TW522225B - Detection device for transparent panel - Google Patents

Abstract

A detection device for a transparent panel comprises a ring-formed diffuse illumination device for illuminating a transparent panel to be detected with a detection light, which is arranged to be parallel with a plane of the transparent panel, a reflection mirror for reflecting the detection light which penetrates through the transparent panel so as to re-illuminate the transparent panel with said detection light, which is arranged to be opposite of the ring-formed diffuse illumination device with respect to the transparent panel, and a lens for allowing only a light which is substantially parallel with an optical axis of the light scattered by the surface of the transparent panel and the light which illuminates the transparent panel and is scattered thereby after being reflected by the reflection mirror to penetrate through the lens, which is arranged to be opposite of the transparent panel with respect to the ring-formed diffuse illumination device. Various defects of the transparent panel can be detected easily by using this detection device for the transparent panel.

Description

522225 V. Description of the Invention (1) [Technical Field of the Invention] _ A variety of transparent glass and plastic inspection devices are related. Inspection of transparent board [Prior art] One of the main components such as the surface input device is transparent 2 2, which is mixed with scars, pollution, dust, thread, or gas. Defect inspections to find such defects, although:: defectives = f: indispensable, but the previous inspection depends on the staff member's shell: maintain the shape to grasp the existence of defects and the defects of defects. Reflection [Problems to be Solved by the Invention] tThe above-mentioned various defects and disadvantages, 'the size, color, and the depth, width, length, and direction of the scar are also infinitely different.' Shiji II; visual inspection: find: ,:; ::: Γ To be, often !: There are different members to set the ring production 椹 t to provide Gu Yi to detect all kinds of defects and defects: Easy to check the vibration of the transparent plate. In order to achieve the above purpose, in order to achieve the above-mentioned purpose, according to the present invention, a circular-shaped diffused illuminator for inspecting a light-ray board inspection device 'contains: arranged on a transparent plate surface; a mirror; And the flat side of the flat plate with the opposite side, the J-shaped diffuser lens that reflects through the transparent plate and the bright plate is set to illuminate the transparent plate with circular diffused illumination = light; and into the opposite side of the transparent plate, only transparent Page 6 522225, Description of the invention (2) Light 'slights parallel to the optical axis' of the light scattered on the bright plate and the light scattered on the transparent plate after being reflected by the reflector pass through. According to the present invention, 'the annular diffused illuminator and the reflecting mirror are used to uniformly diffuse the diffused light onto the transparent plate of the inspection object, so it is independent of the type and shape of the defective defect', so that the defective condition can be stably detected. Also, because a lens such as a telecentric lens is used, only the light scattered through the transparent plate is reflected, and the light scattered by the transparent plate after reflection by the mirror is slightly parallel to the optical axis, and is photographed with a C ^ CD camera. Institutional photography, so it is not affected by astigmatism such as surrounding ceiling lights, stable inspection, and is not restricted by the setting of the inspection device body. Further, since a ring-shaped fluorescent lamp which is commercially available can be used as the ring-shaped diffusion luminaire, the cost is low and the structure is easy. [Embodiment of the invention] FIG. 1 is a diagram illustrating an example of defective defect of a transparent plate. Figure 1 shows the cross-section of the transparent plate 1 of the inspection object, and it is posted on the glass substrate 2. i 甬 杳 ^ ^ ^ r wins 0, and the taxi — a hanging, its thickness is about 3 mm 〇 transparent plate 1 'In the absence of defects and justifications; ^ ~ In the shape of a worker's october, its plane is flat, and the front and rear surfaces are cleaned to clean makeup before being checked for falseness—manufactured by 4 persons, ^, 0 t month / 糸It ’s sad, but during the manufacturing process, there is a gap between the glass substrate 2 and the film 3, and there are various reasons for the thread head 1 1, Yilu 12, dirt 13 or bubbles. "Love Liangchuan dust ^ a ... y There are even scars caused by the choice of X Dang et al. 1. This kind of defect & & is known to be different το Various curvatures, sometimes the color is also similar and need to check about 50 " inSIZE 的 失 # There is an inch, a length, the depth of the & scar, the width of the scar, the reason for the problem, and there is no regularity. Inspection of transparent plates according to the present invention ~

