en) | 2009-02-01 |
CN101203940B (zh) | 2010-11-03 |
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