JP2006236614A - 除電装置と搬送装置とを備えた製造装置 - Google Patents
除電装置と搬送装置とを備えた製造装置 Download PDFInfo
- Publication number
- JP2006236614A JP2006236614A JP2005045653A JP2005045653A JP2006236614A JP 2006236614 A JP2006236614 A JP 2006236614A JP 2005045653 A JP2005045653 A JP 2005045653A JP 2005045653 A JP2005045653 A JP 2005045653A JP 2006236614 A JP2006236614 A JP 2006236614A
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- JP
- Japan
- Prior art keywords
- manufacturing apparatus
- charged
- charged object
- conductor
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
- B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/02—Control devices, e.g. for safety, warning or fault-correcting detecting dangerous physical condition of load carriers, e.g. for interrupting the drive in the event of overheating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
- B65G2207/10—Antistatic features
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
- B65G2207/40—Safety features of loads, equipment or persons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2812/00—Indexing codes relating to the kind or type of conveyors
- B65G2812/02—Belt or chain conveyors
- B65G2812/02009—Common features for belt or chain conveyors
- B65G2812/02108—Protection means
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Elimination Of Static Electricity (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
【解決手段】帯電物体である基板41は、搬送ローラ42で搬送され、エアナイフヘッド43から吹き付けられるエアにより、基板41上の洗浄水44が取り除かれる。エアナイフヘッド43及び側壁45は絶縁体で、天板46は接地導体で形成され、これらにより形成された除電空間には除電装置47が設置されている。天板46を接地導体とすることで、除電に有効な電界を発生させ、除電装置47による速やかな除電が達成できる。
【選択図】図1
Description
Claims (6)
- 帯電物体を除電する除電装置と帯電物体を搬送する搬送装置とを備えた製造装置において、帯電物体の周辺に導体を設け、除電に有効な電界を発生させることを特徴とする製造装置
- 前記帯電物体の帯電電位をV0V、帯電物体表面から5cm又は帯電物体表面から垂直方向への除電空間の厚さのいずれか狭い方の平均電界強度をE0V/cmとすると、E0>V0/50の条件を満足できるよう、帯電物体の周辺に導体を設けることを特徴とする請求項1に記載の製造装置
- 前記製造装置が、半導体製造装置、液晶ディスプレイ製造装置、ハードディスク製造装置又は絶縁性フィルム製造装置であり、前記搬送装置が、各種搬送装置であることを特徴とする請求項1に記載の製造装置
- 前記導体の体積抵抗率が1011Ω・cm以下であることを特徴とする請求項1に記載の製造装置
- 前記帯電物体の帯電面側から相対する最寄りの導体までの距離が1mm以上1000mm以下であることを特徴とする請求項1に記載の製造装置
- 前記導体の形状・構造は、帯電物体から発生する電界が導体の何れの箇所においてもコロナ放電を発生する強度以上に電界集中しない形状・構造であることを特徴とする請求項1に記載の製造装置
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005045653A JP2006236614A (ja) | 2005-02-22 | 2005-02-22 | 除電装置と搬送装置とを備えた製造装置 |
KR1020050106870A KR100692328B1 (ko) | 2005-02-22 | 2005-11-09 | 제전 장치와 반송 장치를 구비한 제조 장치 |
TW094140869A TWI275554B (en) | 2005-02-22 | 2005-11-21 | Manufacturing equipment provided with static charge eliminator and transport device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005045653A JP2006236614A (ja) | 2005-02-22 | 2005-02-22 | 除電装置と搬送装置とを備えた製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006236614A true JP2006236614A (ja) | 2006-09-07 |
JP2006236614A5 JP2006236614A5 (ja) | 2007-02-08 |
Family
ID=37044041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005045653A Pending JP2006236614A (ja) | 2005-02-22 | 2005-02-22 | 除電装置と搬送装置とを備えた製造装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2006236614A (ja) |
KR (1) | KR100692328B1 (ja) |
TW (1) | TWI275554B (ja) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR0181552B1 (ko) * | 1995-09-02 | 1999-05-15 | 니시가와 마사미기 | 제전 및 제진방법과 제전 및 제진장치 |
US20050052815A1 (en) * | 2003-09-09 | 2005-03-10 | Smc Corporation | Static eliminating method and apparatus therefor |
-
2005
- 2005-02-22 JP JP2005045653A patent/JP2006236614A/ja active Pending
- 2005-11-09 KR KR1020050106870A patent/KR100692328B1/ko not_active IP Right Cessation
- 2005-11-21 TW TW094140869A patent/TWI275554B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI275554B (en) | 2007-03-11 |
TW200630289A (en) | 2006-09-01 |
KR20060093641A (ko) | 2006-08-25 |
KR100692328B1 (ko) | 2007-03-09 |
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