Page 7 522225 V. Defect of invention description (3). That is, according to the transparent plate inspection device of the present invention, a uniform inspection light is irradiated to the transparent plate 1 of the inspection object and the light scattering difference of the transparent plate is, for example, photographed in a black and white image. Defects and types of defects. The black and white pair of the captured image is strong and weak. By increasing the light intensity I of the transparent plate that illuminates the inspection object, it can be more η and if it is; extracting the fixed component of the scattered light component and photographing it, you can get a brighter one. : Is a diagram of a transparent plate inspection device according to the first embodiment of the present invention. Fig. 2 (a) is a plan view of the transparent plate inspection 2 on the night, ^. ^ ^ N, and Fig. 2 (b) is a cross-sectional view of the transparent plate inspection I set 21. In addition, according to the structure of the transparent plate inspection device 21 according to the first embodiment of the present invention, the two-plate inspection titanium set 21 includes: a ring-shaped diffusion lighting fixture 22, a reflector 23, a lens 24, and a photographing mechanism 25. The ring-shaped diffuse illuminator 22 is arranged parallel to the surface of the inspection target transparent plate 丨. It is sufficient to use a commercially available ring-shaped fluorescent lamp for the ring-shaped diffusion lighting fixture 22, and the size of the ring-shaped diffusion luminaire 22 may be, for example, 110 mm or 127 nm. The reflecting mirror 23 is provided on the side of the transparent plate} opposite to the annular diffused lighting fixture 22 (not shown in Fig. 2 (a)). > The lens 24 makes the center of the lens 24 concentric with the center of the ring-shaped diffusion lighting fixture 22, and is on the opposite side to the transparent plate 丄 of the clothes-like diffusion lighting fixture 22. The lens collects the light scattered on the transparent plate 1 and the light scattered by the transparent plate after being reflected by the reflecting mirror 23 to collect light. This embodiment uses the daylight view on both sides of the lens ^ the main light rays on both sides of the lens Telecentric lens parallel to the main axis. The camera ~ mechanism 25 is provided on the side opposite to the lens 24 of the ring-shaped diffuse lighting fixture 22.

522225, Description of the Invention (4) and: In the center of the photographing mechanism 25 and the ring-shaped diffuse lighting fixture 22, a CCD camera, a Mos camera, etc. can be taken as examples of the mechanism 25. The inspection range of the transparent plate inspection device 21 according to the present embodiment depends on the sample and the photographable range. However, due to the large size of the transparent object 1 to be inspected, it can also be equipped with a moving mechanism to facilitate the overall inspection of the transparent plate 丨 overall inspection The transparent plate inspection device 21 can be moved in the horizontal direction. Next, the operation principle of this embodiment will be described. The diffusion inspection light emitted by the ring-shaped diffusion lighting fixture 22 shown in the figure reaches the transparent / + sun guard and scatters in all directions. However, in this embodiment, the fact that hair-scattered light at the defect-free defective element i is shifted specifically, etc. Take the black and white contrast of the obtained image with the photography agency 2 5 to grasp the defects and the types of defects. FIG. 3 is an explanatory diagram of the operation principle of the first embodiment of the present invention. Fig. 3 (a) shows the scattering of light when a foreign object 41 such as a defective defective thread, dust, or pollution is mixed into the transparent plate 1, and Fig. 3 (b) shows the scattering of light when a flaw 4 2 is generated in the transparent plate 1. As shown in Figs. 3 (a) and 3 (b), the inspection light 31 emitted uniformly from the ring-shaped diffused lighting fixture 22 irradiates the transparent plate! At a time, on the surface of the transparent plate} that is free of defects, a part of the inspection light 31 is reflected (reflected light 32), and a part of it passes (passed through light 33). The transmitted light 33 is reflected by the reflecting mirror 23, and then irradiates the transparent plate 1 and passes through the transparent plate 1 (through the light 34). Due to the ring-shaped diffusion knowledge and the light fixture 22, the direction and light intensity of the inspection light 3 1 are uniformly emitted. Therefore, in the normal place of the transparent plate 1 without defects, the reflected light 32 of the transparent plate 1 and the dental light 34 Direction, and the occurrence of reflected light 32 and transmitted light 34

