TW200630289A - A manufacturing equipment with a static electric charge-removing device and a conveyance device - Google Patents
A manufacturing equipment with a static electric charge-removing device and a conveyance deviceInfo
- Publication number
- TW200630289A TW200630289A TW094140869A TW94140869A TW200630289A TW 200630289 A TW200630289 A TW 200630289A TW 094140869 A TW094140869 A TW 094140869A TW 94140869 A TW94140869 A TW 94140869A TW 200630289 A TW200630289 A TW 200630289A
- Authority
- TW
- Taiwan
- Prior art keywords
- static electricity
- air
- electric charge
- manufacturing equipment
- static electric
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
- B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/02—Control devices, e.g. for safety, warning or fault-correcting detecting dangerous physical condition of load carriers, e.g. for interrupting the drive in the event of overheating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
- B65G2207/10—Antistatic features
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
- B65G2207/40—Safety features of loads, equipment or persons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2812/00—Indexing codes relating to the kind or type of conveyors
- B65G2812/02—Belt or chain conveyors
- B65G2812/02009—Common features for belt or chain conveyors
- B65G2812/02108—Protection means
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Elimination Of Static Electricity (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
To minimize an electrostatic obstacle to be generated at an electrified manufactured and processed product. A substrate (41) as an electrified substance is transferred by a transfer roller (42), and cleaning water (44) on the substrate(41) is removed by air blown from an air-knife head (43). The air-knife head (43) and the side wall (45) are made of insulation materials and a ceiling plate (46) is made of a grounded conductor, and the static charge eliminator (47) is arranged at a static electricity eliminated space formed of the head, the wall and the plate. Quick static electricity elimination depending on the static electricity eliminator (47) can be attained by generating an effective electric field effective for static electricity elimination by forming the ceiling plate as the grounded conductor.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005045653A JP2006236614A (en) | 2005-02-22 | 2005-02-22 | Manufacturing equipment provided with static charge eliminator and transport device |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200630289A true TW200630289A (en) | 2006-09-01 |
TWI275554B TWI275554B (en) | 2007-03-11 |
Family
ID=37044041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094140869A TWI275554B (en) | 2005-02-22 | 2005-11-21 | Manufacturing equipment provided with static charge eliminator and transport device |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2006236614A (en) |
KR (1) | KR100692328B1 (en) |
TW (1) | TWI275554B (en) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR0181552B1 (en) * | 1995-09-02 | 1999-05-15 | 니시가와 마사미기 | Discharge and vibration damper |
US20050052815A1 (en) * | 2003-09-09 | 2005-03-10 | Smc Corporation | Static eliminating method and apparatus therefor |
-
2005
- 2005-02-22 JP JP2005045653A patent/JP2006236614A/en active Pending
- 2005-11-09 KR KR1020050106870A patent/KR100692328B1/en not_active IP Right Cessation
- 2005-11-21 TW TW094140869A patent/TWI275554B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2006236614A (en) | 2006-09-07 |
KR20060093641A (en) | 2006-08-25 |
KR100692328B1 (en) | 2007-03-09 |
TWI275554B (en) | 2007-03-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |