TW200702658A - Illumination device for visual inspection based on reflected light and transmitted light - Google Patents

Illumination device for visual inspection based on reflected light and transmitted light

Info

Publication number
TW200702658A
TW200702658A TW095119425A TW95119425A TW200702658A TW 200702658 A TW200702658 A TW 200702658A TW 095119425 A TW095119425 A TW 095119425A TW 95119425 A TW95119425 A TW 95119425A TW 200702658 A TW200702658 A TW 200702658A
Authority
TW
Taiwan
Prior art keywords
light
inspection
defects
visual inspection
transmission
Prior art date
Application number
TW095119425A
Other languages
English (en)
Inventor
Tsutomu Kubota
Kazuyuki Matsumoto
Yasuo Imamura
Original Assignee
Moritex Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Moritex Corp filed Critical Moritex Corp
Publication of TW200702658A publication Critical patent/TW200702658A/zh

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8803Visual inspection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33Acousto-optical deflection devices
    • G02F1/335Acousto-optical deflection devices having an optical waveguide structure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW095119425A 2005-06-17 2006-06-01 Illumination device for visual inspection based on reflected light and transmitted light TW200702658A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005178290A JP2006349576A (ja) 2005-06-17 2005-06-17 反射光及び透過光による目視検査用照明装置

Publications (1)

Publication Number Publication Date
TW200702658A true TW200702658A (en) 2007-01-16

Family

ID=37519246

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095119425A TW200702658A (en) 2005-06-17 2006-06-01 Illumination device for visual inspection based on reflected light and transmitted light

Country Status (4)

Country Link
JP (1) JP2006349576A (zh)
KR (1) KR100873057B1 (zh)
CN (1) CN100426021C (zh)
TW (1) TW200702658A (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101592812B (zh) * 2009-06-23 2012-05-23 友达光电(苏州)有限公司 显示面板及其像素缺陷检查方法
CN103803125A (zh) * 2014-02-24 2014-05-21 江苏新美星包装机械股份有限公司 饮料生产线中的led灯检装置
CN109459877B (zh) * 2018-08-15 2021-04-06 中国电子科技集团公司第五十五研究所 一种显示屏带框贴合方法、贴合装置及其显示器
CN110907474A (zh) * 2019-12-10 2020-03-24 江苏奥蓝工程玻璃有限公司 一种玻璃镀膜视觉检测用缺陷采集装置
CN116359230B (zh) * 2023-05-26 2023-08-29 北京博兴远志科技有限公司 一种永磁体表面凹凸缺陷检测系统及方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07272679A (ja) * 1994-03-31 1995-10-20 Toshiba Lighting & Technol Corp ショートアークメタルハライドランプ、放電灯点灯装置および液晶プロジェクタ
JP3201922B2 (ja) * 1995-03-03 2001-08-27 東芝機械株式会社 電子ビーム描画装置ならびにステージ位置測定装置
JPH09222396A (ja) * 1996-02-19 1997-08-26 Toray Ind Inc 欠陥検査方法および装置
JP3883153B2 (ja) * 1998-04-10 2007-02-21 松下電器産業株式会社 X線基板検査装置
JP2925539B1 (ja) * 1998-07-10 1999-07-28 オリンパス光学工業株式会社 マクロ検査用照明装置
JP2001116925A (ja) * 1999-10-20 2001-04-27 Sumitomo Chem Co Ltd 光学シートの検査方法
KR100400455B1 (ko) * 2001-04-26 2003-10-01 엘지전자 주식회사 검사기판 조명장치
JP3973659B2 (ja) * 2002-05-31 2007-09-12 オリンパス株式会社 マクロ照明装置
JP2004101403A (ja) * 2002-09-11 2004-04-02 Tokyo Seimitsu Co Ltd 外観検査装置
JP2004163664A (ja) * 2002-11-13 2004-06-10 Dainippon Printing Co Ltd コレステリック液晶層の検査方法、その検査装置及びコレステリック液晶層の製造方法
KR100508190B1 (ko) * 2003-11-11 2005-08-17 주식회사 에이디피엔지니어링 대형기판 검사용 조명장치

Also Published As

Publication number Publication date
KR100873057B1 (ko) 2008-12-11
JP2006349576A (ja) 2006-12-28
CN1880983A (zh) 2006-12-20
CN100426021C (zh) 2008-10-15
KR20060132476A (ko) 2006-12-21

Similar Documents

Publication Publication Date Title
KR101318483B1 (ko) 유리 시트의 표면 및 바디 결함을 식별하기 위한 검사 시스템 및 방법
TW200743171A (en) Substrate illumination and inspection system
JP2010112786A (ja) 照明装置及びそれを有する外観検査装置
TW200702658A (en) Illumination device for visual inspection based on reflected light and transmitted light
WO2008143228A1 (ja) ウエハ端面検査装置
JP2010519516A (ja) 自動検査用にフィルムを照明するための方法及び装置
KR20110021304A (ko) 스크래치 검사장치 및 방법
CN202794061U (zh) 一种玻璃板检测装置
TW201341785A (zh) 用以檢查物品缺陷之系統及方法
JP2014190811A (ja) 照明装置及び検査装置
KR20130143226A (ko) 도광판 검사장치
KR100785308B1 (ko) 칩 엘이디 표면 검사 방법 및 장치
JPH11281584A (ja) 検査方法およびその装置
KR101006983B1 (ko) 패널 검사장치
CN102374968A (zh) 用于微透明装置的视觉照明仪器
KR100400455B1 (ko) 검사기판 조명장치
KR20190001789A (ko) 멀티 광학 디스플레이 검사 장치
JP2006201015A (ja) 直線ライン状紫外照明光を用いた検査装置
JP2009092481A (ja) 外観検査用照明装置及び外観検査装置
JP4324504B2 (ja) 透明板の欠陥検出方法およびその装置
JPH05232040A (ja) 外観検査用投光装置
TW522225B (en) Detection device for transparent panel
KR100791277B1 (ko) 평판 디스플레이 패널 검사장치
KR20110117424A (ko) 칩 엘이디 표면 검사 장치 및 그 방법
KR20100077960A (ko) 기판검사용 조명장치