Page 9 522225 V. Description of the invention (5) The proportion is slightly the same, and the scattering is hardly shifted. However, when there is a foreign matter 41 as shown in Fig. 3 (a) or a flaw as shown in Fig. 3 (b), as described below, the light scattering there will be shifted. That is, as shown in FIG. 3 (a), when the inspection light 3 1 a irradiates a place where a foreign object 41 exists, the reflection direction of the inspection light 31 will be disordered (the reflected light 32 a) because the film 3 is not flat there. In particular, when the foreign matter 41 is a thread, it will prevent the light transmission there, and the proportion of the reflected light 3 2 and the passing light 3 3 is also different from the non-defective place. The transmitted light 3 3 is reflected by the reflecting mirror 23 and irradiated to the end of the foreign object 41, the refractive index changes due to the presence of the foreign object 41, but transmits light with its refractive index (passing light 34a). In this way, the light scattering will shift in the presence of foreign matter 41. As shown in FIG. 3 (b), when the inspection light 3ib irradiates the flaw 42, the reflection direction of the inspection light 3b will be disordered because the film 3 there is not flat (reflected light 32b). After passing through the light 33 and being reflected by the reflecting mirror 23, when the flaw 42 is irradiated, the light will pass through the flaw 42 in a different direction from the flat surface (through the light 34b). As described above, even in the presence of the flaw 42, the light scattering is shifted similarly to the case where the foreign matter 41 is present. As described above, the scattered light will be shifted in the presence of defective defects. For example, light parallel to the normal of the transparent plate 1 is taken as an example. The light reflected or transmitted by no defect on the transparent plate 丨 is reflected by the light scattered by the reflected or transmitted light where the defect exists. The ratio of normal light parallel to the transparent plate 1 is different. That is, the diffused light uniformly emitted from the ring-shaped diffused lighting fixture 2 2 has no defects on the transparent plate 1 and the light is uniformly reflected or passed through, but where the defects are present, the normal of the transparent plate 丨 is parallel. Light composition will change

Page 10 522225 V. Description of the invention (6) Therefore, in this embodiment, only the light scattered on the transparent plate 1 is extracted, and after being reflected by the reflecting mirror 23, the light scattered by the transparent plate 1 is irradiated slightly parallel to the transparent plate 1. The light component of the normal. This is used to capture black and white images with a photography mechanism 25 such as a CC camera. As a result, the more the components slightly parallel to the normal line of the transparent plate 1, the more emphasis is placed on white. In order to obtain a more sharp lens 24 with such a black-and-white contrast, this embodiment uses a telecentric lens in which the daytime viewing angles on both sides of the lens are 0 °, that is, the principal rays on both sides of the lens are parallel to the main axis. Fig. 4 is an explanatory diagram of a telecentric lens used in the present invention. Fig. 4 (a) shows a normal lens, and Fig. 4 (b) shows a telecentric lens. As shown in Fig. 4 (a), a normal lens is imaged because the principal ray 51 is incident on the lens 24 at a certain written angle of view 0, but the telecentric lens is as shown in Fig. 4 (b). It is 0 °, that is, the principal rays 51 on both sides of the lens are parallel to the main axis. That is, the principal rays of the imaging are parallel to the principal axis. In other words, the lens can be described as having the function of only extracting the incident light and emitting light parallel to the main axis ^. '' In this embodiment, the lens 24 is a telecentric lens. As shown in FIG. 2, the center of the transparent lens 24 and the center of the ring-shaped diffused lighting fixture 22 are concentric. On the other hand, only the scattered light on the transparent plate 1 is diffused and reflected by the reflector 23, and then the transparent plate is irradiated with the scattered light, and the light on the optical axis passes through. The light passing through the lens 24 is taken by the photographing mechanism 25. In this embodiment / mechanism 25, a CCD camera is used, but a Mos camera or the like may be used. Figure 5 shows the inspection results of the transparent plate inspection device according to the first embodiment of the present invention.

522225

x 20 _aperture t 5Ϊ .345, field of view 25 mm image for digital laboratories, after using CCD camera ′ as dual image 5 = ΪΪ The white part indicated by the arrow in the picture is defective. Figure = Dust, and such figures can be confirmed = Panel inspection I can detect defects. The transparent plate inspection of the first embodiment of the transparent plate is related to the results obtained from the cracking of the transparent moon. The inspection is carried out through various digital processing to database, which is easier to use effectively. As described above, according to the first embodiment of the present invention, since the diffused light is uniformly irradiated on the transparent plate of the inspection object according to the first embodiment of the present invention, it is not related to the defects, such as class, shape, and size. Defective detection defects. Because a lens such as a telecentric lens is used to guide only the light scattered on the transparent plate, and the light scattered on the transparent plate is irradiated with light that is slightly parallel to the optical axis, and is photographed by the photography mechanism of the wCCD camera, it is not affected by the surrounding ceiling. The influence of external astigmatism such as lamps, stable inspection, is not limited by the installation environment of the inspection device body. Further, since a ring-shaped fluorescent lamp can be used as a commercially available ring-shaped fluorescent lamp, the cost is low and the structure is easy. 〃 In order to make the black-and-white contrast of the image obtained through the lens more vivid, improve the detection accuracy of defects, increase the intensity of diffused light irradiating the transparent plate, and expand the light! Ϋ The uniform one is π. For example, in order to form diffused light that irradiates a transparent plate, the light intensity I and the diffusivity can be further increased by using the quasi-Lambertian light to the sun and the moon. In the second embodiment of the present invention, in the case where the light intensity and the diffusivity are further increased, a large number of diffuser luminaires with a number of percentages are provided.

Page 12 522225 V. Description of the invention (8) ---- Figure 6 is a diagram of a transparent plate inspection device according to the second embodiment of the present invention. Fig. 6 (a) is a plan view of the transparent plate inspection device 51, and Fig. 6 (b) is a cross-sectional view of the transparent plate inspection device 51. In this embodiment, the ring-shaped diffused lighting fixture 2 2 of the transparent plate inspection device 21 in FIG. 2 is replaced with a plurality of ring-shaped diffused lighting fixtures, and FIG. 6 illustrates three ring-shaped diffused lighting fixtures 22a, 22b, and 22c. In this embodiment, it is assumed that the opening surface is parallel to the imaginary hemispherical surface of the transparent plate 1. On the imaginary hemispherical surface, the ring diameters of the annular diffusion lighting fixtures 22a, 22b, and 22c are smaller as the distance from the transparent plate 1 increases. Laminate products to achieve the same lighting effect as quasi-Lambertian lighting. As shown in FIG. 6, in this embodiment, it is assumed that, for example, a hemispherical surface with a radius of 70 mm is arranged at a position corresponding to the opening surface of the imaginary hemispherical surface so that the upper surface of the transparent object to be inspected is aligned. It is also assumed that the radius of the imaginary hemisphere is not affected by this :: For γ, it is assumed that a commercially available ring-shaped glare lamp radius can be applied to the ring-shaped diffused light. Above 15 mm, place @ 4 ^ 人 ^ 々 the elbow% 1 of the first diameter of 1 3 4 mm. The private sculpting tool is at 49 ... and the ring diameter m is followed by the second ring; Since there are so many /// products 3 = expansion, the quasi-Lambertian lighting equivalent to 70 mm of luminaire can be equivalent to the radius 22a, 2 and can also be used; the example of diffuse lighting fixtures uses 3 circular diffusions Illumination. This implementation 522225 V. Description of the invention (9) The number of those who are placed on the position of the imaginary hemisphere is not limited. The reflecting mirror 23 is disposed below 30 mm above the transparent plate 1. (Figure 6 (a) is not shown). The lens 24 is provided so that the center of the lens 24 is concentric with the center of each of the ring-shaped diffusion lighting fixtures 22a, 22b, and 2c, and is provided on the side opposite to the transparent plate 1 to each of the ring-shaped diffusion lighting fixtures 22a, 22b, and 2c. The lens 2 4 reflects the light scattered on the transparent plate 1 and reflects the light scattered by the transparent plate 1 after being reflected by the reflecting mirror 23 to collect the light. In this embodiment, the daytime viewing angle on both sides of the lens is zero, that is, the lens A telecentric lens whose principal rays on both sides are parallel to the principal axis. The photographing mechanism 25 is provided on the side opposite to the lens 24 to each of the annular diffusion lighting fixtures 22a, 22b, and 22c, and the center of the photographing mechanism 25 is concentric with the center of each of the annular diffusion lighting fixtures 22a, 22b, and 22c. The imaging mechanism 25 may be a CCD camera, a MOS camera, or the like. According to the inspection scope of the transparent plate inspection device 21 of the present embodiment, it can rely on the photographic dry area of the shirt mechanism 25, but it can also be equipped with a moving mechanism because of the inspection target transparent cup 1 sample, so it will capture: ==, and the transparent plate inspection device 21 can be moved horizontally. In this way, in this embodiment, due to the assumption of the pass, Cheng Ren μt U Yau sang Qu on the imaginary hemispherical surface of the transparent plate. On its imaginary hemispherical surface, the multi-educational place Hada Kozai has a number of jade-like diffuse lighting With a ring diameter of 'the more it is hidden from the transparent plate, the smaller it is, the more layers are stacked', which can increase the irradiance of the transparent plate = = and = degree ', so that the black and white contrast of the image obtained by the lens photography is more vivid, and the defect detection is improved. Precision. In this embodiment, since the ring-shaped diffused luminaire can be used as a lamp, it is possible to obtain the same effect as that of quasi-Lambertian lighting at a low price.

Page 14 522225 V. Description of the Invention (Effects of the Invention) As explained above, according to the present invention, the annular diffused illuminator and reflector for transparent plate inspection are used to uniformly irradiate the diffused light onto the transparent plate of the inspection object. Therefore, it has nothing to do with the type, shape, and size of defect defects, and can stably detect defect defects. Because a lens such as a telecentric lens is used, only the light scattered on the transparent plate and the light scattered by the transparent plate after being reflected by the reflecting mirror pass through the light slightly parallel to the optical axis, and are photographed by a photography mechanism such as a CCD camera Therefore, it is not affected by external astigmatism such as surrounding ceiling lights, and the inspection is stable, and it is not restricted by the setting environment of the inspection device body. In addition, since a ring-shaped fluorescent lamp can be used as a commercially available ring-shaped fluorescent lamp, the cost is low and the structure is easy. In addition, for the transparent plate inspection device, when using a large number of annular diffused lighting fixtures, 'assuming that the opening surface is parallel to the imaginary hemispherical surface of the transparent plate, on the imaginary hemispherical surface', the diameter of most annular diffused lighting fixtures is kept away from transparency The smaller the plate, the “multi-layer stacking, can increase the light intensity and diffusion of the diffused light irradiating the transparent plate”, so that the black and white contrast of the image obtained by the lens photography is more vivid, and the defect detection accuracy is improved. [Brief description of the drawings] FIG. 1 is an example of defects of a transparent plate. FIG. 2 is a diagram of a transparent plate inspection device according to a first embodiment of the present invention. FIG. 3 is an explanatory diagram of the operation principle of the first embodiment of the present invention. Fig. 4 is an explanatory diagram of a telecentric lens used in the present invention. Fig. 5 is a diagram of the inspection result of the transparent plate inspection device according to the first embodiment of the present invention. Fig. 6 is a diagram of the inspection device of the transparent plate according to the second embodiment of the present invention.

522225 V. Description of the invention (11) [Explanation of component symbols] 1 · · · Transparent plate 2 · · · Glass substrate 3 · · · Film 21, 51 · • • Transparent plate inspection device 22, 2 2a, 2 2b, 2 2c ··· Ring diffuse lighting 2 3 · · · Mirror 24 · · · Lens 25 · · · Photographic mechanism

Page 16 522225 Simple Explanation of Drawings Page 17

Claims (1)

522225 6. Scope of patent application1. A transparent plate inspection illuminating device, the transparent plate is arranged on the opposite side through the above-mentioned annular diffusion and is arranged on the upper mirror, the opposite side, and the reflecting plate; and the lens, the side, so that only the upper side is illuminated The above-mentioned transparent 2. If the application of ring-shaped diffusion is based on the above-mentioned transparent ring diameter, the more 3. If the application includes a camera showing the patent scope of the above-mentioned transparent board, the board is supposed to be far from the above-mentioned patent structure, 俾The camera device is characterized in that: the inspection light is exposed on the surface; ... the transparent plate of the inspection body is broken, and the transparent plate is on the second transparent plate; Diffusion-like illumination | The light scattered on the 2 γ phase of the above-mentioned transparent plate reflected light, reflected by the flat mirror ^ 1 Jg. _ D light on the optical axis passes. , The transparent plate inspection device, and at least one open surface of the middle and upper hemispheres, and the accumulation of the above Xiguang layer in parallel transparent plate is smaller. U-shaped diffused luminaire Item 1 or 2 Transparent plate inspection device Take the light passing through the lens. more Page 18