KR100692328B1 - 제전 장치와 반송 장치를 구비한 제조 장치 - Google Patents

제전 장치와 반송 장치를 구비한 제조 장치 Download PDF

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Publication number
KR100692328B1
KR100692328B1 KR1020050106870A KR20050106870A KR100692328B1 KR 100692328 B1 KR100692328 B1 KR 100692328B1 KR 1020050106870 A KR1020050106870 A KR 1020050106870A KR 20050106870 A KR20050106870 A KR 20050106870A KR 100692328 B1 KR100692328 B1 KR 100692328B1
Authority
KR
South Korea
Prior art keywords
manufacturing apparatus
conductor
charged object
electric field
charged
Prior art date
Application number
KR1020050106870A
Other languages
English (en)
Korean (ko)
Other versions
KR20060093641A (ko
Inventor
히또시 이나바
가즈요시 나까지마
야스히꼬 후꾸찌
마사하루 후지노
Original Assignee
가부시끼가이샤 퓨처 비전
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시끼가이샤 퓨처 비전 filed Critical 가부시끼가이샤 퓨처 비전
Publication of KR20060093641A publication Critical patent/KR20060093641A/ko
Application granted granted Critical
Publication of KR100692328B1 publication Critical patent/KR100692328B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/02—Control devices, e.g. for safety, warning or fault-correcting detecting dangerous physical condition of load carriers, e.g. for interrupting the drive in the event of overheating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/10—Antistatic features
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/40—Safety features of loads, equipment or persons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/02—Belt or chain conveyors
    • B65G2812/02009—Common features for belt or chain conveyors
    • B65G2812/02108—Protection means

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Elimination Of Static Electricity (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020050106870A 2005-02-22 2005-11-09 제전 장치와 반송 장치를 구비한 제조 장치 KR100692328B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00045653 2005-02-22
JP2005045653A JP2006236614A (ja) 2005-02-22 2005-02-22 除電装置と搬送装置とを備えた製造装置

Publications (2)

Publication Number Publication Date
KR20060093641A KR20060093641A (ko) 2006-08-25
KR100692328B1 true KR100692328B1 (ko) 2007-03-09

Family

ID=37044041

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050106870A KR100692328B1 (ko) 2005-02-22 2005-11-09 제전 장치와 반송 장치를 구비한 제조 장치

Country Status (3)

Country Link
JP (1) JP2006236614A (ja)
KR (1) KR100692328B1 (ja)
TW (1) TWI275554B (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970019773A (ko) * 1995-09-02 1997-04-30 니시가와 마사미기 제전 및 제진방법과 제전 및 제진장치
KR20050026355A (ko) * 2003-09-09 2005-03-15 에스엠시 가부시키가이샤 제전방법 및 장치

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970019773A (ko) * 1995-09-02 1997-04-30 니시가와 마사미기 제전 및 제진방법과 제전 및 제진장치
KR20050026355A (ko) * 2003-09-09 2005-03-15 에스엠시 가부시키가이샤 제전방법 및 장치

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
1019970019773 A
1020050026355 A

Also Published As

Publication number Publication date
JP2006236614A (ja) 2006-09-07
TW200630289A (en) 2006-09-01
KR20060093641A (ko) 2006-08-25
TWI275554B (en) 2007-03-11

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