JP2006349576A - 反射光及び透過光による目視検査用照明装置 - Google Patents

反射光及び透過光による目視検査用照明装置 Download PDF

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Publication number
JP2006349576A
JP2006349576A JP2005178290A JP2005178290A JP2006349576A JP 2006349576 A JP2006349576 A JP 2006349576A JP 2005178290 A JP2005178290 A JP 2005178290A JP 2005178290 A JP2005178290 A JP 2005178290A JP 2006349576 A JP2006349576 A JP 2006349576A
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JP
Japan
Prior art keywords
light
inspection
visual inspection
mirror
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005178290A
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English (en)
Japanese (ja)
Inventor
Tsutomu Kubota
勉 窪田
Kazuyuki Matsumoto
和幸 松本
Yasuo Imamura
保夫 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moritex Corp
Original Assignee
Moritex Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Moritex Corp filed Critical Moritex Corp
Priority to JP2005178290A priority Critical patent/JP2006349576A/ja
Priority to TW095119425A priority patent/TW200702658A/zh
Priority to CNB2006100928468A priority patent/CN100426021C/zh
Priority to KR1020060054202A priority patent/KR100873057B1/ko
Publication of JP2006349576A publication Critical patent/JP2006349576A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G02F1/335—Acousto-optical deflection devices having an optical waveguide structure

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2005178290A 2005-06-17 2005-06-17 反射光及び透過光による目視検査用照明装置 Pending JP2006349576A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005178290A JP2006349576A (ja) 2005-06-17 2005-06-17 反射光及び透過光による目視検査用照明装置
TW095119425A TW200702658A (en) 2005-06-17 2006-06-01 Illumination device for visual inspection based on reflected light and transmitted light
CNB2006100928468A CN100426021C (zh) 2005-06-17 2006-06-16 基于反射光和透射光的目视检查用照明装置
KR1020060054202A KR100873057B1 (ko) 2005-06-17 2006-06-16 반사광 및 투과광에 의한 시각검사용 조명장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005178290A JP2006349576A (ja) 2005-06-17 2005-06-17 反射光及び透過光による目視検査用照明装置

Publications (1)

Publication Number Publication Date
JP2006349576A true JP2006349576A (ja) 2006-12-28

Family

ID=37519246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005178290A Pending JP2006349576A (ja) 2005-06-17 2005-06-17 反射光及び透過光による目視検査用照明装置

Country Status (4)

Country Link
JP (1) JP2006349576A (zh)
KR (1) KR100873057B1 (zh)
CN (1) CN100426021C (zh)
TW (1) TW200702658A (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101592812B (zh) * 2009-06-23 2012-05-23 友达光电（苏州）有限公司 显示面板及其像素缺陷检查方法
CN103803125A (zh) * 2014-02-24 2014-05-21 江苏新美星包装机械股份有限公司 饮料生产线中的led灯检装置
CN109459877B (zh) * 2018-08-15 2021-04-06 中国电子科技集团公司第五十五研究所 一种显示屏带框贴合方法、贴合装置及其显示器
CN110907474A (zh) * 2019-12-10 2020-03-24 江苏奥蓝工程玻璃有限公司 一种玻璃镀膜视觉检测用缺陷采集装置
CN116359230B (zh) * 2023-05-26 2023-08-29 北京博兴远志科技有限公司 一种永磁体表面凹凸缺陷检测系统及方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07272679A (ja) * 1994-03-31 1995-10-20 Toshiba Lighting & Technol Corp ショートアークメタルハライドランプ、放電灯点灯装置および液晶プロジェクタ
JPH09222396A (ja) * 1996-02-19 1997-08-26 Toray Ind Inc 欠陥検査方法および装置
JP2000028537A (ja) * 1998-07-10 2000-01-28 Olympus Optical Co Ltd マクロ検査用照明装置
WO2003102562A1 (fr) * 2002-05-31 2003-12-11 Olympus Corporation Dispositif de macro-illumination

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3201922B2 (ja) * 1995-03-03 2001-08-27 東芝機械株式会社 電子ビーム描画装置ならびにステージ位置測定装置
JP3883153B2 (ja) * 1998-04-10 2007-02-21 松下電器産業株式会社 Ｘ線基板検査装置
JP2001116925A (ja) * 1999-10-20 2001-04-27 Sumitomo Chem Co Ltd 光学シートの検査方法
KR100400455B1 (ko) * 2001-04-26 2003-10-01 엘지전자 주식회사 검사기판 조명장치
JP2004101403A (ja) * 2002-09-11 2004-04-02 Tokyo Seimitsu Co Ltd 外観検査装置
JP2004163664A (ja) * 2002-11-13 2004-06-10 Dainippon Printing Co Ltd コレステリック液晶層の検査方法、その検査装置及びコレステリック液晶層の製造方法
KR100508190B1 (ko) * 2003-11-11 2005-08-17 주식회사 에이디피엔지니어링 대형기판 검사용 조명장치

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07272679A (ja) * 1994-03-31 1995-10-20 Toshiba Lighting & Technol Corp ショートアークメタルハライドランプ、放電灯点灯装置および液晶プロジェクタ
JPH09222396A (ja) * 1996-02-19 1997-08-26 Toray Ind Inc 欠陥検査方法および装置
JP2000028537A (ja) * 1998-07-10 2000-01-28 Olympus Optical Co Ltd マクロ検査用照明装置
WO2003102562A1 (fr) * 2002-05-31 2003-12-11 Olympus Corporation Dispositif de macro-illumination

Also Published As

Publication number Publication date
KR100873057B1 (ko) 2008-12-11
CN1880983A (zh) 2006-12-20
CN100426021C (zh) 2008-10-15
TW200702658A (en) 2007-01-16
KR20060132476A (ko) 2006-12-21

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