JP2006234462A - 慣性センサ - Google Patents

慣性センサ Download PDF

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Publication number
JP2006234462A
JP2006234462A JP2005046752A JP2005046752A JP2006234462A JP 2006234462 A JP2006234462 A JP 2006234462A JP 2005046752 A JP2005046752 A JP 2005046752A JP 2005046752 A JP2005046752 A JP 2005046752A JP 2006234462 A JP2006234462 A JP 2006234462A
Authority
JP
Japan
Prior art keywords
resin substrate
flexible resin
detection element
inertial sensor
natural frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005046752A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006234462A5 (enExample
Inventor
Toshiyuki Nozoe
利幸 野添
Hideo Oogoshi
偉生 大越
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2005046752A priority Critical patent/JP2006234462A/ja
Publication of JP2006234462A publication Critical patent/JP2006234462A/ja
Publication of JP2006234462A5 publication Critical patent/JP2006234462A5/ja
Pending legal-status Critical Current

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JP2005046752A 2005-02-23 2005-02-23 慣性センサ Pending JP2006234462A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005046752A JP2006234462A (ja) 2005-02-23 2005-02-23 慣性センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005046752A JP2006234462A (ja) 2005-02-23 2005-02-23 慣性センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007230971A Division JP2007316091A (ja) 2007-09-06 2007-09-06 慣性センサ

Publications (2)

Publication Number Publication Date
JP2006234462A true JP2006234462A (ja) 2006-09-07
JP2006234462A5 JP2006234462A5 (enExample) 2007-10-25

Family

ID=37042294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005046752A Pending JP2006234462A (ja) 2005-02-23 2005-02-23 慣性センサ

Country Status (1)

Country Link
JP (1) JP2006234462A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007107953A (ja) * 2005-10-12 2007-04-26 Denso Corp 角速度センサ
JP2008039469A (ja) * 2006-08-02 2008-02-21 Epson Toyocom Corp 圧電振動ジャイロモジュール及び圧電振動ジャイロセンサ
JP2020204519A (ja) * 2019-06-17 2020-12-24 キヤノン株式会社 角速度検出装置並びにこれを備える撮像装置及びレンズ鏡筒

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0989570A (ja) * 1995-09-26 1997-04-04 Alps Electric Co Ltd 振動子の保護装置
JPH09133704A (ja) * 1995-11-07 1997-05-20 Murata Mfg Co Ltd 加速度センサ
JPH09170926A (ja) * 1995-12-21 1997-06-30 Matsushita Electric Ind Co Ltd 角速度センサ
JPH1123285A (ja) * 1997-07-08 1999-01-29 Alps Electric Co Ltd 振動子の支持構造
JP2002071353A (ja) * 2000-09-01 2002-03-08 Ngk Insulators Ltd 角速度測定装置
JP2002257553A (ja) * 2001-01-25 2002-09-11 Bei Technologies Inc 重複レートセンサおよび慣性レート感知方法
JP2003028647A (ja) * 2001-07-18 2003-01-29 Murata Mfg Co Ltd 振動型センサ部品およびその製造方法およびその振動型センサ部品を用いたセンサモジュール
JP2004271479A (ja) * 2003-03-12 2004-09-30 Citizen Watch Co Ltd 角速度センサ
JP2004309443A (ja) * 2003-02-20 2004-11-04 Ngk Insulators Ltd 振動子の支持構造

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0989570A (ja) * 1995-09-26 1997-04-04 Alps Electric Co Ltd 振動子の保護装置
JPH09133704A (ja) * 1995-11-07 1997-05-20 Murata Mfg Co Ltd 加速度センサ
JPH09170926A (ja) * 1995-12-21 1997-06-30 Matsushita Electric Ind Co Ltd 角速度センサ
JPH1123285A (ja) * 1997-07-08 1999-01-29 Alps Electric Co Ltd 振動子の支持構造
JP2002071353A (ja) * 2000-09-01 2002-03-08 Ngk Insulators Ltd 角速度測定装置
JP2002257553A (ja) * 2001-01-25 2002-09-11 Bei Technologies Inc 重複レートセンサおよび慣性レート感知方法
JP2003028647A (ja) * 2001-07-18 2003-01-29 Murata Mfg Co Ltd 振動型センサ部品およびその製造方法およびその振動型センサ部品を用いたセンサモジュール
JP2004309443A (ja) * 2003-02-20 2004-11-04 Ngk Insulators Ltd 振動子の支持構造
JP2004271479A (ja) * 2003-03-12 2004-09-30 Citizen Watch Co Ltd 角速度センサ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007107953A (ja) * 2005-10-12 2007-04-26 Denso Corp 角速度センサ
JP2008039469A (ja) * 2006-08-02 2008-02-21 Epson Toyocom Corp 圧電振動ジャイロモジュール及び圧電振動ジャイロセンサ
JP2020204519A (ja) * 2019-06-17 2020-12-24 キヤノン株式会社 角速度検出装置並びにこれを備える撮像装置及びレンズ鏡筒
JP7254637B2 (ja) 2019-06-17 2023-04-10 キヤノン株式会社 角速度検出装置並びにこれを備える撮像装置及びレンズ鏡筒

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