JP2006269679A - 接合型半導体装置の製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 38
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- 229910010271 silicon carbide Inorganic materials 0.000 claims description 26
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 24
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- 230000002829 reductive effect Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
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- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
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- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/7722—Field effect transistors using static field induced regions, e.g. SIT, PBT
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
【解決手段】 第1の高抵抗層形成工程と、チャネルドープ層形成工程と、第2の高抵抗層形成工程と、ソース領域12となる第1導電型の低抵抗層を形成する低抵抗層形成工程と、低抵抗層と第2の高抵抗層の途中の深さまで部分的にエッチングするエッチング工程と、エッチング工程でエッチングした部分の下部にゲート領域13を形成するゲート領域形成工程と、表面保護膜17を形成する表面保護膜形成工程と、ソース電極19とゲート電極20とドレイン電極18を形成する電極形成工程と、ソース電極19とゲート電極20側に上層電極21を形成する上層電極形成工程と、を有する。
【選択図】 図1
Description
図12(a)で示すデバイスのようにソース幅を狭くし、ゲート間距離を短くすると、製造が難しくなるとともに、図に示すようにデバイス全面積に占める有効領域(図中符号ERで示す)が減り、結果としてオン電圧(抵抗)が上昇することになる。
四戸孝 他著「600V5A 4H-SiC SIT with Low RonS of 13mΩcm2」Silicon Carbide and Related Materials, 2003, PartII, pp.1217-1220. (財)新機能素子開発協会著「平成14年度新エネルギー・産業技術総合開発機構委託成果報告書、超低損失電力素子技術開発、素子化技術」 J. H. Zhao et al. 「6A, 1kV 4H-SiC Normally-off Trenched-and-Implanted Vertical JFETs」Materials Science Forum Vols. 457-460 (2004) pp. 1213-1216.
接合型半導体装置の製造方法を提供することにある。
11 ドレイン領域
12 ソース領域
13 ゲート領域
14 n型高抵抗層
15 チャネルドープ層
17 表面保護膜
18 ドレイン電極
19 ソース電極
20 ゲート電極
21 上層電極
Claims (4)
- 第1の導電型の半導体基板に第1の高抵抗層を形成する第1の高抵抗層形成工程と、
前記第1の高抵抗層上にチャネルドープ層を形成するチャネルドープ層形成工程と、
前記チャネルドープ層上に第2の高抵抗層を形成する第2の高抵抗層形成工程と、
ソース領域となる第1導電型の低抵抗層を形成する低抵抗層形成工程と、
前記低抵抗層と前記第2の高抵抗層の途中の深さまで部分的にエッチングするエッチング工程と、
前記エッチング工程でエッチングした部分の下部にゲート領域を形成するゲート領域形成工程と、
表面保護膜を形成する表面保護膜形成工程と、
ソース電極とゲート電極とドレイン電極を形成する電極形成工程と、
ソース電極とゲート電極側に上層電極を形成する上層電極形成工程と、
を有することを特徴とする接合型半導体装置の製造方法。 - 前記ゲート領域形成工程は、イオン注入により行うことを特徴とする請求項1記載の接合型半導体装置の製造方法。
- 前記イオン注入の注入エネルギーは数十keV以上1MeV以下であることを特徴とする請求項2記載の接合型半導体装置の製造方法。
- 前記半導体結晶が炭化硅素であることを特徴とする請求項1〜3のいずれか1項に記載の接合型半導体装置の製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005084671A JP4996828B2 (ja) | 2005-03-23 | 2005-03-23 | 接合型半導体装置の製造方法 |
KR1020060026075A KR20060103140A (ko) | 2005-03-23 | 2006-03-22 | 접합형 반도체 장치의 제조 방법 |
AT06005896T ATE535020T1 (de) | 2005-03-23 | 2006-03-22 | Verfahren zur herstellung einer halbleiteranordnung mit übergang |
EP06005896A EP1705712B1 (en) | 2005-03-23 | 2006-03-22 | Method for manufacturing junction semiconductor device |
CNB2006100653821A CN100499051C (zh) | 2005-03-23 | 2006-03-23 | 结型半导体装置的制造方法 |
US11/386,661 US7544552B2 (en) | 2005-03-23 | 2006-03-23 | Method for manufacturing junction semiconductor device |
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Application Number | Priority Date | Filing Date | Title |
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JP2005084671A JP4996828B2 (ja) | 2005-03-23 | 2005-03-23 | 接合型半導体装置の製造方法 |
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Publication Number | Publication Date |
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JP2006269679A true JP2006269679A (ja) | 2006-10-05 |
JP4996828B2 JP4996828B2 (ja) | 2012-08-08 |
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JP2005084671A Active JP4996828B2 (ja) | 2005-03-23 | 2005-03-23 | 接合型半導体装置の製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7544552B2 (ja) |
EP (1) | EP1705712B1 (ja) |
JP (1) | JP4996828B2 (ja) |
KR (1) | KR20060103140A (ja) |
CN (1) | CN100499051C (ja) |
AT (1) | ATE535020T1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010024243A1 (ja) * | 2008-08-26 | 2010-03-04 | 本田技研工業株式会社 | バイポーラ型半導体装置およびその製造方法 |
WO2010024239A1 (ja) * | 2008-08-26 | 2010-03-04 | 本田技研工業株式会社 | 接合型半導体装置およびその製造方法 |
JP2011171421A (ja) * | 2010-02-17 | 2011-09-01 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
JP2014183259A (ja) * | 2013-03-21 | 2014-09-29 | Renesas Electronics Corp | 半導体装置の製造方法および半導体装置 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011091179A (ja) * | 2009-10-22 | 2011-05-06 | Honda Motor Co Ltd | バイポーラ型半導体装置およびその製造方法 |
US8829574B2 (en) * | 2011-12-22 | 2014-09-09 | Avogy, Inc. | Method and system for a GaN vertical JFET with self-aligned source and gate |
US8723178B2 (en) * | 2012-01-20 | 2014-05-13 | Monolithic Power Systems, Inc. | Integrated field effect transistors with high voltage drain sensing |
US8716078B2 (en) * | 2012-05-10 | 2014-05-06 | Avogy, Inc. | Method and system for a gallium nitride vertical JFET with self-aligned gate metallization |
US8841708B2 (en) | 2012-05-10 | 2014-09-23 | Avogy, Inc. | Method and system for a GAN vertical JFET with self-aligned source metallization |
JP6138619B2 (ja) * | 2013-07-30 | 2017-05-31 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法および半導体装置 |
US9496366B2 (en) * | 2013-10-08 | 2016-11-15 | Shindengen Electric Manufacturing Co., Ltd. | Method for manufacturing silicon carbide (SiC) semiconductor device by introducing nitrogen concentration of 5X1019 cm-3 or more at a boundary surface between thermal oxide film and the SiC substrate and then removing the thermal oxide film |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2002359378A (ja) * | 2001-03-28 | 2002-12-13 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2004006723A (ja) * | 2002-03-25 | 2004-01-08 | Toshiba Corp | 高耐圧半導体装置及びその製造方法 |
Family Cites Families (8)
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JPH0770474B2 (ja) * | 1985-02-08 | 1995-07-31 | 株式会社東芝 | 化合物半導体装置の製造方法 |
JP2794369B2 (ja) | 1992-12-11 | 1998-09-03 | キヤノン株式会社 | 液晶素子 |
US5554561A (en) * | 1993-04-30 | 1996-09-10 | Texas Instruments Incorporated | Epitaxial overgrowth method |
JP3789949B2 (ja) * | 1994-03-07 | 2006-06-28 | 本田技研工業株式会社 | 半導体装置 |
US5705830A (en) * | 1996-09-05 | 1998-01-06 | Northrop Grumman Corporation | Static induction transistors |
EP1199099A1 (en) * | 2000-10-19 | 2002-04-24 | Amersham Biosciences AB | Reactor |
JP2004134547A (ja) | 2002-10-10 | 2004-04-30 | Hitachi Ltd | 半導体装置 |
JP4777676B2 (ja) * | 2005-03-23 | 2011-09-21 | 本田技研工業株式会社 | 接合型半導体装置および接合型半導体装置の製造方法 |
-
2005
- 2005-03-23 JP JP2005084671A patent/JP4996828B2/ja active Active
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2006
- 2006-03-22 KR KR1020060026075A patent/KR20060103140A/ko active IP Right Grant
- 2006-03-22 EP EP06005896A patent/EP1705712B1/en not_active Not-in-force
- 2006-03-22 AT AT06005896T patent/ATE535020T1/de active
- 2006-03-23 CN CNB2006100653821A patent/CN100499051C/zh not_active Expired - Fee Related
- 2006-03-23 US US11/386,661 patent/US7544552B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002359378A (ja) * | 2001-03-28 | 2002-12-13 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2004006723A (ja) * | 2002-03-25 | 2004-01-08 | Toshiba Corp | 高耐圧半導体装置及びその製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010024243A1 (ja) * | 2008-08-26 | 2010-03-04 | 本田技研工業株式会社 | バイポーラ型半導体装置およびその製造方法 |
WO2010024239A1 (ja) * | 2008-08-26 | 2010-03-04 | 本田技研工業株式会社 | 接合型半導体装置およびその製造方法 |
JP2011171421A (ja) * | 2010-02-17 | 2011-09-01 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
US8766277B2 (en) | 2010-02-17 | 2014-07-01 | Renesas Electronics Corporation | Semiconductor device and manufacturing method of the same |
JP2014183259A (ja) * | 2013-03-21 | 2014-09-29 | Renesas Electronics Corp | 半導体装置の製造方法および半導体装置 |
Also Published As
Publication number | Publication date |
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JP4996828B2 (ja) | 2012-08-08 |
EP1705712A1 (en) | 2006-09-27 |
EP1705712B1 (en) | 2011-11-23 |
ATE535020T1 (de) | 2011-12-15 |
US20060216879A1 (en) | 2006-09-28 |
KR20060103140A (ko) | 2006-09-28 |
CN100499051C (zh) | 2009-06-10 |
CN1838390A (zh) | 2006-09-27 |
US7544552B2 (en) | 2009-06-09 |
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